205230 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details Means for adjusting the focus
Automatic focusing of electron beams using a modified Faraday cup diagnostic
#302Focus adjustment method and focus adjustment apparatus
#303Charged particle beam apparatus, charged particle beam focusing method, microstructure measuring method, microstructure inspecting method, semiconductor device manufacturing method, and program
#304Method and device for distance measurement
#305Particle-optical projection system
#306Method for optically detecting height of a specimen and charged particle beam apparatus using the same
#307Apparatus and method for electron beam inspection with projection electron microscopy
#308Charged particle beam apparatus
#309Focus correction method for inspection of circuit patterns
#310Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern
#311Transmission electron microscope
#312Sample milling/observing apparatus and method of observing sample
#313Sample electrification measurement method and charged particle beam apparatus
#314Scanning electron microscope and method for detecting an image using the same
#315Charged particle beam apparatus
#316Electron microscope and a method of imaging objects
#317Charged particle beam apparatus and dimension measuring method
#318Focusing system and method for a charged particle imaging system
#319Method and system for focusing a charged particle beam
#320Scanning electron microscope
#321Charged particle beam adjustment method and apparatus
#322Charged particle beam apparatus
#323Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope
#324Automated method of correcting aberrations in electron beam, method of visualizing aberrations, and automated aberration corrector
#325Electron beam apparatus and method with surface height calculator and a dual projection optical unit
#326Charged particle beam adjusting method and charged particle beam apparatus
#327Particle-optical projection system
#328Method of observing a specimen using a scanning electron microscope
#329Charged particle beam apparatus
#330Sample electrification measurement method and charged particle beam apparatus
#331Auto focusing apparatus and method
#332Method for performing focusing in a particle-optical device with the aid of astigmatism in the particle beam
#333Automatic methods for focus and astigmatism corrections in charged-particle beam instrument
#334System and method for fast focal length alterations
#335Methods of operating particle microscopes and particle microscopes
#336Method of operating a charged particle microscope and charged particle microscope operating according to such method
#337Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material
#338Scanning UV light source utilizing semiconductor heterostructures
#339Gallium beam lithography for superconductive structure formation
#340Method of operating a charged particle microscope and charged particle microscope operating according to such method
#341Pattern measurement apparatus and pattern measurement method