206504 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterised by the variable being measured; Intensity, dose or other characteristics of particle beams or electromagnetic radiation; Beam diagnostics including control of the parameter or property diagnosed Beam diameter
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSCOPE USING SETTINGS ADJUSTED TO AN INSPECTION SITE
#2CHARGED PARTICLE BEAM APPARATUS
#3ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE
#4CHARGED PARTICLE BEAM DEVICE
#5Photocathode designs and methods of generating an electron beam using a photocathode
#6Electron beam generation and measurement
#7Photocathode designs and methods of generating an electron beam using a photocathode
#8Silicon electron emitter designs
#9METHOD FOR ESTIMATING LIFETIME OF CATHODE IN ELECTRON BEAM LITHOGRAPHY APPARATUS
#10Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device
#11Measuring apparatus, drawing apparatus, and article manufacturing method
#12Method for monitoring ion implantation
#13Multi-column electron beam exposure apparatus and multi-column electron beam exposure method
#14Ion source and ion implantation apparatus