ClassID:

205252

H01J37/285 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes Emission microscopes, e.g. field-emission microscopes

Recent Application in this class:
#1
20260092884
2026-04-02

MULTIFUNCTIONAL SAMPLE STAGE FOR IN-SITU TESTING WITH TRANSMISSION ELECTRON MICROSCOPE AND ATOM PROBE TOMOGRAPHY

#2
20260088243
2026-03-26

ELECTRON SPECTROSCOPY APPARATUS AND METHODS

#3
20250364207
2025-11-27

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

#4
20250357069
2025-11-20

JUNCTION BETWEEN HEXABORIDE-CONTAINING AND TANTALUM-CONTAINING COMPONENTS

#5
20250342985
2025-11-06

ELECTRICAL AND THERMAL CONNECTION CABLE FOR CHARGED PARTICLE MICROSCOPES

#6
20250299916
2025-09-25

FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF

#7
20250182999
2025-06-05

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

#8
20250166964
2025-05-22

AUTOMATIC GRID FINGER DETECTION

#9
20250132117
2025-04-24

METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE, METHOD FOR SYNTHESIZING IMAGE OF OBJECT BEING IRRADIATED, PROGRAM, RECORDING MEDIUM, AND ELECTRON BEAM APPLICATION DEVICE

#10
20250112017
2025-04-03

IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION

#11
20250054724
2025-02-13

Vacuum Processing Device

#12
20240395636
2024-11-28

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

#13
20240249911
2024-07-25

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

#14
20240222064
2024-07-04

Processor System, Correction Method, and Correction Program

#15
20240128129
2024-04-18

LUMINESCENCE METHOD FOR THE IN-LINE DETECTION OF ATOMIC SCALE DEFECTS DURING FABRICATION OF 4H-SIC DIODES

#16
20240120168
2024-04-11

Electron gun and electron beam application apparatus

#17
20230386783
2023-11-30

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

#18
20230238212
2023-07-27

Electron Microscope

#19
20230221112
2023-07-13

Cathodoluminescence focal scans to characterize 3D NAND CH profile

#20
20230123152
2023-04-20

Semiconductor charged particle detector for microscopy

#21
20230071801
2023-03-09

ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD

#22
20220415609
2022-12-29

Scanning Electron Microscope

#23
20220349789
2022-11-03

METHOD TO PREPARE A SAMPLE FOR ATOM PROBE TOMOGRAPHY (APT), PREPARATION DEVICE TO PERFORM SUCH METHOD AND METHOD TO INVESTIGATE A REGION OF INTEREST OF A SAMPLE INCLUDING SUCH PERFORMING METHOD

#24
20220254601
2022-08-11

TOMOGRAPHIC ATOM PROBE WITH TERAHERTZ PULSE GENERATOR

#25
20220230837
2022-07-21

Multi-beam image acquisition apparatus and multi-beam image acquisition method

#26
20220139666
2022-05-05

Automated tomography field ion microscope

#27
20220108870
2022-04-07

Microscope

#28
20220068596
2022-03-03

Graphene based substrates for imaging

#29
20220059318
2022-02-24

Atom probe tomography specimen preparation

#30
20210364525
2021-11-25

Method for analyzing the 3D structure of biomolecules

#31
20210356429
2021-11-18

System and method for performing three-dimensional compositional analyses

#32
20210351001
2021-11-11

Method of imaging a 2D sample with a multi-beam particle microscope

#33
20210343603
2021-11-04

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

#34
20210333306
2021-10-28

Energy beam input to atom probe specimens from multiple angles

#35
20210313141
2021-10-07

Apparatus for transmission electron microscopy cathodoluminescence

#36
20210254209
2021-08-19

Atomic layer deposition of fluoride thin films

#37
20210199714
2021-07-01

Correlation between emission spots utilizing CAD data in combination with emission microscope images

#38
20210183611
2021-06-17

Method for image adjustment and charged particle beam system

#39
20210104376
2021-04-08

DEVICE FOR PROVIDING ELECTRONS AND METHOD FOR MAKING THE SAME

#40
20210090844
2021-03-25

MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM

#41
20210042943
2021-02-11

SCANNING ELECTRON MICROSCOPE

#42
20200381208
2020-12-03

Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen

#43
20200333271
2020-10-22

METHOD FOR CONTROLLING A UNIT OF A PARTICLE BEAM DEVICE AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD

#44
20200294764
2020-09-17

Charged particle beam apparatus and sample observation method using the same

#45
20200286711
2020-09-10

Atom probe inspection device, field ion microscope, and distortion correction method

#46
20200251305
2020-08-06

CHARGED PARTICLE BEAM APPARATUS

#47
20200243300
2020-07-30

Method of imaging a 3D sample with a multi-beam particle microscope

#48
20200173940
2020-06-04

SEM FOV fingerprint in stochastic EPE and placement measurements in large FOV SEM devices

#49
20200161079
2020-05-21

Apparatus of plural charged particle beams

#50
20200043813
2020-02-06

Atom probe tomography specimen preparation

#51
20200020507
2020-01-16

Systems and methods for using multimodal imaging to determine structure and atomic composition of specimens

#52
20190378682
2019-12-12

Semiconductor charged particle detector for microscopy

#53
20190311880
2019-10-10

Electron energy loss spectroscopy with adjustable energy resolution

#54
20190304744
2019-10-03

Methods for acquiring planar view stem images of device structures

#55
20190295804
2019-09-26

System and method for photocathode illumination inspection

#56
20190287757
2019-09-19

Electron beam device and sample inspection method

#57
20190283177
2019-09-19

Laser processing system and laser processing method

#58
20190279838
2019-09-12

Charged particle beam apparatus and sample observation method using superimposed comparison image display

#59
20190277881
2019-09-12

Method for determining the shape of a sample tip for atom probe tomography

#60
20190272975
2019-09-05

Automated TEM sample preparation

#61
20190259567
2019-08-22

Stage device and charged particle beam device

#62
20190257855
2019-08-22

Method and apparatus for atomic probe tomography

#63
20190237294
2019-08-01

Transmission electron microscope micro-grid and method for making the same

#64
20190189391
2019-06-20

Retractable detector

#65
20190187174
2019-06-20

Miniature device for ultra high sensitivity and stability probing in vacuum

#66
20190074160
2019-03-07

Systems and method for using multimodal imaging to determine structure and atomic composition of specimens

#67
20190051491
2019-02-14

Field ionization source, ion beam apparatus, and beam irradiation method

#68
20180373010
2018-12-27

Point-spread-function measurement device and measurement method, image acquisition apparatus, and image acquisition method

#69
20180358200
2018-12-13

Multi-column scanning electron microscopy system

#70
20180350556
2018-12-06

Detector supplement device for spectroscopy setup

#71
20180301317
2018-10-18

Electron beam generation for transmission electron microscope

#72
20180286631
2018-10-04

Optical-cavity based ponderomotive phase plate for transmission electron microscopy

#73
20180275079
2018-09-27

Radiation Analyzing Apparatus

#74
20180226219
2018-08-09

Multi-column scanning electron microscopy system

#75
20180204705
2018-07-19

Charged particle beam apparatus

#76
20180158645
2018-06-07

Sample chamber device for electron microscope, and electron microscope comprising same

#77
20180151327
2018-05-31

Beam blanker and method for blanking a charged particle beam

#78
20180130636
2018-05-10

Wide field-of-view atom probe

#79
20180012728
2018-01-11

Retractable detector

#80
20170372868
2017-12-28

Atom probe with vacuum differential

#81
20170345627
2017-11-30

Charged-particle microscope with in situ deposition functionality

#82
20170323764
2017-11-09

Ion beam device

#83
20170323761
2017-11-09

CHARGED PARTICLE DETECTOR

#84
20170315091
2017-11-02

Method for evaluating structural change during production process, and analysis program

#85
20170309445
2017-10-26

Quantitative secondary electron detection

#86
20170301513
2017-10-19

Scanning electron microscope

#87
20170288169
2017-10-05

Laminated film and process for manufacturing the same, as well as method for analyzing laminated film

#88
20170263415
2017-09-14

Scanning electron microscope and electron trajectory adjustment method therefor

#89
20170256380
2017-09-07

Automated TEM sample preparation

#90
20170213697
2017-07-27

Multi mode system with a dispersion X-ray detector

#91
20170140896
2017-05-18

Systems and methods for using multimodal imaging to determine structure and atomic composition of specimens

#92
20170069459
2017-03-09

Detection assembly, system and method

#93
20170062174
2017-03-02

TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE

#94
20170053778
2017-02-23

Method of preparing a plan-view transmission electron microscope sample used in an integrated circuit analysis

#95
20170047207
2017-02-16

Electron source

#96
20170040230
2017-02-09

Charged particle beam device and inspection device

#97
20170004952
2017-01-05

Sample holder and analytical vacuum device

#98
20160379797
2016-12-29

Charged Particle Beam Apparatus

#99
20160358746
2016-12-08

Defect image classification apparatus

#100
20160268119
2016-09-15

Electron spectrometer and measurement method

#101
20160260577
2016-09-08

Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate

#102
20160254120
2016-09-01

Near-field optical transmission electron emission microscope

#103
20160247662
2016-08-25

Sample processing evaluation apparatus

#104
20160225575
2016-08-04

Ion beam device and emitter tip adjustment method

#105
20160211115
2016-07-21

Method for the correction of electron proximity effects

#106
20160211112
2016-07-21

Method and Apparatus for Reviewing Defects

#107
20160211109
2016-07-21

Sample holder and charged particle device

#108
20160203943
2016-07-14

Electron microscope

#109
20160196952
2016-07-07

Electron microscope

#110
20160189929
2016-06-30

RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING

#111
20160189924
2016-06-30

Electron microscope and method of operating same

#112
20160189922
2016-06-30

Charged particle microscope with improved spectroscopic functionality

#113
20160181061
2016-06-23

Image creating method and imaging system for performing the same

#114
20160181055
2016-06-23

Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system

#115
20160172156
2016-06-16

Source for selectively providing positively or negatively charged particles for a focusing column

#116
20160172155
2016-06-16

Device and method of detecting and generating combined modulated particle wave-fronts

#117
20160169668
2016-06-16

Method for studying a zone of an object so as to determine a mass-thickness and a composition thereof by using an electron beam and measurements of X-ray radiation intensity

#118
20160163503
2016-06-09

Electron microscope with plural X-ray detectors for acquiring elemental spectrum

#119
20160163502
2016-06-09

Method and compound system for inspecting and reviewing defects

#120
20160155606
2016-06-02

INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE

#121
20160148781
2016-05-26

Charged particle beam apparatus and inspection method using the same

#122
20160148780
2016-05-26

Quantitative secondary electron detection

#123
20160141147
2016-05-19

Automated TEM sample preparation

#124
20160133434
2016-05-12

Image evaluation method and charged particle beam device

#125
20160118217
2016-04-28

E-beam inspection apparatus and method of using the same on various integrated circuit chips

#126
20160093464
2016-03-31

Composite charged particle beam apparatus

#127
20160086769
2016-03-24

Semiconductor inspection system and methods of inspecting a semiconductor device using the same

#128
20160086765
2016-03-24

Electron detection system

#129
20160086762
2016-03-24

Spectroscopy in a transmission charged-particle microscope

#130
20160064184
2016-03-03

Scanning electron microscope and methods of inspecting and reviewing samples

#131
20160064183
2016-03-03

Electron microscope and sample observation method

#132
20160056015
2016-02-25

Radiation Sensor, and its Application in a Charged-Particle Microscope

#133
20160035538
2016-02-04

Pattern shape evaluation method, semiconductor device manufacturing method, and pattern shape evaluation device

#134
20160013015
2016-01-14

Computational scanning microscopy with improved resolution

#135
20150371820
2015-12-24

Charged particle beam apparatus

#136
20150371818
2015-12-24

Characterization method for a reservoir micro pore structure and a system thereof

#137
20150369737
2015-12-24

System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

#138
20150340193
2015-11-26

Inspection apparatus

#139
20150311034
2015-10-29

Method and apparatus for sample extraction and handling

#140
20150303030
2015-10-22

Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam

#141
20150255240
2015-09-10

Method for manufacturing electron source

#142
20150253353
2015-09-10

Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses

#143
20150155133
2015-06-04

Charged particle beam apparatus

#144
20150083912
2015-03-26

Charged particle beam apparatus

#145
20150083911
2015-03-26

Method of detecting electrons, an electron-detector and an inspection system

#146
20150076988
2015-03-19

Electron emitter device with integrated multi-pole electrode structure

#147
20150041646
2015-02-12

Inspection system and inspection image data generation method

#148
20150008323
2015-01-08

Device and method for electron emission and device including such an electron emission system

#149
20150002009
2015-01-01

Metal hexaboride cold field emitter, method of fabricating same, and electron gun

#150
20140326876
2014-11-06

Method of using a phase plate in a transmission electron microscope

#151
20140312227
2014-10-23

Inspection apparatus

#152
20140291515
2014-10-02

Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded

#153
20140124665
2014-05-08

Radiation detector, radiation detection apparatus, and X-ray analyzer

#154
20130332116
2013-12-12

Electron microscope and method of operating the same

#155
20130193321
2013-08-01

Systems and methods for investigating a characteristic of a material using electron microscopy

#156
20130175444
2013-07-11

Isotope ion microscope methods and systems

#157
20130134307
2013-05-30

Inductively coupled plasma source as an electron beam source for spectroscopic analysis

#158
20130087704
2013-04-11

GAS FIELD IONIZATION ION SOURCE, SCANNING CHARGED PARTICLE MICROSCOPE, OPTICAL AXIS ADJUSTMENT METHOD AND SPECIMEN OBSERVATION METHOD

#159
20120298861
2012-11-29

Vector Potential Photoelectron Microscope

#160
20120241608
2012-09-27

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#161
20120193530
2012-08-02

System and method for localization of large numbers of fluorescent markers in biological samples

#162
20120145894
2012-06-14

Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate

#163
20120117696
2012-05-10

INTEGRATED METALLIC MICROTIP COUPON STRUCTURE FOR ATOM PROBE TOMOGRAPHIC ANALYSIS

#164
20120080596
2012-04-05

Laser Atom Probe and Laser Atom Probe Analysis Methods

#165
20120049063
2012-03-01

Sample surface inspection apparatus and method

#166
20110284744
2011-11-24

Method and system for 4D tomography and ultrafast scanning electron microscopy

#167
20110260054
2011-10-27

ATOM PROBE PULSE ENERGY

#168
20110210245
2011-09-01

Device for generating wide spectral band laser pulses, particularly for a tomographic atom probe

#169
20110139979
2011-06-16

Isotope ion microscope methods and systems

#170
20110113858
2011-05-19

Gas charge container, atom probe apparatus, and method for analyzing hydrogen position in material

#171
20110068267
2011-03-24

Electron beam inspection method and electron beam inspection apparatus

#172
20110017909
2011-01-27

ELECTRON IMAGING APPARATUS WITH IMAGE PROCESSING

#173
20110012018
2011-01-20

Magnetic lens, method for focusing charged particles and charged particle energy analyzer

#174
20110006205
2011-01-13

AMBIENT PRESSURE PHOTOELECTRON MICROSCOPE

#175
20100305747
2010-12-02

Method and apparatus for sample extraction and handling

#176
20100294928
2010-11-25

LASER ATOM PROBES

#177
20100288926
2010-11-18

ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS

#178
20100282964
2010-11-11

METHODS AND APPARATUSES TO ALIGN ENERGY BEAM TO ATOM PROBE SPECIMEN

#179
20100204927
2010-08-12

ATOM PROBE DATA PROCESSES AND ASSOCIATED SYSTEMS

#180
20100187436
2010-07-29

High resolution gas field ion column

#181
20100148060
2010-06-17

Atom probe

#182
20100140470
2010-06-10

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#183
20090320624
2009-12-31

Method for preparing specimens for atom probe analysis and specimen assemblies made thereby

#184
20090152462
2009-06-18

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

#185
20090114620
2009-05-07

ATOM PROBE ELECTRODE TREATMENTS

#186
20090110951
2009-04-30

Atomically sharp iridium tip

#187
20090045336
2009-02-19

Scanning probe microscopy cantilever, corresponding manufacturing method, scanning probe microscope, and scanning method

#188
20080315093
2008-12-25

Electron beam inspection method and electron beam inspection apparatus

#189
20080296489
2008-12-04

Atom Probe Evaporation Processes

#190
20080265159
2008-10-30

Sample surface inspection apparatus and method

#191
20080217533
2008-09-11

Charged particle spin polarimeter, microscope, and photoelectron spectroscope

#192
20080135748
2008-06-12

Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system

#193
20070205358
2007-09-06

Laser atom probe

#194
20070184515
2007-08-09

Method to determine 3-d elemental composition and structure of biological and organic materials via atom probe microscopy

#195
20070018504
2007-01-25

Short duration variable amplitude high voltage pulse generator

#196
20060219909
2006-10-05

Detecting apparatus and device manufacturing method

#197
20060192145
2006-08-31

Charged particle beam apparatus and method for operating the same

#198
20060113470
2006-06-01

High resolution atom probe

#199
20050158653
2005-07-21

Sample surface inspection apparatus and method

#200
20050067566
2005-03-31

Photoemission electron microscopy and measuring method using the microscopy

#201
20050017174
2005-01-27

Laser stimulated atom probe characterization of semiconductor and dielectric structures

#202
18665386
2025-08-12

Electrode and filament coupled by adapter

#203
16532459
2024-09-17

Scanning charged-particle-beam microscopy with energy-dispersive x-ray spectroscopy

#204
14989743
2016-11-15

E-beam inspection apparatus and method of using the same on various integrated circuit chips

#205
14929812
2017-05-30

Virtual ground for target substrate using floodgun and feedback control

#206
14751087
2016-08-02

Mirror pulse compressor for electron beam apparatus