METHODS FOR FABRICATING FACEPLATE OF SEMICONDUCTOR APPARATUS

Showerhead electrode assembly for plasma processing apparatuses

Activated gas injector, film deposition apparatus, and film deposition method

Electrode design for plasma processing chamber

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Movable gas introduction structure and substrate processing apparatus having same

Tunable multi-zone gas injection system

Plasma Reactor Having Injector

VACUUM PROCESSING APPARATUS

Apparatus and method for the plasma treatment of hollow bodies

Atmospheric pressure plasma apparatus

Plasma processing method

REACTIVE GAS DISTRIBUTOR, REACTIVE GAS TREATMENT SYSTEM, AND REACTIVE GAS TREATMENT METHOD

CHAMBER PLASMA-CLEANING PROCESS SCHEME

Method of forming non-conformal layers

METHOD FOR PLASMA ETCHING POROUS LOW-K DIELECTRIC LAYERS

Plasma processing apparatus and method

ATMOSPHERIC PRESSURE PLASMA ELECTRODE

Plasma processing apparatus, plasma processing method and storage medium

Apparatus for generating hollow cathode plasma and apparatus for treating large area substrate using hollow cathode plasma

Clamped monolithic showerhead electrode

Clamped showerhead electrode assembly

Showerhead electrode

Process and System For Varying the Exposure to a Chemical Ambient in a Process Chamber

Method of avoiding a parasitic plasma in a plasma source gas supply conduit

MICROWAVE PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND ORGANIC ELECTRON DEVICE

Baffle plate and substrate processing apparatus

Manufacturing method of semiconductor device and substrate processing apparatus

PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

SHOWER PLATE AND MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD USING THE SHOWER PLATE

Apparatus and process for sensing fluoro species in semiconductor processing systems

Method for designing shower plate for plasma CVD apparatus

SILICIDE FORMING METHOD AND SYSTEM THEREOF

Ceiling electrode with process gas dispersers housing plural inductive RF power applicators extending into the plasma

Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes

Electrode and Vacuum Processing Apparatus

SHOWER PLATE, AND PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD USING THE SHOWER PLATE

SELECTIVE INDUCTIVE DOUBLE PATTERNING

FLOWABLE DIELECTRIC EQUIPMENT AND PROCESSES

PLASMA PROCESS EMPLOYING MULTIPLE ZONE GAS DISTRIBUTION FOR IMPROVED UNIFORMITY OF CRITICAL DIMENSION BIAS

Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias

Plasma Processing Apparatus

Substrate processing system for performing exposure process in gas atmosphere

End point detection method, end point detection device, and gas phase reaction processing apparatus equipped with end point detection device

COMPONENTS FOR USE IN A PLASMA CHAMBER HAVING REDUCED PARTICLE GENERATION AND METHOD OF MAKING

Process gas introducing mechanism and plasma processing device

PLASMA PROCESSING APPARATUS AND METHOD

METHOD TO PREVENT PARASITIC PLASMA GENERATION IN GAS FEEDTHRU OF LARGE SIZE PECVD CHAMBER

Plasma Processing Apparatus and the Upper Electrode Unit

Microwave plasma processing device

Plasma generator systems and methods of forming plasma

Apparatus for depositing silicon-based thin film and method for depositing silicon-based thin film

Method for forming amorphous carbon film

LIQUID CRYSTAL DISPLAY DEVICE MANUFACTURING METHOD AND LIQUID CRYSTAL DISPLAY DEVICE

Down-stream plasma etching with deflectable radical stream

Plasma processing apparatus

SYSTEMS AND METHODS FOR DEPOSITION

METHOD AND APPARATUS FOR CONTROLLING GAS INJECTION IN PROCESS CHAMBER

Mono-energetic neutral beam activated chemical processing system and method of using

Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes

Shower head and substrate processing apparatus

Plasma processing apparatus

Shower head and substrate processing apparatus

METHOD FOR MANUFACTURING SHOWER PLATE, SHOWER PLATE MANUFACTURED USING THE METHOD, AND PLASMA PROCESSING APPARATUS INCLUDING THE SHOWER PLATE

ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD FOR ELECTRODE UNIT

Apparatus and method for plasma etching

Cover part, process gas diffusing and supplying unit, and substrate processing apparatus

Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium

ETCH RATE AND CRITICAL DIMENSION UNIFORMITY BY SELECTION OF FOCUS RING MATERIAL

MULTIPLE PORT GAS INJECTION SYSTEM UTILIZED IN A SEMICONDUCTOR PROCESSING SYSTEM

METHOD OF SUBSTRATE TREATMENT, RECORDING MEDIUM AND SUBSTRATE TREATING APPARATUS

Method to control uniformity using tri-zone showerhead

METHOD AND SYSTEM FOR CONTROLLING CENTER-TO-EDGE DISTRIBUTION OF SPECIES WITHIN A PLASMA

Hollow cathode device and method for using the device to control the uniformity of a plasma process

Gas flow equalizer plate suitable for use in a substrate process chamber

SHOWER HEAD STRUCTURE FOR PROCESSING SEMICONDUCTOR

Plasma processing method

Method of making an electrode assembly for plasma processing apparatus

Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer Chambers

Plasma processing apparatus

Film Forming and Cleaning Method

Plasma processing apparatus

HARDMASK OPEN PROCESS WITH ENHANCED CD SPACE SHRINK AND REDUCTION

Gas supply system, substrate processing apparatus and gas supply method

AUTOMATIC INSITU POST PROCESS CLEANING FOR PROCESSING SYSTEMS HAVING TURBO PUMPS

Fabrication of a silicon structure and deep silicon etch with profile control

Plasma Doping Method and Apparatus

Heated showerhead assembly

Substrate processing method, substrate processing apparatus and recording medium

SHOWERHEAD INSULATOR AND ETCH CHAMBER LINER

Film-forming apparatus

SURFACE PROCESSING APPARATUS

Methods and apparatus for a wide conductance kit

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR ELEMENT MANUFACTURED BY SUCH APPARATUS

PLASMA ETCHING METHOD

Method for in-situ refurbishing a ceramic substrate holder

APPARATUS FOR TREATING SUBSTRATE

Method and system for plasma enhanced chemical vapor deposition

CVD showerhead alignment apparatus

Composite showerhead electrode assembly for a plasma processing apparatus

ATMOSPHERIC-PRESSURE PLASMA REACTOR

Plasma reactor gas distribution plate having path splitting manifold side-by-side with showerhead

Plasma reactor gas distribution plate having a vertically stacked path splitting manifold

Plasma reactor gas distribution plate with radially distributed path splitting manifold

Batch-type remote plasma processing apparatus

Thin-film deposition apparatus using discharge electrode and solar cell fabrication method

Dual zone gas injection nozzle

Plasma reactor gas distribution plate having a path splitting manifold immersed within a showerhead

Gas distribution plate with annular plenum having a sloped ceiling for uniform distribution

Method and apparatus for removing polymer from the wafer backside and edge

Plasma treatment apparatus and plasma treatment method

Vapor-phase process apparatus, vapor-phase process method, and substrate

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

Suppressor of hollow cathode discharge in a shower head fluid distribution system

Gas shower plate for plasma processing apparatus

Process and apparatus for atmospheric pressure plasma enhanced chemical vapor deposition coating of a substrate

Multi-station plasma reactor with multiple plasma regions

Method of manufacturing semiconductor device, film deposition method, and film deposition apparatus

Plasma processing method and plasma processing apparatus

SPUTTERING APPARATUS AND SPUTTERING METHOD

COATING DEVICE AND METHOD OF PRODUCING AN ELECTRODE ASSEMBLY

Batch-type remote plasma processing apparatus

Phase change alloy etch

Plasma processing apparatus and plasma processing method

Film formation apparatus and method for using same

METHODS OF MAKING GAS DISTRIBUTION MEMBERS FOR PLASMA PROCESSING APPARATUSES

Shower plate and substrate processing apparatus

Gas Supply Pipe for Plasma Treatment

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

METHOD FOR REMOVING OXIDES

Plasma-enhanced cyclic layer deposition process for barrier layers

Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition

RF RETURN PLATES FOR BACKING PLATE SUPPORT

SUPPORT ASSEMBLY

APPARATUS AND METHOD FOR PLASMA ETCHING

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

Showerhead assembly

Temperature controlled showerhead

Method of manufacturing semiconductor device

Corrosion-resistant gas distribution plate for plasma processing chamber

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

Integrated steerability array arrangement for minimizing non-uniformity

Plasma processing apparatus and method

PECVD PROCESS CHAMBER WITH COOLED BACKING PLATE

Method and apparatus for deposition

Plasma processing apparatus

PLASMA PROCESSING APPARATUS

Methods for treating surfaces, and methods for removing one or more materials from surfaces

Film coating system and isolating device thereof

Method of Manufacturing Semiconductor Device

Alternate gas delivery and evacuation system for plasma processing apparatuses

Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection

Cathode liner with wafer edge gas injection in a plasma reactor chamber

Apparatus for cyclical depositing of thin films

Processing apparatus and processing method

SUCTION DEVICE FOR PLASMA COATING CHAMBER

Dual Top Gas Feed Through Distributor for High Density Plasma Chamber

APPARATUS AND METHOD FOR PLASMA DOPING

Method of manufacturing semiconductor device

Plasma processing method for forming a film and an electronic component manufactured by the method

Flat panel display manufacturing apparatus

RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus

PLASMA PROCESSING APPARATUS AND PLASMA GENERATION CHAMBER

Remote Plasma Atomic Layer Deposition Apparatus and Method Using Dc Bias

Diffuser gravity support

SUBSTRATE PROCESSING APPARATUS AND SHOWER HEAD

Shower Plate and Plasma Treatment Apparatus Using Shower Plate

Amorphous carbon film forming method and device

Gas supply mechanism and substrate processing apparatus

Method and apparatus for manufacturing semiconductor device, and storage medium

Particle Reduction Through Gas and Plasma Source Control

Evacuation method and storage medium

Gas supply system and gas supply accumulation unit of semiconductor manufacturing apparatus

Substrate cleaning chamber and components

Plasma based ion implantation system

Plasma immersion ion implantation with highly uniform chamber seasoning process for a toroidal source reactor

Method and system for introducing process fluid through a chamber component

Component, an apparatus and a method for the manufacture of a layer system

PLASMA PROCESSING APPARATUS

Hollow anode plasma reactor and method

Method for front end of line fabrication

PECVD process chamber backing plate reinforcement

Apparatus and process for plasma-enhanced atomic layer deposition

Media Injector

Apparatus and method for removing a photoresist structure from a substrate

METHOD OF FORMING AMORPHOUS CARBON LAYER USING CROSS TYPE HYDROCARBON COMPOUND AND METHOD OF FORMING LOW-K DIELECTRIC LAYER USING THE SAME

APPARATUS AND METHOD FOR INTEGRATED SURFACE TREATMENT AND FILM DEPOSITION

Plasma processing apparatus

Substrate Processing Apparatus and Reaction Container

Substrate processing apparatus and reaction container

ATOMIC LAYER DEPOSITION REACTOR

Substrate processing apparatus and substrate processing method

Plasma processing apparatus

MULTIFLOW INTEGRATED ICP SOURCE

PLASMA REACTOR WITH AN OVERHEAD INDUCTIVE ANTENNA AND AN OVERHEAD GAS DISTRIBUTION SHOWERHEAD

Multichannel array as window protection

Gas flow diffuser

Plasma CVD apparatus and film deposition method

Dynamic control of process chemistry for improved within-substrate process uniformity

Substrate processing apparatus and electrode structure

SPUTTERING SYSTEM

Plasma Reaction Apparatus Having Pre-Seasoned Showerheads and Methods for Manufacturing the Same

PLASMA PROCESSING APPARATUS, CLEANING METHOD THEREOF, CONTROL PROGRAM AND COMPUTER STORAGE MEDIUM

Plasma Processing Method

Method and system for distributing gas for a bevel edge etcher

Plasma film-forming apparatus and plasma film-forming method

Plasma process for inductively coupling power through a gas distribution plate while adjusting plasma distribution

Silicon carbide gas distribution plate and RF electrode for plasma etch chamber

Method and apparatus for controlling gas flow to a processing chamber

Method and apparatus for controlling gas flow to a processing chamber

Shower head and cvd apparatus using the same

Apparatus and method for focused electric field enhanced plasma-based ion implantation

surface treatment apparatus

Multi-zone gas distribution system for a treatment system

Process for wafer backside polymer removal and wafer front side photoresist removal

GAS DISTRIBUTION UNIFORMITY IMPROVEMENT BY BAFFLE PLATE WITH MULTI-SIZE HOLES FOR LARGE SIZE PECVD SYSTEMS

Surface processing apparatus

Plasma Generator Apparatus

Control Method for plasma etching apparatus

Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber

PLASMA PROCESSING APPARATUS

Showerhead electrode assembly with gas flow modification for extended electrode life

Substrate damage prevention system and method

Hyperthermal neutral beam source and method of operating

Plasma processing apparatus

PLASMA PROCESSING APPARATUS

Substrate processing apparatus and reaction container

Gas baffle and distributor for semiconductor processing chamber

Dual top gas feed through distributor for high density plasma chamber

DUAL TOP GAS FEED THROUGH DISTRIBUTOR FOR HIGH DENSITY PLASMA CHAMBER

Substrate processing system for performing exposure process in gas atmosphere

SYSTEM AND METHOD FOR CONTAINMENT SHIELDING DURING PECVD DEPOSITION PROCESSES

SYSTEM AND METHOD FOR HIGH-ENERGY SPUTTERING USING RETURN CONDUCTORS

PLASMA CONFINEMENT BAFFLE AND FLOW EQUALIZER FOR ENHANCED MAGNETIC CONTROL OF PLASMA RADIAL DISTRIBUTION

Vacuum processing apparatus

Hollow cathode discharging apparatus

Plasma apparatus and plasma processing method

Mask etch plasma reactor with variable process gas distribution

Method and apparatus for photomask plasma etching

Suspension for showerhead in process chamber

Gas sealing skirt for suspended showerhead in process chamber

Ashing system

APPARATUS FOR DEPOSITING THIN FILM AND METHOD OF DEPOSITING THE SAME

RF plasma reactor having a distribution chamber with at least one grid

Batch-Type Remote Plasma Processing Apparatus

By-product collecting processes for cleaning processes

Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access

Film formation method and apparatus for forming silicon oxide film

Substrate processing system, gas supply unit, method of substrate processing, computer program, and storage medium

High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation

Enhanced virtual anode

Plasma processing apparatus capable of adjusting pressure within processing chamber

Batch-type remote plasma processing apparatus

Batch-Type Remote Plasma Processing Apparatus

Oxidation method and apparatus for semiconductor process

Surface Processing Apparatus

Methods of cleaning processing chamber in semiconductor device fabrication equipment

SUBSTRATE TREATMENT APPARATUS AND CLEANING METHOD

Method and Apparatus for the Etching of Microstructures

Capacitively coupled plasma reactor with magnetic plasma control

Diffuser plate with slit valve compensation

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

Plasma processing method

Plasma Processing Apparatus And Method

Plasma process for surface treatment of workpieces

Edge gas injection for critical dimension uniformity improvement

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Etching method, plasma processing system and storage medium

PROCESS CHAMBER FOR DIELECTRIC GAPFILL

Semiconductor device manufacturing apparatus and method of using the same

Apparatus and method for avoidance of parasitic plasma in plasma source gas supply conduits

REACTIVE SPUTTERING ZINC OXIDE TRANSPARENT CONDUCTIVE OXIDES ONTO LARGE AREA SUBSTRATES

SEMICONDUCTOR MANUFACTURING APPARATUS

Apparatus for etching high aspect ratio features

Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zones

Plasma etch process using polymerizing etch gases and an inert diluent gas in independent gas injection zones to improve etch profile or etch rate uniformity

Plasma processing method for forming a silicon nitride film on a silicon oxide film

Method of operating a plasma reactor having an overhead electrode with a fixed impedance match element

Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zone

Plasma processing apparatus having an evacuating arrangement to evacuate gas from a gas-introducing part of a process chamber

Plasma etch reactor with distribution of etch gases across a wafer surface and a polymer oxidizing gas in an independently fed center gas zone

Batch-type remote plasma processing apparatus

Process for preparation of multi-thin layered structure

Reactive sputtering chamber with gas distribution tubes

Reduced contaminant gas injection system and method of using

Method of removing residue from a substrate

SPUTTER CHAMBER FOR COATING A SUBSTRATE

Plasma processing apparatus

Plasma treatment apparatus

ETCHING METHOD

Substrate Processing Apparatus

Process for producing materials for electronic device

APPARATUS AND PROCESS FOR SURFACE TREATMENT OF SUBSTRATE USING AN ACTIVATED REACTIVE GAS

Plasma etching apparatus and plasma etching method

APPARATUS FOR CLEANING CHAMBER USING GAS SEPARATION TYPE SHOWERHEAD

Apparatus and method of gas injection sequencing

Apparatus and method for plasma etching

Gas port assembly

Process tuning gas injection from the substrate edge