ClassID:

206567

H01J2237/2823 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Determination of microscope properties Resolution

Recent Application in this class:
#1
20220076917
2022-03-10

METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT

#2
20210202205
2021-07-01

Method and system for automatic zone axis alignment

#3
20210065335
2021-03-04

BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS

#4
20200013583
2020-01-09

Charged particle beam apparatus, observation method using charged particle beam apparatus, and program

#5
20190172185
2019-06-06

Blade deployment mechanisms for surgical forceps

#6
20190066968
2019-02-28

Aberration measurement method and electron microscope

#7
20180323035
2018-11-08

Charged particle beam apparatus, observation method using charged particle beam apparatus, and program

#8
20170263415
2017-09-14

Scanning electron microscope and electron trajectory adjustment method therefor

#9
20130266240
2013-10-10

Method for determining distortions in a particle-optical apparatus

#10
20130166240
2013-06-27

Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time

#11
20120083827
2012-04-05

Blade deployment mechanisms for surgical forceps

#12
20100246993
2010-09-30

Method for determining distortions in a particle-optical apparatus

#13
20100224781
2010-09-09

Electron microscope

#14
20100133426
2010-06-03

Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope

#15
20100072366
2010-03-25

Method of use for a multipole detector for a transmission electron microscope

#16
20100072365
2010-03-25

Variable rate scanning in an electron microscope

#17
20100032565
2010-02-11

Electron microscope and a method for measuring the defocus variation or the limit resolution

#18
20090268969
2009-10-29

Method and electron microscope for measuring the similarity of two-dimensional images

#19
20090121131
2009-05-14

Method of determination of resolution of scanning electron microscope

#20
20080319696
2008-12-25

Method and its system for calibrating measured data between different measuring tools

#21
20080121791
2008-05-29

Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same

#22
20080099677
2008-05-01

Method for measuring information transfer limit in transmission electron microscope, and transmission electron microscope using the same

#23
20080067373
2008-03-20

Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current

#24
20080067370
2008-03-20

Electron microscope and scanning probe microscope calibration device

#25
20080067337
2008-03-20

Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope

#26
20080011963
2008-01-17

Charged particle beam apparatus and charged particle beam resolution measurement method

#27
20070280559
2007-12-06

Image evaluation method and microscope

#28
20060192120
2006-08-31

Charged-particle-beam mapping projection-optical systems and methods for adjusting same

#29
20060038125
2006-02-23

Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system

#30
20050247860
2005-11-10

Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system

#31
20050199811
2005-09-15

Image evaluation method and microscope

#32
15896597
2018-09-04

Transmission electron microscope sample alignment system and method