205247 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes; Details Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#2METHODS OF COLLECTING A MULTIDIMENSIONAL DATA SET AND ASSOCIATED SYSTEMS
#3ULTRA FAST PULSER FOR LOW ENERGY ELECTRON BEAMS
#4PARTICLE BEAM APPARATUS WITH MOVEABLE OBJECT STAGE
#5MULTIPLE PARTICLE BEAM SYSTEM, IN PARTICULAR MULTI-BEAM PARTICLE MICROSCOPE, HAVING A FAST MAGNETIC LENS AND THE USE THEREOF
#6COMPENSATOR FOR INTERNAL ELECTROMAGNETIC INTERFERENCE IN SEM-BASED AC PROBING
#7MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST AUTOFOCUS AROUND AN ADJUSTABLE WORKING DISTANCE
#8CHIP NAVIGATION USING VIRTUAL MAP INCLUDING SAMPLE NAVIGATION BASED ON HAND-DRAWN OR DIGITIALLY GENERATED IMAGES
#9ELECTRON MICROSCOPE AND CONTROL METHOD THEREOF
#10ADAPTIVE DWELL TIME MICROSCOPY
#11MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING THE SAME
#12SAMPLE PREPARATION
#13Charged Particle Beam Apparatus and Image Production Method
#14METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD
#15AREA SELECTION IN CHARGED PARTICLE MICROSCOPE IMAGING
#16CHARGING ARTIFACT MITIGATION VIA SCANNING DIRECTION ROTATION
#17TEMPORAL CHARACTERIZATION OF OSCILLATOR SIGNALS IN CHARGED PARTICLE MICROSCOPY
#18PICTURE MODE RESOLUTION ENHANCEMENT FOR E-BEAM DETECTOR
#19METHOD AND SYSTEM FOR FINE FOCUSING SECONDARY BEAM SPOTS ON DETECTOR FOR MULTI-BEAM INSPECTION APPARATUS
#20CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE
#21OBTAINING HIGH RESOLUTION INFORMATION FROM LOW RESOLUTION IMAGES
#22CHARGED PARTICLE BEAM DEVICE
#23HEATING ASSEMBLY FOR CHARGED PARTICLE BEAM SYSTEM
#24MACHINE LEARNING METHOD FOR IDENTIFYING THE CRYSTAL PHASE DISTRIBUTION OF POLYCRYSTALLINE THIN FILMS IN NANODEVICES
#25MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH REDUCED CHARGING EFFECTS
#26Scanning Transmission Electron Microscope and Aligning Method of Aperture
#27MICROWAVE SYNCHRONISATION SYSTEM
#28MEASUREMENT DEVICE AND SCANNING IMAGE ACQUISITION METHOD
#29CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF
#30Charged Particle Beam System
#31SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A CHARGED PARTICLE SYSTEM
#32A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE
#33METHOD AND APPARATUS
#34SCANNING ELECTRON MICROSCOPE DEVICE
#353D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE
#36LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PARTICLE MICROSCOPY
#37OBJECTIVE LENSES, CHARGED PARTICLE MICROSCOPES INCLUDING THE SAME, AND ASSOCIATED METHODS
#38SCANNING PATTERNS FOR SCIENTIFIC INSTRUMENTS
#39SEGMENTED ENDPOINTING FOR SAMPLE PREPARATION
#40METHOD FOR DISTORTION MEASUREMENT AND PARAMETER SETTING FOR CHARGED PARTICLE BEAM IMAGING DEVICES AND CORRESPONDING DEVICES
#41Charged Particle Beam Apparatus
#42CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DEVICE
#43METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD
#44Recipe Creating System, Length Measurement System, and Recipe Creating Method
#45HIGH VOLTAGE POWER SUPPLIES FOR FAST VOLTAGE CHANGES
#46MULTI-BEAM SYSTEM AND MULTI-BEAM FORMING UNIT WITH REDUCED SENSITIVITY TO SECONDARY RADIATION
#47CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
#48MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF SECONDARY ELECTRON BEAMLETS ON A DETECTOR
#49METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE, COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE
#50METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
#51AUTOMATED REGION SELECTION FOR AUTO SWEEP
#52FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION
#53DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE OF A CHARGED PARTICLE BEAM DEVICE FROM FOCUSED ION BEAM GEOMETRY INDUCED CONSTRAINTS
#54DEVICE FOR PERFORMING AN INTERFEROMETRIC MEASUREMENT
#55CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
#56DIFFERENTIAL PHASE CONTRAST MICROANALYSIS USING ENERGY LOSS SPECTROMETERS
#57TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELECTRON MICROSCOPE
#58Charged Particle Beam Device
#59SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM
#60SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS
#61Correction Method and Correction Device
#62MICROSCOPE ABERRATION CORRECTION
#63CHARGED PARTICLE BEAM DEVICE
#64DISCHARGING A REGION OF A SAMPLE
#65CHARGED PARTICLE BEAM DEVICE
#66SUBSTRATE INSPECTION METHOD
#67FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
#68Automating cryo-electron microscopy data collection
#69METHOD FOR OPERATING AN ELECTRON BEAM SYSTEM
#70SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAGE CONTRAST DEFECT SIGNAL
#71Charged Particle Beam System
#72CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS
#73ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#74METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGED PARTICLE INSPECTION SYSTEM, METHOD OF PROCESSING A SAMPLE, ASSESSMENT METHOD
#75SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
#76METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING ELECTRON MICROSCOPE FOR CARRYING OUT THE METHOD
#77Electron Microscope, Aberration Correction Method, And Imaging Method
#78Transmission charged particle microscope with an electron energy loss spectroscopy detector
#79CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#80SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
#81CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERRATION CORRECTOR, AND METHOD OF CORRECTING CHARGED PARTICLE BEAM CHROMATIC ABERRATION
#82System comprising a multi-beam particle microscope and method for operating the same
#83Collision Judgment Apparatus, Recording Medium Recording Program, and Collision Judgment Method
#84DETECTING CHARGED PARTICLE EVENTS AT HIGH DOSE RATES
#85ION MILLING DEVICE
#86CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS
#87Charged Particle Beam System
#88Laser Thermal Epitaxy in a Charged Particle Microscope
#89ELECTRON BEAM APPLICATION DEVICE
#90DIRECTED ENERGY BEAM DEFLECTION FIELD MONITOR AND CORRECTOR
#91SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED PARTICLE SYSTEM
#92INSPECTION SYSTEM
#93ELECTRON MICROSCOPE
#94Sample Inspection Apparatus, Inspection System, Thin Piece Sample Fabrication Apparatus, and Method for Inspecting Sample
#95Charged Particle Microscope and Stage
#96Electron gun and electron beam application apparatus
#97NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
#98Adaptive specimen image acquisition using an artificial neural network
#99ASSESSMENT SYSTEM, METHOD OF ASSESSING
#100Application Management For Charged Particle Microscope Devices
#101INSPECTION DEVICE AND INSPECTION METHOD
#102SYSTEM FOR SENSOR PROTECTION IN ELECTRON IMAGING APPLICATIONS
#103METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND RELATED SYSTEM AND COMPUTER PROGRAM PRODUCT
#104Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
#105ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL SYSTEM
#106Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE)
#107Thermal-aided inspection by advanced charge controller module in a charged particle system
#108Live-assisted image acquisition method and system with charged particle microscopy
#109METHOD AND SYSTEM FOR INDEXING ELECTRON DIFFRACTION PATTERNS
#110CHARGED PARTICLE BEAM APPARATUS
#111Automated ion-beam alignment for dual-beam instrument
#112Ion Milling Device and Ion Milling Method
#113Charged Particle Beam System and Control Method Therefor
#114SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTURE OF CHARGING DYNAMICS
#115CHARGED PARTICLE BEAM APPARATUS AND PROCESSOR SYSTEM
#1163D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
#117Method and system for analyzing three-dimensional features
#118STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING
#119Method and system for generating a diffraction image
#120DELAY TIME MEASUREMENT METHOD AND SYSTEM
#121Charged Particle Beam Apparatus and Control Method for Charged Particle Beam Apparatus
#122TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNING SUCH A TRANSMISSION CHARGED PARTICLE BEAM APPARATUS
#123Charged Particle Beam Apparatus
#124CHARGED PARTICLE BEAM DEVICE
#125System and method for scanning a sample using multi-beam inspection apparatus
#126Charged Particle Beam Apparatus
#127MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST AUTOFOCUS AROUND AN ADJUSTABLE WORKING DISTANCE
#128Auto-tuning stage settling time with feedback in charged particle microscopy
#129SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS
#130SAMPLE IMAGE OBSERVATION DEVICE AND METHOD FOR SAME
#131Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE)
#132SEMICONDUCTOR INSPECTION APPARATUS AND SEMICONDUCTOR INSPECTION METHOD USING THE SAME
#133Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
#134MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION AND ASSOCIATED COMPUTER PROGRAM PRODUCT
#135Methods and apparatuses for adjusting beam condition of charged particles
#136Pulsed charged-particle beam system
#137Method for measuring a sample and microscope implementing the method
#138Device for observing permeation and diffusion path of observation target gas, observation target gas measuring method, point-defect location detecting device, point-defect location detecting method, and observation samples
#139SCANNING ELECTRON MICROSCOPE
#140Charged particle beam device
#141Multi-electron beam inspection apparatus, multipole array control method, and multi-electron beam inspection method
#142Semiconductor Analysis System
#143Charged particle assessment tool, inspection method
#144Observation method by means of scanning transmission electron microscope, scanning transmission electron microscope system, and computer readable medium
#145Sparse sampling using a programmatically randomized signal modulating a carrier signal
#146CHARGED PARTICLE BEAM SCANNING MODULE, CHARGED PARTICLE BEAM DEVICE, AND COMPUTER
#147Dual speed acquisition for drift corrected, fast, low dose, adaptive compositional charged particle imaging
#148Method and system for generating a diffraction image
#149System and method for defect inspection using voltage contrast in a charged particle system
#150METHOD AND SYSTEM FOR STUDYING SAMPLES USING A SCANNING TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH REDUCED BEAM INDUCED SAMPLE DAMAGE
#151Method for area-wise inspecting a sample via a multi-beam particle microscope, computer program product and multi-beam particle microscope for semiconductor sample inspection, and its use
#152Defective pixel management in charged particle microscopy
#1533D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
#154Charged particle gun and charged particle beam device
#155AREA SELECTION IN CHARGED PARTICLE MICROSCOPE IMAGING
#156Protective shutter for charged particle microscope
#157Sample Delivery, Data Acquisition, and Analysis, and Automation Thereof, in Charged-Particle-Beam Microscopy
#158Systems and methods of profiling charged-particle beams
#159METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
#160Charged particle beam apparatus and method of controlling sample charge
#161Charged particle beam device
#162CHARGED PARTICLE BEAM DEVICE
#163Charged particle beam system
#164MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION
#165Multiple electron beam image acquisition method, multiple electron beam image acquisition apparatus, and multiple electron beam inspection apparatus
#166Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
#167SELF-REFERENCING HEALTH MONITORING SYSTEM FOR MULTI-BEAM SEM TOOLS
#168Microscope System
#169Charged particle beam system and overlay misalignment measurement method
#170Multibeam scanning apparatus and multibeam scanning method
#171Inspection tool and method of determining a distortion of an inspection tool
#172Method of measuring relative rotational angle and scanning transmission electron microscope
#173Estimation model generation method and electron microscope
#174TOMOGRAPHIC ATOM PROBE WITH TERAHERTZ PULSE GENERATOR
#175MULTIPLE LANDING ENERGY SCANNING ELECTRON MICROSCOPY SYSTEMS AND METHODS
#176Charged particle beam device and charged particle beam device calibration method
#177Transmission electron microscope and inspection method using transmission electron microscope
#178APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS
#179Charged particle beam apparatus and method for controlling charged particle beam apparatus
#180Charged particle beam system
#181Charged particle beam apparatus and method of controlling charged particle beam apparatus
#182Charged particle beam apparatus
#183Stroboscopic illumination synchronized electron detection and imaging
#184Thermal-aided inspection by advanced charge controller module in a charged particle system
#185Transmission electron microscope and method of adjusting optical system
#186Automated operational control of micro-tooling devices
#187Charged particle beam device
#188Automated tomography field ion microscope
#189IN-LENS WAFER PE-CHARGING AND INSPECTION WITH MULTIPLE BEAMS
#190Electron beam device
#191Charged particle beam device, autofocus processing method of charged particle beam device, and detector
#192Charged particle beam apparatus and sample observation method
#193Method of aligning a charged particle beam apparatus
#194Charged particle beam device and method for controlling sample stage
#195Charged particle beam apparatus
#196Transmission electron microscope and adjustment method of objective aperture
#197Measurement system and method for setting observation conditions of measurement apparatus
#198Charged particle beam device
#199Method and system for dynamic band contrast imaging
#200System comprising a multi-beam particle microscope and method for operating the same
#201Scanning transmission electron microscope and adjustment method of optical system
#202Charged particle beam system
#203Transmission charged particle microscope with an electron energy loss spectroscopy detector
#204Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
#205Charged particle beam device and method for adjusting position of detector of charged particle beam device
#206Scanning electron microscope
#207Charged particle beam device
#208Charged particle beam device with interferometer for height measurement
#209Electron microscope and sample observation method using the same
#210Charged particle beam apparatus and adjustment method for charged particle beam apparatus
#211Charged particle beam device and charged particle beam adjustment method
#212System and method for scanning a sample using multi-beam inspection apparatus
#213Charged particle assessment tool, inspection method
#214Imaging device
#215Ion milling device and ion milling method
#216Comparative holographic imaging
#217Systems and methods for charged particle flooding to enhance voltage contrast defect signal
#218Adaptive specimen image acquisition
#219Liquid chip for electron microscope including electrode
#220Method for high speed EELS spectrum acquisition
#221Charged particle beam irradiation apparatus and control method
#222Particle beam irradiation apparatus
#223Method of acquiring dark-field image
#224Substrate and method for calibration of measurement apparatus
#225Control method for electron microscope and electron microscope
#226Sensor module for scanning electron microscopy applications
#227Charged particle beam control device
#228Multi modal cryo compatible GUID grid
#229Charged particle beam apparatus and charged particle beam inspection system
#230Charged particle beam system and method
#231Operating a particle beam device
#232Pattern evaluation system and pattern evaluation method
#233Defect observation device
#234Inspection tool and method of determining a distortion of an inspection tool
#235ARTIFICIAL INTELLIGENCE ENABLED VOLUME RECONSTRUCTION
#236Method and system for zone axis alignment
#237System for electron diffraction analysis
#238Method of operating a particle beam system, particle beam system and computer program product
#239Methods and apparatuses for adjusting beam condition of charged particles
#240Methods of inspecting samples with multiple beams of charged particles
#241In-lens wafer pre-charging and inspection with multiple beams
#242Systems and methods for etching a substrate
#243SEM FOV fingerprint in stochastic EPE and placement measurements in large FOV SEM devices
#244Setting position of a particle beam device component
#245Electron diffraction imaging system for determining molecular structure and conformation
#246Charged particle beam device and method for setting condition in charged particle beam device
#247CHARGED PARTICLE MICROSCOPE, AND METHOD FOR ADJUSTING A CHARGED PARTICLE MICROSCOPE
#248Cross-section observation device, and control method
#249Method and apparatus for carrying out a time-resolved interferometric measurement
#250Primary beam scanning apparatus and signal processing method
#251Charged particle beam device and image processing method in charged particle beam device
#252Method for processing an object
#253Crystal orientation figure creating device, charged particle beam device, crystal orientation figure creating method, and program
#254Membrane assembly, examination container and electron microscope
#255Adaptive specimen image acquisition using an artificial neural network
#256Charged particle beam device
#257Charged particle beam apparatus, and method of adjusting charged particle beam apparatus
#258Neutral atom imaging system
#259Laser-assisted electron-beam inspection for semiconductor devices
#260Operating a particle beam apparatus
#261Electron energy loss spectroscopy with adjustable energy resolution
#262Electron beam microscope
#263Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method
#264Electron beam inspection apparatus and electron beam inspection method
#265Electron microscope
#266Multiple beam inspection apparatus and sensitivity correction method for multi-detector
#267Temporal compressive sensing systems
#268Transmission charged particle microscope with improved EELS/EFTEM module
#269Method for adjusting a particle beam microscope
#270Electron beam detection element, electron microscope, and transmission electron microscope
#271Electron microscope and method of controlling same
#272Charged particle beam device
#273Electron microscope and specimen tilt angle adjustment method
#274Charged Particle Beam Device
#275Electron beam image acquisition apparatus, and electron beam image acquisition method
#276Measurement method and electron microscope
#277Electron-Beam Inspection Systems with optimized throughput
#278CHARGED PARTICLE BEAM DEVICE, APERTURE ARRANGEMENT FOR A CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR OPERATING A CHARGED PARTICLE BEAM DEVICE
#279Charged particle beam apparatus
#280Aberration measurement method and electron microscope
#281Charged particle beam device with distance setting between irradiation regions in a scan line
#282Systems and methods for charged particle flooding to enhance voltage contrast defect signal
#283Optimized sub-sampling in an electron microscope
#284Charged particle beam device for imaging vias inside trenches
#285Radiation analysis apparatus
#286Imaging system and imaging method
#287Method for alignment of a light beam to a charged particle beam
#288Method of verifying operation parameter of scanning electron microscope
#289Distortion measurement method for electron microscope image, electron microscope, distortion measurement specimen, and method of manufacturing distortion measurement specimen
#290Scanning transmission electron microscope and method of image generation
#291Pattern inspection method using charged particle beam
#292Transmission scanning microscopy including electron energy loss spectroscopy and observation method thereof
#293Charged particle beam device and image processing method in charged particle beam device
#294Charged particle beam apparatus
#295Aberration measurement in a charged particle microscope
#296Image forming apparatus
#297CONTINUOUSLY VARIABLE APERTURE
#298Charged particle beam apparatus and method for controlling charged beam apparatus
#299Temporal compressive sensing systems
#300Observation method and specimen observation apparatus