205415 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes operating with cathodic sputtering; Testing and control Detecting exhaustion of target material
PHYSICAL VAPOR DEPOSITION (PVD) WITH TARGET EROSION PROFILE MONITORING
#2METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING CHAMBERS
#3PHYSICAL VAPOR DEPOSITION (PVD) WITH TARGET EROSION PROFILE MONITORING
#4BIAS MAGNETIC FIELD CONTROL METHOD, CONTROL DEVICE, AND SEMICONDUCTOR PROCESS EQUIPMENT
#5Physical vapor deposition process apparatus and method of optimizing thickness of a target material film deposited using the same
#6SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHOD, AND PROGRAM
#7Film forming method, film forming apparatus, and program
#8Film forming apparatus and film forming method
#9Smart chamber and smart chamber components
#10Magnetron sputtering device, magnetron sputtering apparatus and magnetron sputtering method
#11Method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes
#12Method for monitoring usage of a physical vapor deposition (PVD) target with an ultrasonic transducer
#13Multi-Magnetron Arrangement
#14SPUTTERING APPARATUS
#15Cathode assembly, physical vapor deposition system, and method for physical vapor deposition
#16Smart chamber and smart chamber components
#17System and method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes
#18Sputtering apparatus
#19Sputtering apparatus
#20SPUTTER GUN
#21PVD target with end of service life detection capability
#22PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
#23PVD target with end of service life detection capability
#24PVD target with end of service life detection capability
#25METHOD OF USING A TARGET HAVING END OF SERVICE LIFE DETECTION CAPABILITY