Patents-Review.com
ClassID:

205404 ⎘

H01J37/3447 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes operating with cathodic sputtering; Constructional aspects of the reactor Collimators, shutters, apertures

Recent Application in this class:
#1
20260135070
2026-05-14

PHYSICAL VAPOR DEPOSITION APPARATUS

 #2
20260128265
2026-05-07

SUBSTRATE PROCESSING APPARATUS

 #3
20260120991
2026-04-30

HIGH TEMPERATURE ION SOURCE

 #4
20260049392
2026-02-19

PHYSICAL VAPOR DEPOSITION APPARATUS

 #5
20250346986
2025-11-13

Methods And Apparatus For Depositing Amorphous Indium Tin Oxide Film

 #6
20250329521
2025-10-23

SEMICONDUCTOR TOOL FOR COPPER DEPOSITION

 #7
20250329520
2025-10-23

DELIVERY OF CONFIGURABLE PULSED VOLTAGE WAVEFORMS FOR SUBSTRATE PROCESSING

 #8
20250266252
2025-08-21

COLLIMATOR FOR PRODUCTION OF PIEZOELECTRIC LAYERS WITH TILTED C-AXIS ORIENTATION

 #9
20250246396
2025-07-31

HIGH TEMPERATURE ION SOURCE

 #10
20250239442
2025-07-24

METHOD AND DEVICE FOR PROTECTING OXYGEN-SENSITIVE TARGET MATERIALS IN A COATING SOURCE

 #11
20250210332
2025-06-26

SHUTTER SYSTEM FOR GAP-FREE SHIELDING OF A COATING SOURCE, AND ASSOCIATED METHOD

 #12
20250183020
2025-06-05

SPUTTERING APPARATUS

 #13
20250137114
2025-05-01

SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL

 #14
20240387156
2024-11-21

DEPOSITION SYSTEM AND METHOD

 #15
20240360545
2024-10-31

PHYSICAL VAPOR DEPOSITION APPARATUS

 #16
20240347326
2024-10-17

PROCESS SHUTTER ARRANGEMENT

 #17
20240297017
2024-09-05

JET IMPINGEMENT COOLING ASSEMBLY FOR PLASMA WINDOWS POSITIONED IN A BEAM ACCELERATOR SYSTEM

 #18
20240240306
2024-07-18

PVD SYSTEM AND COLLIMATOR

 #19
20240186064
2024-06-06

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER

 #20
20240177979
2024-05-30

DEVICE AND METHOD FOR PLASMA GENERATION IN A WIDE PRESSURE RANGE AND SYSTEM AND METHOD FOR OPTICAL GAS ANALYSIS/DETECTION BY MEANS OF SUCH A DEVICE

 #21
20240162021
2024-05-16

Sputtering Apparatus

 #22
20240117486
2024-04-11

FILM FORMING APPARATUS AND FILM FORMING METHOD

 #23
20240105433
2024-03-28

METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRIC DEPOSITION

 #24
20240021421
2024-01-18

Vacuum deposition into trenches and vias

 #25
20240011148
2024-01-11

Film forming position misalignment correction method and film forming system

 #26
20230402271
2023-12-14

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

 #27
20230386809
2023-11-30

SEMICONDUCTOR TOOL FOR COPPER DEPOSITION

 #28
20230383397
2023-11-30

Shutter disc for a semiconductor processing tool

 #29
20230374654
2023-11-23

IN SITU AND TUNABLE DEPOSITION OF A FILM

 #30
20230274922
2023-08-31

Slit diaphragm

 #31
20230260770
2023-08-17

SEMICONDUCTOR TOOL FOR COPPER DEPOSITION

 #32
20230257869
2023-08-17

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

 #33
20230212736
2023-07-06

METHOD OF OPERATING A PVD APPARATUS

 #34
20230187191
2023-06-15

Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process

 #35
20230175113
2023-06-08

PHYSICAL VAPOR DEPOSITION APPARATUS

 #36
20230073011
2023-03-09

SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER

 #37
20230060047
2023-02-23

PVD system and collimator

 #38
20230032857
2023-02-02

IN SITU AND TUNABLE DEPOSITION OF A FILM

 #39
20220415637
2022-12-29

Cleaning of SIN with CCP plasma or RPS clean

 #40
20220415636
2022-12-29

Cleaning of sin with CCP plasma or RPS clean

 #41
20220415633
2022-12-29

Shielding mechanism and thin-film-deposition equipment using the same

 #42
20220415622
2022-12-29

Shielding device and thin-film-deposition equipment with the same

 #43
20220411922
2022-12-29

Shielding device and thin-film-deposition equipment with the same

 #44
20220411917
2022-12-29

Shielding device and thin-film-deposition equipment with the same

 #45
20220406583
2022-12-22

DEPOSITION SYSTEM AND METHOD

 #46
20220406562
2022-12-22

Protective shutter for charged particle microscope

 #47
20220351953
2022-11-03

Sputtering target assembly to prevent overetch of backing plate and methods of using the same

 #48
20220351952
2022-11-03

Magnetron plasma sputtering arrangement

 #49
20220341028
2022-10-27

Vacuum processing apparatus

 #50
20220271726
2022-08-25

PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHODS FOR MAKING THE SAME

 #51
20220223390
2022-07-14

Film formation apparatus and film formation method

 #52
20220186361
2022-06-16

Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process

 #53
20220154330
2022-05-19

System and method for detecting abnormality of thin-film deposition process

 #54
20220074044
2022-03-10

Film forming method, film forming apparatus, and program

 #55
20220064781
2022-03-03

Apparatus and a method for forming patterns on a surface of a substrate plate by a sputtering process

 #56
20220044920
2022-02-10

Sputtering apparatus and film forming method

 #57
20220037136
2022-02-03

Deposition system with multi-cathode and method of manufacture thereof

 #58
20220025511
2022-01-27

Apparatus and method for performing sputtering process

 #59
20220020577
2022-01-20

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

 #60
20220013396
2022-01-13

Alignment mask, metal mask assembly, and preparation method therefor

 #61
20210407777
2021-12-30

Sputtering target assembly to prevent overetch of backing plate and methods of using the same

 #62
20210407773
2021-12-30

Gasketing and Plasma Ashing for Coated Devices

 #63
20210395877
2021-12-23

Apparatus for improved anode-cathode ratio for rf chambers

 #64
20210327692
2021-10-21

Multi-cathode processing chamber with dual rotatable shields

 #65
20210296103
2021-09-23

Sputtering apparatus

 #66
20210262080
2021-08-26

SPUTTER DEVICE

 #67
20210207261
2021-07-08

Film forming apparatus and method

 #68
20210164099
2021-06-03

High throughput vacuum deposition sources and system

 #69
20210082675
2021-03-18

Sputtering method and sputtering apparatus

 #70
20210071294
2021-03-11

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPOR DEPOSITION PROCESSES

 #71
20210050195
2021-02-18

Methods and apparatus for physical vapor deposition (PVD) dielectric deposition

 #72
20210043432
2021-02-11

SUBSTRATE SUPPORT SYSTEM

 #73
20210040605
2021-02-11

Sputtering method

 #74
20210013410
2021-01-14

Apparatus for and method of fabricating semiconductor device

 #75
20200357617
2020-11-12

Biasable flux optimizer / collimator for PVD sputter chamber

 #76
20200303172
2020-09-24

TARGET ASSEMBLY SHIELD

 #77
20200176235
2020-06-04

PHYSICAL VAPOR DEPOSITION WITH A DUAL-SHUTTER

 #78
20200118803
2020-04-16

Film formation apparatus

 #79
20200071815
2020-03-05

Film-forming device

 #80
20200051798
2020-02-13

COLLIMATOR FOR SELECTIVE PVD WITHOUT SCANNING

 #81
20200051796
2020-02-13

Film-forming apparatus, film-forming system, and film-forming method

 #82
20200043696
2020-02-06

Substrate side-deposition apparatus

 #83
20200013597
2020-01-09

Methods and apparatus for co-sputtering multiple targets

 #84
20200013592
2020-01-09

METHODS AND APPARATUS FOR LINEAR SCAN PHYSICAL VAPOR DEPOSITION WITH REDUCED CHAMBER FOOTPRINT

 #85
20190390327
2019-12-26

Apparatus for depositing material on the surface of a substrate

 #86
20190390325
2019-12-26

Sputtering device

 #87
20190371610
2019-12-05

Process integration method to tune resistivity of nickel silicide

 #88
20190348264
2019-11-14

Pre-clean chamber with integrated shutter garage

 #89
20190341237
2019-11-07

SHUTTER MECHANISM FOR TARGET, AND FILM-FORMING DEVICE PROVIDED WITH SAME

 #90
20190316251
2019-10-17

Methods and apparatus for shutter disk assembly detection

 #91
20190301007
2019-10-03

THERMALLY OPTIMIZED RINGS

 #92
20190296707
2019-09-26

Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same

 #93
20190288203
2019-09-19

Apparatus for and method of fabricating semiconductor devices

 #94
20190287772
2019-09-19

METHOD AND APPARATUS OF FORMING STRUCTURES BY SYMMETRIC SELECTIVE PHYSICAL VAPOR DEPOSITION

 #95
20190287771
2019-09-19

Collimator, fabrication apparatus including the same, and method of fabricating a semiconductor device using the same

 #96
20190279851
2019-09-12

Biasable flux optimizer / collimator for PVD sputter chamber

 #97
20190267220
2019-08-29

Shield for a substrate processing chamber

 #98
20190259575
2019-08-22

Multi-beam particle beam system

 #99
20190252165
2019-08-15

Film forming system and method for forming film on substrate

 #100
20190189407
2019-06-20

Methods and apparatus for substrate edge uniformity

 #101
20190172690
2019-06-06

Substrate processing apparatus

 #102
20190139758
2019-05-09

Transparent halo assembly for reduced particle generation

 #103
20190057850
2019-02-21

Sputtering gap measurement apparatus and magnetron sputtering device

 #104
20190051503
2019-02-14

Processing apparatus and collimator

 #105
20190027346
2019-01-24

Processing apparatus and collimator

 #106
20180366328
2018-12-20

Process integration method to tune resistivity of nickel silicide

 #107
20180269045
2018-09-20

PVD TOOL TO DEPOSIT HIGHLY REACTIVE MATERIALS

 #108
20180269044
2018-09-20

PVD TOOL TO DEPOSIT HIGHLY REACTIVE MATERIALS

 #109
20180261440
2018-09-13

Sputtering apparatus and substrate processing apparatus

 #110
20180247797
2018-08-30

Reactors for plasma-assisted processes and associated methods

 #111
20180245217
2018-08-30

High throughput vacuum deposition sources and system

 #112
20180240655
2018-08-23

Methods and apparatus for multi-cathode substrate processing

 #113
20180237903
2018-08-23

Processing device, sputtering device, and collimator

 #114
20180233336
2018-08-16

PROCESSING APPARATUS AND COLLIMATOR

 #115
20180233335
2018-08-16

PROCESSING DEVICE AND COLLIMATOR

 #116
20180223421
2018-08-09

Paste method to reduce defects in dielectric sputtering

 #117
20180218889
2018-08-02

Biasable flux optimizer / collimator for PVD sputter chamber

 #118
20180158658
2018-06-07

Systems and methods for integrated resputtering in a physical vapor deposition chamber

 #119
20180155817
2018-06-07

Film forming apparatus

 #120
20180142342
2018-05-24

Collimator for use in a physical vapor deposition chamber

 #121
20180044783
2018-02-15

Thermally optimized rings

 #122
20180037983
2018-02-08

SPUTTERING DEVICE

 #123
20170365451
2017-12-21

SPUTTERING APPARATUS AND METHOD FOR FORMING SEMICONDUCTOR FILM USING SPUTTERING APPARATUS

 #124
20170350003
2017-12-07

Multisurface simultaneous sputtering and shuttering

 #125
20170345629
2017-11-30

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS

 #126
20170301525
2017-10-19

Processing apparatus and collimator

 #127
20170253959
2017-09-07

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

 #128
20170221685
2017-08-03

Methods for igniting a plasma in a substrate processing chamber

 #129
20170178877
2017-06-22

Methods and apparatus for processing a substrate

 #130
20170140907
2017-05-18

Sputtering apparatus and processing apparatus

 #131
20170117121
2017-04-27

Biasable flux optimizer / collimator for PVD sputter chamber

 #132
20170115555
2017-04-27

Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor

 #133
20170111028
2017-04-20

Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed layers

 #134
20170111022
2017-04-20

Multi-stage deposition system for growth of inclined c-axis piezoelectric material structures

 #135
20170111021
2017-04-20

Methods for fabricating acoustic structure with inclined c-axis piezoelectric bulk and crystalline seed layers

 #136
20170110301
2017-04-20

Sputtering apparatuses and methods of manufacturing a magnetic memory device using the same

 #137
20170110300
2017-04-20

Deposition system for growth of inclined c-axis piezoelectric material structures

 #138
20170018412
2017-01-19

Sputtering apparatus

 #139
20160300700
2016-10-13

Anode Shield

 #140
20160260589
2016-09-08

Film forming apparatus

 #141
20160240357
2016-08-18

Physical vapor deposition system and physical vapor depositing method using the same

 #142
20160214136
2016-07-28

Shield mask mounting fitting for a sputtering apparatus

 #143
20160203961
2016-07-14

Magnetron sputtering apparatus

 #144
20160190346
2016-06-30

Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide

 #145
20160189938
2016-06-30

One-piece process kit shield

 #146
20160186312
2016-06-30

Magnetron-sputtering coating system and method, and display substrate

 #147
20160186310
2016-06-30

Target preparation

 #148
20160160343
2016-06-09

Film deposition device

 #149
20160145735
2016-05-26

Collimator for use in substrate processing chambers

 #150
20160099135
2016-04-07

Rectangular Hollow Sputter Source and Method of use Thereof

 #151
20160086779
2016-03-24

Method of manufacturing semiconductor device and sputtering apparatus

 #152
20160071699
2016-03-10

DEPOSITION DEVICE

 #153
20160030909
2016-02-04

Deposition tool for combinatorial thin film material libraries

 #154
20160027623
2016-01-28

Sputtering apparatus

 #155
20150380223
2015-12-31

Holding assembly for substrate processing chamber

 #156
20150376774
2015-12-31

Sputtering apparatus and method thereof

 #157
20150364301
2015-12-17

Electronic device manufacturing method and sputtering method

 #158
20150357171
2015-12-10

Methods and apparatus for improved metal ion filtering

 #159
20150279635
2015-10-01

Deposition system with multi-cathode and method of manufacture thereof

 #160
20150262797
2015-09-17

Sputtering apparatus and substrate processing apparatus

 #161
20150262796
2015-09-17

Sputtering apparatus and substrate processing apparatus

 #162
20150235822
2015-08-20

Processing apparatus having a first shield and a second shield arranged to sandwich a substrate

 #163
20150235818
2015-08-20

Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof

 #164
20150206724
2015-07-23

Systems and methods for integrated resputtering in a physical vapor deposition chamber

 #165
20150206714
2015-07-23

Reactive sputtering apparatus

 #166
20150187546
2015-07-02

Vacuum-processing apparatus, vacuum-processing method, and storage medium

 #167
20150136586
2015-05-21

Method for producing a polycrystalline ceramic film

 #168
20150129414
2015-05-14

Process kit of physical vapor deposition chamber and fabricating method thereof

 #169
20150114823
2015-04-30

Bipolar collimator utilized in a physical vapor deposition chamber

 #170
20150075979
2015-03-19

Intaglio printing plate coating apparatus

 #171
20150053547
2015-02-26

Film forming method, film forming apparatus and control unit for the film forming apparatus

 #172
20140374250
2014-12-25

Sputtering apparatus

 #173
20140339545
2014-11-20

Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device

 #174
20140319676
2014-10-30

Electronic component manufacturing method and electrode structure

 #175
20140284207
2014-09-25

Filters for blocking macroparticles in plasma deposition apparatus

 #176
20140262766
2014-09-18

Processing apparatus and shield

 #177
20140261175
2014-09-18

Self-centering process shield

 #178
20140251789
2014-09-11

Physical vapor deposition RF plasma shield deposit control

 #179
20140196848
2014-07-17

Finned shutter disk for a substrate process chamber

 #180
20140174917
2014-06-26

Recycling method for tantalum coil for sputtering and tantalum coil obtained by the recycling method

 #181
20140102889
2014-04-17

Film-forming apparatus

 #182
20140054167
2014-02-27

Film-forming apparatus

 #183
20140054164
2014-02-27

Deposition apparatus and electronic device manufacturing method

 #184
20140034489
2014-02-06

Film-forming apparatus

 #185
20140021037
2014-01-23

Thin film forming apparatus and thin film forming method

 #186
20140020629
2014-01-23

Two piece shutter disk assembly for a substrate process chamber

 #187
20130299345
2013-11-14

Sputtering apparatus

 #188
20130264191
2013-10-10

SHIELD MESH FOR SPUTTERING OF A THIN FILM ON A SUBSTRATE

 #189
20130220795
2013-08-29

Sputtering apparatus including target mounting and control

 #190
20130160708
2013-06-27

Combinatorial high power coaxial switching matrix

 #191
20130153413
2013-06-20

SPUTTER GUN SHUTTER

 #192
20130056352
2013-03-07

MEDIUM FREQUENCY MAGNETRON SPUTTERING DEVICE

 #193
20130048494
2013-02-28

SPUTTERING DEVICE

 #194
20130048489
2013-02-28

Electronic device manufacturing method and sputtering method

 #195
20130020195
2013-01-24

Vacuum deposition apparatus

 #196
20120325651
2012-12-27

Sputtering apparatus and method of manufacturing electronic device

 #197
20120318668
2012-12-20

Tantalum coil for sputtering and method for processing the coil

 #198
20120273346
2012-11-01

FLOW DIVIDER SYSTEM

 #199
20120258255
2012-10-11

Control of film composition in co-sputter deposition by using collimators

 #200
20120247952
2012-10-04

FILM FORMING METHOD BY SPUTTERING APPARATUS AND SPUTTERING APPARATUS

 #201
20120234672
2012-09-20

Sputtering method and sputtering apparatus

 #202
20120228122
2012-09-13

SPUTTERING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #203
20120199471
2012-08-09

Film-Forming apparatus and Film-Forming method

 #204
20120199070
2012-08-09

FILTER FOR ARC SOURCE

 #205
20120164354
2012-06-28

SPUTTERING APPARATUS AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

 #206
20120152736
2012-06-21

Reactive sputtering apparatus

 #207
20120111722
2012-05-10

FILM-FORMING APPARATUS

 #208
20120103793
2012-05-03

VACUUM FILM-FORMING APPARATUS AND POSITION DETECTION METHOD FOR SHUTTER PLATE OF VACUUM FILM-FORMING APPARATUS

 #209
20120034393
2012-02-09

Formation method of coating

 #210
20120006675
2012-01-12

FILM FORMING METHOD, FILM FORMING APPARATUS AND CONTROL UNIT FOR THE FILM FORMING APPARATUS

 #211
20110262634
2011-10-27

Method of manufacturing magnetoresistive device and apparatus for manufacturing the same

 #212
20110247928
2011-10-13

Sputtering apparatus and sputtering method

 #213
20110220487
2011-09-15

Protective enclosure for an ion gun, device for depositing materials through vacuum evaporation comprising such a protective enclosure and method for depositing materials

 #214
20110209986
2011-09-01

Sputtering apparatus, sputtering method, and electronic device manufacturing method

 #215
20110155561
2011-06-30

Reactive sputtering method and reactive sputtering apparatus

 #216
20110147199
2011-06-23

Sputtering apparatus and electronic device manufacturing method

 #217
20110051115
2011-03-03

Substrate holding apparatus, mask alignment method, and vacuum processing apparatus using long taper pins and short taper pins for alignment

 #218
20110048934
2011-03-03

System and apparatus to facilitate physical vapor deposition to modify non-metal films on semiconductor substrates

 #219
20110036709
2011-02-17

PROCESS KIT FOR RF PHYSICAL VAPOR DEPOSITION

 #220
20110020486
2011-01-27

DEVICE FOR FORMING FILM

 #221
20110000783
2011-01-06

Rotary magnet sputtering apparatus

 #222
20100326818
2010-12-30

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS

 #223
20100310902
2010-12-09

DRY ETCHING METHOD, MAGNETO-RESISTIVE ELEMENT, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME

 #224
20100243438
2010-09-30

Sputtering apparatus

 #225
20100224482
2010-09-09

Deposition apparatus and electronic device manufacturing method

 #226
20100206715
2010-08-19

SPUTTERING APPARATUS, DOUBLE ROTARY SHUTTER UNIT, AND SPUTTERING METHOD

 #227
20100206713
2010-08-19

PZT Depositing Using Vapor Deposition

 #228
20100181187
2010-07-22

CHARGED PARTICLE BEAM PVD DEVICE, SHIELDING DEVICE, COATING CHAMBER FOR COATING SUBSTRATES, AND METHOD OF COATING

 #229
20100175988
2010-07-15

Apparatus and method for making sputtered films with reduced stress asymmetry

 #230
20100147680
2010-06-17

Shaped anode and anode-shield connection for vacuum physical vapor deposition

 #231
20100071625
2010-03-25

Shutter disk having a tuned coefficient of thermal expansion

 #232
20100025229
2010-02-04

Apparatus and method for sputtering target debris reduction

 #233
20090308739
2009-12-17

WAFER PROCESSING DEPOSITION SHIELDING COMPONENTS

 #234
20090308732
2009-12-17

APPARATUS AND METHOD FOR UNIFORM DEPOSITION

 #235
20090236218
2009-09-24

Method for depositing multilayer coatings

 #236
20090211897
2009-08-27

Sputtering apparatus and method for controlling the same

 #237
20090176114
2009-07-09

Base substrate for epitaxial diamond film, method for producing the base substrate for epitaxial diamond film, epitaxial diamond film produced with the base substrate for epitaxial diamond film, and method for producing the epitaxial diamond film

 #238
20090166195
2009-07-02

SPUTTERING APPARATUS

 #239
20090166188
2009-07-02

Method for depositing electrically insulating layers

 #240
20090148595
2009-06-11

Method of manufacturing magnetoresistive device

 #241
20090134011
2009-05-28

Method for producing a directional layer by cathode sputtering, and device for implementing the method

 #242
20090114529
2009-05-07

Sputtering apparatus

 #243
20090090617
2009-04-09

Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films

 #244
20090084501
2009-04-02

Processing system for producing a negative ion plasma

 #245
20080289957
2008-11-27

Vacuum Film Forming Apparatus

 #246
20080169064
2008-07-17

Surface-treating apparatus

 #247
20080132046
2008-06-05

Plasma Doping With Electronically Controllable Implant Angle

 #248
20080099039
2008-05-01

Method and apparatus for manufacturing cleaned substrates or clean substrates which are further processed

 #249
20080081128
2008-04-03

Film-forming system, film-forming method, insulating film, dielectric film, piezoelectric film, ferroelectric film, piezoelectric element and liquid discharge system

 #250
20080076269
2008-03-27

Process for forming thin film and system for forming thin film

 #251
20080011602
2008-01-17

Deposition apparatus and deposition method

 #252
20080011599
2008-01-17

Sputtering apparatus including novel target mounting and/or control

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20070228302
2007-10-04

Adjustable suspension assembly for a collimating lattice

 #254
20070181422
2007-08-09

Sputtering apparatus and anti-adhesion plate therefor

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20070102286
2007-05-10

Process kit and target for substrate processing chamber

 #256
20070034509
2007-02-15

Magnetic filter for physical vapor deposition equipment

 #257
20070012663
2007-01-18

Magnetron sputtering system for large-area substrates having removable anodes

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20070012557
2007-01-18

Low voltage sputtering for large area substrates

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20060249369
2006-11-09

Process for physical vapor deposition of a chalcogenide material layer and chamber for physical vapor deposition of a chalcogenide material layer of a phase change memory device

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20060231392
2006-10-19

Cross-contaminant shield in sputtering system

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2006-10-19

Top shield for sputtering system

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20060188660
2006-08-24

Method for depositing multilayer coatings

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20060169583
2006-08-03

Sputtering device

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20060141783
2006-06-29

Sputtering apparatus and method for forming metal silicide layer using the same

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20060137970
2006-06-29

Shield unit for TiN sputtering apparatus, method of coating the same, and sputtering method

 #266
20060137968
2006-06-29

Oscillating shielded cylindrical target assemblies and their methods of use

 #267
20060124634
2006-06-15

Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions

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20060102077
2006-05-18

Vacuum treatment system

 #269
20060090999
2006-05-04

Sputter coating system

 #270
20060054494
2006-03-16

Physical vapor deposition apparatus for depositing thin multilayer films and methods of depositing such films

 #271
20060037538
2006-02-23

Holding device for a screen

 #272
20050284756
2005-12-29

Single piece coil support assemblies, coil constructions and methods of assembling coil constructions

 #273
20050194545
2005-09-08

[ADJUSTABLE COLLIMATOR AND SPUTTERING APPARATUS WITH THE SAME]

 #274
20050145487
2005-07-07

Coating installation

 #275
20050145477
2005-07-07

Device for targeted application of deposition material to a substrate

 #276
20050067272
2005-03-31

System method and collimator for oblique deposition

 #277
18654389
2025-08-19

Methods and apparatus for depositing amorphous indium tin oxide film

 #278
17507262
2022-10-25

Thin-film-deposition equipment for detecting shielding mechanism

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17497535
2022-10-18

Double-layer shielding device and thin-film-deposition equipment with the same

 #280
14483093
2017-09-12

Filtered cathodic arc method, apparatus and applications thereof

 #281
12955851
2018-01-09

Sputtering shield