206508 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterised by the variable being measured; Intensity, dose or other characteristics of particle beams or electromagnetic radiation Polarisation (electromagnetic beams)
Phase-shifting element and particle beam device having a phase-shifting element
#2Phase-shifting element and particle beam device having a phase-shifting element
#3Phase-shifting element and particle beam device having a phase-shifting element