ClassID:

205241

H01J37/248 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details Components associated with high voltage supply

Recent Application in this class:
#1
20260120993
2026-04-30

SYSTEMS FOR AND METHODS OF IMPROVED PLASMA ENHANCED DEPOSITION, SURFACE MODIFICATION, AND ABATEMENT

#2
20250357076
2025-11-20

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

#3
20250343025
2025-11-06

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED MULTI-BEAM GENERATOR FOR FIELD CURVATURE CORRECTION AND MULTI-BEAM GENERATOR

#4
20240429021
2024-12-26

HIGH POWER GENERATOR AND METHOD OF SUPPLYING HIGH POWER PULSES

#5
20240404806
2024-12-05

Method for Magnetron Sputtering

#6
20240242917
2024-07-18

High-Voltage Insulating Structure, Charged Particle Gun, and Charged Particle Beam Device

#7
20240038486
2024-02-01

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

#8
20230360882
2023-11-09

Plasma processing method and plasma processing apparatus

#9
20230353056
2023-11-02

DC High-Voltage Source Device and Charged Particle Beam Device

#10
20230352264
2023-11-02

Creating Ion Energy Distribution Functions (IEDF)

#11
20230268158
2023-08-24

Charged Particle Beam Apparatus

#12
20230238736
2023-07-27

HIGH VOLTAGE FEEDTHROUGH AND CONNECTOR FOR A CHARGED PARTICLE APPARATUS

#13
20230148109
2023-05-11

High voltage amplifier circuit and analyzer apparatus

#14
20220336182
2022-10-20

Common substrate and shadow ring lift apparatus

#15
20220319795
2022-10-06

Power supply module and charged particle beam device

#16
20220028646
2022-01-27

COMPACT DEVICE FOR PULSED ELECTRIC FIELDS IN A TREATMENT CELL

#17
20210407767
2021-12-30

Plasma processing apparatus

#18
20210391143
2021-12-16

Charged particle beam device

#19
20210343496
2021-11-04

Creating ion energy distribution functions (IEDF)

#20
20210257178
2021-08-19

Charged particle beam generator and charged particle beam apparatus

#21
20210020407
2021-01-21

Plasma processing method and plasma processing apparatus

#22
20200312622
2020-10-01

Plasma etching apparatus and plasma etching method

#23
20200266029
2020-08-20

Composite charged particle beam apparatus and control method thereof

#24
20200266022
2020-08-20

Creating ion energy distribution functions (IEDF)

#25
20200266020
2020-08-20

Electron gun and electron beam application device

#26
20200227230
2020-07-16

Nanosecond pulser bias compensation

#27
20200203119
2020-06-25

Plasma delivery system for modulated plasma systems

#28
20200161155
2020-05-21

Automatic ESC bias compensation when using pulsed DC bias

#29
20200137868
2020-04-30

Filament power supply for electron accelerator and electron accelerator

#30
20200111647
2020-04-09

Plasma-Treatment Device for Contactlessly Supplying HF Voltage to a Movable Plasma Electrode Unit and Method for Operating Such a Plasma-Treatment Device

#31
20190259562
2019-08-22

Creating ion energy distribution functions (IEDF)

#32
20190189390
2019-06-20

System and method to monitor glitch energy

#33
20180330911
2018-11-15

Method and apparatus for an imaging system

#34
20180233320
2018-08-16

Charged particle beam device

#35
20180166249
2018-06-14

Creating ion energy distribution functions (IEDF)

#36
20180158648
2018-06-07

Charged particle beam device provided with ion pump

#37
20170309442
2017-10-26

High voltage electron beam system and method

#38
20170257036
2017-09-07

High voltage generation circuit

#39
20170229276
2017-08-10

High voltage feedthrough assembly, time-resolved transmission electron microscope and method of electrode manipulation in a vacuum environment

#40
20170169988
2017-06-15

Charged particle beam device and installation method

#41
20170004954
2017-01-05

Analytical apparatus, sample holder and analytical method

#42
20160348247
2016-12-01

Flame-Assisted Flash Sintering

#43
20160181063
2016-06-23

Compact, configurable power supply for energizing ozone-producing cells

#44
20160175852
2016-06-23

Self cleaning ion generator

#45
20160013017
2016-01-14

Method and apparatus for a high resolution imaging system

#46
20150325403
2015-11-12

Focused ion beam low kV enhancement

#47
20150200079
2015-07-16

RF impedance matching network

#48
20150179387
2015-06-25

Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus

#49
20150083929
2015-03-26

Focused ion beam low kV enhancement

#50
20140291554
2014-10-02

Source bushing shielding

#51
20140291543
2014-10-02

Insulation structure of high voltage electrodes for ion implantation apparatus

#52
20140270055
2014-09-18

X-ray CT apparatus

#53
20140099430
2014-04-10

Reducing glitching in an ion implanter

#54
20130293091
2013-11-07

Thick-film resistorized ceramic insulators for sealed high voltage tube electrodes

#55
20130257301
2013-10-03

Compact, configurable power supply for energizing ozone-producing cells

#56
20120318975
2012-12-20

High-voltage supply unit for a particle beam device

#57
20120003760
2012-01-05

Glitch control during implantation

#58
20100296320
2010-11-25

Device and method for generating a stable high voltage

#59
20100243912
2010-09-30

Isolation circuit for transmitting AC power to a high-voltage region

#60
20100193679
2010-08-05

Guiding charged droplets and ions in an electrospray ion source

#61
20090057573
2009-03-05

TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER

#62
20080277583
2008-11-13

Charged particle beam apparatus

#63
20080238326
2008-10-02

Ion acceleration column connection mechanism with integrated shielding electrode and related methods

#64
20080157681
2008-07-03

Method of reducing particle contamination for ion implanters

#65
20080087821
2008-04-17

Electron beam system and method of operating the same

#66
20080067378
2008-03-20

Charged particle beam apparatus

#67
20070164237
2007-07-19

Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase

#68
19020985
2025-07-29

Integrated feedthrough for high voltage cables

#69
16555064
2021-01-19

Ion source with multiple configurations

#70
16225298
2019-12-24

System and method of arc detection using dynamic threshold