H01J27/10 - CPC Classification Index

ClassID:

204957 ⎘

H01J27/10 - CPC Classification

Classification description:

Ion beam tubes; Ion sources; Ion guns using arc discharge Duoplasmatrons ; Duopigatrons

Sub-classes:

Discharge chambers and ionization devices, methods and systems using them

Duoplasmatron ion source with a partially ferromagnetic anode

Discharge chambers and ionization devices, methods and systems using them

Linear anode layer slit ion source

LINEAR DUOPLASMATRON

ION Beam System and Machining Method

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

Ion beam system and machining method

Ion beam system and machining method