206509 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterised by the variable being measured; Intensity, dose or other characteristics of particle beams or electromagnetic radiation Spin polarisation (particles)
ELECTRON GUN AND ELECTRON MICROSCOPE
#2NON-INVASIVE MEASURING/DIAGNOSIS/TREATMENT APPARATUS AND METHOD
#3SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
#4Ultra-precision timing clock method
#5CHARGED PARTICLE BEAM DEVICE
#6Electron gun and electron microscope
#7Spin polarimeter
#8Scanning electron microscope and method for analyzing secondary electron spin polarization
#9Non-contact angle measuring apparatus
#10Inspection tool, lithographic apparatus, electron beam source and an inspection method
#11Coherence measuring device for spin-polarized electron beam and method using the same
#12Image type electron spin polarimeter
#13Generation of charged particle vortex waves
#14Electron microscope
#15Electron beam source and method of manufacturing the same
#16System and method for producing and using multiple electron beams with quantized orbital angular momentum in an electron microscope
#17Spin-polarized electron source
#18Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus
#19Charged particle spin polarimeter, microscope, and photoelectron spectroscope
#20Transmission electron microscope
#21INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN