206567 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion microscopes; Determination of microscope properties Resolution
METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT
#2Method and system for automatic zone axis alignment
#3BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
#4Charged particle beam apparatus, observation method using charged particle beam apparatus, and program
#5Blade deployment mechanisms for surgical forceps
#6Aberration measurement method and electron microscope
#7Charged particle beam apparatus, observation method using charged particle beam apparatus, and program
#8Scanning electron microscope and electron trajectory adjustment method therefor
#9Method for determining distortions in a particle-optical apparatus
#10Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time
#11Blade deployment mechanisms for surgical forceps
#12Method for determining distortions in a particle-optical apparatus
#13Electron microscope
#14Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
#15Method of use for a multipole detector for a transmission electron microscope
#16Variable rate scanning in an electron microscope
#17Electron microscope and a method for measuring the defocus variation or the limit resolution
#18Method and electron microscope for measuring the similarity of two-dimensional images
#19Method of determination of resolution of scanning electron microscope
#20Method and its system for calibrating measured data between different measuring tools
#21Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same
#22Method for measuring information transfer limit in transmission electron microscope, and transmission electron microscope using the same
#23Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current
#24Electron microscope and scanning probe microscope calibration device
#25Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
#26Charged particle beam apparatus and charged particle beam resolution measurement method
#27Image evaluation method and microscope
#28Charged-particle-beam mapping projection-optical systems and methods for adjusting same
#29Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
#30Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
#31Image evaluation method and microscope
#32Transmission electron microscope sample alignment system and method