Patents-Review.com
ClassID:

205305 ⎘

H01J37/32238 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources; Microwave generated discharge; Means for coupling power to the plasma Windows

Recent Application in this class:
#1
20260155340
2026-06-04

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

 #2
20260094788
2026-04-02

Plasma Processing Apparatus

 #3
20260081111
2026-03-19

PLASMA GENERATION DEVICE USING RESONANT WAVEGUIDE HAVING TUNER

 #4
20260066231
2026-03-05

PLASMA GENERATOR AND INJECTOR ASSEMBLY FOR A PROCESSING CHAMBER, and related METHODS

 #5
20250140534
2025-05-01

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #6
20250104974
2025-03-27

Plasma Processing Device

 #7
20250037977
2025-01-30

APPARATUS AND METHOD FOR PLASMA PROCESSING

 #8
20240339300
2024-10-10

Plasma Processing Apparatus

 #9
20240339299
2024-10-10

MICROWAVE ANTENNA, AND POWER SUPPLYING DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING SAME

 #10
20240297020
2024-09-05

PLASMA PROCESSING APPARATUS

 #11
20240222085
2024-07-04

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS INCLUDING APPLYING A VOLTAGE TO A LOWER ELECTRODE IN A SUBSTRATE SUPPORT WITH A GAS SUPPLIED INTO A CHAMBER

 #12
20240203692
2024-06-20

PLASMA PROCESSING APPARATUS AND PLASMA CONTROL METHOD

 #13
20240186115
2024-06-06

PLASMA PROCESSING APPARATUS

 #14
20240162010
2024-05-16

ADJUSTABLE DIELECTRIC CONSTANT CERAMIC WINDOW

 #15
20240014010
2024-01-11

PLASMA PROCESSING APPARATUS

 #16
20230369021
2023-11-16

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

 #17
20230343561
2023-10-26

Plasma processing apparatus and ceiling wall

 #18
20230317421
2023-10-05

PLASMA PROCESSING APPARATUS

 #19
20230238217
2023-07-27

PLASMA PROCESSING APPARATUS

 #20
20230220543
2023-07-13

Artificial diamond plasma production device

 #21
20230178340
2023-06-08

Plasma processing apparatus

 #22
20230178339
2023-06-08

PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE

 #23
20230110096
2023-04-13

PLASMA PROCESSING APPARATUS

 #24
20230106303
2023-04-06

Plasma processing apparatus and plasma processing method

 #25
20230081103
2023-03-16

PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

 #26
20230039721
2023-02-09

Systems for cooling RF heated chamber components

 #27
20230033323
2023-02-02

PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

 #28
20230031447
2023-02-02

PLASMA PROCESSING APPARATUS

 #29
20220367156
2022-11-17

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

 #30
20220319812
2022-10-06

REMOTE MODULAR HIGH-FREQUENCY SOURCE

 #31
20220216039
2022-07-07

Wafer processing apparatus

 #32
20220199369
2022-06-23

Plasma processing method and plasma processing apparatus

 #33
20220068606
2022-03-03

Plasma processing apparatus and plasma processing method

 #34
20220044912
2022-02-10

Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same

 #35
20210358722
2021-11-18

PLASMA PROCESSING APPARATUS

 #36
20210343510
2021-11-04

QUARTZ COMPONENT WITH PROTECTIVE COATING

 #37
20210287882
2021-09-16

Modular microwave source with local lorentz force

 #38
20210242036
2021-08-05

Method for etching oxide semiconductor film and plasma processing apparatus

 #39
20210134560
2021-05-06

Plasma processing apparatus and plasma processing method

 #40
20210111002
2021-04-15

Plasma processing apparatus

 #41
20210057190
2021-02-25

LARGE AREA MICROWAVE PLASMA CVD APPARATUS AND CORRESPONDING METHOD FOR PROVIDING SUCH DEPOSITION

 #42
20210050188
2021-02-18

Systems for cooling RF heated chamber components

 #43
20200402769
2020-12-24

SYMMETRIC AND IRREGULAR SHAPED PLASMAS USING MODULAR MICROWAVE SOURCES

 #44
20200294766
2020-09-17

PLASMA GENERATION UNIT AND METHOD OF DISCRIMINATING STATE OF PHYSICAL QUANTITY WHICH IS USED FOR PLASMA GENERATION

 #45
20200287258
2020-09-10

TRANSPARENT PRESSURE BARRIER FOR MICROWAVE PLASMA PROCESSING

 #46
20200152433
2020-05-14

Methods and apparatus for microwave plasma assisted chemical vapor deposition reactors

 #47
20200105504
2020-04-02

Plasma chemical vapor deposition reactor with a microwave resonant cavity

 #48
20200075292
2020-03-05

Antenna device, radiation method of electromagnetic waves, plasma processing apparatus, and plasma processing method

 #49
20200058468
2020-02-20

Antenna, plasma processing device and plasma processing method

 #50
20190326098
2019-10-24

Remote modular high-frequency source

 #51
20190311886
2019-10-10

Microwave Plasma Source With Split Window

 #52
20190287768
2019-09-19

Plasma processing apparatus

 #53
20190279845
2019-09-12

ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS

 #54
20190272981
2019-09-05

Quartz component with protective coating

 #55
20190242016
2019-08-08

Chemical vapor deposition reactor to grow diamond film by microwave plasma chemical vapor deposition

 #56
20190221909
2019-07-18

Pressure barrier comprising a transparent microwave window providing a pressure difference on opposite sides of the window

 #57
20190214233
2019-07-11

Plasma processing device

 #58
20190198296
2019-06-27

Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same

 #59
20190164725
2019-05-30

Plasma processing apparatus and plasma processing method

 #60
20190157045
2019-05-23

Microwave plasma source

 #61
20190074166
2019-03-07

Plasma probe device and plasma processing apparatus

 #62
20190067031
2019-02-28

Etching method and etching apparatus

 #63
20190006152
2019-01-03

Plasma generating unit and plasma processing apparatus

 #64
20180374680
2018-12-27

PLASMA PROCESSING APPARATUS

 #65
20180374678
2018-12-27

Antenna and plasma processing apparatus

 #66
20180323043
2018-11-08

Modular microwave source with local Lorentz force

 #67
20180294143
2018-10-11

Symmetric and irregular shaped plasmas using modular microwave sources

 #68
20180277339
2018-09-27

PLASMA PROCESSING APPARATUS

 #69
20180261433
2018-09-13

Elementary device for producing a plasma, having a coaxial applicator

 #70
20180247796
2018-08-30

Systems for cooling RF heated chamber components

 #71
20180240652
2018-08-23

Temperature control using temperature control element coupled to faraday shield

 #72
20180182599
2018-06-28

Plasma reactor with non-power-absorbing dielectric gas shower plate assembly

 #73
20180179626
2018-06-28

Large area optical quality synthetic polycrystalline diamond window

 #74
20180138018
2018-05-17

Dual-frequency surface wave plasma source

 #75
20180019103
2018-01-18

Microwave control method

 #76
20170330727
2017-11-16

Antenna, microwave plasma source including the same, plasma processing apparatus, and method of manufacturing semiconductor device

 #77
20170298514
2017-10-19

Plasma processing apparatus

 #78
20170271132
2017-09-21

Methods and apparatus for microwave plasma assisted chemical vapor deposition reactors

 #79
20170253963
2017-09-07

Method of Efficient Coaxial Delivery of Microwaves into a Mode Stabilized Resonating Chamber for the Purpose of Deposition of Microwave Plasma CVD Polycrystalline Diamond Films

 #80
20170229286
2017-08-10

Plasma processing apparatus

 #81
20170170010
2017-06-15

Method for manufacturing insulating film laminated structure

 #82
20170133202
2017-05-11

COMPUTER ADDRESSABLE PLASMA DENSITY MODIFICATION FOR ETCH AND DEPOSITION PROCESSES

 #83
20170103875
2017-04-13

Temperature control in RF chamber with heater and air amplifier

 #84
20170009338
2017-01-12

Plasma processing apparatus and film formation method

 #85
20160358758
2016-12-08

Plasma processing apparatus

 #86
20160293389
2016-10-06

Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus

 #87
20160284516
2016-09-29

Microwave plasma source and plasma processing apparatus

 #88
20160172163
2016-06-16

Microwave plasma processing apparatus and microwave supplying method

 #89
20160157330
2016-06-02

Cavity resonator of microwave plasma generating apparatus

 #90
20160126114
2016-05-05

Plasma processing apparatus

 #91
20160111256
2016-04-21

Plasma reactor with non-power-absorbing dielectric gas shower plate assembly

 #92
20150348761
2015-12-03

Top dielectric quartz plate and slot antenna concept

 #93
20150348757
2015-12-03

Workpiece processing chamber having a thermal controlled microwave window

 #94
20150279627
2015-10-01

Film-forming apparatus

 #95
20150228459
2015-08-13

Plasma processing method and plasma processing apparatus

 #96
20150214015
2015-07-30

FILM FORMING APPARATUS, METHOD OF FORMING LOW-PERMITTIVITY FILM, SiCO FILM, AND DAMASCENE INTERCONNECT STRUCTURE

 #97
20150206712
2015-07-23

Antenna and plasma processing apparatus

 #98
20150170881
2015-06-18

Microwave plasma source and plasma processing apparatus

 #99
20150064923
2015-03-05

Plasma processing device and plasma processing method

 #100
20150064922
2015-03-05

Method of selectively removing a region formed of silicon oxide and plasma processing apparatus

 #101
20150053346
2015-02-26

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

 #102
20150030786
2015-01-29

Microwave plasma reactor for manufacturing synthetic diamond material

 #103
20150015139
2015-01-15

Microwave plasma processing apparatus and microwave supplying method

 #104
20140342122
2014-11-20

Large area optical quality synthetic polycrystalline diamond window

 #105
20140312767
2014-10-23

Dielectric window for plasma treatment device, and plasma treatment device

 #106
20140308461
2014-10-16

Microwave plasma reactor for manufacturing synthetic diamond material

 #107
20140262042
2014-09-18

Microwave surface-wave plasma device

 #108
20140262041
2014-09-18

Microwave surface-wave plasma device

 #109
20140099734
2014-04-10

Deposition method and deposition apparatus

 #110
20140079946
2014-03-20

Laminated structure, member for semiconductor manufacturing apparatus, and method for producing laminated structure

 #111
20130228283
2013-09-05

Temperature control in RF chamber with heater and air amplifier

 #112
20130093321
2013-04-18

Dielectric window for plasma processing apparatus, plasma processing apparatus and method for mounting dielectric window for plasma processing apparatus

 #113
20130087283
2013-04-11

Systems for cooling RF heated chamber components

 #114
20130071955
2013-03-21

PLASMA ETCHING METHOD

 #115
20130065398
2013-03-14

Dry metal etching method

 #116
20130029494
2013-01-31

Plasma etching method, method for producing semiconductor device, and plasma etching device

 #117
20130008607
2013-01-10

Antenna, dielectric window, plasma processing apparatus and plasma processing method

 #118
20120247676
2012-10-04

Plasma processing apparatus and microwave introduction device

 #119
20120180953
2012-07-19

PLASMA PROCESSING APPARATUS AND WAVE RETARDATION PLATE USED THEREIN

 #120
20120126376
2012-05-24

SILICON DIOXIDE FILM AND PROCESS FOR PRODUCTION THEREOF, COMPUTER-READABLE STORAGE MEDIUM, AND PLASMA CVD DEVICE

 #121
20120118505
2012-05-17

PLASMA PROCESSING APPARATUS AND COOLING DEVICE FOR PLASMA PROCESSING APPARATUS

 #122
20110303364
2011-12-15

Plasma processing apparatus

 #123
20110303363
2011-12-15

PLASMA PROCESSING APPARATUS

 #124
20110259523
2011-10-27

PLASMA PROCESSING APPARATUS

 #125
20110168673
2011-07-14

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND MECHANISM FOR REGULATING TEMPERATURE OF DIELECTRIC WINDOW

 #126
20110146910
2011-06-23

PLASMA PROCESSING APPARATUS

 #127
20110114261
2011-05-19

Plasma processing apparatus

 #128
20110039417
2011-02-17

Plasma processing apparatus and plasma processing method

 #129
20110000780
2011-01-06

Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method

 #130
20100307685
2010-12-09

MICROWAVE PLASMA PROCESSING APPARATUS

 #131
20100240225
2010-09-23

MICROWAVE PLASMA PROCESSING APPARATUS, MICROWAVE PLASMA PROCESSING METHOD, AND MICROWAVE-TRANSMISSIVE PLATE

 #132
20100175621
2010-07-15

Microwave Plasma Processing Apparatus

 #133
20100170872
2010-07-08

Plasma processing apparatus and method for using plasma processing apparatus

 #134
20100096362
2010-04-22

PLASMA PROCESSING APPARATUS, POWER SUPPLY APPARATUS AND METHOD FOR OPERATING PLASMA PROCESSING APPARATUS

 #135
20100075066
2010-03-25

PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD

 #136
20090246965
2009-10-01

ETCHING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

 #137
20090229755
2009-09-17

Plasma processing apparatus

 #138
20090218044
2009-09-03

Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window

 #139
20090214400
2009-08-27

Plasma processing apparatus

 #140
20090211708
2009-08-27

Plasma processing apparatus

 #141
20090120366
2009-05-14

MICROWAVE PLASMA CVD DEVICE

 #142
20090074632
2009-03-19

Plasma processing apparatus

 #143
20090045749
2009-02-19

Plasma generating apparatus and plasma treatment apparatus

 #144
20080302761
2008-12-11

PLASMA PROCESSING SYSTEM AND USE THEREOF

 #145
20080190560
2008-08-14

Microwave Plasma Processing Apparatus

 #146
20080184934
2008-08-07

Plasma reactor for the treatment of large size substrates

 #147
20080025899
2008-01-31

Plasma surface treatment method, quartz member, plasma processing apparatus and plasma processing method

 #148
20070283888
2007-12-13

Plasma reactor for the treatment of large size substrates

 #149
20070283887
2007-12-13

Microwave plasma processing apparatus

 #150
20070264441
2007-11-15

Plasma processing apparatus and plasma processing method

 #151
20070235425
2007-10-11

Plasma processing apparatus and plasma processing method

 #152
20070227661
2007-10-04

MICROWAVE PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING MICROWAVE PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

 #153
20070212254
2007-09-13

Microwave plasma sterilizing method and device

 #154
20070181531
2007-08-09

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

 #155
20070113788
2007-05-24

Plasma processing equipment

 #156
20070077737
2007-04-05

Plasma processing method and plasma processing apparatus

 #157
20060289116
2006-12-28

Plasma processing apparatus

 #158
20060150914
2006-07-13

Plasma process device

 #159
20060090704
2006-05-04

Plasma processing apparatus with dielectric plates and fixing member wavelength dependent spacing

 #160
20050257891
2005-11-24

Plasma processing apparatus

 #161
20050250338
2005-11-10

Plasma method with high input power

 #162
20050172901
2005-08-11

Plasma processing device

 #163
20050092437
2005-05-05

Plasma processing equipment

 #164
20050011455
2005-01-20

Plasma process apparatus and its processor