ClassID:

204956

H01J27/08 - CPC Classification

Classification description:

Ion beam tubes; Ion sources; Ion guns using arc discharge

Sub-classes:
Recent Application in this class:
#1
20250323004
2025-10-16

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

#2
20240282543
2024-08-22

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

#3
20240098869
2024-03-21

VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING VAPOR

#4
20240052477
2024-02-15

DEPOSITION APPARATUS

#5
20230402247
2023-12-14

Molten liquid transport for tunable vaporization in ion sources

#6
20220367138
2022-11-17

Ion source with multiple bias electrodes

#7
20220359147
2022-11-10

Extended cathode and repeller life by active management of halogen cycle

#8
20220336181
2022-10-20

Adjustable support for arc chamber of ion source

#9
20220102129
2022-03-31

Apparatus and method for ionizing an analyte, and apparatus and method for analyzing an ionized analyte

#10
20220063821
2022-03-03

IONIC PROPULSION SYSTEM

#11
20210151309
2021-05-20

Apparatus and method for ionizing an analyte, and apparatus and method for analysing an ionized analyte

#12
20200357596
2020-11-12

Ion generator and electric apparatus

#13
20200294765
2020-09-17

Dual cathode ion source

#14
20200294750
2020-09-17

Ion source with biased extraction plate

#15
20200255933
2020-08-13

Deposition apparatus

#16
20190385811
2019-12-19

Dual cathode ion source

#17
20190198281
2019-06-27

Metallic ion source

#18
20180254166
2018-09-06

Ion generator

#19
20180211808
2018-07-26

Dual cathode ion source

#20
20170287579
2017-10-05

Ion source repeller shield comprising a labyrinth seal

#21
20170278690
2017-09-28

Ionization device with mass spectrometer therewith

#22
20170207054
2017-07-20

Ion source cathode shield

#23
20170178870
2017-06-22

Method of extracting and accelerating ions

#24
20160336138
2016-11-17

Source housing assembly for controlling ion beam extraction stability and ion beam current

#25
20160217961
2016-07-28

12CaO-7AlOelectride hollow cathode

#26
20160086763
2016-03-24

Ion source devices and methods

#27
20160018818
2016-01-21

In-situ monitoring of fabrication of integrated computational elements

#28
20150240794
2015-08-27

Ion thruster

#29
20150206690
2015-07-23

System and method for generating ions in an ion source

#30
20150179385
2015-06-25

Supporting structure and ion generator using the same

#31
20150129775
2015-05-14

Ion generator and ion generating method

#32
20150083931
2015-03-26

Ion generating apparatus

#33
20140354138
2014-12-04

12CaO-7Al2O3 electride hollow cathode

#34
20140326594
2014-11-06

Extended lifetime ion source

#35
20140166870
2014-06-19

Ion source having increased electron path length

#36
20140145581
2014-05-29

Ion implanter

#37
20140110598
2014-04-24

Ion source device and method for providing ion source

#38
20140099782
2014-04-10

Method and apparatus for thermal control of ion sources and sputtering targets

#39
20140062286
2014-03-06

Ion generation method and ion source

#40
20140055024
2014-02-27

Ion source devices and methods

#41
20130341279
2013-12-26

Ionization method, mass spectrometry method, extraction method, and purification method

#42
20130299717
2013-11-14

Object neutralization with flexible discharge electrode

#43
20130270454
2013-10-17

System and method of ion beam source for semiconductor ion implantation

#44
20130112892
2013-05-09

In-line corona-based gas flow ionizer

#45
20120013249
2012-01-19

Ion source

#46
20120012755
2012-01-19

Ion source apparatus

#47
20110220812
2011-09-15

Cleaning of an extraction aperture of an ion source

#48
20110186749
2011-08-04

Ion source

#49
20110156570
2011-06-30

Cathode ion source

#50
20110139998
2011-06-16

Ion beam generator

#51
20110096457
2011-04-28

Self-balancing ionized gas streams

#52
20110080095
2011-04-07

FILAMENT ELECTRICAL DISCHARGE ION SOURCE

#53
20100230276
2010-09-16

DEVICE AND METHOD FOR THIN FILM DEPOSITION USING A VACUUM ARC IN AN ENCLOSED CATHODE-ANODE ASSEMBLY

#54
20100155619
2010-06-24

Directional gas injection for an ion source cathode assembly

#55
20100148088
2010-06-17

Techniques for providing a multimode ion source

#56
20100038556
2010-02-18

Hot cathode and ion source including the same

#57
20090309041
2009-12-17

Techniques for providing a multimode ion source

#58
20090289197
2009-11-26

Gas delivery system for an ion source

#59
20090283695
2009-11-19

Multi mode ion source

#60
20090243490
2009-10-01

Unbalanced ion source

#61
20090211896
2009-08-27

Cathode and counter-cathode arrangement in an ion source

#62
20090166554
2009-07-02

Techniques for providing a multimode ion source

#63
20090114841
2009-05-07

Double plasma ion source

#64
20080277593
2008-11-13

Ion source

#65
20080230713
2008-09-25

Ion source arc chamber seal

#66
20080164820
2008-07-10

Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus

#67
20080129180
2008-06-05

Ion sources for ion implantation apparatus

#68
20080087219
2008-04-17

Dual mode ion source for ion implantation

#69
20080067412
2008-03-20

Ion source

#70
20080047256
2008-02-28

Gas-fed hollow cathode keeper and method of operating same

#71
20080042580
2008-02-21

Dual mode ion source for ion implantation

#72
20070170372
2007-07-26

Dual mode ion source for ion implantation

#73
20070152165
2007-07-05

Apparatus and method for generating ions of an ion implanter

#74
20070132358
2007-06-14

Ion source and polishing system using the same

#75
20070114436
2007-05-24

Filament member, ion source, and ion implantation apparatus

#76
20070114435
2007-05-24

Filament member, ion source, and ion implantation apparatus

#77
20070075267
2007-04-05

Monatomic dopant ion source and method

#78
20070075266
2007-04-05

Ion source element, ion implanter having the same and method of modifying the same

#79
20060284104
2006-12-21

Ion source

#80
20060169921
2006-08-03

Ion source for use in an ion implanter

#81
20060169915
2006-08-03

Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms

#82
20060163489
2006-07-27

Source arc chamber for ion implanter having repeller electrode mounted to external insulator

#83
20060151786
2006-07-13

Ion doping system, ion doping method and semiconductor device

#84
20060132068
2006-06-22

Ion source apparatus and method

#85
20060097645
2006-05-11

Dual mode ion source for ion implantation

#86
20060097185
2006-05-11

Ionizer and method for gas-cluster ion-beam formation

#87
20060060797
2006-03-23

Ion implanters having an arc chamber that affects ion current density

#88
20060030134
2006-02-09

Ion sources and ion implanters and methods including the same

#89
20050253084
2005-11-17

Ion generation apparatus used in ion implanter

#90
20050211923
2005-09-29

Ion sources

#91
20050173651
2005-08-11

Cathode and counter-cathode arrangement in an ion source

#92
20050098118
2005-05-12

Apparatus for deposition of diamond like carbon

#93
16555064
2021-01-19

Ion source with multiple configurations

#94
16185358
2019-11-05

Indirectly heated cathode ion source assembly

#95
15416131
2018-05-22

Dual cathode ion source

#96
13647826
2015-10-06

System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source