205253 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron or ion microscopes; Electron or ion diffraction tubes Reflection microscopes
Sub-classes:MIRROR ELECTRONIC INSPECTION DEVICE
#2Aberration reduction in multipass electron microscopy
#3System and method for alignment of cathodoluminescence optics
#4Mirror device, mirror drive method, light irradiation device, and image acquisition device
#5Electron beam device
#6Charged particle beam apparatus, observation method using charged particle beam apparatus, and program
#7Reflection-mode electron-beam inspection using ptychographic imaging
#8System and method for photocathode illumination inspection
#9Stage device and charged particle beam device
#10Measuring spherical and chromatic aberrations in cathode lens electrode microscopes
#11Charged particle beam apparatus
#12Mirror device, mirror drive method, light irradiation device, and image acquisition device
#13Charged particle beam device and method for adjusting charged particle beam device
#14Evaluating an object
#15SEM inspection apparatus and pattern matching method
#16Defect Inspection Device
#17Measuring spherical and chromatic aberrations in cathode lens electrode microscopes
#18Gun lens design in a charged particle microscope
#19Charged particle beam apparatus, observation method using charged particle beam apparatus, and program
#20Charged particle beam apparatus and sample elevating apparatus
#21Mirror ion microscope and ion beam control method
#22Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#23Inspection apparatus and inspection method
#24Multi-beam dark field imaging
#25Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#26Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope
#27Inspection device
#28Inspection equipment
#29Image type electron spin polarimeter
#30Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#31Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate
#32Focusing a charged particle system
#33Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#34Specimen observation method and device using secondary emission electron and mirror electron detection
#35Back scattered electron detector
#36Apparatus and method for performing microdiffraction analysis
#37Focusing a charged particle imaging system
#38Charged particle beam device
#39Electro-optical inspection apparatus and method with dust or particle collection function
#40Electron beam irradiation apparatus
#41Systems and methods for investigating a characteristic of a material using electron microscopy
#42Inspection device
#43Electro-optical inspection apparatus and method with dust or particle collection function
#44Scanning electron microscope
#45Charged particle beam device
#46Specimen observation method and device using secondary emission electron and mirror electron detection
#47Electron beam inspection method and electron beam inspection apparatus
#48Spectrometer for Surface Analysis and Method Therefor
#49Graphical user interface for use with electron beam wafer inspection
#50Scanning electron microscope
#51Apparatus and method for inspecting sample surface
#52Electron beam inspection method and electron beam inspection apparatus
#53Electron Microscope And Electron Beam Inspection System
#54Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same
#55Inspection system and inspection method
#56Method and apparatus for pattern inspection
#57Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples
#58High throughput multi beam detection system and method
#59INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN
#60Electron microscope and electron bean inspection system.
#61Projection electron microscope, electron microscope, specimen surface observing method and micro device producing method
#62Spectrometer for surface analysis and method therefor
#63Pattern defect inspection method and apparatus thereof
#64Apparatus and method for electron beam inspection with projection electron microscopy
#65Apparatus and method for wafer pattern inspection
#66Focusing system and method for a charged particle imaging system
#67Patterned wafer inspection method and apparatus therefor
#68Electron microscope and electron beam inspection system
#69Apparatus and method for inspecting pattern on object
#70Patterned wafer inspection method and apparatus therefor
#71Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples
#72System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device
#73Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination