Patents-Review.com
ClassID:

205246 ⎘

H01J37/263 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes; Details Contrast, resolution or power of penetration

Recent Application in this class:
#1
20260031300
2026-01-29

STANDARD SAMPLE FOR USE IN TRANSMISSION ELECTRON MICROSCOPE, METHOD OF PREPARING THE SAME, METHOD OF ADJUSTING TRANSMISSION ELECTRON MICROSCOPE, AND METHOD OF ANALYZING OBSERVATION IMAGE OBTAINED WITH TRANSMISSION ELECTRON MICROSCOPE

 #2
20260018375
2026-01-15

ADAPTIVE DWELL TIME MICROSCOPY

 #3
20250372343
2025-12-04

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH ADAPTIVE DETECTION SYSTEM

 #4
20250349502
2025-11-13

PICTURE MODE RESOLUTION ENHANCEMENT FOR E-BEAM DETECTOR

 #5
20250316445
2025-10-09

Charged Particle Beam Apparatus and Analysis Method

 #6
20250253123
2025-08-07

CHARGED PARTICLE-OPTICAL APPARATUS

 #7
20250226174
2025-07-10

SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A CHARGED PARTICLE SYSTEM

 #8
20250069847
2025-02-27

DIFFERENTIAL PHASE CONTRAST MICROANALYSIS USING ENERGY LOSS SPECTROMETERS

 #9
20250062099
2025-02-20

LASER-BASED CONTRAST CONTROL IN TRANSMISSION ELECTRON MICROSCOPY

 #10
20240347316
2024-10-17

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING THE NUMERICAL APERTURE, ASSOCIATED COMPUTER PROGRAM PRODUCT AND MULTIPLE PARTICLE BEAM SYSTEM

 #11
20240186107
2024-06-06

METHOD AND APPARATUS FOR INSPECTION

 #12
20240153732
2024-05-09

SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED PARTICLE SYSTEM

 #13
20240060864
2024-02-22

IN SITU BIASING AND FREEZING OF CYROGENIC ELECTRON MICROSCOPY SAMPLES

 #14
20230260743
2023-08-17

IMAGING METHOD AND APPARATUS FOR DIRECT ELECTRON DETECTION CAMERAS AND COMPUTER DEVICE

 #15
20230260085
2023-08-17

SYSTEMS AND METHODS FOR HYBRID ENHANCEMENT OF SCANNING ELECTRON MICROSCOPE IMAGES

 #16
20230253178
2023-08-10

Method and apparatus for Schottky TFE inspection

 #17
20230223232
2023-07-13

ELECTRON MICROSCOPE ANALYSIS SYSTEM

 #18
20230179885
2023-06-08

Methods and Systems for Processing of Microscopy Images

 #19
20230127466
2023-04-27

Device for observing permeation and diffusion path of observation target gas, observation target gas measuring method, point-defect location detecting device, point-defect location detecting method, and observation samples

 #20
20230127255
2023-04-27

Electron Microscope and Image Acquisition Method

 #21
20230103943
2023-04-06

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREOF

 #22
20230072075
2023-03-09

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREFOR

 #23
20230059414
2023-02-23

Measurement system and method of setting parameter of charged particle beam device

 #24
20230055155
2023-02-23

Semiconductor Analysis System

 #25
20230040811
2023-02-09

Observation method by means of scanning transmission electron microscope, scanning transmission electron microscope system, and computer readable medium

 #26
20230020967
2023-01-19

Method and apparatus for inspecting a sample by means of multiple charged particle beamlets

 #27
20230012946
2023-01-19

System and method for defect inspection using voltage contrast in a charged particle system

 #28
20230005704
2023-01-05

Scanning electron microscope device and electron beam inspection apparatus

 #29
20220392742
2022-12-08

Pattern height metrology using an e-beam system

 #30
20220367145
2022-11-17

Method and apparatus for Schottky TFE inspection

 #31
20220238299
2022-07-28

DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY

 #32
20220199360
2022-06-23

ELECTRON MICROSCOPE USING ARTIFICIAL INTELLIGENCE TRAINING DATA

 #33
20220139665
2022-05-05

Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

 #34
20220130640
2022-04-28

Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system

 #35
20220005666
2022-01-06

Time-dependent defect inspection apparatus

 #36
20210391140
2021-12-16

Charged particle beam device

 #37
20210375581
2021-12-02

Method and apparatus for inspection

 #38
20210233741
2021-07-29

Electron microscope and sample observation method using the same

 #39
20210204969
2021-07-08

BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS

 #40
20210159045
2021-05-27

Adjusting mechanism for adjusting deformation of panel and electron beam detection apparatus comprising the same

 #41
20210065335
2021-03-04

BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS

 #42
20210027982
2021-01-28

Method for operating a particle beam microscope

 #43
20200365366
2020-11-19

Laser-based phase plate image contrast manipulation

 #44
20200279716
2020-09-03

Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate

 #45
20200152419
2020-05-14

Charged particle beam device and optical-axis adjusting method thereof

 #46
20200118786
2020-04-16

SYSTEM AND METHOD FOR SELECTIVE AUTOFOCUS

 #47
20200075287
2020-03-05

Time-dependent defect inspection apparatus

 #48
20190378685
2019-12-12

Charged particle beam apparatus, and method of adjusting charged particle beam apparatus

 #49
20190172185
2019-06-06

Blade deployment mechanisms for surgical forceps

 #50
20190148107
2019-05-16

Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate

 #51
20190131107
2019-05-02

Electron microscope and imaging method

 #52
20190096627
2019-03-28

Electron spectroscopy system

 #53
20190066971
2019-02-28

Image generation method

 #54
20190033232
2019-01-31

System and method of inspecting substrate and method of fabricating semiconductor device using the same

 #55
20190006147
2019-01-03

Method and apparatus for inspection

 #56
20180374673
2018-12-27

Charged particle beam device and optical-axis adjusting method thereof

 #57
20180330916
2018-11-15

Charged particle beam device and phase plate

 #58
20180269026
2018-09-20

Charged particle beam device

 #59
20180254169
2018-09-06

Post column filter with enhanced energy range

 #60
20180211814
2018-07-26

Method and device for manipulating particle beam

 #61
20180067294
2018-03-08

Scanning microscope with controlled variable measurement parameters

 #62
20170338078
2017-11-23

Scanning electron microscope and method of use thereof

 #63
20170336335
2017-11-23

Generating an image of an object or a representation of data about the object

 #64
20170271124
2017-09-21

Secondary particle detection system of scanning electron microscope

 #65
20170263415
2017-09-14

Scanning electron microscope and electron trajectory adjustment method therefor

 #66
20170243715
2017-08-24

Inspection apparatus and inspection method

 #67
20170207060
2017-07-20

Test structure for electron beam inspection and method for defect determination using electron beam inspection

 #68
20170186583
2017-06-29

Scanning electron microscope and method for controlling same

 #69
20170169992
2017-06-15

Electron microscope device and imaging method using same

 #70
20170125210
2017-05-04

Post column filter with enhanced energy range

 #71
20170018394
2017-01-19

Scanning electron microscope

 #72
20160300689
2016-10-13

Scanning transmission electron microscope having multiple beams and post-detection image correction

 #73
20160300688
2016-10-13

Scanning transmission electron microscope having multiple beams and post-detection image correction

 #74
20160225581
2016-08-04

Electron microscope

 #75
20160225579
2016-08-04

Particle beam microscope and method for operating a particle beam microscope

 #76
20160211110
2016-07-21

Weak signal detection system and electron microscope equipped with same

 #77
20160203944
2016-07-14

Charged particle beam apparatus and sample image acquiring method

 #78
20160189923
2016-06-30

APPARATUS AND METHOD

 #79
20160141146
2016-05-19

Certified wafer inspection

 #80
20160111247
2016-04-21

Charged particle microscope with special aperture plate

 #81
20160069929
2016-03-10

Calibration standard with pre-determined features

 #82
20160035533
2016-02-04

Energy filter for charged particle beam apparatus

 #83
20150371816
2015-12-24

Sample observation device having a selectable acceleration voltage

 #84
20150332892
2015-11-19

Method for image outlier removal for transmission electron microscope cameras

 #85
20150262785
2015-09-17

Transmission electron microscope and method of displaying TEM images

 #86
20150136980
2015-05-21

Image acquisition method and transmission electron microscope

 #87
20150136979
2015-05-21

Charged particle beam device

 #88
20150136172
2015-05-21

Phase plate for a transmission electron microscope

 #89
20150102221
2015-04-16

Charged particle beam device having an energy filter

 #90
20150041647
2015-02-12

Method of using an environmental transmission electron microscope

 #91
20140367586
2014-12-18

Charged particle beam system and method of operating thereof

 #92
20140346355
2014-11-27

Electron microscope

 #93
20140346354
2014-11-27

Generation of charged particle vortex waves

 #94
20140326878
2014-11-06

Phase shift method for a TEM

 #95
20140326876
2014-11-06

Method of using a phase plate in a transmission electron microscope

 #96
20140319341
2014-10-30

Charged particle microscope apparatus and image acquisition method of charged particle microscope apparatus utilizing image correction based on estimated diffusion of charged particles

 #97
20140284476
2014-09-25

Energy filter for charged particle beam apparatus

 #98
20140284475
2014-09-25

Incoherent transmission electron microscopy

 #99
20140252228
2014-09-11

Device and method for creating Gaussian aberration-corrected electron beams

 #100
20140246584
2014-09-04

SCANNING ELECTRON MICROSCOPE

 #101
20140224988
2014-08-14

Phase plate and electron microscope

 #102
20140166879
2014-06-19

Backscatter reduction in thin electron detectors

 #103
20140158883
2014-06-12

Characterization of nanoscale structures using an ultrafast electron microscope

 #104
20140151552
2014-06-05

Tilt-imaging scanning electron microscope

 #105
20140138542
2014-05-22

Scanning electron microscope and scanning transmission electron microscope

 #106
20140124666
2014-05-08

Charged particle beam device having an energy filter

 #107
20140061463
2014-03-06

Imaging a sample in a TEM equipped with a phase plate

 #108
20140061461
2014-03-06

DEFECT INSPECTION APPARATUS, DEFECT INSPECTION METHOD AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM

 #109
20140061456
2014-03-06

COORDINATE CORRECTING METHOD, DEFECT IMAGE ACQUIRING METHOD AND ELECTRON MICROSCOPE

 #110
20140061455
2014-03-06

Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope

 #111
20130313428
2013-11-28

Phase plate for a TEM

 #112
20130248706
2013-09-26

Sample analyzing apparatus and sample analyzing method

 #113
20130234023
2013-09-12

Characterization of nanoscale structures using an ultrafast electron microscope

 #114
20130234011
2013-09-12

METHOD FOR SETTING AN OPERATING PARAMETER OF A PARTICLE BEAM DEVICE AND A SAMPLE HOLDER FOR PERFORMING THE METHOD

 #115
20130206986
2013-08-15

Charged particle beam apparatus

 #116
20130166240
2013-06-27

Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time

 #117
20130141563
2013-06-06

Image forming device and computer program

 #118
20130126733
2013-05-23

Charged particle beam microscope

 #119
20130112875
2013-05-09

Scanning transmission electron microscope and axial adjustment method thereof

 #120
20130099115
2013-04-25

Microfabricated high-bandpass foucault aperture for electron microscopy

 #121
20120312986
2012-12-13

Characterization of nanoscale structures using an ultrafast electron microscope

 #122
20120104253
2012-05-03

CHARGED PARTICLE BEAM MICROSCOPE AND MEASURING METHOD USING SAME

 #123
20120097848
2012-04-26

Scanning incremental focus microscopy

 #124
20120083827
2012-04-05

Blade deployment mechanisms for surgical forceps

 #125
20120032078
2012-02-09

Backscatter reduction in thin electron detectors

 #126
20120004879
2012-01-05

CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPLE INSPECTION METHOD

 #127
20110315876
2011-12-29

Blocking member for use in the diffraction plane of a TEM

 #128
20110253893
2011-10-20

Charged particle beam device and a method of operating a charged particle beam device

 #129
20110233403
2011-09-29

Incoherent transmission electron microscopy

 #130
20110210250
2011-09-01

Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member

 #131
20110133080
2011-06-09

Charged particle beam apparatus and methods for capturing images using the same

 #132
20110024622
2011-02-03

System and method for material analysis of a microscopic element

 #133
20110024621
2011-02-03

SCANNING ELECTRON MICROSCOPE CONTROL DEVICE, CONTROL METHOD, AND PROGRAM

 #134
20110012029
2011-01-20

Pattern observation method

 #135
20100320385
2010-12-23

Scanning electron microscope

 #136
20100314539
2010-12-16

Method and apparatus for identifying plug-to-plug short from a charged particle microscopic image

 #137
20100258719
2010-10-14

Particle-beam microscope

 #138
20100230584
2010-09-16

Method for setting an operating parameter of a particle beam device and a sample holder for performing the method

 #139
20100213369
2010-08-26

Method for producing image contrast by phase shifting in electron optics

 #140
20100108883
2010-05-06

Characterization of nanoscale structures using an ultrafast electron microscope

 #141
20100108882
2010-05-06

4D imaging in an ultrafast electron microscope

 #142
20100072366
2010-03-25

Method of use for a multipole detector for a transmission electron microscope

 #143
20100065741
2010-03-18

Method for the production of multiplayer electrostatic lens array

 #144
20100038534
2010-02-18

Method of generating particle beam images using a particle beam apparatus

 #145
20100032565
2010-02-11

Electron microscope and a method for measuring the defocus variation or the limit resolution

 #146
20100019166
2010-01-28

Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same

 #147
20100001183
2010-01-07

Phase plate, imaging method, and electron microscope

 #148
20090276735
2009-11-05

System and method of correcting errors in SEM-measurements

 #149
20090268969
2009-10-29

Method and electron microscope for measuring the similarity of two-dimensional images

 #150
20090200464
2009-08-13

TEM with aberration corrector and phase plate

 #151
20090133167
2009-05-21

Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus

 #152
20090078868
2009-03-26

Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

 #153
20090050805
2009-02-26

Scanning electron microscope

 #154
20080319696
2008-12-25

Method and its system for calibrating measured data between different measuring tools

 #155
20080202918
2008-08-28

Phase Plate For Phase-Contrast Electron Microscope, Method For Manufacturing the Same and Phase-Contrast Electron Microscope

 #156
20080122462
2008-05-29

Method of inspecting pattern and inspecting instrument

 #157
20080121791
2008-05-29

Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same

 #158
20080099677
2008-05-01

Method for measuring information transfer limit in transmission electron microscope, and transmission electron microscope using the same

 #159
20080093551
2008-04-24

Electric charged particle beam microscopy and electric charged particle beam microscope

 #160
20080073521
2008-03-27

Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus

 #161
20080067373
2008-03-20

Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current

 #162
20080067370
2008-03-20

Electron microscope and scanning probe microscope calibration device

 #163
20080011963
2008-01-17

Charged particle beam apparatus and charged particle beam resolution measurement method

 #164
20070280559
2007-12-06

Image evaluation method and microscope

 #165
20070235659
2007-10-11

Method and device for aligning a charged particle beam column

 #166
20070181807
2007-08-09

Charged particle apparatus, scanning electron microscope, and sample inspection method

 #167
20070164219
2007-07-19

Charged particle beam apparatus and methods for capturing images using the same

 #168
20070138403
2007-06-21

Particle optical apparatus

 #169
20060255273
2006-11-16

Transmission electron microscope

 #170
20060226362
2006-10-12

Scanning electron microscope

 #171
20060163477
2006-07-27

Method and apparatus for inspecting patterns

 #172
20060038125
2006-02-23

Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system

 #173
20050250224
2005-11-10

Method of inspecting pattern and inspecting instrument

 #174
20050247860
2005-11-10

Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system

 #175
20050199811
2005-09-15

Image evaluation method and microscope

 #176
20050199808
2005-09-15

Method and apparatus for collecting defect images

 #177
20050012050
2005-01-20

Method and device for aligning a charged particle beam column

 #178
20050006598
2005-01-13

Method and device for aligning a charged particle beam column

 #179
15896597
2018-09-04

Transmission electron microscope sample alignment system and method

 #180
15246421
2018-03-13

Method of operating a charged particle microscope and charged particle microscope operating according to such method

 #181
15185920
2017-08-22

Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material

 #182
14696122
2017-10-31

Automated SEM nanoprobe tool

 #183
14228391
2016-09-06

Method of operating a charged particle microscope and charged particle microscope operating according to such method