206501 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Detection characterised by the variable being measured
Sub-classes:Ion beam profiling system and related methods
#2Scanning electron microscope
#3Electron microscope and method of operating same
#4Directional treatment for multi-dimensional device processing
#5Signal processing method and signal processing apparatus
#6Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen
#7Method and system for generating and reviewing a thin sample
#8Sample observation method and transmission electron microscope