Patents-Review.com
ClassID:

205265 ⎘

H01J37/304 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Electron-beam or ion-beam tubes for localised treatment of objects Controlling tubes by information coming from the objects or from the beam , e.g. correction signals

Sub-classes:
Recent Application in this class:
#1
20260148933
2026-05-28

SUBSTRATE PROPERTY CONTROL USING DOSE-DEPENDENT RESPONSE

 #2
20260148931
2026-05-28

GRADIENT-BASED MILLING FOR SEGMENTED ENDPOINTING DURING LAMELLAE THINNING

 #3
20260148928
2026-05-28

MOBILE RADIATION DETECTOR SYSTEM FOR ION IMPLANTERS

 #4
20260135063
2026-05-14

BEAM CONDITIONING FOR DEFECT CONTROL IN BEAMLINE ION IMPLANTER

 #5
20260130190
2026-05-07

FORMATION OF ANGLED GRATINGS

 #6
20260114239
2026-04-23

FAST BEAM CALIBRATION PROCEDURE FOR BEAMLINE ION IMPLANTER

 #7
20260112573
2026-04-23

METHOD AND APPARATUS FOR CHARGE COMPENSATION DURING 3D TOMOGRAPHY

 #8
20260081098
2026-03-19

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING ASTIGMATISM AND NUMERICAL APERTURE

 #9
20260074144
2026-03-12

RASTER BEAM WRITING METHOD AND RASTER BEAM WRITING APPARATUS

 #10
20260066221
2026-03-05

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #11
20260066219
2026-03-05

CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM

 #12
20260018379
2026-01-15

BEAM TUNING FOR NON-UNIFORM ION IMPLANTATION

 #13
20260018378
2026-01-15

ION IMPLANTER, CONTROL SYSTEM, AND TECHNIQUES FOR TUNING ION IMPLANTER

 #14
20260018377
2026-01-15

OPTIMIZATION AND ALIGNMENT OF SHAPED CHARGED PARTICLE BEAMS

 #15
20250393113
2025-12-25

NEUTRAL BEAM INJECTION POWER FEEDBACK CONTROL METHOD

 #16
20250391707
2025-12-25

METHOD AND SYSTEM FOR 3D RECONSTRUCTION OF WAFER STRUCTURE BY DIAGONAL MILLING

 #17
20250391635
2025-12-25

ELECTRON BEAM ADJUSTMENT METHOD, ELECTRON BEAM APPARATUS, AND STORAGE MEDIUM

 #18
20250372345
2025-12-04

INHOMOGENEOUS D-SHAPED FOCUSED ION BEAMS

 #19
20250336642
2025-10-30

ENERGY ACCURACY FOR AN RF LINEAR ACCELERATOR ION IMPLANTATION SYSTEM

 #20
20250316447
2025-10-09

RIBBON BEAM UNIFORMITY TUNING USING MACHINE LEARNING

 #21
20250299919
2025-09-25

ION IMPLANT DOSE MONITORING BY THERMAL WAVE MEASUREMENT

 #22
20250299917
2025-09-25

METHOD FOR ION IMPLANTATION UNIFORMITY CONTROL

 #23
20250299916
2025-09-25

FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF

 #24
20250253126
2025-08-07

CHARGED PARTICLE BEAM WRITING APPARATUS, SHOT DATA CORRECTION METHOD AND CHARGED PARTICLE BEAM WRITING METHOD

 #25
20250232950
2025-07-17

METHOD FOR GENERATING WRITING DATA, WRITING DATA GENERATION APPARATUS, METHOD OF CHARGED-PARTICLE BEAM WRITING, CHARGED-PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

 #26
20250218722
2025-07-03

MULTIMODE DOSE COMPENSATION SYSTEM

 #27
20250191917
2025-06-12

WAFER TOTAL THICKNESS VARIATION USING MASKLESS IMPLANT

 #28
20250166961
2025-05-22

MICROSCOPY IMAGING METHOD AND SYSTEM

 #29
20250157821
2025-05-15

BACKSIDE IMPLANT FOR WAFER CURVATURE CONTROL

 #30
20250157789
2025-05-15

E-BEAM EXPOSURE METHOD AND MASK MANUFACTURING METHOD COMPRISING THE SAME

 #31
20250149287
2025-05-08

Ion Milling Device

 #32
20250140569
2025-05-01

LOCALIZED STRESS MODULATION BY IMPLANT TO BACK OF WAFER

 #33
20250140523
2025-05-01

SUBSTRATE STRESS MANAGEMENT USING VARIABLE ENERGY AND VARIABLE DOSE IMPLANTATION

 #34
20250140520
2025-05-01

APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING

 #35
20250140519
2025-05-01

METHOD OF ADJUSTING CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRITING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM

 #36
20250140518
2025-05-01

MACHINING METHOD AND CHARGED PARTICLE BEAM DEVICE

 #37
20250112026
2025-04-03

INVERTING IMPLANTER PROCESS MODEL FOR PARAMETER GENERATION

 #38
20250104964
2025-03-27

METHOD FOR CALCULATING EFFECTIVE TEMPERATURE OF MULTI-CHARGED PARTICLE BEAM WRITING REGION, MULTI-CHARGED PARTICLE BEAM WRITING METHOD, NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM, AND MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS

 #39
20250095957
2025-03-20

ION PRODUCTION SYSTEM WITH A MASS RESOLVING APERTURE HAVING A SCATTER RECESS

 #40
20250087452
2025-03-13

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD

 #41
20250079120
2025-03-06

MULTI-CHARGED PARTICLE BEAM WRITING METHOD AND MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS

 #42
20250037969
2025-01-30

CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD, AND DISCHARGE DETECTION APPARATUS

 #43
20240412946
2024-12-12

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD

 #44
20240404780
2024-12-05

SEMICONDUCTOR PROCESSING APPARATUS

 #45
20240395492
2024-11-28

COMPENSATION RASTER SCANNING

 #46
20240387142
2024-11-21

INTEGRATED SYNCHRONOUS SYSTEM FOR GRIDDED ION SOURCES

 #47
20240363307
2024-10-31

MARK POSITION MEASUREMENT APPARATUS, CHARGED PARTICLE BEAM WRITING APPARATUS, AND MARK POSITION MEASUREMENT METHOD

 #48
20240321548
2024-09-26

Integrated Circuit with FIB-Ready Structures

 #49
20240304413
2024-09-12

Optimizing Image Distortion in a Multi Beam Charged Particle Processing Apparatus

 #50
20240297016
2024-09-05

APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT ION SOURCE AND RADICAL SOURCE

 #51
20240290575
2024-08-29

DETECTION USING SEMICONDUCTOR DETECTOR

 #52
20240282550
2024-08-22

BLANKING APERTURE ARRAY SYSTEM AND CHARGED PARTICLE BEAM WRITING APPARATUS

 #53
20240274404
2024-08-15

System and Method for Reducing Particle Formation in a Process Chamber of an Ion Implanter

 #54
20240242931
2024-07-18

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD, AND COMPUTER READABLE RECORDING MEDIA STORING PROGRAM

 #55
20240222070
2024-07-04

XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER

 #56
20240221970
2024-07-04

METHOD FOR MANUFACTURING A HEAD FOR IRRADIATING A TARGET WITH A BEAM OF CHARGED PARTICLES

 #57
20240203743
2024-06-20

METHOD FOR PRECISION OXIDATION CONTROL BY ION IMPLANTATION

 #58
20240203684
2024-06-20

METHOD FOR ANALYZING DISTURBING INFLUENCES IN A MULTI-BEAM PARTICLE MICROSCOPE, ASSOCIATED COMPUTER PROGRAM PRODUCT AND MULTI-BEAM PARTICLE MICROSCOPE

 #59
20240194444
2024-06-13

ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM

 #60
20240177966
2024-05-30

Fiducial guided cross-sectioning and lamella preparation with tomographic data collection

 #61
20240112881
2024-04-04

SUBSTRATE ANALYSIS SYSTEM

 #62
20240079207
2024-03-07

MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WORKING DISTANCE IN A MULTI-BEAM CHARGED PARTICLE SYSTEM

 #63
20240071719
2024-02-29

Closed loop faraday correction of a horizontal beam current profile for uniform current tuning

 #64
20240047175
2024-02-08

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND RELATED SYSTEM AND COMPUTER PROGRAM PRODUCT

 #65
20240029997
2024-01-25

APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM

 #66
20240013999
2024-01-11

MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS

 #67
20230420224
2023-12-28

Operating a gas feed device for a particle beam apparatus

 #68
20230411115
2023-12-21

DRAWING APPARATUS, DRAWING METHOD, AND METHOD OF MANUFACTURING PLATE

 #69
20230377833
2023-11-23

System and methods for automated processing of multiple samples in a BIB system

 #70
20230377830
2023-11-23

Automated ion-beam alignment for dual-beam instrument

 #71
20230375941
2023-11-23

PROXIMITY EFFECT CORRECTION IN ELECTRON BEAM LITHOGRAPHY

 #72
20230369014
2023-11-16

DOSE MAPPING AND SUBSTRATE ROTATION FOR SUBSTRATE CURVATURE CONTROL WITH IMPROVED RESOLUTION

 #73
20230369010
2023-11-16

Ion Milling Device and Ion Milling Method

 #74
20230260747
2023-08-17

ION IMPLANTER AND ION IMPLANTATION METHOD

 #75
20230260744
2023-08-17

METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUCT, AND MATERIAL PROCESSING DEVICE FOR CARRYING OUT THE METHOD

 #76
20230238214
2023-07-27

Real time photoresist outgassing control system and method

 #77
20230230801
2023-07-20

Focused Ion Beam System and Method of Correcting Deviation of Field of View of Ion Beam

 #78
20230215689
2023-07-06

Method of Automatic Detection of Required Peak for Sample Machining by Focused Ion Beam

 #79
20230168589
2023-06-01

Proximity effect correction in electron beam lithography

 #80
20230140499
2023-05-04

ION IMPLANTATION METHOD, ION IMPLANTER, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #81
20230139375
2023-05-04

IN-SITU ETCH RATE OR DEPOSITION RATE MEASUREMENT SYSTEM

 #82
20230107036
2023-04-06

Charged particle beam writing method and charged particle beam writing apparatus

 #83
20230095091
2023-03-30

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PARTICLE BEAM WRITING METHOD

 #84
20230057995
2023-02-23

FAST BEAM CALIBRATION PROCEDURE FOR BEAMLINE ION IMPLANTER

 #85
20230045072
2023-02-09

Detection and correction of system responses in real-time

 #86
20230044598
2023-02-09

Microscopy imaging method for 3D tomography with predictive drift tracking for multiple charged particle beams

 #87
20230038439
2023-02-09

Ion implanter and model generation method

 #88
20230038392
2023-02-09

Blended energy ion implantation

 #89
20230016619
2023-01-19

METHOD FOR ION IMPLANTATION UNIFORMITY CONTROL

 #90
20230016122
2023-01-19

Method and apparatus for controlled ion implantation

 #91
20230005711
2023-01-05

Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus

 #92
20220415610
2022-12-29

3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample

 #93
20220402036
2022-12-22

Devices, systems, and methods for using an imaging device to calibrate and operate a plurality of electron beam guns in an additive manufacturing system

 #94
20220392744
2022-12-08

Specimen machining device and information provision method

 #95
20220384141
2022-12-01

Method for controlling dynamically controllable ultrawide-amplitude and high-response ion source

 #96
20220359155
2022-11-10

Tuning gas cluster ion beam systems

 #97
20220344171
2022-10-27

Localized stress modulation by implant to back of wafer

 #98
20220319807
2022-10-06

Charged particle beam writing apparatus and charged particle beam writing method

 #99
20220319806
2022-10-06

Apparatus, system and method for energy spread ion beam

 #100
20220301926
2022-09-22

FORMATION OF ANGLED GRATINGS

 #101
20220301817
2022-09-22

Ion beam irradiation apparatus and program therefor

 #102
20220293391
2022-09-15

Ion milling device and milling processing method using same

 #103
20220285125
2022-09-08

Sample milling apparatus and method of adjustment therefor

 #104
20220254602
2022-08-11

Ion implanter and ion implantation method

 #105
20220246397
2022-08-04

Temperature controlled/electrically biased wafer surround

 #106
20220189736
2022-06-16

Ion implantation apparatus

 #107
20220148851
2022-05-12

Apparatus of plural charged-particle beams

 #108
20220122805
2022-04-21

ION BEAM DELAYERING SYSTEM AND METHOD, AND ENDPOINT MONITORING SYSTEM AND METHOD THEREFOR

 #109
20220107569
2022-04-07

Multiple charged particle beam writing apparatus and multiple charged particle beam writing method

 #110
20220102113
2022-03-31

Multiple-charged particle-beam irradiation apparatus and multiple-charged particle-beam irradiation method

 #111
20220102112
2022-03-31

Ion implanter and particle detection method

 #112
20220093360
2022-03-24

Data generation method and charged particle beam irradiation device

 #113
20220059320
2022-02-24

Ion implantation method and device

 #114
20220005669
2022-01-06

Ion beam delayering system and method, topographically enhanced delayered sample produced thereby, and imaging methods and systems related thereto

 #115
20210407764
2021-12-30

Detection using semiconductor detector

 #116
20210327678
2021-10-21

Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system

 #117
20210305009
2021-09-30

Beam steering correction for attenuating the degradation of positional accuracy of charged particle and laser light beams caused by mechanical vibrations

 #118
20210280388
2021-09-09

Ion implanter and model generation method

 #119
20210257185
2021-08-19

Multi-charged particle beam writing apparatus and multi-charged particle beam writing method

 #120
20210225611
2021-07-22

Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method

 #121
20210193430
2021-06-24

Ion milling device and ion milling method

 #122
20210183615
2021-06-17

Ion milling device

 #123
20210175048
2021-06-10

Techniques for determining and correcting for expected dose variation during implantation of photoresist-coated substrates

 #124
20210166946
2021-06-03

Apparatus and techniques for substrate processing using independent ion source and radical source

 #125
20210159047
2021-05-27

Obtaining an energy spectrum of a focused ion beam

 #126
20210159046
2021-05-27

Method and system for iteratively cross-sectioning a sample to correlatively targeted sites

 #127
20210125810
2021-04-29

Isolated LINAC resonator pickup circuit

 #128
20210110996
2021-04-15

Method and apparatus for examining a beam of charged particles

 #129
20210098228
2021-04-01

System and method of preparing integrated circuits for backside probing using charged particle beams

 #130
20210043421
2021-02-11

Ion implanter and ion implantation method

 #131
20210040600
2021-02-11

Methods for directed irradiation synthesis with ion and thermal beams

 #132
20210020401
2021-01-21

Ion implanter and ion implantation method

 #133
20200388464
2020-12-10

Apparatus of plural charged-particle beams

 #134
20200357605
2020-11-12

Charged particle beam writing method and charged particle beam writing apparatus

 #135
20200335309
2020-10-22

Operating a gas supply device for a particle beam device

 #136
20200303163
2020-09-24

Ion implanter

 #137
20200266032
2020-08-20

Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control

 #138
20200258715
2020-08-13

Charged particle beam writing apparatus and charged particle beam writing method

 #139
20200234919
2020-07-23

Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus, and multiple electron beam irradiation method

 #140
20200203122
2020-06-25

Optical alignment correction using convolutional neural network evaluation of a beam image

 #141
20200194224
2020-06-18

Detection and correction of system responses in real-time

 #142
20200185191
2020-06-11

Particle beam system and method for operating a particle beam system

 #143
20200176218
2020-06-04

Method and system for cross-sectioning a sample with a preset thickness or to a target site

 #144
20200144109
2020-05-07

Formation of angled gratings

 #145
20200133139
2020-04-30

Proximity effect correction in electron beam lithography

 #146
20200095688
2020-03-26

Dose-based end-pointing for low-kV FIB milling in TEM sample preparation

 #147
20200066485
2020-02-27

Compensated location specific processing apparatus and method

 #148
20200051780
2020-02-13

Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method

 #149
20200043700
2020-02-06

Ion implantation method

 #150
20200027692
2020-01-23

Tomography-assisted TEM prep with requested intervention automation workflow

 #151
20190378684
2019-12-12

Neutral atom imaging system

 #152
20190362937
2019-11-28

Electron beam irradiation method, electron beam irradiation apparatus, and computer readable non-transitory storage medium

 #153
20190355628
2019-11-21

Process window analysis

 #154
20190355553
2019-11-21

Charged-particle beam writing apparatus and charged-particle beam writing method

 #155
20190333734
2019-10-31

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD

 #156
20190304749
2019-10-03

Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method

 #157
20190304743
2019-10-03

Charged particle beam system and method

 #158
20190295814
2019-09-26

Intelligent pre-scan in scanning transmission charged particle microscopy

 #159
20190292652
2019-09-26

Methods for directed irradiation synthesis with ion and thermal beams

 #160
20190292046
2019-09-26

Sensor characteristic evaluation method and charged particle beam device

 #161
20190279843
2019-09-12

Apparatus, method, and program for processing and observing cross section, and method of measuring shape

 #162
20190272976
2019-09-05

Two-axis variable width mass resolving aperture with fast acting shutter motion

 #163
20190270159
2019-09-05

Methods and systems for raster scanning a surface of an object using a particle beam

 #164
20190252151
2019-08-15

Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage

 #165
20190244785
2019-08-08

Ion implantation apparatus and measurement device

 #166
20190189392
2019-06-20

CHARGED PARTICLE BEAM SYSTEM AND METHODS

 #167
20190172680
2019-06-06

Endpointing for focused ion beam processing

 #168
20190172678
2019-06-06

Method of obtaining beam deflection shape and method of obtaining arrangement angle of blanking aperture array plate

 #169
20190103252
2019-04-04

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #170
20190103251
2019-04-04

Depth-controllable ion milling

 #171
20190066977
2019-02-28

Ion implantation method, ion implantation apparatus and semiconductor device

 #172
20190066975
2019-02-28

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #173
20190062157
2019-02-28

Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus

 #174
20190051492
2019-02-14

Method of analyzing surface modification of a specimen in a charged-particle microscope

 #175
20190043693
2019-02-07

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #176
20190035603
2019-01-31

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #177
20190027339
2019-01-24

Charged particle beam treatment apparatus

 #178
20190015924
2019-01-17

Raster methodology, apparatus and system for electron beam layer manufacturing using closed loop control

 #179
20190004429
2019-01-03

Method for acquiring parameter for dose correction of charged particle beam, charged particle beam writing method, and charged particle beam writing apparatus

 #180
20180364563
2018-12-20

METHOD AND APPARATUS FOR INSPECTING A SAMPLE

 #181
20180350557
2018-12-06

Ion implanter, ion beam irradiated target, and ion implantation method

 #182
20180342371
2018-11-29

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD

 #183
20180301318
2018-10-18

Ion milling device

 #184
20180240642
2018-08-23

Method and apparatus for transmission electron microscopy

 #185
20180209032
2018-07-26

Methods for directed irradiation synthesis with ion and thermal beams

 #186
20180197715
2018-07-12

Compensated location specific processing apparatus and method

 #187
20180182596
2018-06-28

Charged particle beam apparatus and method for controlling charged beam apparatus

 #188
20180166254
2018-06-14

Multi charged particle beam exposure method and multi charged particle beam exposure apparatus

 #189
20180166248
2018-06-14

Blanking deflector, and multi charged particle beam writing apparatus using three deflector electrodes and a transmission line

 #190
20180144905
2018-05-24

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #191
20180138013
2018-05-17

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #192
20180122616
2018-05-03

Charged particle beam writing apparatus, and charged particle beam writing method

 #193
20180076006
2018-03-15

Blanking aperture array apparatus, charged particle beam lithography apparatus, and electrode testing method

 #194
20180068829
2018-03-08

Ion implantation apparatus and ion implantation method

 #195
20180068828
2018-03-08

In situ beam current monitoring and control in scanned ion implantation systems

 #196
20180053627
2018-02-22

Microscopy imaging method and system

 #197
20180053626
2018-02-22

Ion beam mill etch depth monitoring with nanometer-scale resolution

 #198
20180040453
2018-02-08

Multi charged particle beam writing apparatus and method of adjusting the same

 #199
20180033592
2018-02-01

Charged particle beam drawing method and charged particle beam drawing apparatus

 #200
20170358453
2017-12-14

Material removal process for self-aligned contacts

 #201
20170345659
2017-11-30

Material removal process for self-aligned contacts

 #202
20170319729
2017-11-09

Low voltage electron beam dosimeter device and method

 #203
20170294288
2017-10-12

Method and device for characterizing an electron beam

 #204
20170278672
2017-09-28

Charged particle beam writing method, and charged particle beam writing apparatus

 #205
20170271127
2017-09-21

Ion implantation apparatus and measurement device

 #206
20170229280
2017-08-10

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #207
20170221677
2017-08-03

Ion milling device and ion milling method

 #208
20170207063
2017-07-20

Method for implantation of semiconductor wafers having high bulk resistivity

 #209
20170170019
2017-06-15

Material removal process for self-aligned contacts

 #210
20170154750
2017-06-01

Electron gun, control method and control program thereof, and three-dimensional shaping apparatus

 #211
20170146910
2017-05-25

Method of aperture alignment and multi charged particle beam writing apparatus

 #212
20170140897
2017-05-18

Microscopy imaging method and system

 #213
20170133200
2017-05-11

Particle beam irradiation apparatus for irradiating a subject with an arbitrary number of particles

 #214
20170125211
2017-05-04

Method of cleaning electrostatic chuck

 #215
20170103869
2017-04-13

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

 #216
20170077001
2017-03-16

Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system

 #217
20170069460
2017-03-09

Charged particle beam lithography apparatus and charged particle beam lithography method

 #218
20160365224
2016-12-15

Method of analyzing surface modification of a specimen in a charged-particle microscope

 #219
20160365223
2016-12-15

Method for evaluating charged particle beam drawing apparatus

 #220
20160322196
2016-11-03

Multi-charged particle beam writing apparatus and multi-charged particle beam writing method

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2016-10-27

Charged particle beam writing apparatus and charged particle beam writing method

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20160314930
2016-10-27

Device, manufacturing method, and exposure apparatus

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20160312357
2016-10-27

Apparatus and method for controlling implant process

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20160307731
2016-10-20

Method for verifying characteristics of an electron beam

 #225
20160300691
2016-10-13

System for manufacturing semiconductor device

 #226
20160254122
2016-09-01

Method for generating parameter pattern, ion implantation method and feed forward semiconductor manufacturing method

 #227
20160247664
2016-08-25

Bipolar wafer charge monitor system and ion implantation system comprising same

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20160217973
2016-07-28

Monitoring device, ion implantation device, and monitoring method

 #229
20160211116
2016-07-21

Method and device for characterizing an electron beam

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20160211115
2016-07-21

Method for the correction of electron proximity effects

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20160211113
2016-07-21

Differential imaging with pattern recognition for process automation of cross sectioning applications

 #232
20160203948
2016-07-14

Charged particle beam system and methods

 #233
20160189928
2016-06-30

System and method to improve productivity of hybrid scan ion beam implanters

 #234
20160189927
2016-06-30

Method of measuring vertical beam profile in an ion implantation system having a vertical beam angle device

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20160189926
2016-06-30

Beam profiling speed enhancement for scanned beam implanters

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20160181065
2016-06-23

Charged particle beam drawing apparatus and charged particle beam drawing method

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20160181062
2016-06-23

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

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20160181058
2016-06-23

Method for processing and/or for observing an object, and particle beam device for carrying out the method

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20160172159
2016-06-16

Apparatus and method to control an ion beam

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20160172156
2016-06-16

Source for selectively providing positively or negatively charged particles for a focusing column

 #241
20160163508
2016-06-09

Ion milling device

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20160163507
2016-06-09

Deposition method and focused ion beam system

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20160161849
2016-06-09

Multi charged particle beam writing apparatus and multi charged particle beam writing method

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20160155608
2016-06-02

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

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20160133439
2016-05-12

High energy ion implanter, beam current adjuster, and beam current adjustment method

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20160133438
2016-05-12

Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same

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20160126060
2016-05-05

Endpointing for focused ion beam processing

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20160111249
2016-04-21

Methods and apparatus for determining, using, and indicating ion beam working properties

 #249
20160093468
2016-03-31

Method of reducing the thickness of a target sample

 #250
20160093466
2016-03-31

Method for correcting drift of accelerating voltage, method for correcting drift of charged particle beam, and charged particle beam writing apparatus

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20160090645
2016-03-31

Method for structuring an object with the aid of a particle beam apparatus

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20160079032
2016-03-17

Ion implanter and method of ion beam tuning

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20160071687
2016-03-10

Charged particle radiation device and specimen preparation method using said device

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20160035634
2016-02-04

Ion implantation method and ion implantation apparatus performing the same

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20160035534
2016-02-04

Method for analyzing and/or processing an object as well as a particle beam device for carrying out the method

 #256
20160027612
2016-01-28

Apparatus for preparing a sample for microscopy

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20160016254
2016-01-21

Raster methodology, apparatus and system for electron beam layer manufacturing using closed loop control

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20160005569
2016-01-07

Charged particle beam writing apparatus and charged particle beam writing method

 #259
20150364297
2015-12-17

Beam irradiation apparatus and beam irradiation method

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20150347660
2015-12-03

Compensation of dose inhomogeneity using overlapping exposure spots

 #261
20150325408
2015-11-12

Charged particle beam apparatus and program

 #262
20150325405
2015-11-12

Processing apparatus and method of treating a substrate

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20150325404
2015-11-12

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN ARTICLE

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20150311077
2015-10-29

Ion implantation method and ion implantation apparatus

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20150303025
2015-10-22

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

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20150292077
2015-10-15

Methods for directed irradiation synthesis with ion and thermal beams

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20150270098
2015-09-24

Charged particle beam treatment apparatus and method of adjusting path length of charged particle beam

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20150270097
2015-09-24

Charged particle beam treatment apparatus

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20150262791
2015-09-17

ELECTRON BEAM DRAWING METHOD, ELECTRON BEAM DRAWING APPARATUS AND DATA GENERATING METHOD

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20150262788
2015-09-17

Cross-section processing and observation method and cross-section processing and observation apparatus

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20150243567
2015-08-27

Electron radiation monitoring electrode system to prevent gold spitting and resist cross-linking during evaporation

 #272
20150243476
2015-08-27

Apparatus and methods for implementing predicted systematic error correction in location specific processing

 #273
20150228453
2015-08-13

Method for acquiring settling time

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20150221473
2015-08-06

Charged particle beam apparatus

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20150214006
2015-07-30

Endpoint detection for photolithography mask repair

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20150214005
2015-07-30

Method for enhancing beam utilization in a scanned beam ion implanter

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20150213997
2015-07-30

Ion sources, systems and methods

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2015-07-30

Using wafer geometry to improve scanner correction effectiveness for overlay control

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20150206708
2015-07-23

Charged particle beam apparatus and processing method

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20150200071
2015-07-16

Inspection of regions of interest using an electron beam system

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20150162166
2015-06-11

System and method for controlling ion implanter

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20150155135
2015-06-04

DRAWING APPARATUS, DRAWING METHOD, AND METHOD FOR FABRICATING ARTICLE

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20150136978
2015-05-21

Focused ion beam system and method of making focal adjustment of ion beam

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20150136977
2015-05-21

Differential imaging with pattern recognition for process automation of cross sectioning applications

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20150123005
2015-05-07

Particle beam transport apparatus

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20150115156
2015-04-30

Cross section processing method and cross section processing apparatus

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20150102236
2015-04-16

Electron beam exposure apparatus and method of detecting error using the same

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2015-03-05

WRITING DATA CORRECTING METHOD, WRITING METHOD, AND MANUFACTURING METHOD OF MASK OR TEMPLATE FOR LITHOGRAPHY

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2015-03-05

Method and apparatus for predicting a growth rate of deposited contaminants

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2015-02-19

Method for processing and/or for observing an object, and particle beam device for carrying out the method

 #291
20140374624
2014-12-25

Sensitivity correction method for dose monitoring device and particle beam therapy system

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20140367584
2014-12-18

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

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20140353527
2014-12-04

Using wafer geometry to improve scanner correction effectiveness for overlay control

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2014-11-06

Source for selectively providing positively or negatively charged particles for a focusing column

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2014-10-30

Particle beam irradiation apparatus

 #296
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2014-10-02

Electron beam melting furnace and method for operating same

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20140265827
2014-09-18

Current regulation method of multiple beams

 #298
20140255826
2014-09-11

Endpoint detection for photolithography mask repair

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20140239200
2014-08-28

Cathode operating temperature adjusting method, and writing apparatus

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20140225008
2014-08-14

Multi charged particle beam writing apparatus and multi charged particle beam writing method