206692 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Processing objects by plasma generation characterised by the type of processing; Changing chemical properties of treated surfaces Polymerising
COATINGS
#2INSULATING FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM
#3A Device and Method For Generating A Plasma Jet
#4Method for depositing a gap-fill layer by plasma-assisted deposition
#5Methods of treating a surface of a polymer material by atmospheric pressure plasma
#6Method for depositing a gap-fill layer by plasma-assisted deposition
#7COATINGS
#8Plasma polymerization apparatus and plasma polymerization method using the same
#9Methods of treating a surface of a polymer material by atmospheric pressure plasma
#10Coatings
#11Coatings
#12METHOD AND SYSTEM FOR MODIFYING A SUBSTRATE USING A PLASMA
#13Apparatus and Methods for Defining a Plasma
#14Method for producing contact areas on a semiconductor substrate
#15Modified polysilazane film and method for producing gas barrier film
#16Low k porous SiCOH dielectric and integration with post film formation treatment
#17LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT
#18Preparation of coatings through plasma polymerization
#19Method for providing a coating on the surfaces of a product with an open cell structure throughout its structure and use of such a method