205252 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes Emission microscopes, e.g. field-emission microscopes
MULTIFUNCTIONAL SAMPLE STAGE FOR IN-SITU TESTING WITH TRANSMISSION ELECTRON MICROSCOPE AND ATOM PROBE TOMOGRAPHY
#2ELECTRON SPECTROSCOPY APPARATUS AND METHODS
#3ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
#4JUNCTION BETWEEN HEXABORIDE-CONTAINING AND TANTALUM-CONTAINING COMPONENTS
#5ELECTRICAL AND THERMAL CONNECTION CABLE FOR CHARGED PARTICLE MICROSCOPES
#6FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF
#7SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
#8AUTOMATIC GRID FINGER DETECTION
#9METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE, METHOD FOR SYNTHESIZING IMAGE OF OBJECT BEING IRRADIATED, PROGRAM, RECORDING MEDIUM, AND ELECTRON BEAM APPLICATION DEVICE
#10IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION
#11Vacuum Processing Device
#12ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
#13SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
#14Processor System, Correction Method, and Correction Program
#15LUMINESCENCE METHOD FOR THE IN-LINE DETECTION OF ATOMIC SCALE DEFECTS DURING FABRICATION OF 4H-SIC DIODES
#16Electron gun and electron beam application apparatus
#17ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
#18Electron Microscope
#19Cathodoluminescence focal scans to characterize 3D NAND CH profile
#20Semiconductor charged particle detector for microscopy
#21ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD
#22Scanning Electron Microscope
#23METHOD TO PREPARE A SAMPLE FOR ATOM PROBE TOMOGRAPHY (APT), PREPARATION DEVICE TO PERFORM SUCH METHOD AND METHOD TO INVESTIGATE A REGION OF INTEREST OF A SAMPLE INCLUDING SUCH PERFORMING METHOD
#24TOMOGRAPHIC ATOM PROBE WITH TERAHERTZ PULSE GENERATOR
#25Multi-beam image acquisition apparatus and multi-beam image acquisition method
#26Automated tomography field ion microscope
#27Microscope
#28Graphene based substrates for imaging
#29Atom probe tomography specimen preparation
#30Method for analyzing the 3D structure of biomolecules
#31System and method for performing three-dimensional compositional analyses
#32Method of imaging a 2D sample with a multi-beam particle microscope
#33ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
#34Energy beam input to atom probe specimens from multiple angles
#35Apparatus for transmission electron microscopy cathodoluminescence
#36Atomic layer deposition of fluoride thin films
#37Correlation between emission spots utilizing CAD data in combination with emission microscope images
#38Method for image adjustment and charged particle beam system
#39DEVICE FOR PROVIDING ELECTRONS AND METHOD FOR MAKING THE SAME
#40MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM
#41SCANNING ELECTRON MICROSCOPE
#42Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
#43METHOD FOR CONTROLLING A UNIT OF A PARTICLE BEAM DEVICE AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
#44Charged particle beam apparatus and sample observation method using the same
#45Atom probe inspection device, field ion microscope, and distortion correction method
#46CHARGED PARTICLE BEAM APPARATUS
#47Method of imaging a 3D sample with a multi-beam particle microscope
#48SEM FOV fingerprint in stochastic EPE and placement measurements in large FOV SEM devices
#49Apparatus of plural charged particle beams
#50Atom probe tomography specimen preparation
#51Systems and methods for using multimodal imaging to determine structure and atomic composition of specimens
#52Semiconductor charged particle detector for microscopy
#53Electron energy loss spectroscopy with adjustable energy resolution
#54Methods for acquiring planar view stem images of device structures
#55System and method for photocathode illumination inspection
#56Electron beam device and sample inspection method
#57Laser processing system and laser processing method
#58Charged particle beam apparatus and sample observation method using superimposed comparison image display
#59Method for determining the shape of a sample tip for atom probe tomography
#60Automated TEM sample preparation
#61Stage device and charged particle beam device
#62Method and apparatus for atomic probe tomography
#63Transmission electron microscope micro-grid and method for making the same
#64Retractable detector
#65Miniature device for ultra high sensitivity and stability probing in vacuum
#66Systems and method for using multimodal imaging to determine structure and atomic composition of specimens
#67Field ionization source, ion beam apparatus, and beam irradiation method
#68Point-spread-function measurement device and measurement method, image acquisition apparatus, and image acquisition method
#69Multi-column scanning electron microscopy system
#70Detector supplement device for spectroscopy setup
#71Electron beam generation for transmission electron microscope
#72Optical-cavity based ponderomotive phase plate for transmission electron microscopy
#73Radiation Analyzing Apparatus
#74Multi-column scanning electron microscopy system
#75Charged particle beam apparatus
#76Sample chamber device for electron microscope, and electron microscope comprising same
#77Beam blanker and method for blanking a charged particle beam
#78Wide field-of-view atom probe
#79Retractable detector
#80Atom probe with vacuum differential
#81Charged-particle microscope with in situ deposition functionality
#82Ion beam device
#83CHARGED PARTICLE DETECTOR
#84Method for evaluating structural change during production process, and analysis program
#85Quantitative secondary electron detection
#86Scanning electron microscope
#87Laminated film and process for manufacturing the same, as well as method for analyzing laminated film
#88Scanning electron microscope and electron trajectory adjustment method therefor
#89Automated TEM sample preparation
#90Multi mode system with a dispersion X-ray detector
#91Systems and methods for using multimodal imaging to determine structure and atomic composition of specimens
#92Detection assembly, system and method
#93TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE
#94Method of preparing a plan-view transmission electron microscope sample used in an integrated circuit analysis
#95Electron source
#96Charged particle beam device and inspection device
#97Sample holder and analytical vacuum device
#98Charged Particle Beam Apparatus
#99Defect image classification apparatus
#100Electron spectrometer and measurement method
#101Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate
#102Near-field optical transmission electron emission microscope
#103Sample processing evaluation apparatus
#104Ion beam device and emitter tip adjustment method
#105Method for the correction of electron proximity effects
#106Method and Apparatus for Reviewing Defects
#107Sample holder and charged particle device
#108Electron microscope
#109Electron microscope
#110RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING
#111Electron microscope and method of operating same
#112Charged particle microscope with improved spectroscopic functionality
#113Image creating method and imaging system for performing the same
#114Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system
#115Source for selectively providing positively or negatively charged particles for a focusing column
#116Device and method of detecting and generating combined modulated particle wave-fronts
#117Method for studying a zone of an object so as to determine a mass-thickness and a composition thereof by using an electron beam and measurements of X-ray radiation intensity
#118Electron microscope with plural X-ray detectors for acquiring elemental spectrum
#119Method and compound system for inspecting and reviewing defects
#120INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE
#121Charged particle beam apparatus and inspection method using the same
#122Quantitative secondary electron detection
#123Automated TEM sample preparation
#124Image evaluation method and charged particle beam device
#125E-beam inspection apparatus and method of using the same on various integrated circuit chips
#126Composite charged particle beam apparatus
#127Semiconductor inspection system and methods of inspecting a semiconductor device using the same
#128Electron detection system
#129Spectroscopy in a transmission charged-particle microscope
#130Scanning electron microscope and methods of inspecting and reviewing samples
#131Electron microscope and sample observation method
#132Radiation Sensor, and its Application in a Charged-Particle Microscope
#133Pattern shape evaluation method, semiconductor device manufacturing method, and pattern shape evaluation device
#134Computational scanning microscopy with improved resolution
#135Charged particle beam apparatus
#136Characterization method for a reservoir micro pore structure and a system thereof
#137System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
#138Inspection apparatus
#139Method and apparatus for sample extraction and handling
#140Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam
#141Method for manufacturing electron source
#142Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses
#143Charged particle beam apparatus
#144Charged particle beam apparatus
#145Method of detecting electrons, an electron-detector and an inspection system
#146Electron emitter device with integrated multi-pole electrode structure
#147Inspection system and inspection image data generation method
#148Device and method for electron emission and device including such an electron emission system
#149Metal hexaboride cold field emitter, method of fabricating same, and electron gun
#150Method of using a phase plate in a transmission electron microscope
#151Inspection apparatus
#152Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded
#153Radiation detector, radiation detection apparatus, and X-ray analyzer
#154Electron microscope and method of operating the same
#155Systems and methods for investigating a characteristic of a material using electron microscopy
#156Isotope ion microscope methods and systems
#157Inductively coupled plasma source as an electron beam source for spectroscopic analysis
#158GAS FIELD IONIZATION ION SOURCE, SCANNING CHARGED PARTICLE MICROSCOPE, OPTICAL AXIS ADJUSTMENT METHOD AND SPECIMEN OBSERVATION METHOD
#159Vector Potential Photoelectron Microscope
#160Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#161System and method for localization of large numbers of fluorescent markers in biological samples
#162Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate
#163INTEGRATED METALLIC MICROTIP COUPON STRUCTURE FOR ATOM PROBE TOMOGRAPHIC ANALYSIS
#164Laser Atom Probe and Laser Atom Probe Analysis Methods
#165Sample surface inspection apparatus and method
#166Method and system for 4D tomography and ultrafast scanning electron microscopy
#167ATOM PROBE PULSE ENERGY
#168Device for generating wide spectral band laser pulses, particularly for a tomographic atom probe
#169Isotope ion microscope methods and systems
#170Gas charge container, atom probe apparatus, and method for analyzing hydrogen position in material
#171Electron beam inspection method and electron beam inspection apparatus
#172ELECTRON IMAGING APPARATUS WITH IMAGE PROCESSING
#173Magnetic lens, method for focusing charged particles and charged particle energy analyzer
#174AMBIENT PRESSURE PHOTOELECTRON MICROSCOPE
#175Method and apparatus for sample extraction and handling
#176LASER ATOM PROBES
#177ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS
#178METHODS AND APPARATUSES TO ALIGN ENERGY BEAM TO ATOM PROBE SPECIMEN
#179ATOM PROBE DATA PROCESSES AND ASSOCIATED SYSTEMS
#180High resolution gas field ion column
#181Atom probe
#182Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#183Method for preparing specimens for atom probe analysis and specimen assemblies made thereby
#184Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method
#185ATOM PROBE ELECTRODE TREATMENTS
#186Atomically sharp iridium tip
#187Scanning probe microscopy cantilever, corresponding manufacturing method, scanning probe microscope, and scanning method
#188Electron beam inspection method and electron beam inspection apparatus
#189Atom Probe Evaporation Processes
#190Sample surface inspection apparatus and method
#191Charged particle spin polarimeter, microscope, and photoelectron spectroscope
#192Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system
#193Laser atom probe
#194Method to determine 3-d elemental composition and structure of biological and organic materials via atom probe microscopy
#195Short duration variable amplitude high voltage pulse generator
#196Detecting apparatus and device manufacturing method
#197Charged particle beam apparatus and method for operating the same
#198High resolution atom probe
#199Sample surface inspection apparatus and method
#200Photoemission electron microscopy and measuring method using the microscopy
#201Laser stimulated atom probe characterization of semiconductor and dielectric structures
#202Electrode and filament coupled by adapter
#203Scanning charged-particle-beam microscopy with energy-dispersive x-ray spectroscopy
#204E-beam inspection apparatus and method of using the same on various integrated circuit chips
#205Virtual ground for target substrate using floodgun and feedback control
#206Mirror pulse compressor for electron beam apparatus