H01J37/02 - CPC Classification Index

ClassID:

205191 ⎘

H01J37/02 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof Details

Sub-classes:

H01J37/023 » {Means for mechanically adjusting components not otherwise provided for } 108
H01J37/026 » {Means for avoiding or neutralising unwanted electrical charges on tube components} 207
H01J37/04 » Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement 223
H01J37/16 » Vessels; Containers 244
H01J37/18 » Vacuum locks; {Means for obtaining or maintaining the desired pressure within the vessel } 313
H01J37/20 » Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support 2,0K
H01J37/21 » Means for adjusting the focus 313
H01J37/22 » Optical or photographic arrangements associated with the tube 252
H01J37/24 » Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for 115
H01J37/244 » Detectors; Associated components or circuits therefor 1,7K
H01J37/248 » Components associated with high voltage supply 64

Recent Application in this class:

20260081094

2026-03-19

METHODS OF CALIBRATING A LANDING ANGLE OF AN ELECTRON BEAM

20250332304

2025-10-30

METHODS AND SYSTEMS FOR MEDICAL PLASMA TREATMENT AND GENERATION OF PLASMA ACTIVATED MEDIA

20250144669

2025-05-08

VIBRATION REDUCTION IN ION IMPLANTERS USING EMBEDDED ACTUATOR FORCED ATTENUATION

20250003841

2025-01-02

Ion Milling Device

20240017301

2024-01-18

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

20230207248

2023-06-29

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

20220230844

2022-07-21

Charged particle beam apparatus and method for controlling charged particle beam apparatus

20220084806

2022-03-17

Coupling for connecting analytical systems with vibrational isolation

20210283290

2021-09-16

Methods and systems for medical plasma treatment and generation of plasma activated media

#10

20210237129

2021-08-05

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

#11

20210090844

2021-03-25

MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM

#12

20200230665

2020-07-23

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

#13

20190369509

2019-12-05

Substrate processing apparatus

#14

20190122854

2019-04-25

Image processing system and method of processing images

#15

20180308657

2018-10-25

Assessment and calibration of a high energy beam

#16

20180301313

2018-10-18

PLASMA PROCESSING APPARATUS

#17

20180236505

2018-08-23

Method and system for the removal and/or avoidance of contamination in charged particle beam systems

#18

20180226219

2018-08-09

Multi-column scanning electron microscopy system

#19

20180166247

2018-06-14

Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

#20

20180044795

2018-02-15

Substrate processing apparatus and substrate processing method

#21

20170345615

2017-11-30

Image processing system and method of processing images

#22

20170307987

2017-10-26

Substrate processing apparatus

#23

20170097290

2017-04-06

Method of preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics

#24

20170062185

2017-03-02

Gas injection system for ion beam device

#25

20160368031

2016-12-22

Particle beam apparatus and method for operating a particle beam apparatus

#26

20160289839

2016-10-06

Substrate processing apparatus and substrate processing method

#27

20160155607

2016-06-02

Multiple gas injection system

#28

20160141151

2016-05-19

Plasma processing apparatus

#29

20160124026

2016-05-05

Assessment and calibration of a high energy beam

#30

20150102009

2015-04-16

Method for preparing thin samples for TEM imaging

#31

20150014276

2015-01-15

Plasma processing method

#32

20150012243

2015-01-08

Semiconductor evaluation device and computer program

#33

20140347640

2014-11-27

Substrate processing apparatus

#34

20140346350

2014-11-27

Multi-column electron beam inspection that uses custom printing methods

#35

20140312227

2014-10-23

Inspection apparatus

#36

20140302252

2014-10-09

Low energy ion milling or deposition

#37

20140238438

2014-08-28

Method and system for cleaning a vacuum chamber

#38

20140197330

2014-07-17

Vibration isolation module and substrate processing system

#39

20140183358

2014-07-03

Phase plate and method of fabricating same

#40

20140102638

2014-04-17

Plasma processing apparatus

#41

20140099782

2014-04-10

Method and apparatus for thermal control of ion sources and sputtering targets

#42

20140084157

2014-03-27

System and method for ex situ analysis of a substrate

#43

20140083978

2014-03-27

TEMPERATURE CONTROLLED PLASMA PROCESSING CHAMBER COMPONENT WITH ZONE DEPENDENT THERMAL EFFICIENCES

#44

20140061159

2014-03-06

Composite charged particle beam apparatus and thin sample processing method

#45

20140060738

2014-03-06

APPARATUS FOR TREATING SUBSTRATE

#46

20140060736

2014-03-06

Templates including self-assembled block copolymer films

#47

20140054468

2014-02-27

Chromatic aberration corrector and method of controlling same

#48

20140048707

2014-02-20

Optical characterization systems employing compact synchrotron radiation sources

#49

20140048211

2014-02-20

PLASMA PROCESSING APPARATUS

#50

20140041805

2014-02-13

SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY APPARATUS

#51

20140041684

2014-02-13

Techniques for improving the performance and extending the lifetime of an ion source

#52

20140022521

2014-01-23

Substrate processing apparatus and substrate processing method

#53

20140020832

2014-01-23

Substrate processing apparatus and substrate processing method using same

#54

20140014742

2014-01-16

Gas injection system for energetic-beam instruments

#55

20140008020

2014-01-09

Plasma processing apparatus and temperature control method

#56

20130313971

2013-11-28

Gallium ION source and materials therefore

#57

20130248705

2013-09-26

Defect inspection apparatus and defect inspection method

#58

20130248490

2013-09-26

Multiple gas injection system

#59

20130187064

2013-07-25

Particle beam system including a supply of process gas to a processing location

#60

20130187058

2013-07-25

Determination of emission parameters from field emission sources

#61

20130153742

2013-06-20

ARRANGEMENT FOR HOLDING A PARTICLE BEAM APPARATUS

#62

20130140459

2013-06-06

SYSTEM AND METHOD FOR SAMPLE ANALYSIS BY THREE DIMENSIONAL CATHODOLUMINESCENCE

#63

20120292537

2012-11-22

Charged particle beam writing apparatus

#64

20120260936

2012-10-18

Oxidative cleaning method and apparatus for electron microscopes using UV excitation in an oxygen radical source

#65

20120248066

2012-10-04

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

#66

20120214313

2012-08-23

Plasma processing method and plasma processing apparatus

#67

20120112089

2012-05-10

Aperture unit for a particle beam device

#68

20120111374

2012-05-10

ION IMPLANTATION TOOL CLEANING APPARATUS AND METHOD

#69

20120080056

2012-04-05

SYSTEM AND METHOD FOR REMOVING ORGANIC RESIDUE FROM A CHARGED PARTICLE BEAM SYSTEM

#70

20110303641

2011-12-15

Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies

#71

20110084592

2011-04-14

High voltage shielding arrangement of a charged particle lithography system

#72

20110017247

2011-01-27

Cleaning device for transmission electron microscopes

#73

20100288923

2010-11-18

Discharging method for charged particle beam imaging

#74

20100279062

2010-11-04

Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces

#75

20100258738

2010-10-14

Device for deflecting or guiding in a particle beam

#76

20100243607

2010-09-30

Substrate processing apparatus and substrate processing method using same

#77

20090206281

2009-08-20

VAPOR DELIVERY SYSTEM USEFUL WITH ION SOURCES AND VAPORIZERS FOR USE IN SUCH SYSTEM

#78

20090179157

2009-07-16

Vapor delivery to devices under vacuum

#79

20090008572

2009-01-08

Charged-particle beam apparatus

#80

20080311347

2008-12-18

Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces

#81

20080099693

2008-05-01

Charged-particle exposure apparatus

#82

20070284541

2007-12-13

Oxidative cleaning method and apparatus for electron microscopes using UV excitation in a oxygen radical source

#83

20070246651

2007-10-25

Charged particle beam apparatus

#84

20070228525

2007-10-04

Substrate earthing mechanism for use in charged-particle beam writing apparatus

#85

20070152150

2007-07-05

Charged particle beam apparatus

#86

20070125954

2007-06-07

Beam optical component for charged particle beams

#87

20070018562

2007-01-25

Field emitter arrangement and method of cleansing an emitting surface of a field emitter

#88

20060289754

2006-12-28

Charged particle beam apparatus

#89

20060289753

2006-12-28

Charged particle beam apparatus

#90

20060255290

2006-11-16

Sample inspection apparatus

#91

20060060791

2006-03-23

Bellows with spring anti-gravity device

#92

20050274910

2005-12-15

Ion beam system

#93

20050232726

2005-10-20

Method and apparatus for reducing cross contamination of species during ion implantation

#94

20050076725

2005-04-14

Method and apparatus of vibration isolation, in particular for electron beam metrology tools

#95

20050045822

2005-03-03

Charged particle beam apparatus