H01J2237/25 - CPC Classification Index

ClassID:

206519 ⎘

H01J2237/25 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Tubes for localised analysis using electron or ion beams

Sub-classes:

H01J2237/2505 » characterised by their application 11

Recent Application in this class:

20200395190

Operating a particle beam device

20190259570

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

20120273679

X-RAY ANALYSER

20110220796

Methods and devices for high throughput crystal structure analysis by electron diffraction

20100294049

Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment

20100044564

Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus

20090023355

Electron source manufacturing method

20060145585

Electron gun