205251 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Method for detector equalization during the imaging of objects with a multi-beam particle microscope
#902Method for image adjustment and charged particle beam system
#903Charged particle beam device
#904HIDDEN DEFECT DETECTION AND EPE ESTIMATION BASED ON THE EXTRACTED 3D INFORMATION FROM E-BEAM IMAGES
#905Method and system for inspecting an EUV mask
#906Electron beam probing techniques and related structures
#907Grid sample production apparatus for electron microscope
#908Charged particle beam system, method for determining range for automatically searching for focal point position in charged particle beam device, and non-transitory storage medium recording program for causing computer system to determine range for automatically searching for focal position in charged particle beam device
#909Method and system for iteratively cross-sectioning a sample to correlatively targeted sites
#910Adjusting mechanism for adjusting deformation of panel and electron beam detection apparatus comprising the same
#911Multi-beam inspection apparatus with improved detection performance of signal electrons
#912Method, device and system for remote deep learning for microscopic image reconstruction and segmentation
#913Apparatus and method for nanoscale X-ray imaging
#914Navigation for electron microscopy
#915Electron microscope stage
#916Charged particle beam device and axis adjustment method thereof
#917Systems and methods of hysteresis compensation
#918Systems and methods of clamp compensation
#919Systems and methods for charged particle flooding to enhance voltage contrast defect signal
#920System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#921ARCHITECTURE FOR LARGE ACTIVE AREA HIGH SPEED DETECTOR
#922Wafer inspection based on electron beam induced current
#923Charged particle beam device
#924BBP assisted defect detection flow for SEM images
#925Methods and devices configured to operated scanning tunneling microscopes using out-of-bandwidth frequency components added to bias voltage and related software
#926Adaptive specimen image acquisition
#927Calibration sample, electron beam adjustment method and electron beam apparatus using same
#928Method for SEM-guided AFM scan with dynamically varied scan speed
#929Particle beam profiles for analytic equipment configuration
#930Electron beam observation device, electron beam observation system, and control method of electron beam observation device
#931High resolution imaging apparatus and method
#932Charged particle beam apparatus, composite charged particle beam apparatus, and control method for charged particle beam apparatus
#933Focused ion beam apparatus, and control method for focused ion beam apparatus
#934Method and apparatus for examining a beam of charged particles
#935Scanning electron microscope objective lens system and method for specimen observation
#936Imaging apparatus and related control unit
#937Apparatus and method for examining and/or processing a sample
#938Continuous scanning for localization microscopy
#939Integrated transmission electron microscope
#940Light modulated electron source
#941Charged particle beam irradiation apparatus and control method
#942Particle beam irradiation apparatus
#943Use of electron beam scanning electron microscopy for characterization of a sidewall occluded from line-of-sight of the electron beam
#944Focused ion beam apparatus
#945MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM
#946Transmission small-angle X-ray scattering metrology system
#947Method of acquiring dark-field image
#948Substrate and method for calibration of measurement apparatus
#949Charged particle beam device and analysis method
#950Light guide assembly for an electron microscope
#951System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#952MeV-based ion beam analysis apparatus
#953Sample plate holder
#954Control method for electron microscope and electron microscope
#955Biological tissue image processing system, and machine learning method
#956Sensor module for scanning electron microscopy applications
#957Scanning electron microscope apparatus and operation method thereof
#958Charged particle beam control device
#959Scanning electron microscope with composite detection system and specimen detection method
#960Photoabsorption microscopy using electron analysis
#961Charged particle beam device
#962System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#963Evaluating an intermediate product related to a three-dimensional NAND memory unit
#964Electron microscope
#965Wien filter and charged particle beam imaging apparatus
#966BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
#967Method and device for characterizing microbial carbonate pores, and server
#968Accurate wavelength calibration in cathodoluminescence SEM
#969A Device for Extracting and Placing a Lamella
#970Charged particle optical apparatus for through-the-lens detection of particles
#971Scanning electron microscope and method for measuring pattern
#972Charged particle beam apparatus and charged particle beam inspection system
#973Image generation method, non-transitory computer-readable medium, and system
#974INSPECTION METHOD AND INSPECTION APPARATUS
#975Charged particle beam apparatus
#976Cleaning device
#977Charged particle beam apparatus
#978System and method for beam position visualization
#979System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination
#980Focus adjustment method for charged particle beam device and charged particle beam device
#981Sample holder for electron microscopy
#982Machine learning on wafer defect review
#983Scanning electron microscopy system and pattern depth measurement method
#984Method for operating a particle beam microscope
#985Method for determining irradiation conditions for charged particle beam device and charged particle beam device
#986Autofocus method for a scanning electron microscope
#987Beam irradiation device
#988System for deriving electrical characteristics and non-transitory computer-readable medium
#989Kikuchi diffraction detector
#990Method of manufacturing a charged particle detector
#991Method and apparatus for capturing volume information of three-dimensional samples
#992Apparatus and method for measuring energy spectrum of backscattered electrons
#993Charged particle beam system and method
#994Charged particle beam application apparatus
#995Pattern measurement device and non-transitory computer readable medium having stored therein program for executing measurement
#996Multiple electron-beam image acquisition apparatus and multiple electron-beam image acquisition method using beam arrangement with omitted corners in a scan direction
#997Method for evaluating secondary optical system of electron beam inspection device
#998Electron microscope and beam irradiation method
#999Rotatable stage
#1000Charged particle beam system
#1001Monochromator and charged particle beam system
#1002Scanning electron microscope and method for analyzing secondary electron spin polarization
#1003Scanning electron microscope
#1004Method of examining a sample using a charged particle microscope, wherein an electron energy-loss spectroscopy (EELS) spectrum is acquired
#1005Multibeam inspection apparatus
#1006Mask inspection apparatus, electron beam inspection apparatus, mask inspection method, and electron beam inspection method
#1007Apparatus of plural charged-particle beams
#1008Operating a particle beam device
#1009SYSTEMS AND METHODS FOR TUNING AND CALIBRATING CHARGED PARTICLE BEAM APPARATUS
#1010MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING THE SAME
#1011Multiple charged-particle beam apparatus and methods
#1012Multiple charged-particle beam apparatus with low crosstalk
#1013High-resolution three-dimensional profiling of features in advanced semiconductor devices in a non-destructive manner using electron beam scanning electron microscopy
#1014Substrate positioning device and electron beam inspection tool
#1015Multi-beam particle microscope
#1016MULTI-BEAM SCANNING ELECTRON MICROSCOPE
#1017Laser-based phase plate image contrast manipulation
#1018Charged particle beam device
#1019Inspection device
#1020System for detection of passive voltage contrast
#1021Method of examining a sample using a charged particle microscope
#1022Ion milling device
#1023Multi-beam charged particle system
#1024Method of examining a sample using a charged particle microscope
#1025Apparatus and method for high dynamic range counting by pixelated detectors
#1026Operating a gas supply device for a particle beam device
#1027System, apparatus, and method for determining elemental composition using 4D STEM
#1028Defect observation device
#1029Low dose charged particle metrology system
#1030Defect candidate generation for inspection
#1031Pattern cross-sectional shape estimation system and program
#1032High speed/low dose multi-objective autonomous scanning materials imaging
#1033Inspection tool and method of determining a distortion of an inspection tool
#1034Mirror device, mirror drive method, light irradiation device, and image acquisition device
#1035Diagonal compound mill
#1036Charged particle beam apparatus and control method thereof
#1037Charged particle beam device
#1038System and method for learning-guided electron microscopy
#1039Method and apparatus for determining a wavefront of a massive particle beam
#1040CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PLURALITY OF CHARGED PARTICLE BEAMLETS
#1041Charged particle beam device
#1042Actuator-assisted positioning systems and methods
#1043Method for generating a result image
#1044Electron beam device and image processing method
#1045BEAM SPLITTER FOR A CHARGED PARTICLE DEVICE
#1046Apparatus using charged particle beams
#1047Methods and apparatus for performing profile metrology on semiconductor structures
#1048Ion beam device and cleaning method for gas field ion source
#1049Charged particle beam apparatus and sample observation method using the same
#1050Charged particle beam apparatus
#1051Apparatus and method for large-scale high throughput quantitative characterization and three-dimensional reconstruction of material structure
#1052Charged particle beam device
#1053Charged particle ray device and cross-sectional shape estimation program
#1054Defect inspection method and defect inspection device
#1055Height measuring device and beam irradiation device
#1056DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PARTICLE BEAM INSPECTION
#1057Multi-cell detector for charged particles
#1058Charged particle beam apparatus, and systems and methods for operating the apparatus
#1059Apparatus of plural charged-particle beams
#1060Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate
#1061Photocathode emitter system that generates multiple electron beams
#1062Optical objective lens
#1063Scanning electron microscope
#1064Construction of three-dimensional profiles of high aspect ratio structures using top down imaging
#1065Focused ion beam impurity identification
#1066Composite charged particle beam apparatus and control method thereof
#1067Charged particle beam device
#1068Scanning transmission electron microscope and aberration correction method
#1069Sample pre-charging methods and apparatuses for charged particle beam inspection
#1070Electron gun and electron beam application device
#1071Cryogenic transmission electron microscopy sample preparation
#1072Device and method for operating a charged particle device with multiple beamlets
#1073Spatial phase manipulation of charged particle beam
#1074CHARGED PARTICLE BEAM APPARATUS
#1075Charged particle beam device
#1076CHARGED PARTICLE BEAM APPARATUS
#1077Charged particle beam system and method of measuring sample using scanning electron microscope
#1078Multi-beam charged particle system
#1079Inspection tool, lithographic apparatus, electron beam source and an inspection method
#1080Method of imaging a 3D sample with a multi-beam particle microscope
#1081Detection of buried features by backscattered particles
#1082Objective lens arrangement usable in particle-optical systems
#1083Scanning electron microscope and calculation method for three-dimensional structure depth
#1084Image contrast enhancement in sample inspection
#1085Low voltage scanning electron microscope and method for specimen observation
#1086Method of operating a particle beam system, particle beam system and computer program product
#1087Methods and apparatuses for adjusting beam condition of charged particles
#1088Apparatus and method for determining a position of an element on a photolithographic mask
#1089Methods of inspecting samples with multiple beams of charged particles
#1090Method and system for charged particle microscopy with improved image beam stabilization and interrogation
#1091Scanning electron microscope with objective lens below sample stage
#1092Charged particle beam apparatus
#1093Semiconductor detector and method of fabricating same
#1094Method for scanning a sample by a charged particle beam system
#1095Method for calibrating a scanning charged particle microscope
#1096Scanning efficiency by individual beam steering of multi-beam apparatus
#1097System and method for generating and analyzing roughness measurements
#1098Multi-beam inspection apparatus
#1099Light guide, detector having light guide, and charged particle beam device
#1100Image-forming device, and dimension measurement device
#1101Joint electron-optical columns for flood-charging and image-forming in voltage contrast wafer inspections
#1102Charged particle beam device, and observation method and elemental analysis method using the same
#1103Charged-particle beam apparatus
#1104Charged particle beam device and electrostatic lens
#1105Particle beam system and method for operating a particle beam system
#1106Systems and methods for charged particle beam modulation
#1107Method and system for cross-sectioning a sample with a preset thickness or to a target site
#1108Multiple electron beam inspection apparatus with through-hole with spiral shape
#1109Environmental scanning electron microscopy analysis for contact lens coating selection and manufacturing
#1110Construction of three-dimensional profiles of high aspect ratio structures using top down imaging
#1111Charged particle beam device and optical examination device
#1112Scanning electron microscope and image processing method
#1113ELECTRON MICROSCOPE EQUIPPED WITH AUTOMATIC BEAM ALIGNMENT
#1114Nano vacuum tube
#1115Parameter estimation for metrology of features in an image
#1116Multiple electron beam inspection apparatus and multiple electron beam inspection method
#1117Using deep learning based defect detection and classification schemes for pixel level image quantification
#1118Gas phase sample preparation for cryo-electron microscopy
#1119Apparatus of plural charged-particle beams
#1120Confocal imaging technique in a charged particle microscope
#1121Charged particle beam device and optical-axis adjusting method thereof
#1122Apparatus of plural charged-particle beams
#1123Setting position of a particle beam device component
#1124Electron microscope and image processing method
#1125Measurement and endpointing of sample thickness
#1126Charged particle optical apparatus for through-the-lens detection of particles
#1127Electron diffraction imaging system for determining molecular structure and conformation
#1128Charged particle beam device and sample thickness measurement method
#1129Charged particle beam apparatus and sample processing observation method
#1130Charged particle beam device and method for setting condition in charged particle beam device
#1131Charged particle source
#1132Multi-beam electron characterization tool with telecentric illumination
#1133Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device
#1134Sample observation device and sample observation method
#1135Method for validating measurement data
#1136Edge detection system
#1137CHARGED PARTICLE MICROSCOPE, AND METHOD FOR ADJUSTING A CHARGED PARTICLE MICROSCOPE
#1138Objective lens arrangement
#1139Electron gun and electron microscope
#1140Cross-section observation device, and control method
#1141Measuring apparatus and method of setting observation condition
#1142Photocathode designs and methods of generating an electron beam using a photocathode
#1143Charged particle beam apparatus
#1144Machine learning on wafer defect review
#1145MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD
#1146Pattern evaluation device
#1147Particle beam system and method for the particle-optical examination of an object
#1148Detecting defects in a logic region on a wafer
#1149Charged particle beam device
#1150Primary beam scanning apparatus and signal processing method
#1151Multi-electron-beam imaging apparatus with improved performance
#1152Charged particle beam device
#1153Metal encapsulated photocathode electron emitter
#1154Apparatus and method for detecting time-dependent defects in a fast-charging device
#1155Defect observation system and defect observation method for semiconductor wafer
#1156Charged particle beam device and image processing method in charged particle beam device
#1157Method for processing an object
#1158Tilting parameters calculating device, sample stage, charged particle beam device, and program
#1159Crystal orientation figure creating device, charged particle beam device, crystal orientation figure creating method, and program
#1160Coil-integrated-type yoke and manufacturing method of the same
#1161Method of examining a sample using a charged particle microscope
#1162Apparatus for multiple charged-particle beams
#1163MICROTOME, SCANNING ELECTRON MICROSCOPE AND METHOD FOR PREPARING THIN SLICES FROM A SAMPLE AND METHOD FOR ANALYSING THIN SLICES PRODUCED FROM A SAMPLE IN A SCANNING ELECTRON MICROSCOPE AND USE OF A MAGNETIC TAPE FOR THE PURPOSE OF DEPOSITING AND TRANSPORTING OF THIN SLICES OF SAMPLES IN THE FIELD OF SCANNING ELECTRON MICROSCOPY
#1164Method for evaluating a region of an object
#1165Charged particle beam device
#1166Automatic processing device
#1167Multiple working distance height sensor using multiple wavelengths
#1168Charged particle beam device
#1169Charged particle beam device and capturing condition adjusting method in charged particle beam device
#1170Vacuum condition controlling apparatus, system and method for specimen observation
#1171Apparatus and method for inspecting a sample using a plurality of charged particle beams
#1172DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
#1173Vacuum condition processing apparatus, system and method for specimen observation
#1174Pattern Evaluation Apparatus and Computer Program
#1175Method for operating a plurality of FIB-SEM systems
#1176Method and apparatus for charged particle detection
#1177System and method for bare wafer inspection
#1178Tomography-assisted TEM prep with requested intervention automation workflow
#1179Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
#1180Adaptive specimen image acquisition using an artificial neural network
#1181Charged-particle beam system
#1182Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and multiple electron beam inspection apparatus
#1183Charged particle beam apparatus, observation method using charged particle beam apparatus, and program
#11843D defect characterization of crystalline samples in a scanning type electron microscope
#1185Magnetically microfocused electron emission source
#1186Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces
#1187Charged particle beam device
#1188Charged-particle beam device
#1189Charged Particle Beam Device
#1190Charged particle beam device
#1191Charged particle beam control device
#1192Neutral atom imaging system
#1193Semiconductor charged particle detector for microscopy
#1194Multi-beam electron microscope
#1195Pattern measuring method, pattern measuring tool and computer readable medium
#1196Stage apparatus, and charged particle beam apparatus
#1197Beam bender
#1198Deflector for multiple electron beams and multiple beam image acquiring apparatus
#1199Apparatus for wavelength resolved angular resolved cathodoluminescence
#1200Pattern measurement device, and computer program