Irradiation installation and control method for controlling same

Cross-section processing and observation method and cross-section processing and observation apparatus

Charged particle beam device and sample production method

Ion implantation method and ion implantation apparatus

Implant-induced damage control in ion implantation

Electron beam layer manufacturing using scanning electron monitored closed loop control

DRAWING APPARATUS, TRANSMISSION APPARATUS, RECEIVING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

BEAMLINE ELECTRODE VOLTAGE MODULATION FOR ION BEAM GLITCH RECOVERY

Ion implantation method and ion implantation apparatus

X-ray imaging apparatus and method for controlling X-ray imaging apparatus

Gas cluster ion beam process for opening conformal layer in a high aspect ratio contact via

CHARGED PARTICLE BEAM DEVICE AND METHOD OF MANUFACTURE OF SAMPLE

CHARGED PARTICLE BEAM DEFLECTION METHOD WITH SEPARATE STAGE TRACKING AND STAGE POSITIONAL ERROR SIGNALS

Ion sources, systems and methods

Multi charged particle beam writing apparatus and multi charged particle beam writing method

Multi charged particle beam writing apparatus utilizing multiple staged mutually orthogonal beam blankers

Method and Apparatus for Actively Monitoring an Inductively-Coupled Plasma Ion Source using an Optical Spectrometer

Methods and systems for raster scanning a surface of an object using a particle beam

Method for preparing lamella

Ion implantation method and ion implantation apparatus

System and method for ion implantation with improved productivity and uniformity

Inductively coupled plasma source as an electron beam source for spectroscopic analysis

Method of manufacturing semiconductor device

Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith

Ion implantation apparatus and ion implantation method

Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation

Drawing apparatus, and article manufacturing method

System and method of dosage profile control

Ion implanter

Charged particle beam drawing apparatus and charged particle beam drawing method

Ion beam incident angle detection assembly and method

Apparatus and method for probe shape processing by ion beam

Charged particle beam drawing apparatus and article manufacturing method

Real time monitoring ion beam

Sensitivity correction method for dose monitoring device and particle beam therapy system

MANUFACTURING METHOD AND MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE

Measurement and endpointing of sample thickness

Method of processing of an object

Ion sources, systems and methods

Charged particle beam drawing apparatus and article manufacturing method using same

Apparatus and method for controlled particle beam manufacturing

Navigation and sample processing using an ion source containing both low-mass and high-mass species

System and method of dosage profile control

Handling beam glitches during ion implantation of workpieces

Ion beam irradiation system and ion beam irradiation method

Pattern writing system and method and abnormality diagnosing method

Defect analyzer

Ion sources, systems and methods

Transmission energy contamination detector

Raster methodology, apparatus and system for electron beam layer manufacturing using closed loop control

Method and device for monitoring the intensity of an electron beam

Method for improving implant uniformity during photoresist outgassing

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation

Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter

Electron beam apparatus

Electron beam layer manufacturing using scanning electron monitored closed loop control

Ion beam incident angle detection assembly and method

Charged particle beam drawing apparatus and proximity effect correction method thereof

Electron beam lithography apparatus and electron beam lithography method

Ion beam monitoring arrangement

Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument

Manufacturing method of semiconductor device, method for controlling ion beam, and ion implantation apparatus

Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatus

METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES

Vapor Deposition Electron Beam Current Control

Closed-loop process control for electron beam freeform fabrication and deposition processes

Electron gun evaporation apparatus and film formation method using the electron gun evaporation apparatus

Forming an image while milling a work piece

Real Time Monitoring Ion Beam

Techniques for improving extracted ion beam quality using high-transparency electrodes

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

Focused ion beam apparatus, sample processing method using the same, and computer program for focused ion beam processing

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

Measurement and endpointing of sample thickness

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

Methods and apparatus for sensing unconfinement in a plasma processing chamber

Semiconductor manufacturing apparatus

System and method of beam energy identification for single wafer ion implantation

Method of controlling electron beam focusing of pierce-type electron gun and control apparatus therefor

ION IMPLANTING DEVICE AND METHOD

ENERGY CONTAMINATION MONITOR WITH NEUTRAL CURRENT DETECTION

Method and apparatus for measurement of beam angle in ion implantation

System and method of controlling broad beam uniformity

Deflection signal compensation for charged particle beam

Ultra high precision measurement tool with control loop

System and method of performing uniform dose implantation under adverse conditions

Techniques for improved uniformity tuning in an ion implanter system

Defect analyzer

Apparatus for measuring beam characteristics and a method thereof

Ion implantation method and apparatus

Ion implantation method and apparatus

Ion implantation device control method, control system thereof, control program thereof, and ion implantation device

Ion sources, systems and methods

Predicting dose repeatability in an ion implantation

Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture

System and method for focused ion beam data analysis

Defect recognizing method, defect observing method, and charged particle beam apparatus

Charged particle source with automated tip formation

TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY UNIFORMITY

Implant beam utilization in an ion implanter

Method and system for multi-pass correction of substrate defects

Method and system for adjusting beam dimension for high-gradient location specific processing

Techniques for optical ion beam metrology

Method and apparatus for reviewing defects by detecting images having voltage contrast

Charged particle beam apparatus

Method and system for increasing throughput during location specific processing of a plurality of substrates

Ion doping apparatus, ion doping method, semiconductor device and method of fabricating semiconductor device

Charged particle beam writing method

Focused ion beam processing system and method

Charged particle beam deflection method with separate stage tracking and stage positional error signals

Working method by focused ion beam and focused ion beam working apparatus

Dosage accuracy monitoring systems of implanters

Apparatus for ion beam fabrication

In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

Method and system for ion beam profiling

Ion implantation apparatus

Ion implantation apparatus and method of converging/shaping ion beam used therefor

Ion implantation apparatus and ion implantation method

TUNING AN ION IMPLANTER FOR OPTIMAL PERFORMANCE

METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION

Focusing method of charged particle beam and astigmatism adjusting method of charged particle

Ion implanting apparatus and method for implanting ions

Ion implantation device and method for implanting ions

Method and apparatus of measuring beam current waveforms

Ion beam monitoring arrangement

Semiconductor manufacturing apparatus

Electron beam physical vapor deposition apparatus and processes for adjusting the feed rate of a target and manufacturing a multi-component condensate free of lamination

Method to measure ion beam angle

Magnetic monitoring of a Faraday cup for an ion implanter

Ion implanter

Adaptive controller for ion source

Use of ion induced luminescence (IIL) as feedback control for ion implantation

Column simultaneously focusing a particle beam and an optical beam

Determining dopant information

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

Methods for beam current modulation by ion source parameter modulation

Beam line architecture for ion implanter

Technique for improving ion implantation throughput and dose uniformity

Technique for improving ion implantation based on ion beam angle-related information

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME

Ion beam irradiating apparatus and method of adjusting uniformity of a beam

Method and system for identifying events in FIB

Ion beam measuring method and ion implanting apparatus

Scan pattern for an ion implanter

Mask position detection

ION BEAM PROFILER

Ion beam scanning control methods and systems for ion implantation uniformity

Beam angle adjustment in ion implanters

Charged-particle beam lithography with grid matching for correction of beam shot position deviation

Beam tuning with automatic magnet pole rotation for ion implanters

System and method of ion beam control in response to a beam glitch

Ion source

Charged particle beam exposure apparatus

Charged particle beam exposure apparatus

Charged particle beam lithography system and method for evaluating the same

Ion beam monitoring in an ion implanter using an imaging device

Manufacturing equipment using ION beam or electron beam

Charged particle beam apparatus and charged particle beam resolution measurement method

Lithography system and lithography method using the same

LITHOGRAPHY SYSTEM AND ERROR DETECTION METHOD IN SAME

Electron beam generator for multiple columns

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Closed loop dose control for ion implantation

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Semiconductor mask correcting device and semiconductor mask correcting method

Method of implanting a substrate and an ion implanter for performing the method

Preventing dosage drift with duplicate dose integrators

Ion beam contamination determination

Method and device for aligning a charged particle beam column

Adjusting device of an apparatus for generating a beam of charged particles

Method and apparatus for reviewing defects by detecting images having voltage contrast

Charged particle beam device

Move mechanism for moving target object and charged particle beam writing apparatus

Charged particle beam apparatus

Ion beam angle measurement systems and methods for ion implantation systems

Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems

Particle-optical projection system

Method and apparatus of measuring pattern dimension and controlling semiconductor device process having an error revising unit

Beam current stabilization utilizing gas feed control loop

Ion implanation method and device using thereof

Ion implanter and ion implantation control method thereof

Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method

Multi-pixel electron microbeam irradiator systems and methods for selectively irradiating predetermined locations

Charged particle beam apparatus

Beam exposure correction system and method

Defect analyzer

Ion implant beam angle integrity monitoring and adjusting

Charged particle beam apparatus

Apparatus and method for controlled particle beam manufacturing

Etching depth measuring device, etching apparatus, and etching depth measuring method

Electron beam apparatus, and inspection instrument and inspection process thereof

Systems, control subsystems, and methods for projecting an electron beam onto a specimen

Charged particle beam application system

Methods and apparatus for ion beam angle measurement in two dimensions

Method and apparatus for applying charged particle beam

Charged particle beam apparatus

Charged particle beam apparatus

Technique for uniformity tuning in an ion implanter system

Technique for uniformity tuning in an ion implanter system

Method and apparatus for preparing specimen

Deflection signal compensation for charged particle beam

Semiconductor processing method and system

Method of measuring ion beam position

Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control

Subsurface imaging using an electron beam

Technique for ion beam angle process control

Technique for ion beam angle spread control

Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus

Charged particle beam lithography apparatus and method

Ion implanter, and angle measurement apparatus and beam divergence measurement apparatus for ion implanter

Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus

Aberration adjusting method, device fabrication method, and charged particle beam lithography machine

Ion implant ion beam parallelism and direction integrity determination and adjusting

Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus

Method of making lamina specimen

Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program

Focusing apparatus and lithography system using the same

Exposure device, exposure method, and semiconductor device manufacturing method

Charged-particle beam exposure apparatus and method

Ion-implanting apparatus, ion-implanting method, and device manufactured thereby

Projection electron beam lithography apparatus and method employing an estimator

Wafer charge compensation device and ion implantation system having the same

Power sag detection and control in ion implanting system

Column simultaneously focusing a particle beam and an optical beam

Dose uniformity during scanned ion implantation

Apparatus and methods for two-dimensional ion beam profiling

Exposure parameter obtaining method, exposure parameter evaluating method, semiconductor device manufacturing method, charged beam exposure apparatus, and method of the same

Controlled dose ion implantation

Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same

Ion beam measurement systems and methods for ion implant dose and uniformity control

Device for controlling an apparatus generating a charged particle beam

Electron beam apparatus, and inspection instrument and inspection process thereof

Device and method for measurement of beam angle and divergence

Uniformity control multiple tilt axes, rotating wafer and variable scan velocity

Uniformity control using multiple fixed wafer orientations and variable scan velocity

Diagnostic system for profiling micro-beams

Electron beam apparatus and method with surface height calculator and a dual projection optical unit

System and method for proximity effect correction in imaging systems

Ion implantation apparatus and method

Field emission gun and electron beam instruments

Particle-optical projection system

Film-processing method and film-processing apparatus

Ion beam monitoring arrangement

Modulating ion beam current

Characterizing an electron beam treatment apparatus

Ion implantation

Method for measuring the intensity profile of an electron beam, in particular a beam of an electron-beam machining device, and/or for measuring an optical system for an electron beam and/or for adjusting an optical system for an electron beam, measuring structure for such a method and electron-beam machining device

Ion implanting apparatus and ion implanting method using the same

Method and system for in-situ calibration of a dose controller for ion implantation

Method of measuring pattern dimension and method of controlling semiconductor device process

Precise, in-situ endpoint detection for charged particle beam processing

Method of calculating a pressure compensation recipe for a semiconductor wafer implanter

Fault detection and control methodologies for ion implantation processes, and system for performing same

Correction system, method of correcting deflection distortion, program and method for manufacturing a semiconductor device

Methods for integrated implant monitoring

Electron microscope observation system and observation method

Apparatus for low temperature semiconductor fabrication

Charged particle beam apparatus

Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus

Electron beam exposure apparatus and electron beam measurement module

Method and device for aligning a charged particle beam column

Method and device for aligning a charged particle beam column

Effective temperature calculation method for multi-charged particle beam writing region, multi-charged particle beam writing apparatus, multi-charged particle beam writing method, and recording medium recording program

Three-dimensional (3D) imaging system and method for nanostructure

System and method for hi-precision ion implantation

System, apparatus and method for bunched ribbon ion beam

System, apparatus and method for variable length electrode in linear accelerator

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

Precision substrate material removal using miniature-column charged particle beam arrays

Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems

Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems