206518 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Components associated with the control of the tube; Electric or electronic means using digital signal processors
METHODS AND APPARATUS FOR ADAPTIVE CHARGE NEUTRALIZATION USING AN ANTENNA MOUNTED TO AN ION EMITTER
#2Method for controlling dynamically controllable ultrawide-amplitude and high-response ion source
#3METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
#4Estimation model generation method and electron microscope
#5METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE
#6Substrate processing system, substrate processing method, and controller
#7Operating a particle beam device
#8Accelerator system for mineral component analysis, system and method for mineral component analysis
#9Aberration measurement method and electron microscope
#10Electron microscope and method of operating same
#11Charged particle beam device
#12Systems including a beam projection device providing variable exposure duration resolution
#13Method for the correction of electron proximity effects
#14COPPER SUBSTRATE FOR DEPOSITION OF GRAPHENE
#15Sustained self-sputtering of lithium for lithium physical vapor deposition
#16DRAWING APPARATUS, DRAWING METHOD, AND METHOD FOR FABRICATING ARTICLE
#17Dynamic focus adjustment with optical height detection apparatus in electron beam system
#18X-ray CT apparatus
#19Particle beam system and method for operating the same
#20Particle beam system and method for operating the same
#21Ion sources, systems and methods
#22CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPLE INSPECTION METHOD
#23Dynamic focus adjustment with optical height detection apparatus in electron beam system
#24Scanning electron microscope
#25Microstructured pattern inspection method
#26Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
#27Defect inspection and charged particle beam apparatus
#28Charged particle beam equipment
#29Scanning electron microscope
#30Charged particle beam apparatus
#31Method and apparatus for reviewing defects by detecting images having voltage contrast
#32Scanning electron microscope
#33Scanning electron microscope and method for detecting an image using the same
#34Electron beam inspection system and an image generation method for an electron beam inspection system
#35Microstructured pattern inspection method
#36Electron beam apparatus with aberration corrector
#37Image forming method and electron microscope
#38Defect inspection and charged particle beam apparatus
#39Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
#40Electron holography system
#41Defect inspection apparatus
#42Microstructured pattern inspection method
#43Charged particle beam apparatus
#44Method and apparatus for reviewing defects by detecting images having voltage contrast
#45Determining ion beam parallelism using refraction method
#46Scanning electron microscope
#47Charged particle apparatus, scanning electron microscope, and sample inspection method
#48Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase
#49Method and apparatus of reviewing defects on a semiconductor device
#50Method and apparatus for evaluating pattern shape of a semiconductor device
#51Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope
#52Electron beam apparatus with aberration corrector
#53Method of implanting a substrate and an ion implanter for performing the method
#54System and method for determining a cross sectional feature of a structural element using a reference structural element
#55Systems and methods for implant dosage control
#56Method of inspecting pattern and inspecting instrument
#57Focus correction method for inspection of circuit patterns
#58Defect inspection and charged particle beam apparatus
#59Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern
#60Transmission electron microscope
#61Semiconductor processing method and system
#62Scanning electron microscope
#63Charged particle beam equipment
#64Technique for ion beam angle spread control for advanced applications
#65Method of implanting a substrate and an ion implanter for performing the method
#66Scanning electron microscope
#67Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators
#68Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
#69Scanning electron microscope and method for detecting an image using the same
#70Method and apparatus for specifying working position on a sample and method of working the sample
#71Scanning interference electron microscope
#72Scanning electron microscope
#73Focused ion beam system
#74Ion beam processing method
#75Scanning particle beam instrument
#76Electron beam apparatus with aberration corrector
#77Charged particle beam apparatus
#78Microstructured pattern inspection method
#79Defect inspection and charged particle beam apparatus
#80Electron beam apparatus and method with surface height calculator and a dual projection optical unit
#81Defect inspection apparatus
#82Scanning electron microscope
#83Electron microscope
#84Method of inspecting pattern and inspecting instrument
#85Sparse sampling using a programmatically randomized signal modulating a carrier signal
#86Hybrid wafer dicing approach using a phase modulated laser beam profile laser scribing process and plasma etch process