Charged particle beam apparatus using an electrostatic lens gun

Electron microscope and specimen analyzing method

Method and device for synthesizing panorama image using scanning charged-particle microscope

Charged particle beam scanning method and charged particle beam apparatus

DEMAGNIFICATION MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, STAGE PHASE MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, CONTROL METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS

DEMAGNIFICATION MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, STAGE PHASE MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, CONTROL METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

Charged particle filter

Charged-particle energy analyzer

METHOD FOR IDENTIFYING INDIVIDUAL VIRUSES IN A SAMPLE

Charged particle beam device for scanning a sample using a charged particle beam to inspect the sample

HIGH THROUGHPUT SEM TOOL

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image

Specimen observation method and device using secondary emission electron and mirror electron detection

Ion beam device

DIAGNOSIS DEVICE OF RECIPE USED FOR SCANNING ELECTRON MICROSCOPE

Charged particle beam device

Method and system for spectrum data analysis

Inspection device

Sensor head for an x-ray detector and x-ray detector containing said sensor head

Charged particle beam apparatus

Method for measuring sample and measurement device

Method for controlling charging of sample and scanning electron microscope

Isotope ion microscope methods and systems

CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICLE BEAM DEVICE

APPARATUS AND SYSTEMS FOR INTEGRATED CIRCUIT DIAGNOSIS

Method and apparatus for probe contacting

Compact scanning electron microscope

Charged particle beam apparatus and methods for capturing images using the same

PATTERN INSPECTION DEVICE AND METHOD

Standard member for correction, scanning electron microscope using same, and scanning electron microscope correction method

Defect review system and method, and program

Method for quantitative analysis of a material

ELECTRON DETECTION SYSTEMS AND METHODS

Sample inspection methods, systems and components

Charged corpuscular ray apparatus

High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

3D atomic scale imaging methods

Method and apparatus for reviewing defects of semiconductor device

Electron beam apparatus and electron beam inspection method

Z-stage configuration and application thereof

Charged particle beam device

Semiconductor inspecting apparatus

Scanning electron microscope and method of imaging an object by using the scanning electron microscope

MULTIPOLE LENS FOR ELECTRON COLUMN

Particle beam microscopy system and method for operating the same

Charged Particle Beam Irradiation System

Electrode unit and charged particle beam device

Defect review apparatus and method of reviewing defects

Wafer grounding and biasing method, apparatus, and application

Pattern measuring apparatus and pattern measuring method

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

Method for adjusting imaging magnification and charged particle beam apparatus

Specimen mount for microscopy

Image forming method and charged particle beam apparatus

Transmission electron microscope and method for observing specimen image with the same

Particle beam systems and methods

SEMICONDUCTOR DEVICE ANALYZER AND SEMICONDUCTOR DEVICE ANALYSIS METHOD

Detector and inspecting apparatus

System and method for material analysis of a microscopic element

SCANNING ELECTRON MICROSCOPE CONTROL DEVICE, CONTROL METHOD, AND PROGRAM

Pattern observation method

Probe and method for obtaining three-dimensional compositional maps of a biological sample

Electron beam apparatus

Method for S/TEM sample analysis

Gas field ion source with coated tip

Method for examining a sample by using a charged particle beam

Scanning electron microscope

Multi-beam scanning electron beam device and methods of using the same

Method for characterizing identified defects during charged particle beam inspection and application thereof

Microstructured pattern inspection method

Electron microscope with an emitter operating in medium vacuum

Method and apparatus for identifying plug-to-plug short from a charged particle microscopic image

Method for creating S/TEM sample and sample structure

Method and apparatus for sample extraction and handling

Pattern inspection apparatus and method

Method for creating S/tem sample and sample structure

Charged particle detection system and method

Scanning charged particle beams

Sample electrification measurement method and charged particle beam apparatus

High-density FIB-SEM tomography via real-time imaging

Discharging method for charged particle beam imaging

XY-coordinate compensation apparatus and method in sample pattern inspection apparatus

Slider bearing for use with an apparatus comprising a vacuum chamber

System and method for a charged particle beam

Method for venting gas into closed space and gas supply assembly thereof

Method for estimation of probe shape in charged particle beam instruments

Scanning electron microscope having time constant measurement capability

Charged particle beam imaging assembly and imaging method thereof

Dark field detector for use in an electron microscope

POWER SUPPLY FOR ELECTRON GUN AND ELECTRON MICROSCOPE HAVING THE SAME

Pattern inspection method and apparatus

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

Sample transfer unit and sample transferring method

Compact Scanning Electron Microscope

Aberration evaluation pattern, aberration evaluation method, aberration correction method, electron beam drawing apparatus, electron microscope, master, stamper, recording medium, and structure

INSPECTION METHOD AND INSPECTION APPARATUS FOR SEMICONDUCTOR SUBSTRATE

Electron microscope

Layered scanning charged particle microscope package for a charged particle and radiation detector

Layered scanning charged particle apparatus package having an embedded heater

Layered scanning charged particle microscope with differential pumping aperture

Focused ion beam apparatus

Scanning electron microscope

Pattern measurement apparatus

Particle beam system

Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen

User interface for an electron microscope

Electron source

Field emission type electron gun comprising single fibrous carbon electron emitter and operating method for the same

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

High resolution gas field ion column

IMPROVED PARTICLE BEAM GENERATOR

Defect inspection and charged particle beam apparatus

Charged particle beam imaging method and system thereof

Charged particle beam device

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Logical CAD navigation for device characteristics evaluation system

Compact scanning electron microscope

Housing for A Micro-Column

Electron microscope device

Electron microscope device

Charged particle analyser and method using electrostatic filter grids to filter charged particles

E-beam defect review system

Magnetic deflector for an electron column

X-ray detector for electron microscope

Operation stage for wafer edge inspection and review

Electron beam apparatus and method of operating the same

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

Graphical automated machine control and metrology

Apparatus and method to inspect defect of semiconductor device

Electron beam apparatus

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

Charged particle beam apparatus and method of adjusting charged particle optics

Dual mode gas field ion source

Characterization of nanoscale structures using an ultrafast electron microscope

4D imaging in an ultrafast electron microscope

Scanning transmission electron microscope using gas amplification

Wafer grounding methodology

Electron beam apparatus

Charged particle beam inspection apparatus and inspection method using charged particle beam

Method and device for examining a surface of an object

Projection electron beam apparatus and defect inspection system using the apparatus

Sample inspection apparatus, sample inspection method and sample inspection system

High accuracy beam placement for local area navigation

Complex type microscopic device

Device for the field emission of particles and production method

Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method

Airborne particulate sampler

Variable rate scanning in an electron microscope

Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process

Charged particle beam apparatus

Device and method for analyzing a sample

Charged particle beam apparatus

Ion beam stabilization

Fast wafer inspection system

Particle beam system

Positioning device for a particle beam apparatus

Scanning electron microscope having a monochromator

Nanotip repair and characterization using field ion microscopy

Sample dimension measuring method and scanning electron microscope

Method of generating particle beam images using a particle beam apparatus

ELECTRON SOURCE

Method and apparatus for reviewing defects

INSPECTION APPARATUS FOR CIRCUIT PATTERN

Specimen Holder, Specimen Inspection Apparatus, and Specimen Inspection Method

Multiple current charged particle methods

Section processing method and its apparatus

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING CHARGED PARTICLE BEAM IMAGE

CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM APPARATUS

Integrated Circuit Cooling Apparatus for Focused Beam Processes

Charged particle beam apparatus

Multi-beam ion/electron spectra-microscope

Specimen holder, specimen inspection apparatus, and specimen inspection method

Sample decontamination

Charged particle beam apparatus and dimension measuring method

Method and device for producing an image

CHARGED PARTICLE BEAM APPARATUS AND SAMPLE HOLDING SYSTEM

Electron-beam device and detector system

APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBSTRATE, A SCANNING ELECTRON MICROSCOPE, AND A METHOD OF PRODUCING AN IMAGE USING A SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM APPARATUS

Electrostatic latent image evaluation device, electrostatic latent image evaluation method, electrophotographic photoreceptor, and image forming device

Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscope

Scanning electron microscope and similar apparatus

Electron beam apparatus

Deflection signal compensation for charged particle beam

Ultra high precision measurement tool with control loop

Ultra high precision measurement tool

PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD

Substrate-examining apparatus

System and method of correcting errors in SEM-measurements

Specimen observation method

Pattern invariant focusing of a charged particle beam

Method for detecting information of an electric potential on a sample and charged particle beam apparatus

Scanning type charged particle beam microscope and an image processing method using the same

Charged particle beam apparatus permitting high-resolution and high-contrast observation

Method and apparatus for simultaneous SEM and optical examination

Specimen stage apparatus and specimen stage positioning control method

Sample inspection apparatus

Method and apparatus for obtaining images by raster scanning charged particle beam over patterned substrate on a continuous mode stage

Electron-beam dimension measuring apparatus and electron-beam dimension measuring method

Charged particle beam equipment

Electron microscopy

Scanning electron microscope

Environmental cell for a particle-optical apparatus

Apparatus and method for inspecting sample

Method and apparatus for charged particle beam inspection

Multistage gas cascade amplifier

Charged particle beam apparatus and method adjusting axis of aperture

STAGE AND ELECTRON MICROSCOPE APPARATUS

Defective product inspection apparatus, probe positioning method and probe moving method

Scanning electron microscope

Defect analyzer

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

Apparatus for detecting defect by examining electric characteristics of a semiconductor device

Scanning electron microscope

Scanning transmission electron microscope and method of aberration correction therefor

Detector and inspecting apparatus

Charged particle beam apparatus

Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus

Charged particle beam apparatus including aberration corrector

PROJECTION ELECTRON BEAM APPARATUS AND DEFECT INSPECTION SYSTEM USING THE APPARATUS

Appearance inspection apparatus with scanning electron microscope and image data processing method using scanning electron microscope

Review method and review device

PATTERN INSPECTION METHOD AND INSPECTION APPARATUS

Composite charged particle beam apparatus, method of processing a sample and method of preparing a sample for a transmission electron microscope using the same

PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE

Electronic microscope apparatus

Inspection Method And Inspection System Using Charged Particle Beam

INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM

Charged particle beam apparatus

Inspection method and inspection system using charged particle beam

Charged particle beam apparatus

Ion sources, systems and methods

Apparatus and method for inspection and measurement

Charged particle beam trajectory corrector and charged particle beam apparatus

Charge control apparatus and measurement apparatus equipped with the charge control apparatus

Particle-Optical Component

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

Hole inspection apparatus and hole inspection method using the same

High resolution gas field ion column with reduced sample load

Charged particle beam apparatus and control method therefor

Charged particle beam apparatus, and image generation method with charged particle beam apparatus

Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus

Inspection apparatus and inspection method using electron beam

Inspection method for semiconductor wafer and apparatus for reviewing defects

Tool-to-tool matching control method and its system for scanning electron microscope

Method of determination of resolution of scanning electron microscope

Apparatus and method for enhancing voltage contrast of a wafer

Atomically sharp iridium tip

Method and system of performing three-dimensional imaging using an electron microscope

System and method to determine focus parameters during an electron beam inspection

Corrector

CHARGED PARTICLE APPLICATION APPARATUS

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

Charged particle beam reflector device and electron microscope

Charged particle detection devices

Charged particle beam equipment and charged particle microscopy

Method for inspecting and measuring sample and scanning electron microscope

Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles

Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device

Scanning electron microscope

Method and apparatus for reviewing defects by detecting images having voltage contrast

Gas ion source with high mechanical stability

SCANNING ELECTRON MICROSCOPE

Method and apparatus of an inspection system using an electron beam

Scanning electron microscope

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Scanning electron microscope

Charged particle beam device

Inspection method and apparatus using an electron beam

Inspection method for semiconductor wafer and apparatus for reviewing defects

Scanning electron microscope

Scanning electron microscope

Pattern measurement apparatus

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Scanning electron microscope

Scanning electron microscope and method for detecting an image using the same

Electron beam device

Charged particle beam irradiation system

Scanning electron microscope for determining quality of a semiconductor pattern

Inspection system by charged particle beam and method of manufacturing devices using the system

Scanning electron microscope alignment method and scanning electron microscope

Electron beam inspection system and an image generation method for an electron beam inspection system

Microstructured pattern inspection method

CHARGED PARTICLE BEAM APPARATUS, AND SAMPLE PROCESSING AND OBSERVATION METHOD

Electron beam apparatus with aberration corrector

Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor

Charged particle beam apparatus

Charged particle beam apparatus and specimen inspection method

Electron emitting element, electron gun, and electron beam applied equipment using the same

Charged particle beam system and method for evacuation of the system

Focusing and positioning device for a particle-optical raster microscope

Portable electron microscope using micro-column

Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method

Charged particle system including segmented detection elements

Scanning electron microscope and method of imaging an object by using the scanning electron microscope

In-chamber electron detector

Focused ion beam apparatus