206498 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means Energy spectrometers
ELECTRON BEAM APPARATUS AND METHOD FOR GENERATING A PULSED ELECTRON BEAM AND APPLICATIONS THEREOF
#2METHOD AND SYSTEM FOR CALIBRATING A CHARGED-PARTICLE SPECTROMETER
#3ELECTRON SPECTROSCOPY APPARATUS AND METHODS
#4TEMPORAL CHARACTERIZATION OF OSCILLATOR SIGNALS IN CHARGED PARTICLE MICROSCOPY
#5AUTOMATIC CORRECTION OF ENERGY DEPENDENT DEFOCUS IN PARTICLE BEAM SYSTEMS DUE TO A CONFIGURATION CHANGE
#6OPTICAL EMISSION SPECTROSCOPY FOR ADVANCED PROCESS CHARACTERIZATION
#7METHODS AND SYSTEMS OF ELECTRON DIFFRACTION
#8LASER-BASED CONTRAST CONTROL IN TRANSMISSION ELECTRON MICROSCOPY
#9APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
#10METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASURED EELS SPECTRUM
#11TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
#12AUGMENTATION OF ELECTRON ENERGY LOSS SPECTROSCOPY IN CHARGED PARTICLE MICROSCOPES
#13Transmission charged particle microscope with an electron energy loss spectroscopy detector
#14Optical emission spectroscopy for advanced process characterization
#15Electron Spectrometer and Analytical Method
#16ELECTRON SPECTROMETER CALIBRATION METHOD
#17OPERATION METHOD OF ETCHING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
#18Energy Filter, and Energy Analyzer and Charged Particle Beam Device Provided with Same
#19Energy spectrometer with dynamic focus
#20Charged particle beam device
#21Apparatus for ion energy analysis of plasma processes
#22Apparatus for ion energy analysis of plasma processes
#23Particle beam system and method for the particle-optical examination of an object
#24Transmission charged particle microscope with an electron energy loss spectroscopy detector
#25Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
#26Method for high speed EELS spectrum acquisition
#27Accurate wavelength calibration in cathodoluminescence SEM
#28Apparatus and method for measuring energy spectrum of backscattered electrons
#29Methods and systems for acquiring electron backscatter diffraction patterns
#30Method of examining a sample using a charged particle microscope, wherein an electron energy-loss spectroscopy (EELS) spectrum is acquired
#31High speed/low dose multi-objective autonomous scanning materials imaging
#32Device and method for electron transfer from a sample to an energy analyzer and electron spectrometer device
#33Scanning electron microscope
#34Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#35Charged particle beam device, and observation method and elemental analysis method using the same
#36Particle beam system and method for the particle-optical examination of an object
#37Transmission charged particle microscope with adjustable beam energy spread
#38Evaluation method and evaluation apparatus for electronic device
#39APPARATUS AND METHOD OF PRODUCING DIAMOND AND PERFORMING REAL TIME IN SITU ANALYSIS
#40Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
#41Scanning electron microscope and measurement method for obtaining images of a specimen using an ion beam and an electron beam
#42ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE
#43Transmission charged particle microscope with improved EELS/EFTEM module
#44Particle beam system and method for the particle-optical examination of an object
#45Electron spectroscopy system
#46Transmission scanning microscopy including electron energy loss spectroscopy and observation method thereof
#47Energy filter and charged particle beam system
#48Electron microscope
#49Electron energy loss spectrometer using direct detection sensor
#50Retarding potential type energy analyzer
#51Charged particle beam device
#52Hybrid energy conversion and processing detector
#53Compressive scanning spectroscopy
#54Particle beam system and method for the particle-optical examination of an object
#55Energy discriminating electron detector and scanning electron microscope using the same
#56Scanning electron microscope and electron trajectory adjustment method therefor
#57Electron energy loss spectrometer using direct detection sensor
#58Electron energy loss spectrometer
#59Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#60Analyzing energy of charged particles
#61Apparatus and Method of Producing Diamond and Performing Real Time In Situ Analysis
#62Method of performing spectroscopy in a transmission charged-particle microscope
#63Electron spectrometer and measurement method
#64Spectroscopy in a transmission charged-particle microscope
#65Method of acquiring EBSP patterns
#66Monochromator and charged particle apparatus including the same
#67Charged particle beam device
#68Hybrid energy conversion and processing detector
#69High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope
#70Charged particle beam device having an energy filter
#71Adjustable cathodoluminescence detection system and microscope employing such a system
#72Non-invasive charged particle beam monitor
#73Scanning charged particle microscope, image acquisition method, and electron detection method
#74Electron beam apparatus
#75Device and method for determining the energetic composition of electromagnetic waves
#76Scanning particle microscope having an energy selective detector system
#77Scanning electron microscope
#78Charged particle beam device and measuring method using the same
#79Charged particle beam device having an energy filter
#80Photon induced near field electron microscope and biological imaging system
#81Method of using a compound particle-optical lens
#82Method of performing tomographic imaging of a sample in a charged-particle microscope
#83Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes
#84Charged particle ray apparatus and pattern measurement method
#85Sample analyzing apparatus and sample analyzing method
#86Signal processing method and signal processing apparatus
#87Electronic state calculation method, electronic state calculation device, and recording medium
#88Sequential radial mirror analyser
#89HOLLOW CYLINDRICAL ANALYZER
#90Adjustable cathodoluminescence detection system and microscope employing such a system
#91Background reduction system including louver
#92Electron beam apparatus and electron beam inspection method
#93Imaging energy filter for electrically charged particles and spectroscope having same
#94Charged particle beam analyzer and analysis method
#95Electron microscope
#96Electron detecting mechanism and charged particle beam system equipped therewith
#97Detector system for use with transmission electron microscope spectroscopy
#98Contrast for scanning confocal electron microscope
#99Charged particle beam device
#100Photon induced near field electron microscope and biological imaging system
#101Charged-particle energy analyzer
#102Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image
#103Sample inspection methods, systems and components
#104Electron beam apparatus and electron beam inspection method
#105Electron microscope with electron spectrometer
#106Method for discrimination of backscattered from incoming electrons in imaging electron detectors with a thin electron-sensitive layer
#107Charged particle detection system and method
#108System and method for a charged particle beam
#109Scanning electron microscope having time constant measurement capability
#110Charged particle analyser and method using electrostatic filter grids to filter charged particles
#111Device and method for analyzing a sample
#112Scanning electron microscope and similar apparatus
#113Electron microscopy
#114Charged particle beam device with retarding field analyzer
#115Electronic microscope apparatus
#116Apparatus and method for enhancing voltage contrast of a wafer
#117Measuring energy contamination using time-of-flight techniques
#118Electron microscope with electron spectrometer
#119Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#120Scanning electron microscope
#121Transmission electron microscope provided with electronic spectroscope
#122Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system
#123System and method for a charged particle beam
#124Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same
#125Scanning electron microscope having time constant measurement capability
#126Electron beam apparatus and electron beam inspection method
#127Inspection system by charged particle beam and method of manufacturing devices using the system
#128Scanning electron microscope
#129Inspection system by charged particle beam and method of manufacturing devices using the system
#130Sample measuring device
#131Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
#132Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
#133High current density particle beam system
#134Scanning electron microscope
#135Scanning electron microscope
#136Apparatus and method for E-beam dark field imaging
#137Ion implantation monitor system and method thereof
#138Patterned wafer inspection method and apparatus therefor
#139Scanning electron microscope and similar apparatus
#140Scanning electron microscope
#141Non-dispersive charged particle energy analyzer
#142Multi-mode charged particle beam device
#143System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy