Patents-Review.com
ClassID:

205258 ⎘

H01J37/3002 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron-beam or ion-beam tubes for localised treatment of objects Details

Sub-classes:
Recent Application in this class:
#1
20260100328
2026-04-09

AUTOMATED CHEMICAL SWITCHING FOR MATERIAL DELAYERING

 #2
20250285835
2025-09-11

Heated Dynamic Seal Rotary Union for Delivery of Cryogenic Fluid

 #3
20250210303
2025-06-26

MIXED-GAS SPECIES PLASMA SOURCE SYSTEM

 #4
20240379319
2024-11-14

FASTENER FOR SECURING FACEPLATE TO ION SOURCE

 #5
20240331972
2024-10-03

Actively Cooled Gas Line For Ion Source

 #6
20240290576
2024-08-29

ION BEAM EXTRACTION ELECTRODE, ION SOURCE AND EXTRACTION ELECTRODE STRUCTURE

 #7
20240290575
2024-08-29

DETECTION USING SEMICONDUCTOR DETECTOR

 #8
20240062983
2024-02-22

Systems and methods for electron beam focusing in electron beam additive manufacturing

 #9
20230134262
2023-05-04

Resonator, linear accelerator, and ion implanter having adjustable pickup loop

 #10
20220359147
2022-11-10

Extended cathode and repeller life by active management of halogen cycle

 #11
20220084778
2022-03-17

Low-blur electrostatic transfer lens for multi-beam electron gun

 #12
20220037105
2022-02-03

Systems and methods for electron beam focusing in electron beam additive manufacturing

 #13
20210407764
2021-12-30

Detection using semiconductor detector

 #14
20210257180
2021-08-19

Dynamic electron impact ion source

 #15
20210183613
2021-06-17

Beam position monitor for charged particles passing through a chamber

 #16
20210080412
2021-03-18

MeV-based ion beam analysis apparatus

 #17
20210043422
2021-02-11

Implanter calibration

 #18
20210013000
2021-01-14

POROUS CARBONACEOUS VACUUM CHAMBER LINERS

 #19
20200406389
2020-12-31

X-ray calibration standard object

 #20
20200303154
2020-09-24

Liquid metal ion source

 #21
20200279720
2020-09-03

Ion source and cleaning method thereof

 #22
20200266030
2020-08-20

Focused ion beam impurity identification

 #23
20200234917
2020-07-23

LOW EMISSION CLADDING AND ION IMPLANTER

 #24
20200211821
2020-07-02

ELECTRON BEAM IRRADIATION DEVICE

 #25
20200115723
2020-04-16

PROCESSING BIOMASS

 #26
20200058465
2020-02-20

Implanter calibration

 #27
20200020508
2020-01-16

Electrostatic element having grooved exterior surface

 #28
20200020502
2020-01-16

Dynamic electron impact ion source

 #29
20190385812
2019-12-19

Multi-charged-particle-beam writing apparatus and beam evaluating method for the same

 #30
20190353566
2019-11-21

Methods for acquiring planar view STEM images of device structures

 #31
20190252151
2019-08-15

Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage

 #32
20190237293
2019-08-01

Deflection sensitivity calculation method and deflection sensitivity calculation system

 #33
20190237290
2019-08-01

Ion source and ion implantation apparatus

 #34
20190198291
2019-06-27

Chamber with flow-through source

 #35
20190164719
2019-05-30

Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure

 #36
20190162668
2019-05-30

Method of evaluating carbon concentration of silicon sample, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer

 #37
20190144894
2019-05-16

Processing biomass

 #38
20190139738
2019-05-09

Electronic beam machining system

 #39
20180358202
2018-12-13

Lanthanated tungsten ion source and beamline components

 #40
20180236427
2018-08-23

PROCESSING BIOMASS

 #41
20180226223
2018-08-09

Chamber with flow-through source

 #42
20180169290
2018-06-21

Ion generator mounting device

 #43
20180149980
2018-05-31

Electron-beam lithography method and system

 #44
20180096818
2018-04-05

Chamber with flow-through source

 #45
20180090297
2018-03-29

Temperature controlled ion source

 #46
20180068829
2018-03-08

Ion implantation apparatus and ion implantation method

 #47
20180055966
2018-03-01

Ion generator device

 #48
20180019095
2018-01-18

Charged particle instruments

 #49
20170358424
2017-12-14

Electronic beam machining system

 #50
20170358423
2017-12-14

Apparatus for modifying surfaces of titanium implants made of titanium alloy

 #51
20170330756
2017-11-16

METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION SOURCE IN AN ION IMPLANTATION SYSTEM

 #52
20170330725
2017-11-16

LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS

 #53
20170229278
2017-08-10

Board, semiconductor fabrication plant (FAB) and fabrication facility

 #54
20170229205
2017-08-10

ROTATING ENERGY DEGRADER

 #55
20170178860
2017-06-22

Ion implanter

 #56
20170178857
2017-06-22

Temperature controlled ion source

 #57
20170169986
2017-06-15

Self-cleaning linear ionizing bar and methods therefor

 #58
20170148603
2017-05-25

Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

 #59
20170110286
2017-04-20

Controlling an ion beam in a wide beam current operation range

 #60
20170087661
2017-03-30

X-ray calibration standard object

 #61
20170044661
2017-02-16

DYNAMIC APERTURE FOR THREE-DIMENSIONAL CONTROL OF THIN-FILM DEPOSITION AND ION-BEAM EROSION

 #62
20170032967
2017-02-02

STORAGE AND SUB-ATMOSPHERIC DELIVERY OF DOPANT COMPOSITIONS FOR CARBON ION IMPLANTATION

 #63
20170028096
2017-02-02

Ion generator device

 #64
20170000921
2017-01-05

Ion generator mounting device

 #65
20160307724
2016-10-20

Electron exit window foil

 #66
20160293380
2016-10-06

Charged particle beam processing using process gas and cooled surface

 #67
20160189923
2016-06-30

APPARATUS AND METHOD

 #68
20160167010
2016-06-16

Processing biomass

 #69
20160156160
2016-06-02

Ion generator device

 #70
20160155607
2016-06-02

Multiple gas injection system

 #71
20160126057
2016-05-05

Ion milling device

 #72
20160086768
2016-03-24

Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system

 #73
20160067363
2016-03-10

Sanitizer

 #74
20160020068
2016-01-21

Electron beam-induced etching

 #75
20160013013
2016-01-14

Ion generator mounting device

 #76
20150376791
2015-12-31

GAS CLUSTER REACTOR FOR ANISOTROPIC FILM GROWTH

 #77
20150332927
2015-11-19

Gas cluster reactor for anisotropic film growth

 #78
20150311077
2015-10-29

Ion implantation method and ion implantation apparatus

 #79
20150262789
2015-09-17

Method for increased target utilization in ion beam deposition tools

 #80
20150228488
2015-08-13

Semiconductor device manufacturing method and semiconductor manufacturing apparatus

 #81
20150228486
2015-08-13

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

 #82
20150214007
2015-07-30

Ion implantation apparatus and method of controlling ion implantation apparatus

 #83
20150167150
2015-06-18

Formation of an alignment film for a liquid crystal on a substrate

 #84
20150162165
2015-06-11

Charged particle beam lithography system and target positioning device

 #85
20150144808
2015-05-28

Plasma source apparatus and methods for generating charged particle beams

 #86
20150137010
2015-05-21

Multi-electrode stack arrangement

 #87
20150137009
2015-05-21

Multi-electrode cooling arrangement

 #88
20150136995
2015-05-21

Multi-electrode electron optics

 #89
20150131075
2015-05-14

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

 #90
20150123005
2015-05-07

Particle beam transport apparatus

 #91
20150104843
2015-04-16

Processing biomass

 #92
20150060691
2015-03-05

Semiconductor process pumping arrangements

 #93
20150028220
2015-01-29

Electron exit window foil

 #94
20150001423
2015-01-01

Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device

 #95
20140375208
2014-12-25

Ion generator mounting device

 #96
20140373817
2014-12-25

Ion generator device

 #97
20140363978
2014-12-11

Electron beam-induced etching

 #98
20140349235
2014-11-27

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

 #99
20140326896
2014-11-06

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

 #100
20140326594
2014-11-06

Extended lifetime ion source

 #101
20140319994
2014-10-30

Flourine and HF Resistant Seals for an Ion Source

 #102
20140319373
2014-10-30

Charged particle beam drawing apparatus and charged particle beam drawing method

 #103
20140319372
2014-10-30

Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method

 #104
20140319369
2014-10-30

Ion source and a method for in-situ cleaning thereof

 #105
20140306607
2014-10-16

Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source

 #106
20140291543
2014-10-02

Insulation structure of high voltage electrodes for ion implantation apparatus

 #107
20140291511
2014-10-02

Charged particle beam apparatus and sample processing method using charged particle beam apparatus

 #108
20140264086
2014-09-18

Charged particle lithography system

 #109
20140264085
2014-09-18

Method for exposing a wafer

 #110
20140264066
2014-09-18

Deflection scan speed adjustment during charged particle exposure

 #111
20140231667
2014-08-21

Plasma generator

 #112
20140179090
2014-06-26

Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation

 #113
20140168629
2014-06-19

DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #114
20140168628
2014-06-19

Drawing apparatus, and method of manufacturing article

 #115
20140166869
2014-06-19

Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus

 #116
20140123457
2014-05-08

Pre-aligned nozzle/skimmer

 #117
20140117838
2014-05-01

Electron-beam device

 #118
20140041684
2014-02-13

Techniques for improving the performance and extending the lifetime of an ion source

 #119
20130340936
2013-12-26

Method for ex-situ lift-out specimen preparation

 #120
20130334442
2013-12-19

Drift correction method and pattern writing data generation method

 #121
20130248490
2013-09-26

Multiple gas injection system

 #122
20130214468
2013-08-22

Method and apparatus for ex-situ lift-out specimen preparation

 #123
20130105302
2013-05-02

Charged particle beam device and sample production method

 #124
20130015765
2013-01-17

Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source

 #125
20120313047
2012-12-13

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

 #126
20120286170
2012-11-15

Dual pass scanning

 #127
20120267545
2012-10-25

Processing system

 #128
20120142174
2012-06-07

Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system

 #129
20120056100
2012-03-08

Charged particle beam lithography system and target positioning device

 #130
20110293847
2011-12-01

Particle-Beam Induced Processing Using Liquid Reactants

 #131
20110272593
2011-11-10

Gas cluster ion beam system with cleaning apparatus

 #132
20110210263
2011-09-01

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

 #133
20110204264
2011-08-25

Ion implantation through laser fields

 #134
20110140005
2011-06-16

Ion implanting system

 #135
20110111456
2011-05-12

PROCESSING BIOMASS

 #136
20100243913
2010-09-30

PRE-ALIGNED NOZZLE/SKIMMER

 #137
20100044578
2010-02-25

Charged particle beam lithography system and target positioning device

 #138
20100024841
2010-02-04

Ion source and a method for in-situ cleaning thereof

 #139
20070023701
2007-02-01

Device and method for milling of material using ions

 #140
20060022148
2006-02-02

Device and method for milling of material using ions

 #141
16408096
2020-08-04

LUT-based focused ion beam friendly fill-cell design

 #142
16135821
2019-09-03

Methods for acquiring planar view stem images of device structures

 #143
15489153
2018-02-27

System and tool for manipulating insert