206495 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means; Position sensitive detectors Imaging plates
Apparatus for high-speed imaging sensor data transfer
#2High-speed multiframe dynamic transmission electron microscope image acquisition system with arbitrary timing
#3Multi-beam particle microscope and method for operating same
#4Backscatter reduction in thin electron detectors
#5Backscatter reduction in thin electron detectors
#6DEVICE AND METHOD FOR CRYSTAL ORIENTATION MEASUREMENT BY MEANS OF AN ION BLOCKING PATTERN AND A FOCUSED ION PROBE
#7Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy
#8TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus
#9High-resolution scintillation screen for digital imaging
#10Scanning interference electron microscope
#11Method of photothermographic imaging for transmission electron microscopy
#12Patterned wafer inspection method and apparatus therefor
#13Electron beam apparatus and a device manufacturing method using the same apparatus
#14Multi-mode charged particle beam device