206499 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means Detector devices with moving charges in electric or magnetic fields
Scanning electron microscope
#2Charged particle beam device
#3Ion plasma disintegrator
#4Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#5Screening method and apparatus for detecting an object of interest
#6Charged particle beam device
#7Electron microscope and image acquisition method
#8Charged particle beam apparatus
#9Ion beam device and sample observation method
#10Method of measuring gas introducing hole provided in electrode for plasma etching device, electrode, electrode regeneration method, regenerated electrode, plasma etching device, and gas introducing hole state distribution diagram and display method for same
#11Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#12Analyzing energy of charged particles
#13Inspection of a lithographic mask that is protected by a pellicle
#14High-speed multiframe dynamic transmission electron microscope image acquisition system with arbitrary timing
#15Charged particle beam device
#16Inspection of a lithographic mask that is protected by a pellicle
#17Scanning electron microscope
#18Scanning electron microscope
#19Charged particle beam device and measuring method using the same
#20Contamination reduction electrode for particle detector
#21Particle beam device and method for operating a particle beam device
#22Charged particle ray apparatus and pattern measurement method
#23Particle detection system
#24CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR
#25Multi channel detector, optics therefor and method of operating thereof
#26Background reduction system including louver
#27Electron beam apparatus and electron beam inspection method
#28Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen
#29Electron detecting mechanism and charged particle beam system equipped therewith
#30Particle detection system
#31Particle detection system
#32Charged particle beam device
#33Apparatus for transmission of energy and/or for transportation of an ion as well as a particle beam device having an apparatus such as this
#34HIGH THROUGHPUT SEM TOOL
#35ELECTRON DETECTION SYSTEMS AND METHODS
#36Sample inspection methods, systems and components
#37Electron beam apparatus and electron beam inspection method
#38Multi-beam scanning electron beam device and methods of using the same
#39Scanning electron microscope having time constant measurement capability
#40Charged particle analyser and method using electrostatic filter grids to filter charged particles
#41Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
#42Specimen inspection equipment and how to make the electron beam absorbed current images
#43Scanning transmission electron microscope using gas amplification
#44Horizontal and vertical beam angle measurement technique
#45Scanning electron microscope and similar apparatus
#46Inspection method and inspection system using charged particle beam
#47Electron beam device
#48Specimen inspection equipment and how to make electron beam absorbed current images
#49Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same
#50Scanning electron microscope having time constant measurement capability
#51Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
#52Electron beam apparatus and electron beam inspection method
#53Charged particle beam instrument and method of detecting charged particles
#54Scanning electron microscope
#55Detector for charged particle beam instrument
#56Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector
#57Scanning electron microscope
#58Particle detector for secondary ions and direct and or indirect secondary electrons
#59Inspection method and inspection system using charged particle beam
#60Scanning electron microscope
#61Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
#62Scanning electron microscope and similar apparatus
#63Scanning electron microscope
#64Scanning electron microscope