205310 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources; Microwave generated discharge; Means for controlling power transmitted to the plasma Means for controlling or selecting resonance mode
Plasma Processing Apparatus and Method for Measuring Resonance Frequency
#2PLASMA PROCESSING APPARATUS AND PLASMA CONTROL METHOD
#3BIAS SUPPLY WITH RESONANT SWITCHING
#4Bias supply with resonant switching
#5Resonator coil having an asymmetrical profile
#6Resonator coil having an asymmetrical profile
#7Microwave plasma reactor for manufacturing synthetic diamond material
#8METHOD FOR MANUFACTURING AN ANNULAR THIN FILM OF SYNTHETIC MATERIAL AND DEVICE FOR CARRYING OUT SAID METHOD
#9Microwave plasma reactor for manufacturing synthetic diamond material
#10Plasma systems and methods of processing using thereof
#11Plasma processing apparatus
#12Microwave plasma reactors and substrates for synthetic diamond manufacture
#13Microwave plasma reactor for manufacturing synthetic diamond material
#14PLASMA PROCESSING APPARATUS
#15Apparatus for large area plasma processing
#16Microwave plasma processing method