Anti-Stiction Process for Mems Device

SPUTTERING APPARATUS, APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM, THIN FILM FORMING METHOD, AND METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM

Beam Plasma Source Enhanced Magnetron Sputtering

SIMULTANEOUS ETCHING OF MULTI-FACETED SUBSTRATES

PLASMA PROCESS APPARATUS

STABLE GROUND ANODE FOR THIN FILM PROCESSING

BIAS MAGNETIC FIELD CONTROL METHOD, CONTROL DEVICE, AND SEMICONDUCTOR PROCESS EQUIPMENT

Vacuum deposition into trenches and vias

Physical vapor deposition apparatus and method thereof

SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES

Deposition method for tuning magnetic field distribution of deposition equipment

Semiconductor apparatus and magnetic structure of semiconductor apparatus

Movable magnet array for magnetron sputtering

Multifocal magnetron design for physical vapor deposition processing on a single cathode

MAGNETIC-FIELD-DISTRIBUTION TUNER, DEPOSITION EQUIPMENT AND METHOD OF DEPOSITION

Physical vapor deposition apparatus and method thereof

EM SOURCE FOR ENHANCED PLASMA CONTROL

Anti-stiction process for MEMS device

Thermally controlled magnetic fields optimization system for sputter deposition processes

Film forming apparatus and film forming method

Method and apparatus for depositing a material

Depositing apparatus

Anti-stiction process for MEMS device

Physical vapor deposition apparatus and method thereof

Multifocal magnetron design for physical vapor deposition processing on a single cathode

Providing voice call support in a network

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Flexible adjustable return path magnet assembly and methods

Laterally adjustable return path magnet assembly and methods

Surrounding field sputtering source

Method and apparatus for depositing a material

Magnetic Configuration for a Magnetron Sputter Deposition System

Sputtering apparatus

Magnetron assembly for physical vapor deposition chamber

Online adjustable magnet bar

Rotation plus vibration magnet for magnetron sputtering apparatus

Sputtering apparatus

Method of fine tuning a magnetron sputtering electrode in a rotatable cylindrical magnetron sputtering device

Sputtering apparatus and magnet unit

Intaglio printing plate coating apparatus

PVD plasma control using a magnet edge lift mechanism

Apparatus and arrangements of magnetic field generators to facilitate physical vapor deposition to form semiconductor films

Configurable variable position closed track magnetron

Adjustable shunt assembly for a sputtering magnetron and a method for adjusting such a shunt

Magnetic-field-generating apparatus for magnetron sputtering

Rotation plus vibration magnet for magnetron sputtering apparatus

Method of switching magnetic flux distribution

Magnetic field generator, magnetron cathode and spattering apparatus

MAGNETIC CIRCUIT FOR SPUTTERING APPARATUS

MAGNET FOR PHYSICAL VAPOR DEPOSITION PROCESSES TO PRODUCE THIN FILMS HAVING LOW RESISTIVITY AND NON-UNIFORMITY

CONTROL OF PLASMA PROFILE USING MAGNETIC NULL ARRANGEMENT BY AUXILIARY MAGNETS

Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system

Magnetron design for RF/DC physical vapor deposition

Cylindrical magnetron having a shunt

TARGET ASSEMBLY FOR A MAGNETRON SPUTTERING APPARATUS, A MAGNETRON SPUTTERING APPARATUS AND A METHOD OF USING THE MAGNETRON SPUTTERING APPARATUS

Trim magnets to adjust erosion rate of cylindrical sputter targets

Magnet Structure and Cathode Electrode Unit for Magnetron Sputtering System, and Magnetron Sputtering System

HIGH POWER IMPULSE MAGNETRON SPUTTERING VAPOUR DEPOSITION

MAGNET ASSEMBLY CAPABLE OF GENERATING MAGNETIC FIELD HAVING DIRECTION THAT IS UNIFORM AND CAN BE CHANGED AND SPUTTERING APPARATUS USING THE SAME

Magnetron Sputtering Device In which Two Modes Of Magnetic Flux Distribution (Balanced Mode/Unbalanced Mode) Can Be Switched From One To The Other And Vice Versa, A Film Formation Method For Forming A Film From An Inorganic Film Formation Material Using The Device, And A Dual Mode Magnetron Sputtering Device And Film Formation Method For Forming A Film From An Inorganic Film Formation Material At A Low Temperature Using The Device

Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths

Enhanced magnetron sputtering target

Split magnet ring on a magnetron sputter chamber

Magnetically enhanced capacitive plasma source for ionized physical vapor deposition

Sputtering device for manufacturing thin films

Magnetically enhanced capacitive plasma source for ionized physical vapor deposition

Cathode structure for vacuum sputtering machine