Impedance matching device

Methods and apparatuses for energetic neutral flux generation for processing a substrate

Copper residue chamber clean

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Method of controlling an ion implanter in plasma immersion mode

APPARATUS AND METHOD FOR PLASMA TREATMENT OF SURFACES

Microwave plasma reactor for manufacturing synthetic diamond material

Low temperature plasma probe and methods of use thereof

Plasma whirl reactor apparatus and methods of use

APPARATUS AND METHOD FOR SURFACE PROCESSING OF A SUBSTRATE

Plasma processing method and plasma processing apparatus

Plasma whirl reactor apparatus and methods of use

PLASMA PROCESSING APPARATUS AND METHOD THEREOF

Electric pressure systems for control of plasma properties and uniformity

Directing plasma distribution in plasma-enhanced chemical vapor deposition

DC PULSE ETCHER

Method and arrangement for generating a jet of fluid, method and system for transforming the jet into a plasma, and uses of said system

Pulsed remote plasma method and system

Plasma processing with preionized and predissociated tuning gases and associated systems and methods

Plasma processing apparatus

Hybrid edge ring for plasma wafer processing

Plasma processing apparatus and plasma processing method

GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS AND METHOD OF FABRICATING GAS SUPPLY MEMBER

ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING THE SAME, AND PLASMA PROCESSING APPARATUS

Wafer dicing with etch chamber shield ring for film frame wafer applications

Mounting table and plasma processing apparatus

Plasma Equipment and Method of Dry-Cleaning the Same

Mounting table and plasma processing apparatus

Facility for microwave treatment of a load

Plasma processing method and plasma processing apparatus

SUBSTRATE PROCESSING APPARATUS

PROCESS MONITORING DEVICE FOR USE IN SUBSTRATE PROCESS APPARATUS, PROCESS MONITORING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR PROVIDING PLASMA TO A PROCESS CHAMBER

SUBSTRATE SUPPORTING UNIT AND SUBSTRATE TREATING APPARATUS AND METHOD

Plasma based surface augmentation method

Process tools and methods of forming devices using process tools

Thin film forming apparatus and thin film forming method using the same

Method for controlling ion energy in radio frequency plasmas

Plasma processing method

Plasma source with integral blade and method for removing materials from substrates

Plasma-enhanced etching in an augmented plasma processing system

Ignition apparatus for arc sources

Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium

Method for distributing gas for a bevel etcher

METHODS AND APPARATUS FOR MODIFYING SURFACE ENERGY OF LAMINATE STACK UP

Methods and apparatus for correcting for non-uniformity in a plasma processing system

Method and device for controlling pattern and structure formation by an electric field

System and method for tissue construction using an electric field applicator

Cooling block forming electrode

DEVICE FOR PROVIDING A FLOW OF PLASMA

Plasma whirl reactor apparatus and methods of use

Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing

Plasma booster for plasma treatment installation

Apparatus for treating substrates

Gas supply system

Method of controlling the switched mode ion energy distribution system

METHODS AND APPARATUS FOR CONTROLLING PHOTORESIST LINE WIDTH ROUGHNESS WITH ENHANCED ELECTRON SPIN CONTROL

Method of controlling the switched mode ion energy distribution system

High-frequency supply of a load without impedance matching

PLASMA NANO-POWDER SYNTHESIZING AND COATING DEVICE AND METHOD OF THE SAME

METHOD AND APPARATUS FOR THE MULTI-LAYER AND MULTI-COMPONENT COATING OF THIN FILMS ON SUBSTRATES, AND MULTI-LAYER AND MULTI-COMPONENT COATINGS

Plasma ignition system, plasma ignition method, and plasma generating apparatus

ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD FOR ELECTRODE UNIT

Determination method, control method, determination apparatus, pattern forming system and program

Electrode assembly and plasma processing apparatus

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Apparatus and method for maskless patterned implantation

Plasma immersion ion milling apparatus and method

Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same

System, method and apparatus for controlling ion energy distribution of a projected plasma

PLASMA, UV AND ION/NEUTRAL ASSISTED ALD OR CVD IN A BATCH TOOL

Formation of Photoconductive and Photovoltaic Films

TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES

Electrode plate for plasma etching and plasma etching apparatus

Falling film plasma reactor

Wafer chucking system for advanced plasma ion energy processing systems

Methods and apparatuses for energetic neutral flux generation for processing a substrate

Gas supply member, plasma treatment method, and method of forming yttria-containing film

Plasma source electrode

Focus ring and manufacturing method therefor

Electron Beam Enhanced Nitriding System (EBENS)

APPARATUS AND METHOD FOR SURFACE PROCESSING

Plasma processing method and plasma processing apparatus

System, method and apparatus for controlling ion energy distribution

Method for controlling ion energy in radio frequency plasmas

Patch production

IGNITION APPARATUS FOR ARC SOURCES

ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME

Feedforward temperature control for plasma processing apparatus

Apparatus and method for improving photoresist properties using a quasi-neutral beam

Process and installation for surface preparation by dielectric barrier discharge

PROCESS TO MAKE STRUCTURED PARTICLES

PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING APPARATUS, AND ELECTRODE PLATE MANUFACTURING METHOD

Plasma processing apparatus

Method and device for CNT length control

Plasma stamp, plasma treatment device, method for plasma treatment and method for producing a plasma stamp

Apparatus and method for sputtering hard coatings

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Method and apparatus for plasma surface treatment of moving substrate

Upper electrode backing member with particle reducing features

Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts

Quartz guard ring centering features

Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode

Low temperature plasma probe and methods of use thereof

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Plasma processing apparatus and method for plasma processing

Plasma Reactor, and Method for the Production of Monocrystalline Diamond Layers

Cooling block forming electrode

Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool

Plasma booster for plasma treatment installation

Atomic layer deposition apparatus and atomic layer deposition method

Substrate processing apparatus

Method for manufacturing a treated surface and vacuum plasma sources

PLASMA PROCESSING APPARATUS, HEATING DEVICE FOR PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD

Method and apparatus for controlling ion energy distribution

Thin film deposition via charged particle-depleted plasma achieved by magnetic confinement

FALLING FILM PLASMA REACTOR

TREATMENT SYSTEM FOR FLAT SUBSTRATES

Modulated multi-frequency processing method

Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator

Plasma source with integral blade and method for removing materials from substrates

Hollow-cathode discharge apparatus for plasma-based processing

Plasma source and method for removing materials from substrates utilizing pressure waves

TITANIUM DIOXIDE LAYER WITH IMPROVED SURFACE PROPERTIES

Apparatus for generating dielectric barrier discharge gas

Abnormal discharge suppressing device for vacuum apparatus

Method and apparatus for adjusting the reference impedance of a power generator

Apparatus including showerhead electrode and heater for plasma processing

PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-INHIBITORY MEMBER

PLASMA TREATMENT APPARATUS

Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates

Plasma system for improved process capability

Device for carrying out a plasma-assisted process

Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities

ETCH REACTOR SUITABLE FOR ETCHING HIGH ASPECT RATIO FEATURES

APPARATUS FOR TREATING SUBSTRATES

Plasma processing member, deposition apparatus including the same, and depositing method using the same

Arrangement for Producing Coatings on Substrates in Vacuo

Pulsed dielectric barrier discharge

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Flat-Type Non-Thermal Plasma Reactor

Electrode for generating plasma and plasma generator

Apparatus and method for enhancing plasma etch

Electrode design for plasma processing chamber

Plasma whirl reactor apparatus and methods of use

Plasma whirl reactor apparatus and methods of use

Apparatus and method for the plasma treatment of hollow bodies

Method for generating hollow cathode plasma and method for treating large area substrate using hollow cathode plasma

PLASMA ELECTRODE

Sheet Plasma Film Forming Apparatus

Apparatus for generating hollow cathode plasma and apparatus for treating large area substrate using hollow cathode plasma

Deposition apparatus for improving the uniformity of material processed over a substrate and method of using the apparatus

Peripherally engaging electrode carriers and assemblies incorporating the same

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR PRODUCTION EQUIPMENT AND STORAGE MEDIUM

Sterilizer and Sterilization Method Using the Same

Sheet Plasma Film-Forming Apparatus

Method of coating inner and outer surfaces of pipes for thermal solar and other applications

Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method

APPARATUS AND METHOD FOR DRY ETCHING

Plasma processing with preionized and predissociated tuning gases and associated systems and methods

Method of cleaning the surface of a material coated with an organic substance and generator and device for carrying out said method

PLASMA GENERATING APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION METHOD

Cluster generator

Substrate processing apparatus and electrode member

Substrate processing apparatus

System and method for depositing a material on a substrate

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS

Linear plasma source for dynamic (moving substrate) plasma processing

ELECTRICAL CONTROL OF PLASMA UNIFORMITY USING EXTERNAL CIRCUIT

METHOD AND APPARATUS FOR PRODUCING A FEATURE HAVING A SURFACE ROUGHNESS IN A SUBSTRATE

ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD FOR ELECTRODE UNIT

Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium

Method of making an electrode assembly for plasma processing apparatus

Microcrystalline silicon thin film transistor

Substrate processing method and substrate processing apparatus

Apparatus and method for coating diamond on work pieces via hot filament chemical vapor deposition

APPARATUS AND METHOD FOR CLEANING, ETCHING, ACTIVATION AND SUBSEQUENT TREATMENT OF GLASS SURFACES, GLASS SURFACES COATED BY METAL OXIDES, AND SURFACES OF OTHER SI02-COATED MATERIALS

Fabrication of a silicon structure and deep silicon etch with profile control

Electrode with Improved Plasma Uniformity

Base substrate for epitaxial diamond film, method for producing the base substrate for epitaxial diamond film, epitaxial diamond film produced with the base substrate for epitaxial diamond film, and method for producing the epitaxial diamond film

Deposition apparatus and deposition method

Edge electrodes with dielectric covers

Method and system for plasma enhanced chemical vapor deposition

Composite showerhead electrode assembly for a plasma processing apparatus

Plasma Film Deposition System

Thin-film deposition apparatus using discharge electrode and solar cell fabrication method

Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates

System, method and apparatus for filament and support used in plasma-enhanced chemical vapor deposition for reducing carbon voids on media disks in disk drives

Substrate Processing Apparatus and Semiconductor Device Producing Method

Roll-to-roll patterning of transparent and metallic layers

PROGRAMMED HIGH SPEED DEPOSITION OF AMORPHOUS, NANOCRYSTALLINE, MICROCRYSTALLINE, OR POLYCRYSTALLINE MATERIALS HAVING LOW INTRINSIC DEFECT DENSITY

Plasma chemical reactor

Plasma processing chamber with guard ring for upper electrode assembly

Formation of photoconductive and photovoltaic films

PLASMA TREATMENT APPARATUS

Thin-film deposition system

Deposited Film Forming Method, Deposited Film Forming Device, Deposited Film, and Photosensitive Member Provided with the Deposited Film

Apparatus and Methods for Growing Nanofibres and Nanotips

Method and system for controlling a voltage waveform

METHODS AND APPARATUS FOR IGNITING A LOW PRESSURE PLASMA

LOWER ELECTRODE ASSEMBLY FOR PROCESSING SUBSTRATES

Apparatus for cyclical depositing of thin films

High density plasma source

ELECTRON BEAM ENHANCED NITRIDING SYSTEM

Plasma Treating Apparatus, Electrode Member for Plasma Treating Apparatus, Electrode Member Manufacturing Method and Recycling Method

REACTOR WITH HEATED AND TEXTURED ELECTRODES AND SURFACES

TILTED PLASMA DOPING

Plasma processing apparatus and method

Annular baffle

METHOD AND APPARATUS FOR MAKING DIAMOND-LIKE CARBON FILMS

PLASMA PROCESSING APPARATUS

Generating an output DC voltage with a boost converter having a controlled pulse-duty factor

Substrate cleaning chamber and cleaning and conditioning methods

Method and apparatus for making diamond-like carbon films

Plasma Chamber Cathode and Outer Ring Made of Silicon Material

Fastening Unit for Ignition Units and Device for Carbon Deposition

Surface treatment apparatus

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Plasma processing apparatus and method thereof

Class D amplifier arrangement

Method and system for distributing gas for a bevel edge etcher

Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same

Power Source Arrangement For Multiple-Target Sputtering System

Pulsed-plasma system with pulsed sample bias for etching semiconductor substrates

MULTIPLE-MAGNETRON SPUTTERING SOURCE WITH PLASMA CONFINEMENT

surface treatment apparatus

Plasma processing method and plasma processing apparatus

Plasma Processing Apparatus And Method Of Producing Semiconductor Thin Film Using The Same

PLASMA PROCESSING APPARATUS AND ELECTRODE PLATE, ELECTRODE SUPPORTING BODY, AND SHIELD RING THEREOF

Plasma processing apparatus

PLASMA PROCESSING APPARATUS

Plasma processing apparatus

PLASMA PROCESSING APPARATUS

Plasma Processing Apparatus

METHOD AND APPARATUS FOR FORMING OXYNITRIDE FILM AND NITRIDE FILM, OXYNITRIDE FILM, NITRIDE FILM, AND SUBSTRATE

System and method for generating ions and radicals

Pulsed dielectric barrier discharge

Hollow cathode discharging apparatus

Plasma reactor for processing a workpiece and having a tunable cathode

Quartz guard ring

Quartz guard ring centering features

Upper electrode backing member with particle reducing features

PLASMA GENERATING DEVICE, METHOD OF CLEANING DISPLAY PANEL, AND METHOD OF MANUFACTURING DISPLAY PANEL USING THE SAME

Components for a plasma processing apparatus

Apparatus and Method for Materials Processing with Ion-Ion Plasma

DEVICE FOR CARRYING OUT A PLASMA-ASSISTED PROCESS

Apparatus of triple-electrode dielectric barrier discharge at atmospheric pressure

Methods and apparatus for igniting a low pressure plasma

Table for use in plasma processing system and plasma processing system

Electrode for plasma processes and method for manufacture and use thereof

Method and system for controlling the uniformity of a ballistic electron beam by RF modulation

Winding type plasma CVD apparatus

Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts

Adaptively Plasma Source And Method Of Processing Semiconductor Wafer Using The Same

Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod

Method of mounting objects for chemical vapour deposition

System for Low-Energy Plasma-Enhanced Chemical Vapor Deposition

METHOD AND APPARATUS FOR PHOTO-EXCITATION OF CHEMICALS FOR ATOMIC LAYER DEPOSITION OF DIELECTRIC FILM

Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool

Material for electrodes of low temperature plasma generators

Inductively coupled plasma reactor with multiple magnetic cores

Apparatus and method for treating a workpiece with ionizing gas plasma

Plasma etching chamber and method for manufacturing photomask using the same

Plasma processing apparatus and electrode used therein

PLASMA PROCESSING APPARATUS AND ELECTRODE ASSEMBLY FOR PLASMA PROCESSING APPARATUS

Cooling block forming electrode

Arrangement for the separation of particles from a plasma

Plasma-generation power-supply device

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATER, AND SUBSTRATE TREATMENT SYSTEM

Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrate

Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities

Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch

Apparatus and method for plasma processing

Method for producing solid element plasma and its plasma source

Silicon electrode plate for plasma etching with superior durability

Corona discharge plasma source devices, and various systems and methods of using same

Plasma processing unit

Method for plasma ignition

Apparatus for Treating Plasma and Method for Cleaning the Same

Treatment apparatus and method of treating surfaces

Electrode for generating plasma and plasma processing apparatus using same

Method and apparatus for modifying an etch profile

Plasma generation and processing with multiple radiation sources

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Plasma process device and plasma process method

Method and apparatus for an improved upper electrode plate in a plasma processing system

Plasma processing apparatus

APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS

Electromagnetic treatment in atmospheric-plasma coating process

Plasma processing method and apparatus

Apparatus and method for treating a substrate with plasma, and facility for manufacturing semiconductor devices

Width adjustable substrate support for plasma processing

Apparatus and method for surface treatment to substrate

Flow-formed chamber component having a textured surface

Silicon dot forming method and silicon dot forming apparatus

Plasma excitation system

Method and apparatus for plasma processing

High-density plasma source

Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system