205247 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes; Details Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
Method and device for observing a specimen in a field of view of an electron microscope
#602Charged particle beam apparatus and methods for capturing images using the same
#603Image forming method and charged particle beam apparatus
#604Apparatus and measuring method of aberration coefficient of scanning transmission electron microscope
#605Apparatus and adjusting method for a scanning transmission electron microscope
#606Electron beam apparatus and device manufacturing method using the same
#607Method and apparatus of reviewing defects on a semiconductor device
#608Method of measuring a critical dimension of a semiconductor device and a related apparatus
#609Charged particle beam apparatus
#610Method and apparatus for evaluating pattern shape of a semiconductor device
#611Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope
#612Charged particle beam irradiation method and charged particle beam apparatus
#613Electron beam apparatus with aberration corrector
#614Method for optically detecting height of a specimen and charged particle beam apparatus using the same
#615Method and apparatus which enable high resolution particle beam profile measurement
#616Charged particle beam device with DF-STEM image valuation method
#617Electron beam device and its control method
#618Electron beam apparatus, and inspection instrument and inspection process thereof
#619Image forming method and charged particle beam apparatus
#620Charged particle beam application system
#621Electron beam system and electron beam measuring and observing methods
#622Focus correction method for inspection of circuit patterns
#623Method and apparatus for automated beam optimization in a scanning electron microscope
#624Method and system for determining a positioning error of an electron beam of a scanning electron microscope
#625Transmission electron microscope
#626Calibration method for electron-beam system and electron-beam system
#627Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith
#628Inspection apparatus and inspection method using electron beam
#629Pattern inspection apparatus and method
#630Sample electrification measurement method and charged particle beam apparatus
#631Scanning electron microscope with measurement function
#632Environmental scanning electron microcope
#633Charged particle beam equipment
#634Pattern measuring method and pattern measuring device
#635Charged particle beam apparatus and method for operating the same
#636Charged-particle-beam mapping projection-optical systems and methods for adjusting same
#637Inspection method and apparatus using an electron beam
#638Scanning electron microscope
#639Scanning electron microscope and method for detecting an image using the same
#640Method and an apparatus of an inspection system using an electron beam
#641Charged particle beam apparatus
#642Charged particle beam equipment and charged particle microscopy
#643Electron microscope and a method of imaging objects
#644Scanning electron microscope and system for inspecting semiconductor device
#645Scanning electron microscope
#646Ion beam processing method
#647Method and device for observing a specimen in a field of view of an electron microscope
#648Transmission electron microscope and image observation method using it
#649Focusing system and method for a charged particle imaging system
#650Scanning particle beam instrument
#651Charged-particle beam apparatus and method for automatically correcting astigmatism and for height detection
#652Apparatus and method for E-beam dark field imaging
#653Electron beam apparatus and device manufacturing method using same
#654Scanning electron microscope
#655Method of three-dimensional image reconstruction and transmission electron microscope
#656Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
#657Electron beam apparatus, and inspection instrument and inspection process thereof
#658Electron beam apparatus with aberration corrector
#659Charged particle beam apparatus
#660Scanning transmission electron microscope and electron energy loss spectroscopy
#661Charged particle beam emitting device and method for adjusting the optical axis
#662Microstructured pattern inspection method
#663Method and system for ultrafast photoelectron microscope
#664Method of inspecting pattern and inspecting instrument
#665Electron beam apparatus and method with surface height calculator and a dual projection optical unit
#666Scanning electron microscope
#667Method and an apparatus of an inspection system using an electron beam
#668Defect inspection apparatus
#669Detection of defects in patterned substrates
#670Method and apparatus for collecting defect images
#671Scanning electron microscope
#672Sample electrification measurement method and charged particle beam apparatus
#673Electron microscope
#674Electron microscope
#675Patterned wafer inspection method and apparatus therefor
#676Method and system for the examination of specimen
#677Electron beam system and electron beam measuring and observing methods
#678Method and device for observing a specimen in a field of view of an electron microscope
#679System and method for fast focal length alterations
#680Method and device for aligning a charged particle beam column
#681Method and device for aligning a charged particle beam column
#682Sparse sampling using a programmatically randomized signal modulating a carrier signal
#683Automating cryo-electron microscopy data collection
#684Beam controlled nano-robotic device
#685Imaging technique in scanning transmission charged particle microscopy
#686Method for analyzing an object and a charged particle beam device for carrying out this method
#687Virtual ground for target substrate using floodgun and feedback control