SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Charged Particle Beam Apparatus and Charged Particle Gun

CHARGED PARTICLE BEAM DEVICE

ELECTRON BEAM CURING OF CLEAR AND PIGMENTED COATINGS FOR THE COIL INDUSTRY AND METHOD THEREOF

ION PRODUCTION SYSTEM WITH A MASS RESOLVING APERTURE HAVING A SCATTER RECESS

NANOSCALE FAILURE ANALYSIS METHOD

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS

Method for Reducing Line-End Space in Integrated Circuit Patterning

ELECTRON BEAM ADDITIVE MANUFACTURING SYSTEM AND CONTROL COMPONENTS

METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE

ALD PROCESS WITH PLASMA TREATMENT

Energy filter element for ion implantation systems for the use in the production of wafers

PROCESS APPARATUS

Semiconductor wafer

Method for reducing line-end space in integrated circuit patterning

Wafer scanning apparatus and method for focused beam processing

METHOD AND APPARATUS FOR PROCESSING A LITHOGRAPHIC MASK

Method for manufacturing semiconductor structure

Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope

Pattern enhancement using a gas cluster ion beam

Method and apparatus for an imaging system

Energy filter element for ion implantation systems for the use in the production of wafers

INHIBITING BACTERIA COLONIZATION WITHOUT ANTIBIOTICS

Electron beam additive manufacturing system and control components

Method for reducing line-end space in integrated circuit patterning

Ion source with single-slot tubular cathode

Automatic sample preparation apparatus

Wafer scanning apparatus and method for focused beam processing

Pattern enhancement using a gas cluster ion beam

Methods of post-curing additive manufacturing parts using electron beams

In situ angle measurement using channeling

Method and device for implanting ions in wafers

Devices and methods for examining and/or processing an element for photolithography

Energy filter element for ion implantation systems for the use in the production of wafers

Method for manufacturing semiconductor structure

Plasma processing apparatuses having a dielectric injector

Automatic sample preparation apparatus and automatic sample preparation method

AUTOMATIC SAMPLE PREPARATION APPARATUS

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

System and method to increase surface friction across a hydrophobic, anti-fouling, and oleophobic coated substrate

Method and apparatus for an imaging system

UPGRADING PROCESS STREAMS

PROCESSING MATERIALS

TREATING BIOMASS

PROCESSING BIOMASS

ENCLOSURES FOR TREATING MATERIALS

Automatic processing device

Method for producing a TEM sample

Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope

RECONFIGURABLE PROCESSING ENCLOSURES

Charged particle beam system and method

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Deflection sensitivity calculation method and deflection sensitivity calculation system

Ion source and ion implantation apparatus

CONTROLLING PROCESS GASES

Image analysis apparatus and charged particle beam apparatus

Endpointing for focused ion beam processing

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

Textiles and methods and systems for producing textiles

Equipment protecting enclosures

Tin-containing dopant compositions, systems and methods for use in ion implantation systems

Ion beam irradiation device and ion beam irradiation method

Processing biomass

Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby

Method of analyzing surface modification of a specimen in a charged-particle microscope

Processing materials

Automatic sample preparation apparatus

Array for processing materials

Processing materials

Method and apparatus for an imaging system

MEDICAL DEVICE FOR BONE IMPLANT AND METHOD FOR PRODUCING SUCH A DEVICE

Fiducial design for tilted or glancing mill operations with a charged particle beam

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beams

ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON

Deposition or treatment of diamond-like carbon in a plasma reactor

Microstructure manufacturing method and microstructure manufacturing apparatus

Plasma treatment of an elastomeric material for adhesion

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

Upgrading process streams

Treatment method for inhibiting platelet attachment and articles treated thereby

Semiconductor manufacturing apparatus and method thereof

Phosphine co-gas for carbon implants

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

Processing materials

Processing materials

Cluster tool and manufacuturing method of semiconductor structure using the same

Mirror ion microscope and ion beam control method

Method and apparatus for an imaging system of biological material

Reconfigurable processing enclosures

Height measurement device and charged particle beam device

Composite charged particle beam apparatus and control method thereof

Attachment of nano-objects to beam-deposited structures

Method for producing a foam web

Method of stem-based drilling of ultrathin silicon nitride nanopores and nanopore arrays

Method and device for characterizing an electron beam

Array for processing materials

Equipment protecting enclosures

Ion sorter

TEXTILES AND METHODS AND SYSTEMS FOR PRODUCING TEXTILES

Treating biomass

Slide part and surface processing method of the same

Tin-containing dopant compositions, systems and methods for use in ION implantation systems

Controlling process gases

Equipment protecting enclosures

Pattern measurement method and pattern measurement device

Treatment method for defect reduction in a substrate and substrates treated thereby

Automatic sample preparation apparatus

Sample processing method and charged particle beam device

Array for processing materials

Processing materials

Reconfigurable processing enclosures

Method of analyzing surface modification of a specimen in a charged-particle microscope

Processing materials

Method for verifying characteristics of an electron beam

Method of manipulating a sample in an evacuated chamber of a charged particle apparatus

Equipment protecting enclosures

Methods of altering the refractive index of materials

Array for processing materials

Method and device for characterizing an electron beam using an X-ray detector with a patterned aperture resolver and patterned aperture modulator

Method and device for characterizing an electron beam

Method of modifying a sample surface layer from a microscopic sample

Method and apparatus for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Sample holder and focused-ion-beam machining device provided therewith

Endpointing for focused ion beam processing

Electron detection system

Ion source devices and methods

Process gas enhancement for beam treatment of a substrate

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOLID SURFACE SMOOTHING APPARATUS

Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus

Plasma treatment of an elastomeric material for adhesion

Plasma ion source for use with a focused ion beam column with selectable ions

Method and apparatus for a high resolution imaging system

Method for soil treatment

Fiducial design for tilted or glancing mill operations with a charged particle beam

Electron sensitive glass and optical circuits, microstructures formed therein

Ion implantation apparatus

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

Methods for perforating multi-layer graphene through ion bombardment

Method and apparatus for beam deflection in a gas cluster ion beam system

TEM sample preparation

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Treating biomass

Focused ion beam apparatus

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Method and apparatus for an imaging system

Projection exposure apparatus for microlithography comprising an optical distance measurement system

Ion beam irradiation device

Atom probe tomography sample preparation for three-dimensional (3D) semiconductor devices

Particle beam transport apparatus

Apparatus to control an ion beam

Semiconductor manufacturing apparatus and method thereof

Textiles and methods and systems for producing textiles

Charged particle beam apparatus

Charged particle beam apparatus

Electron beam conditioning

High-energy ion implanter

Low contamination scanner for GCIB system

Upgrading process streams

Method and system for modifying substrate relief features using ion implantation

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOLID SURFACE SMOOTHING APPARATUS

Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for Analysis

Processing materials

Array for processing materials

Reconfigureable processing enclosures

Enclosures for treating materials

Controlling process gases

Topography minimization of neutral layer overcoats in directed self-assembly applications

Ion beam system and method of operating an ion beam system

Ion source, nanofabrication apparatus comprising such source, and a method for emitting ions

Irradiation installation and control method for controlling same

CHARGED PARTICLE BEAM DEVICE

Slide part and surface processing method of the same

Movement-free bending method for one-dimensional or two-dimensional nanostructure using ion beam

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOLID SURFACE SMOOTHING APPARATUS

Charged particle beam writing apparatus and charged particle beam writing method

Ion source devices and methods

Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly

Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly

Charged Particle Optics with Azimuthally-Varying Third-Order Aberrations for Generation of Shaped Beams

Ion beam device and machining method

Electrode of electrostatic lens and method of manufacturing the same

Drawing apparatus, drawing method, and method of manufacturing article

Solar cell, solar cell manufacturing device, and method for manufacturing the same

Isotope ion microscope methods and systems

Systems and methods providing electron beam writing to a medium

Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions

Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith

Ion implantation apparatus and ion implantation method

Composite charged particle beam apparatus

Ion beam incident angle detection assembly and method

System and method for ion implantation with improved productivity and uniformity

Charging-free electron beam cure of dielectric material

Aberration-corrected wien ExB mass filter with removal of neutrals from the Beam

Ion beam system and method of operating ion beam system

Method to alter silicide properties using GCIB treatment

Systems and methods providing electron beam writing to a medium

Semiconductor structure made using improved multiple ion implantation process

Scanner for GCIB system

Method and apparatus for forming the doped cryo-biology specimen of electron microscope

Energy beam drawing apparatus and method of manufacturing device

Coating and ion beam mixing apparatus and method to enhance the corrosion resistance of the materials at the elevated temperature using the same

Semiconductor structure made using improved multiple ion implantation process

Method and system for modifying patterned photoresist using multi-step ion implantation

Navigation and sample processing using an ion source containing both low-mass and high-mass species

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby

Apparatus and method for modifying physical properties of nanostructure using focused electron beam, and nano-barcode and serial-junction nanowire fabricated thereby

Method for modifying a material layer using gas cluster ion beam processing

HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM

Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith

Method and system for modifying substrate relief features using ion implantation

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

Slide part and surface processing methods of the same

Isotope ion microscope methods and systems

Method to alter silicide properties using GCIB treatment

Hot edge ring with sloped upper surface

Ion beam incident angle detection assembly and method

Electron beam lithography apparatus and electron beam lithography method

CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER

System and method for ion implantation with improved productivity and uniformity

Charged particle optical system comprising an electrostatic deflector

Method for enhancing a substrate using gas cluster ion beam processing

Method for modifying a material layer using gas cluster ion beam processing

Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam

Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Solid Surface Smoothing Apparatus

Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles

Multiple nozzle gas cluster ion beam system

Multiple nozzle gas cluster ion beam processing system and method of operating

Electron beam annealing apparatus and annealing methods using the same

Substrate processing apparatus and cleaning method of the same

Method for marking an item based on colour centres

METALLIC PROBE, AND METHOD AND APPARATUS FOR FABRICATING THE SAME

Method of machining a work piece with a focused particle beam

Method to direct pattern metals on a substrate

COATING AND ION BEAM MIXING APPARATUS AND METHOD TO ENHANCE THE CORROSION RESISTANCE OF THE MATERIALS AT THE ELEVATED TEMPERATURE USING THE SAME

Charging-free electron beam cure of dielectric material

Ion gun system, vapor deposition apparatus, and method for producing lens

Method and apparatus for surface processing of a substrate using an energetic particle beam

Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces

High resolution plasma etch

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

Gas cluster ion beam emitting apparatus and method for ionization of gas cluster

Method and device for ion beam processing of surfaces

Method for marking a crystalline material using cathodoluminescence

Multi-pixel electron microbeam irradiator systems and methods for selectively irradiating predetermined locations

Electron beam irradiating apparatus

VACUUM REACTION CHAMBER WITH X-LAMP HEATER

Vacuum reaction chamber with x-lamp heater

Method for focusing patterning nano-sized structure

Precision shape modification of nanodevices with a low-energy electron beam

Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam

Method and devices for producing corpuscular radiation systems

Gas cluster ion beam emitting apparatus and method for ionization of gas cluster

Apparatus and methods for ion beam implantation

Irradiation system with ion beam/charged particle beam

Apparatus and method for polishing gemstones and the like

Liquid crystal alignment using electron beam exposure

Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to large area electron beam

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system

Film-processing method and film-processing apparatus

Electron beam treatment apparatus

Electron beam treatment apparatus

Method of charged particle beam lithography and equipment for charged particle beam lithography

Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface

Shaped sputter shields for improved ion column operation

Ion beam irradiation device and operating method thereof

Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus

Beam controlled nano-robotic device

Indirectly heated cathode ion source assembly

Materials having two surfaces with different coefficients of thermal expansion

Method for production of novel materials via ultra-high energy electron beam processing