Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Optical auto focusing system and method for electron beam inspection tool

Method and apparatus for inspecting integrated circuit pattern

Sheet beam-type testing apparatus

Charged particle beam apparatus for forming a specimen image

Charged particle instrument equipped with optical microscope

Electron beam device

Defect review method and device for semiconductor device

Autofocus method for scanning charged-particle beam instrument

Scanning electron microscope and three-dimensional shape measuring device that used it

Charged Particle Beam Device

Charged particle beam apparatus

Inspection equipment for fine pattern and morphology using microcolumn

Defect review apparatus and method of reviewing defects

Charged particle beam apparatus and method for operating a charged particle beam apparatus

Standard component for calibration and electron-beam system using the same

Electron beam apparatus and sample observation method using the same

Charged particle system

Isosurfacial three-dimensional imaging system and method

Monochromator and scanning electron microscope using the same

Autofocus method in a scanning electron microscope

Method and apparatus for observing a specimen

Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method

Ramp generator and circuit pattern inspection apparatus using the same ramp generator

Charged particle beam apparatus

Scanning electron microscope with length measurement function and dimension length measurement method

Method of forming a sample image and charged particle beam apparatus

Scanning Electron Microscope

Integrated deflectors for beam alignment and blanking in charged particle columns

Method for adjusting imaging magnification and charged particle beam apparatus

Charged particle beam apparatus

Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanism

Scanning electron microscope and calibration of image distortion

Pattern measuring method and electron microscope

Sample transfer unit and sample transferring method

Electron microscope

Scanning Electron Microscope

Charged particle beam measurement equipment, size correction and standard sample for correction

Sample electrification measurement method and charged particle beam apparatus

Scanning Transmission Charged Particle Beam Device

Scanning electron microscope

APPARATUS HAVING VACUUM VESSEL

Charged particle beam apparatus

Achromatic mass separator

Particle-optical apparatus for simultaneous observing a sample with particles and photons

Sample dimension measuring method and scanning electron microscope

Electron beam apparatus and device production method using the electron beam apparatus

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Emission detecting analysis system and method of detecting emission on object

Apparatus for detecting backscattered electrons in a beam apparatus

AMELIORATING CHARGE TRAP IN INSPECTING SAMPLES USING SCANNING ELECTRON MICROSCOPE

Defect inspection and charged particle beam apparatus

Gas field ION source for multiple applications

Scanning electron microscope

Sample inspection method, sample inspection apparatus, and sample holder

Scanning electron microscope

System and method for a charged particle beam

Method for inspecting substrate, substrate inspecting system and electron

Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same

SAMPLE ANALYZING APPARATUS

Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same

Charged particle beam orbit corrector and charged particle beam apparatus

Charged particle beam apparatus

Scanning electron microscope having time constant measurement capability

Method of determining micro- and nano- sizes in scanning electron microscope

Determining dopant information

Scanning electron microscope with measurement function

Charged particle beam apparatus and dimension measuring method

Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same

Method for measuring information transfer limit in transmission electron microscope, and transmission electron microscope using the same

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

Electron beam apparatus and electron beam inspection method

Graphical automated machine control and metrology

Electric charged particle beam microscopy and electric charged particle beam microscope

High-density FIB-SEM tomography via real-time imaging

Electron beam system and method of operating the same

Automatic method of axial adjustments in electron beam system

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

RF Coil Plasma Generation

Scanning electron microscope

Charged particle beam system and a method for inspecting a sample

Confocal secondary electron imaging

Charged particle beam scanning method and charged particle beam apparatus

Specimen observation method

Method and apparatus for reviewing defects

Semiconductor wafer defect inspection method and apparatus

Standard component for calibration and calibration method using it and electro beam system

Conductive probe and method for producing the same

Electron lens and charged particle beam apparatus

Semiconductor wafer inspection tool and semiconductor wafer inspection method

Charged particle beam equipment with magnification correction

Charged particle beam apparatus

CHARGED PARTICLE BEAM APPARATUS

Multi-part specimen holder with conductive patterns

Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current

High-resolution optical channel for non-destructive navigation and processing of integrated circuits

Pattern inspection method and apparatus

Method for inspecting defect and system therefor

Pattern inspection method and apparatus

Charged particle beam scanning method and charged particle beam apparatus

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Charged particle beam irradiation method and semiconductor device manufacturing method

Defective product inspection apparatus, probe positioning method and probe moving method

Scanning electron microscope

Charged particle beam device and method for inspecting specimen

Method of alignment for efficient defect review

Inspection system by charged particle beam and method of manufacturing devices using the system

Plasma and electron beam etching device and method

Detector for charged particle beam instrument

Scanning electron microscope

Electron microscope for inspecting dimension and shape of a pattern formed on a wafer

Method for marking a crystalline material using cathodoluminescence

PATTERN INSPECTION AND MEASUREMENT APPARATUS

Method and system for focusing a charged particle beam

Charged particle beam apparatus and charged particle beam resolution measurement method

Electron induced chemical etching for device level diagnosis

Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector

Microstructured pattern inspection method

Charged particle beam apparatus and method for charged particle beam adjustment

Inspection apparatus for circuit pattern

Image evaluation method and microscope

Electron beam apparatus and device production method using the electron beam apparatus

Charged particle beam apparatus and pattern measuring method

Method of inspecting a specimen surface, apparatus and use of fluorescent material

Pattern inspection method and apparatus

Focussing lens for charged particle beams

Charged particle beam apparatus

Scanning electron microscope

Charged particle beam device

Inspection system by charged particle beam and method of manufacturing devices using the system

Method and apparatus for inspecting a substrate

SYSTEMS AND METHODS FOR A HELIUM ION PUMP

Method and apparatus for reviewing defects by detecting images having voltage contrast

Scanning electron microscope

Metrology system of fine pattern for process control by charged particle beam

Ion sources, systems and methods

Method to reduce cross talk in a multi column e-beam test system

Method and an apparatus of an inspection system using an electron beam

Systems and methods for a gas field ion microscope

Scanning electron microscope and a method for imaging a specimen using the same

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device

Ion sources, systems and methods

Semiconductor inspection system

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Scanning electron microscope

Pattern inspection method, pattern inspection apparatus, semiconductor device manufacturing method, and program

Method and apparatus for displaying detected defects

Ion sources, systems and methods

Ion sources, systems and methods

Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device

Charged particle beam apparatus, charged particle beam focusing method, microstructure measuring method, microstructure inspecting method, semiconductor device manufacturing method, and program

Scanning electron microscope and apparatus for detecting defect

Charged particle apparatus, scanning electron microscope, and sample inspection method

Charged particle optical apparatus with aberration corrector

Scanning electron microscope having a monochromator

Scanning electron microscope

Method of electric discharge machining a cathode for an electron gun

Charged particle beam apparatus and methods for capturing images using the same

Image forming method and charged particle beam apparatus

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Apparatus and measuring method of aberration coefficient of scanning transmission electron microscope

Apparatus and adjusting method for a scanning transmission electron microscope

Electron beam apparatus and device manufacturing method using the same

Three-dimensional imaging using electron beam activated chemical etch

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Charged particle beam apparatus

Method and apparatus of reviewing defects on a semiconductor device

Portable scanning electron microscope

Electron microscope apparatus using CRT-type optics

Inspection method and inspection system using charged particle beam

Ion sources, systems and methods

Logical CAD navigation for device characteristics evaluation system

Method and apparatus of measuring pattern dimension and controlling semiconductor device process having an error revising unit

Electron-beam device and detector system

Method and apparatus for evaluating pattern shape of a semiconductor device

Charged particle beam irradiation method and charged particle beam apparatus

Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method

Electron beam apparatus with aberration corrector

Particle detection auditing system and method

Tool-to-tool matching control method and its system for scanning electron microscope

Method and system for detecting hidden defects

Pattern measuring method

Method and apparatus for observing a specimen

Method and structure for sample preparation for scanning electron microscopes in integrated circuit manufacturing

Method for optically detecting height of a specimen and charged particle beam apparatus using the same

Charged particle beam apparatus

System and method of image processing, and scanning electron microscope

METHOD AND SYSTEM FOR ENHANCING RESOLUTION OF A SCANNING ELECTRON MICROSCOPE

Method for controlling charged particle beam, and charged particle beam apparatus

Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program

Substrate-examining apparatus

Cluster tool for microscopic processing of samples

Method of adjusting the operating region of a tool component to a pre-determined element

Defect analyzer

Scanning electron microscope and image signal processing method

Inspection system by charged particle beam and method of manufacturing devices using the system

Electron beam device and its control method

Method and apparatus for reviewing defects

Scanning electron microscope

Apparatus and method for inspecting a sample of a specimen by means of an electron beam

System and method for determining a cross sectional feature of a structural element using a reference structural element

Method and apparatus for inspecting defects of circuit patterns

Method for determining lens errors in a particle-optical device

Scanning electron microscope

Microsystem manipulation apparatus

Method for inspecting substrate, substrate inspecting system and electron beam apparatus

Method and apparatus for scanning and measurement by electron beam

Electron beam apparatus, and inspection instrument and inspection process thereof

Method and apparatus for reviewing defects of semiconductor device

Method of forming a sample image and charged particle beam apparatus

Method and apparatus for inspecting a substrate

Image forming method and charged particle beam apparatus

Charged particle beam apparatus

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Electron beam system and electron beam measuring and observing methods

Standard reference for metrology and calibration method of electron-beam metrology system using the same

Charged particle beam apparatus

Charged particle beam apparatus

Observing method and its apparatus using electron microscope

Particle detector for secondary ions and direct and or indirect secondary electrons

Ion beam apparatus and analysis method

Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus

Electron beam device

Scanning transmission ion microscope

Defect inspection and charged particle beam apparatus

Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern

Method and apparatus for automated beam optimization in a scanning electron microscope

Method and system for determining a positioning error of an electron beam of a scanning electron microscope

Method and system for discharging a sample

Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same

Deflection signal compensation for charged particle beam

Calibration method for electron-beam system and electron-beam system

Charged particle beam device with detection unit switch and method of operation thereof

Method for defect detection and process monitoring based on SEM images

Inspection apparatus and inspection method using electron beam

Pattern inspection apparatus and method

Method of inspecting a circuit pattern and inspecting instrument

Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus

Inspection method and inspection system using charged particle beam

Charged particle beam apparatus

Computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles

Scanning electron microscope

Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy

Optical axis adjusting mechanism for X-ray lens, X-ray analytical instrument, and method of adjusting optical axis of X-ray lens

Sample electrification measurement method and charged particle beam apparatus

Scanning electron microscope with measurement function

Imaging apparatus for high probe currents

Charged-particle beam instrument

Environmental scanning electron microcope

Scanning electron microscope

Monochromator and scanning electron microscope using the same

Charged particle beam equipment

Method and apparatus for measuring shape of a specimen

Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus

Pattern measuring method and pattern measuring device

Charged particle beam apparatus and method for operating the same

Method of measurement accuracy improvement by control of pattern shrinkage

Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus

Inspection method and apparatus using an electron beam

Scanning electron microscope

Inspection method and inspection apparatus using charged particle beam

Charged particle beam apparatus

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

Detector optics for multiple electron beam test system

Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam

Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method

Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system

Method and apparatus for inspecting patterns

TFT array inspecting apparatus

Multiple lens assembly and charged particle beam device comprising the same

High current density particle beam system

Scanning electron microscope and method for detecting an image using the same

Method and an apparatus of an inspection system using an electron beam

Charged particle beam apparatus

Charged particle beam equipment and charged particle microscopy

Electron microscope and a method of imaging objects

Charged particle beam apparatus and contamination removal method therefor

Sheet beam-type testing apparatus

Method and apparatus for specifying working position on a sample and method of working the sample

Scanning electron microscope

Scanning interference electron microscope

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Scanning electron microscope

Method and apparatus for measuring the physical properties of micro region

Scanning electron microscope

Scanning electron microscope and system for inspecting semiconductor device

Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method

Scanning electron microscope

Method for inspecting defect and system therefor

Method of localizing fluorescent markers