205251 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Scanning electron microscope device and electron beam inspection apparatus
#602Method for area-wise inspecting a sample via a multi-beam particle microscope, computer program product and multi-beam particle microscope for semiconductor sample inspection, and its use
#603CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS
#604Scanning electron microscope device and electron beam inspection apparatus
#605REDUCTION OF IMAGE DRIFT IN A MICROSCOPY SYSTEM
#606Charged particle beam device
#607System for inspecting and grounding a mask in a charged particle system
#608ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR SAME
#609Sample holder system with freely settable inclination angles
#610Method and system for determining sample composition from spectral data
#611Multi-source charged particle illumination apparatus
#6123D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
#613Charged Particle Beam Device and Aberration Correction Method
#614Charged particle gun and charged particle beam device
#615Offcut angle determination using electron channeling patterns
#616Lens designs
#617Protective shutter for charged particle microscope
#618Arbitrary electron dose waveforms for electron microscopy
#619Sample Delivery, Data Acquisition, and Analysis, and Automation Thereof, in Charged-Particle-Beam Microscopy
#620METHOD FOR PROCESSING SCANNING ELECTRON MICROSCOPE SPECIMEN
#621METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
#622CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
#623Pattern height metrology using an e-beam system
#624Systems and methods of profiling charged-particle beams
#625LIGHT-EMITTING BODY, ELECTRON BEAM DETECTOR, AND SCANNING ELECTRON MICROSCOPE
#626Charged particle beam apparatus and image acquiring method
#627Scanning electron microscope and image generation method using scanning electron microscope
#628Reduction of thermal magnetic field noise in TEM corrector systems
#629METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
#630CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLECTING UNITS
#631Carbon nanotube device
#632METHOD FOR OPERATING A PARTICLE BEAM DEVICE, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
#633Method and apparatus for charged particle detection
#634CHARGED PARTICLE INSPECTION SYSTEM AND METHOD USING MULTI-WAVELENGTH CHARGE CONTROLLERS
#635Method for positioning objects in a particle beam microscope with the aid of a flexible particle beam barrier
#636Systems and methods for voltage contrast defect detection
#637Charged particle beam device
#638Machine learning on wafer defect review
#639Transmission electron microscope and imaging method
#640Charged particle beam apparatus and method of controlling sample charge
#641Pattern inspecting device
#642Charged particle beam device
#643CHARGED PARTICLE BEAM DEVICE
#644Charged particle beam system
#645Back-scatter electrons (BSE) imaging with a SEM in tilted mode using cap bias voltage
#646MULTI-BEAM DIGITAL SCAN AND IMAGE ACQUISITION
#647Charged particle microscope device and method for adjusting field-of-view thereof
#648Beam manipulation of advanced charge controller module in a charged particle system
#649Charged particle beam device
#650Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen
#651Arbitrary electron dose waveforms for electron microscopy
#652Light modulated electron source
#653Apparatus and method for determining a position of an element on a photolithographic mask
#654APPARATUS MATCH DETECTION METHOD, DETECTION SYSTEM, PREWARNING METHOD, AND PREWARNING SYSTEM
#655Method to correct first order astigmatism and first order distortion in multi-beam scanning electron microscopes
#656Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
#657Systems and methods of determining aberrations in images obtained by a charged-particle beam tool
#658Charged particle beam device
#659Electron microscope and specimen contamination prevention method
#660Charged particle beam device and inspection method
#661Multi-beam inspection apparatus with improved detection performance of signal electrons
#662SELF-REFERENCING HEALTH MONITORING SYSTEM FOR MULTI-BEAM SEM TOOLS
#663Overlay Measurement System and Overlay Measurement Device
#664SAMPLE CARRIER FOR USE IN A CHARGED PARTICLE MICROSCOPE, AND A METHOD OF USING SUCH A SAMPLE CARRIER IN A CHARGED PARTICLE MICROSCOPE
#665Method and system for imaging a multi-pillar sample
#666Electron beam application apparatus
#667Multiple charged-particle beam apparatus with low crosstalk
#668Methods and systems for acquiring three-dimensional electron diffraction data
#669Shaped aperture set for multi-beam array configurations
#670Dual speed acquisition for drift corrected, fast, low dose, adaptive compositional charged particle imaging
#671Electron beam probing techniques and related structures
#672Charged particle beam system and overlay misalignment measurement method
#673Multibeam scanning apparatus and multibeam scanning method
#674Charged particle beam device
#675Ion beam device
#676Cross-talk cancellation in multiple charged-particle beam inspection
#677PHOTO-MICROPATTERNING FOR ELECTRON MICROSCOPY
#678System and Method for Injecting a Medication
#679Method for measuring CD using scanning electron microscope
#680Numerically compensating SEM-induced charging using diffusion-based model
#681PARTICLE BEAM SYSTEM INCLUDING A MULTI-BEAM DEFLECTION DEVICE AND A BEAM STOP, METHOD FOR OPERATING THE PARTICLE BEAM SYSTEM AND ASSOCIATED COMPUTER PROGRAM PRODUCT
#682Sample holder and charged particle beam apparatus
#683Method of influencing a charged particle beam, multipole device, and charged particle beam apparatus
#684PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION
#685Inspection tool and method of determining a distortion of an inspection tool
#686Electron beam inspection apparatus and electron beam inspection method
#687Method of measuring relative rotational angle and scanning transmission electron microscope
#688Apparatus of charged-particle beam such as scanning electron microscope comprising plasma generator, and method thereof
#689Estimation model generation method and electron microscope
#690SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS
#691Charged particle beam apparatus, scanning electron microscope, and method of operating a charged particle beam apparatus
#692METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM MICROSCOPE, CORPUSCULAR MULTI-BEAM MICROSCOPE FOR VOLTAGE CONTRAST IMAGING AND SEMICONDUCTOR STRUCTURES FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM MICROSCOPE
#693MULTIPLE LANDING ENERGY SCANNING ELECTRON MICROSCOPY SYSTEMS AND METHODS
#694High-resolution x-ray spectroscopy surface material analysis
#695Charged particle beam device
#6963D fiducial for precision 3D NAND channel tilt/shift analysis
#697Apparatus for multiple charged-particle beams
#698Charged particle beam system and method for determining observation conditions in charged particle beam device
#699Scanning electron microscope
#700Charged particle beam device and charged particle beam device calibration method
#701Multi-cell detector for charged particles
#702Method for operating a particle beam microscope
#703Charged particle beam device
#704Scintillator for charged particle beam apparatus and charged particle beam apparatus
#705Method for electrically examining electronic components of an integrated circuit
#706Transmission electron microscope and inspection method using transmission electron microscope
#707APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS
#708Charged particle beam device
#709Charged particle beam apparatus and method for controlling charged particle beam apparatus
#710Operating a particle beam apparatus with an object holder
#711PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD
#712Multi-beam image acquisition apparatus and multi-beam image acquisition method
#713Electron gun and charged particle beam device equipped with electron gun
#714High resolution imaging apparatus and method
#715Charged particle beam system
#716Charged particle beam apparatus and method of controlling charged particle beam apparatus
#717Charged particle beam apparatus
#718Multi-beam inspection apparatus
#719Illumination apertures for extended sample lifetimes in helical tomography
#720Reduction of thermal magnetic field noise in TEM corrector systems
#721Method and system for imaging three-dimensional feature
#722Secondary electron probe and secondary electron detector
#723ELECTRON MICROSCOPE USING ARTIFICIAL INTELLIGENCE TRAINING DATA
#724Inspection devices and methods of inspecting a sample
#725Systems and methods for image enhancement for a multi-beam charged-particle inspection system
#726CHARGED PARTICLE BEAM APPARATUS
#727Apparatus for and method of local control of a charged particle beam
#728Counter pole with permanent magnets
#729Magnetic field free sample plane for charged particle microscope
#730Multi-beam electronics scan
#731ELECTRON BEAM APPLICATION DEVICE, AND ELECTRON BEAM EMISSION METHOD FOR ELECTRON BEAM APPLICATION DEVICE
#732Inspection method, inspection system, and semiconductor fabrication using the same
#733Material processing method and material processing system for performing the method
#734Thermal-aided inspection by advanced charge controller module in a charged particle system
#735Scanning electron microscope having detachable column, and image acquisition method using the same
#736Method for microscopic image generation and system for same
#737Charged particle beam device and operation method therefor
#738Method for calibrating nano measurement scale and standard material used therein
#739Method and system for generating reciprocal space map
#740Evaluating a contact between a wafer and an electrostatic chuck
#741Apparatus and method for examining and/or processing a sample
#742Transmission electron microscope and method of adjusting optical system
#743X-ray detection apparatus and method
#744Beam deflection device, aberration corrector, monochromator, and charged particle beam device
#745Charged particle beam device
#746Electron beam apparatus
#747Charged particle beam device and analysis method
#748Wien filter and charged particle beam imaging apparatus
#749Apparatus of plural charged-particle beams
#750Automated operational control of micro-tooling devices
#751Stage Movement Control Apparatus and Charged Particle Beam System
#752Apparatus for and method of controlling an energy spread of a charged-particle beam
#753System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#754Charged particle beam device
#755Scanning Probe and Electron Microscope Probes and Their Manufacture
#756Charged particle beam device
#757Image contrast enhancement in sample inspection
#758Charged particle beam apparatus and control method
#759Low dose charged particle metrology system
#760Microscope
#761Stage driving system and apparatus or device such as apparatus of charged-particle beam comprising the same
#762Digital detector, apparatus of charged-particle beam such as electron microscope comprising the same, and method thereof
#763Device defect detection method using a charged particle beam
#764Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning
#765Charged particle beam system
#766Rapid and automatic virus imaging and analysis system as well as methods thereof
#767Inspection apparatus and method
#768Depth reconstruction for 3D images of samples in a charged particle system
#769Charged particle beam apparatus
#770Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system
#771Charged particle beam apparatus and control method thereof
#772Method for scanning a sample by a charged particle beam system
#773Charged particle beam device
#774Electron beam device and image acquisition method
#775Stage anti-fretting mechanism for roller bearing lifetime improvement
#776Methods and devices configured to operated scanning tunneling microscopes using out-of-bandwidth frequency components added to bias voltage and related software
#777METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT
#778Theta stage mechanism and electron beam inspection apparatus
#779System and method for learning-guided electron microscopy
#780Sample preparation system and method for electron microscope observation, and tape feeding mechanism used for sample preparation
#781Measurement device and signal processing method
#782Graphene based substrates for imaging
#783Detection of probabilistic process windows
#784System and method for bare wafer inspection
#785Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus
#786SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS
#787CHARGED PARTICLE SOURCE
#788Apparatus for multiple charged-particle beams
#789Gas phase sample preparation for cryo-electron microscopy
#790Electron beam device
#791Scanning Electron Microscope Image Anchoring to Design for Array
#792Charged particle beam device
#793Sample holder for electron microscopy
#794Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device
#795Reducing a temperature difference between a sample and a chuck of an electron beam tool
#796Method, apparatus and computer program for analyzing and/or processing of a mask for lithography
#797Analysis method and analysis system of voltage contrast defect
#798Multistage-connected multipole, multistage multipole unit, and charged particle beam device
#799Charged particle beam apparatus and sample observation method
#800Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method
#801Charged particle beam apparatus and setting assisting method
#802Charged particle beam apparatus and setting assisting method
#803Charged particle beam apparatus
#804Stage apparatus suitable for a particle beam apparatus
#805Particle beam focusing
#806Image acquisition method and electron microscope
#807Time-resolved cathodoluminescence sample probing
#808Method and apparatus for image processing
#809OPTICAL DEVICES AND METHOD OF OPTICAL DEVICE METROLOGY
#810Pattern inspection apparatus and pattern outline position acquisition method
#811Charged particle beam device
#812Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment
#813Target and algorithm to measure overlay by modeling back scattering electrons on overlapping structures
#814Charged particle beam system
#815Time-dependent defect inspection apparatus
#816Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes
#817Measurement system and method for setting observation conditions of measurement apparatus
#818Pattern Measurement Method, Measurement System, and Computer-Readable Medium
#819Dual beam microscope system for imaging during sample processing
#820Scanning electron microscope
#821Charged particle beam device
#822Replaceable module for a charged particle apparatus
#823Apparatus of plural charged-particle beams
#824Apparatus of plural charged-particle beams
#825Scanning electron microscope
#826Device with at least one adjustable sample holder and method of changing holder tilt angle and method of preparing a lamella
#827Charged particle beam device
#828Hyperdimensional scanning transmission electron microscopy and examinations and related systems, methods, and devices
#829Charged particle beam apparatus
#830Method and system for dynamic band contrast imaging
#831Method and apparatus for inspection
#832Charged particle beam device and method for inspecting and/or imaging a sample
#833Charged-particle beam device and cross-sectional shape estimation program
#834Axial alignment assembly, and charged particle microscope comprising such an alignment assembly
#835Charged particle beam device and method for inspecting and/or imaging a sample
#836Method of imaging a 2D sample with a multi-beam particle microscope
#837Imaging device capturing images of a sample including a plurality of sections
#838System comprising a multi-beam particle microscope and method for operating the same
#839Multi-beam inspection methods and systems
#840ML-enabled assured microelectronics manufacturing: a technique to mitigate hardware trojan detection
#841Scanning transmission electron microscope and adjustment method of optical system
#842Scanning electron microscope and a method for overlay monitoring
#843Method implemented by a data processing apparatus, and charged particle beam device for inspecting a specimen using such a method
#844System and method for generating and analyzing roughness measurements
#845Electron source, method for manufacturing the same, and electron beam device using the same
#846Adjusting method of charged particle beam device and charged particle beam device system
#847Charged particle beam apparatus with multiple detectors and methods for imaging
#848Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus
#849Charged particle beam device
#850Particle beam system and method for the particle-optical examination of an object
#851Transmission charged particle microscope with an electron energy loss spectroscopy detector
#852Simultaneous TEM and STEM microscope
#853Beam steering correction for attenuating the degradation of positional accuracy of charged particle and laser light beams caused by mechanical vibrations
#854DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE
#855Charged particle beam source
#856Method of recording an image using a particle microscope
#857Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
#858Method and system for plasma assisted low vacuum charged-particle microscopy
#859Charged particle beam device and method for adjusting position of detector of charged particle beam device
#860Charged particle source and charged particle beam device
#861Scanning electron microscope
#862Charged particle beam device
#863Method, device and system for reducing off-axial aberration in electron microscopy
#864Operating a particle beam apparatus and/or a light microscope
#865Image forming method and impedance microscope
#866Edge detection system
#867Charged particle beam apparatus, sample alignment method of charged particle beam apparatus
#868SPECIMEN MOUNTS AND RELATED METHODS
#869Model calibration and guided metrology based on smart sampling
#870Charged particle beam device with interferometer for height measurement
#871Auger electron microscope and analysis method
#872Charged particle beam apparatus
#873Electrochemical measurement of electron beam-induced pH change during liquid cell electron microscopy
#874MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTICLE BEAM DEVICE
#875Multi-stage vacuum equipment with stages separation controlled by SMA actuator
#876Device and method for analyzing a defect of a photolithographic mask or of a wafer
#877Examining, analyzing and/or processing an object using an object receiving container
#878Metrology data correction using image quality metric
#879Charged particle beam apparatus and adjustment method for charged particle beam apparatus
#880Electron Beam Apparatus
#881Apparatus of plural charged-particle beams
#882Charged particle beam device and charged particle beam adjustment method
#883Cryo nanomanipulator probe with integrated gas injection
#884System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control
#885Electronic microscope device
#886System and method for scanning a sample using multi-beam inspection apparatus
#887Charged particle beam device
#888Multi-beam particle beam system and method for operating same
#889Charged particle assessment tool, inspection method
#890Method for operating a multi-beam particle beam microscope
#891Apparatus for wavelength resolved angular resolved cathodoluminescence
#892Particle beam system for adjusting the current of individual particle beams
#893PHOTODETECTOR CONFIGURATIONS
#894BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
#895Charged particle beam inspection apparatus and charged particle beam inspection method
#896Method and system for automatic zone axis alignment
#897System and method for low-noise edge detection and its use for process monitoring and control
#898Multiple charged-particle beam apparatus with low crosstalk
#899Apparatus of plural charged-particle beams
#900Method and system for testing an integrated circuit