204524 ⎘
Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps; Arrangements for focusing or reflecting ray or beam Mirrors
ELECTROSTATIC LINEAR ION TRAP
#2Systems and methods for providing a beam of charged particles
#3Die-integrated aspheric mirror
#4Die-integrated aspheric mirror
#5Charged particle lithography system with a long shape illumination beam
#6Device, system, and method for reflecting ions