ClassID:

206537

H01J2237/26 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Electron or ion microscopes

Sub-classes:
Recent Application in this class:
#1
20250299902
2025-09-25

SAMPLE INSPECTION SYSTEM

#2
20230170177
2023-06-01

ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM

#3
20230012465
2023-01-12

METHODS OF SUPPORTING A GRAPHENE SHEET DISPOSED ON A FRAME SUPPORT

#4
20220130637
2022-04-28

Electron microscope sample holder fluid handling with independent pressure and flow control

#5
20210047740
2021-02-18

Methods of supporting a graphene sheet disposed on a frame support

#6
20210047358
2021-02-18

Nanoparticle compositions

#7
20200303158
2020-09-24

ELECTRON BEAM INSPECTION TOOL AND METHOD FOR POSITIONING AN OBJECT TABLE

#8
20200278524
2020-09-03

Optical objective lens

#9
20200264321
2020-08-20

Packaging of semiconductor X-ray detectors

#10
20200144020
2020-05-07

Electron microscope sample holder fluid handling with independent pressure and flow control

#11
20200055092
2020-02-20

Vacuum apparatus and recovery support method

#12
20190311876
2019-10-10

Charged particle radiation device

#13
20190228946
2019-07-25

Aberration correcting device for an electron microscope and an electron microscope comprising such a device

#14
20190108970
2019-04-11

Charged particle beam device

#15
20190066970
2019-02-28

Driver of sample holder for electron microscope and stage comprising same

#16
20190064371
2019-02-28

Packaging of semiconductor X-ray detectors

#17
20180301318
2018-10-18

Ion milling device

#18
20180052118
2018-02-22

Virtual inspection systems with multiple modes

#19
20180038810
2018-02-08

Multi-module photon detector and use thereof

#20
20170207062
2017-07-20

Electron microscope and method for transmission electron microscopy imaging of sample arrays

#21
20160372302
2016-12-22

Workpiece transport and positioning apparatus

#22
20160329184
2016-11-10

Array of carbon nanotube micro-tip structures

#23
20160307727
2016-10-20

Method of manipulating a sample in an evacuated chamber of a charged particle apparatus

#24
20160276126
2016-09-22

Low specimen drift TEM holder and cooler for use in microscopy

#25
20160225576
2016-08-04

Multipole lens and charged particle beam system

#26
20160211110
2016-07-21

Weak signal detection system and electron microscope equipped with same

#27
20160189919
2016-06-30

Electron microscopy sample support including porous metal foil

#28
20160186844
2016-06-30

Actuator, sample positioning device, and charged particle beam system

#29
20160181060
2016-06-23

Fiducial-based correlative microscopy

#30
20160163508
2016-06-09

Ion milling device

#31
20160139007
2016-05-19

Methods, apparatus and systems for production, collection, handling, and imaging of tissue sections

#32
20160133433
2016-05-12

Conductive interface system between vacuum chambers in a charged particle beam device

#33
20160086766
2016-03-24

Charged particle beam device

#34
20160025648
2016-01-28

Virtual inspection systems with multiple modes

#35
20160019696
2016-01-21

Device and method for computing amount of drift and charged particle beam system

#36
20150357157
2015-12-10

Particle beam system and method for operating a particle optical unit

#37
20150340193
2015-11-26

Inspection apparatus

#38
20150221469
2015-08-06

Top opening-closing mechanism and inspection apparatus

#39
20150209841
2015-07-30

Method for reducing or removing organic and inorganic contamination from a vacuum system of imaging and analytical devices and a device for carrying it out

#40
20150194285
2015-07-09

Ion source and method for making same

#41
20150170874
2015-06-18

Specimen sample holder for workpiece transport apparatus

#42
20150168320
2015-06-18

Multi-module photon detector and use thereof

#43
20150166273
2015-06-18

Workpiece holder for workpiece transport apparatus

#44
20150137000
2015-05-21

Charged particle beam instrument and sample container

#45
20150129778
2015-05-14

Specimen holder used for mounting samples in electron microscopes

#46
20150034822
2015-02-05

Position sensitive STEM detector

#47
20150021476
2015-01-22

Magnetic lens for focusing a beam of charged particles

#48
20140374593
2014-12-25

Detection method for use in charged-particle microscopy

#49
20140197331
2014-07-17

Charged particle device

#50
20140197311
2014-07-17

Sample carrier for an electron microscope

#51
20140166879
2014-06-19

Backscatter reduction in thin electron detectors

#52
20140139100
2014-05-22

Thermionic cathode with even electric field distribution on electron emitting surface

#53
20130234025
2013-09-12

Electron gun emitting under high voltage, in particular for electron microscopy

#54
20130224429
2013-08-29

Carbon nanotube based micro-tip structure and method for making the same

#55
20130216451
2013-08-22

Methods, apparatus and systems for production, collection, handling, and imaging of tissue sections

#56
20120256085
2012-10-11

Method of protecting a radiation detector in a charged particle instrument

#57
20120205539
2012-08-16

Detector for use in charged-particle microscopy

#58
20120199738
2012-08-09

IN-CHAMBER ELECTRON DETECTOR

#59
20120107521
2012-05-03

Protective layer for charged particle beam processing

#60
20120080406
2012-04-05

METHOD AND SYSTEM FOR PREPARING A LAMELA

#61
20120062094
2012-03-15

Electron gun

#62
20120032078
2012-02-09

Backscatter reduction in thin electron detectors

#63
20120006786
2012-01-12

METHOD AND SYSTEM FOR PREPARING A SAMPLE

#64
20120001068
2012-01-05

Method of electron diffraction tomography

#65
20110240881
2011-10-06

Specimen holder and specimen holder movement device

#66
20110104976
2011-05-05

Carbon nanotube electron gun

#67
20110089397
2011-04-21

Spin-polarized electron source

#68
20110049361
2011-03-03

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

#69
20110020563
2011-01-27

Carbon nanotube film composite structure, transmission electron microscope grid using the same, and method for making the same

#70
20110017921
2011-01-27

Carbon nanotube film composite structure, transmission electron microscope grid using the same, and method for making the same

#71
20110011190
2011-01-20

Probe and method for obtaining three-dimensional compositional maps of a biological sample

#72
20100327161
2010-12-30

Method for discrimination of backscattered from incoming electrons in imaging electron detectors with a thin electron-sensitive layer

#73
20100323445
2010-12-23

Methods, apparatus and systems for production, collection, handling, and imaging of tissue sections

#74
20100294049
2010-11-25

Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment

#75
20100276277
2010-11-04

Electrochemical liquid cell apparatus

#76
20100258738
2010-10-14

Device for deflecting or guiding in a particle beam

#77
20100237762
2010-09-23

Electron source and electron beam apparatus

#78
20100230608
2010-09-16

SAFE MOTION

#79
20100155597
2010-06-24

Particle optical device with magnet assembly

#80
20100148656
2010-06-17

ELECTRON COLUMN USING CNT-TIP AND METHOD FOR ALIGNMENT OF CNT-TIP

#81
20100143198
2010-06-10

Sample support structure and methods

#82
20100093022
2010-04-15

METHODS AND APPARATUS FOR PROVIDING AND PROCESSING SLICED THIN TISSUE

#83
20100084566
2010-04-08

Electron Column Using A Magnetic Lens Layer Having Permanent Magnets

#84
20100025821
2010-02-04

Ion implanting apparatus and ion implanting method

#85
20100006756
2010-01-14

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING CHARGED PARTICLE BEAM IMAGE

#86
20090242795
2009-10-01

Cryo-charging specimen holder for electron microscope

#87
20090218508
2009-09-03

COLD CATHODE FIELD EMISSION ELECTRON GUN AND ITS APPLICATION TO ELECTRON BEAM INSTRUMENTS

#88
20090194692
2009-08-06

CHARGED PARTICLE RADIATION APPARATUS

#89
20090160308
2009-06-25

Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer

#90
20090160307
2009-06-25

DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME

#91
20090050347
2009-02-26

Insulated conducting device with multiple insulation segments

#92
20090001266
2009-01-01

Arrangement and method for compensating emitter tip vibrations

#93
20080308742
2008-12-18

In-chamber electron detector

#94
20080258060
2008-10-23

Charged particle beam apparatus and method for operating a charged particle beam apparatus

#95
20080237483
2008-10-02

Carbon nanotube electron gun

#96
20080224064
2008-09-18

Charged particle beam apparatus

#97
20080142733
2008-06-19

Substrate processing apparatus and method

#98
20080102224
2008-05-01

Protective layer for charged particle beam processing

#99
20080093563
2008-04-24

Aberration Corrector and Method of Aberration Correction

#100
20080073547
2008-03-27

Apparatus for generating a plurality of beamlets

#101
20080054186
2008-03-06

Method of aberration correction and electron beam system

#102
20080029700
2008-02-07

Field emission electron gun and electron beam applied device using the same

#103
20080023642
2008-01-31

Electron gun assembly

#104
20070278416
2007-12-06

Multipole lens and method of fabricating same

#105
20070161044
2007-07-12

Method for localizing and identifying isotopes

#106
20070131873
2007-06-14

Unsupported, electron transparent films and related methods

#107
20070029509
2007-02-08

Apparatus for generating a plurality of beamlets

#108
20070029499
2007-02-08

Apparatus for generating a plurality of beamlets

#109
20070018112
2007-01-25

Apparatus for generating a plurality of beamlets

#110
20060226361
2006-10-12

Analyzing system and charged particle beam device

#111
20060169918
2006-08-03

Information acquisition method and apparatus for information acquisition

#112
20060097165
2006-05-11

Electron beam apparatus and method for manufacturing semiconductor device

#113
20060025002
2006-02-02

TEM MEMS device holder and method of fabrication

#114
20060022135
2006-02-02

Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope

#115
20060008790
2006-01-12

Methods and apparatuses for the automated production, collection, handling, and imaging of large numbers of serial tissue sections

#116
20050051725
2005-03-10

Transmission electron microscope system and method of inspecting a specimen using the same