H01J2237/24465 - CPC Classification Index

#1

20250372342

2025-12-04

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

#2

20250336639

2025-10-30

ENHANCED EDGE DETECTION USING DETECTOR INCIDENCE LOCATIONS

#3

20240290588

2024-08-29

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

#4

20240222069

2024-07-04

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST OPERATING MODE WITH DEFOCUSED BEAM GUIDING, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE

#5

20240087838

2024-03-14

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSCOPE USING SETTINGS ADJUSTED TO AN INSPECTION SITE

#6

20230197424

2023-06-22

Ion collector for use in plasma systems

#7

20230135167

2023-05-04

System and method for monitoring semiconductor processes

#8

20230040811

2023-02-09

Observation method by means of scanning transmission electron microscope, scanning transmission electron microscope system, and computer readable medium

#9

20220375716

2022-11-24

Method and apparatus for charged particle detection

#10

20210313137

2021-10-07

Particle beam system and method for the particle-optical examination of an object

#11

20210193433

2021-06-24

Apparatus of plural charged-particle beams

#12

20200227232

2020-07-16

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

#13

20200111651

2020-04-09

Ion collector for use in plasma systems

#14

20200098541

2020-03-26

Particle beam system and method for the particle-optical examination of an object

#15

20200027694

2020-01-23

Method and apparatus for charged particle detection

#16

20190295814

2019-09-26

Intelligent pre-scan in scanning transmission charged particle microscopy

#17

20190272974

2019-09-05

Discriminative imaging technique in scanning transmission charged particle microscopy

#18

20190214221

2019-07-11

Multiple beam inspection apparatus and sensitivity correction method for multi-detector

#19

20190204245

2019-07-04

Scanning electron microscope and method for determining crystal orientations

#20

20190172677

2019-06-06

Apparatus of plural charged-particle beams

#21

20190122852

2019-04-25

Particle beam system and method for the particle-optical examination of an object

#22

20190088447

2019-03-21

Measurement method and electron microscope

#23

20190066968

2019-02-28

Aberration measurement method and electron microscope

#24

20180217059

2018-08-02

SEGMENTED DETECTOR FOR A CHARGED PARTICLE BEAM DEVICE

#25

20170316912

2017-11-02

Particle beam system and method for the particle-optical examination of an object

#26

20170154756

2017-06-01

Apparatus of plural charged-particle beams

#27

20170084422

2017-03-23

Multi-beam dark field imaging

#28

20170076920

2017-03-16

Ion collector for use in plasma systems

#29

20160372304

2016-12-22

Method and system for charged particle microscopy with improved image beam stabilization and interrogation

#30

20160254118

2016-09-01

Measurement method and electron microscope

#31

20160225580

2016-08-04

Electron microscope and method of measuring aberrations

#32

20160203947

2016-07-14

Charged particle beam device and charged particle beam device control method

#33

20150153464

2015-06-04

Radiographic image capturing device, method for detecting radiation doses, and computer readable storage medium

#34

20150136960

2015-05-21

Three-dimensional mapping using scanning electron microscope images

#35

20150014527

2015-01-15

Scanning charged particle microscope, image acquisition method, and electron detection method

#36

20140097341

2014-04-10

In-column detector for particle-optical column

#37

20140074419

2014-03-13

Three-dimensional mapping using scanning electron microscope images

#38

20130299697

2013-11-14

Charged particle beam applied apparatus, and irradiation method

#39

20130270438

2013-10-17

Switchable multi perspective detector, optics therefor and method of operating thereof

#40

20130245989

2013-09-19

Signal processing method and signal processing apparatus

#41

20130200255

2013-08-08

Three-dimensional mapping using scanning electron microscope images

#42

20120298864

2012-11-29

Charged particle beam apparatus

#43

20120273677

2012-11-01

IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN

#44

20120248959

2012-10-04

Electron beam source and method of manufacturing the same

#45

20120187293

2012-07-26

Transmission electron microscope

#46

20120160999

2012-06-28

High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes

#47

20120112091

2012-05-10

METHOD FOR ADJUSTING STATUS OF PARTICLE BEAMS FOR PATTERNING A SUBSTRATE AND SYSTEM USING THE SAME

#48

20120112086

2012-05-10

SYSTEM AND METHOD FOR ESTIMATING CHANGE OF STATUS OF PARTICLE BEAMS

#49

20120112065

2012-05-10

APPARATUS AND METHOD FOR ESTIMATING CHANGE OF STATUS OF PARTICLE BEAMS

#50

20120012747

2012-01-19

Contrast for scanning confocal electron microscope

#51

20110291007

2011-12-01

Movable detector for charged particle beam inspection or review

#52

20110220795

2011-09-15

Twin beam charged particle column and method of operating thereof

#53

20110139984

2011-06-16

Electron detection device and scanning electron microscope

#54

20110031215

2011-02-10

Particle beam systems and methods

#55

20100282964

2010-11-11

METHODS AND APPARATUSES TO ALIGN ENERGY BEAM TO ATOM PROBE SPECIMEN

#56

20100258721

2010-10-14

Dark field detector for use in an electron microscope

#57

20100224779

2010-09-09

Layered scanning charged particle microscope package for a charged particle and radiation detector

#58

20100051804

2010-03-04

Fast wafer inspection system

#59

20090294665

2009-12-03

Scanning electron microscope and similar apparatus

#60

20090230304

2009-09-17

Scanning electron microscope

#61

20090159797

2009-06-25

Transmission electron microscope

#62

20090090866

2009-04-09

Charged particle detection devices

#63

20080315094

2008-12-25

Charged particle system including segmented detection elements

#64

20080283747

2008-11-20

Scanning electron microscope and three-dimensional shape measuring device that used it

#65

20080191135

2008-08-14

Scanning electron microscope

#66

20080191134

2008-08-14

Charged particle detector assembly, charged particle beam apparatus and method for generating an image

#67

20080087821

2008-04-17

Electron beam system and method of operating the same

#68

20080017811

2008-01-24

Beam stop for an ion implanter

#69

20080006771

2008-01-10

Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector

#70

20060226361

2006-10-12

Analyzing system and charged particle beam device

#71

20060226360

2006-10-12

Charged particle beam device for high spatial resolution and multiple perspective imaging

#72

20060163478

2006-07-27

Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system

#73

20060076489

2006-04-13

Charged particle beam apparatus

#74

20060071175

2006-04-06

Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof

#75

20060054814

2006-03-16

Scanning electron microscope having multiple detectors and a method for multiple detector based imaging

#76

20050279937

2005-12-22

Scanning electron microscope and similar apparatus

#77

20050263703

2005-12-01

Pattern inspection method and apparatus using electron beam

#78

20050030373

2005-02-10

Multi-mode charged particle beam device