206505 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterised by the variable being measured; Intensity, dose or other characteristics of particle beams or electromagnetic radiation; Beam diagnostics including control of the parameter or property diagnosed Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
FORMATION OF ANGLED GRATINGS
#2BEAM TUNING FOR NON-UNIFORM ION IMPLANTATION
#3COMPACT BEAM PROCESSING SYSTEM HAVING IN-SITU IMAGING METROLOGY
#4ENERGY ACCURACY FOR AN RF LINEAR ACCELERATOR ION IMPLANTATION SYSTEM
#5GRID-LESS ION ANGLE DETECTOR
#6ION ANGLE SENSOR
#7IN-SITU ION BEAM ANGLE MEASUREMENT
#8ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM
#9MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSCOPE USING SETTINGS ADJUSTED TO AN INSPECTION SITE
#10MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTICLE BEAM WRITING METHOD, INSPECTION METHOD FOR APERTURE ARRAY SUBSTRATE FOR MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM
#11Charged Particle Beam Device
#12Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system
#13FORMATION OF ANGLED GRATINGS
#14In situ angle measurement using channeling
#15Ion implanter and beam profiler
#16CHARGED PARTICLE BEAM APPARATUS
#17Detection of buried features by backscattered particles
#18Formation of angled gratings
#19Ion implantation apparatus and measurement device
#20Charged particle beam writing method and charged particle beam writing apparatus
#21Aberration measurement method and electron microscope
#22Focused ion beam apparatus
#23Ion implantation apparatus and measurement device
#24Ion implantation apparatus and semiconductor manufacturing method
#25System and method to improve productivity of hybrid scan ion beam implanters
#26Beam profiling speed enhancement for scanned beam implanters
#27Tube-detector alignment using light projections
#28Ion implanter, ion implantation method, and beam measurement apparatus
#29Charged particle beam apparatus
#30Ion implanter, beam energy measuring device, and method of measuring beam energy
#31Charged particle beam apparatus
#32Charged particle beam apparatus
#33Ion beam measuring device and method of measuring ion beam
#34Control for optically aligning an X-ray tube and X-ray detector
#35Beam monitoring device, method, and system
#36Method for manufacturing semiconductor device
#37Electron microscope and method of adjusting the same
#38Charged particle beam device, and image analysis device
#39Sample analyzing apparatus and sample analyzing method
#40Beam monitoring device, method, and system
#41Gas cluster ion beam etch profile control using beam divergence
#42Ion beam incident angle detection assembly and method
#43Real time monitoring ion beam
#44Ion implanting system
#45Apparatus and methods for electron beam detection
#46Mask health monitor using a faraday probe
#47Technique and apparatus for monitoring ion mass, energy, and angle in processing systems
#48METHOD FOR ADJUSTING STATUS OF PARTICLE BEAMS FOR PATTERNING A SUBSTRATE AND SYSTEM USING THE SAME
#49SYSTEM AND METHOD FOR ESTIMATING CHANGE OF STATUS OF PARTICLE BEAMS
#50APPARATUS AND METHOD FOR ESTIMATING CHANGE OF STATUS OF PARTICLE BEAMS
#51Ion beam tuning
#52Lithography apparatus and device manufacturing method
#53Ion implanting apparatus and deflecting electrode
#54Ion beam incident angle detection assembly and method
#55Mask health monitor using a faraday probe
#56Manufacturing method of semiconductor device, method for controlling ion beam, and ion implantation apparatus
#57Off-axis ion milling device for manufacture of magnetic recording media and method for using the same
#58Apparatus and method for ion beam implantation using scanning and spot beams with improved high dose beam quality
#59Apparatus and method for ion beam implantation using scanning and spot beams
#60Ion beam angle calibration and emittance measurement system for ribbon beams
#61Dual beam apparatus with tilting sample stage
#62Method for enhancing tensile stress and source/drain activation using Si:C
#63Collimator magnet for ion implantation system
#64METHOD OF DETERMINING ANGLE MISALIGNMENT IN BEAM LINE ION IMPLANTERS
#65Method and apparatus for measurement of beam angle in ion implantation
#66Post-decel magnetic energy filter for ion implantation systems
#67Horizontal and vertical beam angle measurement technique
#68Ion implanting apparatus and method of correcting beam orbit
#69Ion implantation apparatus and method of correcting deviation angle of ion beam
#70Low contamination, low energy beamline architecture for high current ion implantation
#71Apparatus for measuring beam characteristics and a method thereof
#72Apparatus for Handling a Substrate and a Method Thereof
#73Structures and methods for measuring beam angle in an ion implanter
#74TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY UNIFORMITY
#75Ion implantation method and semiconductor device manufacturing method
#76Technique for reducing magnetic fields at an implant location
#77System and method for two-dimensional beam scan across a workpiece of an ion implanter
#78Method of determining angle misalignment in beam line ion implanters
#79Ion gun, ion beam etching apparatus, ion beam etching facility, etching method, and method for manufacturing magnetic recording medium
#80Beam line architecture for ion implanter
#81Technique for improving ion implantation based on ion beam angle-related information
#82Implanting with improved uniformity and angle control on tilted wafers
#83Ion beam processing apparatus
#84Beam angle adjustment in ion implanters
#85Ion beam monitoring in an ion implanter using an imaging device
#86Systems and methods for beam angle adjustment in ion implanters
#87Ion implantation apparatus and ion implanting method
#88Ion beam angle measurement systems and methods for ion implantation systems
#89Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems
#90Ion implantation beam angle calibration
#91Means to establish orientation of ion beam to wafer and correct angle errors
#92Ion beam profiler
#93Ion implant beam angle integrity monitoring and adjusting
#94Charged particle beam application system
#95Methods and apparatus for ion beam angle measurement in two dimensions
#96Method of measuring ion beam position
#97Methods and apparatus for ion beam angle measurement in two dimensions
#98Technique for ion beam angle process control
#99Irradiation system ion beam and method to enhance accuracy of irradiation
#100Ion beam measurement systems and methods for ion implant dose and uniformity control
#101Device and method for measurement of beam angle and divergence
#102Ion implanting apparatus
#103Movable inclination-angle measuring apparatus for ion beam, and method of use
#104Ion implantation apparatus and ion implanting method