204956 ⎘
Ion beam tubes; Ion sources; Ion guns using arc discharge
Sub-classes:ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
#2ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
#3VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING VAPOR
#4DEPOSITION APPARATUS
#5Molten liquid transport for tunable vaporization in ion sources
#6Ion source with multiple bias electrodes
#7Extended cathode and repeller life by active management of halogen cycle
#8Adjustable support for arc chamber of ion source
#9Apparatus and method for ionizing an analyte, and apparatus and method for analyzing an ionized analyte
#10IONIC PROPULSION SYSTEM
#11Apparatus and method for ionizing an analyte, and apparatus and method for analysing an ionized analyte
#12Ion generator and electric apparatus
#13Dual cathode ion source
#14Ion source with biased extraction plate
#15Deposition apparatus
#16Dual cathode ion source
#17Metallic ion source
#18Ion generator
#19Dual cathode ion source
#20Ion source repeller shield comprising a labyrinth seal
#21Ionization device with mass spectrometer therewith
#22Ion source cathode shield
#23Method of extracting and accelerating ions
#24Source housing assembly for controlling ion beam extraction stability and ion beam current
#2512CaO-7AlOelectride hollow cathode
#26Ion source devices and methods
#27In-situ monitoring of fabrication of integrated computational elements
#28Ion thruster
#29System and method for generating ions in an ion source
#30Supporting structure and ion generator using the same
#31Ion generator and ion generating method
#32Ion generating apparatus
#3312CaO-7Al2O3 electride hollow cathode
#34Extended lifetime ion source
#35Ion source having increased electron path length
#36Ion implanter
#37Ion source device and method for providing ion source
#38Method and apparatus for thermal control of ion sources and sputtering targets
#39Ion generation method and ion source
#40Ion source devices and methods
#41Ionization method, mass spectrometry method, extraction method, and purification method
#42Object neutralization with flexible discharge electrode
#43System and method of ion beam source for semiconductor ion implantation
#44In-line corona-based gas flow ionizer
#45Ion source
#46Ion source apparatus
#47Cleaning of an extraction aperture of an ion source
#48Ion source
#49Cathode ion source
#50Ion beam generator
#51Self-balancing ionized gas streams
#52FILAMENT ELECTRICAL DISCHARGE ION SOURCE
#53DEVICE AND METHOD FOR THIN FILM DEPOSITION USING A VACUUM ARC IN AN ENCLOSED CATHODE-ANODE ASSEMBLY
#54Directional gas injection for an ion source cathode assembly
#55Techniques for providing a multimode ion source
#56Hot cathode and ion source including the same
#57Techniques for providing a multimode ion source
#58Gas delivery system for an ion source
#59Multi mode ion source
#60Unbalanced ion source
#61Cathode and counter-cathode arrangement in an ion source
#62Techniques for providing a multimode ion source
#63Double plasma ion source
#64Ion source
#65Ion source arc chamber seal
#66Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus
#67Ion sources for ion implantation apparatus
#68Dual mode ion source for ion implantation
#69Ion source
#70Gas-fed hollow cathode keeper and method of operating same
#71Dual mode ion source for ion implantation
#72Dual mode ion source for ion implantation
#73Apparatus and method for generating ions of an ion implanter
#74Ion source and polishing system using the same
#75Filament member, ion source, and ion implantation apparatus
#76Filament member, ion source, and ion implantation apparatus
#77Monatomic dopant ion source and method
#78Ion source element, ion implanter having the same and method of modifying the same
#79Ion source
#80Ion source for use in an ion implanter
#81Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms
#82Source arc chamber for ion implanter having repeller electrode mounted to external insulator
#83Ion doping system, ion doping method and semiconductor device
#84Ion source apparatus and method
#85Dual mode ion source for ion implantation
#86Ionizer and method for gas-cluster ion-beam formation
#87Ion implanters having an arc chamber that affects ion current density
#88Ion sources and ion implanters and methods including the same
#89Ion generation apparatus used in ion implanter
#90Ion sources
#91Cathode and counter-cathode arrangement in an ion source
#92Apparatus for deposition of diamond like carbon
#93Ion source with multiple configurations
#94Indirectly heated cathode ion source assembly
#95Dual cathode ion source
#96System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source