ClassID:

207005

H01L21/02076 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Cleaning Cleaning after the substrates have been singulated

Recent Application in this class:
#1
20250364481
2025-11-27

POST CMP PROCESSING FOR HYBRID BONDING

#2
20250349620
2025-11-13

Method of Singulating a Semiconductor Device

#3
20250233021
2025-07-17

DIE CLEANING SYSTEMS AND RELATED METHODS

#4
20250210380
2025-06-26

BARRIER LAYER REMOVAL DEVICE AND BARRIER LAYER REMOVAL METHOD

#5
20250167049
2025-05-22

WAFER PROCESSING METHOD

#6
20250149386
2025-05-08

DIE CLEANING SYSTEMS AND RELATED METHODS

#7
20250062154
2025-02-20

WAFER CLEANING APPARATUS AND METHOD OF CONTROLLING THE SAME

#8
20250006690
2025-01-02

POST-PLASMA CLEAN INFRARED IMAGE INSPECTION FOR OXIDELESS BONDING AND APPARATUS FOR EFFECTING THE SAME

#9
20240404990
2024-12-05

PROCESSED STACKED DIES

#10
20240390955
2024-11-28

ACOUSTIC FOREIGN MATTER REMOVAL DEVICE

#11
20240258098
2024-08-01

SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

#12
20240213021
2024-06-27

METHOD FOR PREPARING SEMICONDUCTOR LAYER

#13
20240079274
2024-03-07

Die cleaning systems and related methods

#14
20240071745
2024-02-29

Methods, systems, and apparatus for tape-frame substrate cleaning and drying

#15
20240038551
2024-02-01

COATING COMPOSITION FOR WAFER PROTECTION AND METHOD OF MANUFACTURING SEMICONDUCTOR PACKAGE USING THE SAME

#16
20240038536
2024-02-01

PLASMA PROCESSING APPARATUS, WAFER TO WAFER BONDING SYSTEM AND WAFER TO WAFER BONDING METHOD

#17
20240006240
2024-01-04

DEVICE WAFER PROCESSING METHOD AND PROCESSING APPARATUS

#18
20240006239
2024-01-04

DEVICE WAFER PROCESSING METHOD

#19
20230377938
2023-11-23

CHIP BONDING METHOD

#20
20230298940
2023-09-21

WAFER PROCESSING METHOD

#21
20230282610
2023-09-07

Processed stacked dies

#22
20230230882
2023-07-20

SEMICONDUCTOR DEVICE AND METHODS OF FORMING THE SAME

#23
20230215722
2023-07-06

Methods, systems, and apparatus for tape-frame substrate cleaning and drying

#24
20220367232
2022-11-17

Hybrid bond method for fixing dies

#25
20220344195
2022-10-27

WAFER CLEANING APPARATUS

#26
20220344194
2022-10-27

Wafer cleaning apparatus and method of controlling the same

#27
20220139754
2022-05-05

Method of manufacturing protective film agent

#28
20220084886
2022-03-17

WAFER PROCESSING METHOD

#29
20220055077
2022-02-24

Die bonding apparatus, cleaning head and manufacturing method for semiconductor device

#30
20210335667
2021-10-28

Processing method of wafer

#31
20210272846
2021-09-02

Disposing protective cover film and underfill layer over singulated integrated circuit dice for protection during integrated circuit processing

#32
20210242085
2021-08-05

Automated transfer and drying tool for process chamber

#33
20210111017
2021-04-15

Post etch defluorination process

#34
20210104487
2021-04-08

Processed stacked dies

#35
20200350208
2020-11-05

Die cleaning systems and related methods

#36
20200312716
2020-10-01

Workpiece-separating device and workpiece-separating method

#37
20200243393
2020-07-30

Automated transfer and drying tool for process chamber

#38
20200234994
2020-07-23

Protective film agent for laser dicing

#39
20200209476
2020-07-02

Saw assisted facet etch dicing

#40
20200051953
2020-02-13

Bonding method of semiconductor chip and bonding apparatus of semiconductor chip

#41
20200035641
2020-01-30

POST CMP PROCESSING FOR HYBRID BONDING

#42
20190393027
2019-12-26

Post etch defluorination process

#43
20190371669
2019-12-05

Method of dicing a semiconductor wafer using a protective film formed by coating a mixture of water-soluble resin and organic solvent

#44
20190363018
2019-11-28

DIE CLEANING SYSTEMS AND RELATED METHODS

#45
20190341378
2019-11-07

Edge cut debond using a temporary filler material with no adhesive properties and edge cut debond using an engineered carrier to enable topography

#46
20190295894
2019-09-26

Method for cutting element chip by laser scribing

#47
20190270123
2019-09-05

Cleaning method for cleaning frame unit

#48
20190139850
2019-05-09

Temporary bonding scheme

#49
20190109047
2019-04-11

Mask-integrated surface protective tape

#50
20190103314
2019-04-04

Automated transfer and drying tool for process chamber

#51
20190088637
2019-03-21

Edge cut debond using a temporary filler material with no adhesive properties and edge cut debond using an engineered carrier to enable topography

#52
20190074185
2019-03-07

Method of manufacturing element chip

#53
20180342422
2018-11-29

Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process

#54
20180331066
2018-11-15

Processed stacked dies

#55
20180291803
2018-10-11

Ultrasonic cleaning system and method

#56
20180269080
2018-09-20

System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays

#57
20180247827
2018-08-30

Semiconductor manufacturing method and plasma processing apparatus

#58
20180229396
2018-08-16

Wafer processing method

#59
20180226359
2018-08-09

Mask-integrated surface protective tape

#60
20180197777
2018-07-12

Manufacturing process of element chip

#61
20180197776
2018-07-12

Resin package substrate processing method

#62
20180182654
2018-06-28

Die tray with channels

#63
20180158691
2018-06-07

Mask-integrated surface protective film

#64
20180158675
2018-06-07

CLEANING METHOD

#65
20180144983
2018-05-24

Device wafer processing method

#66
20180090453
2018-03-29

Method of manufacturing semiconductor device

#67
20180076054
2018-03-15

Anti-plasma adhesive tape and manufacturing method

#68
20170372893
2017-12-28

Cleaning apparatus and substrate processing apparatus

#69
20170338104
2017-11-23

Formulations for the removal of particles generated by cerium-containing solutions

#70
20170330861
2017-11-16

Method for electromagnetic shielding and thermal management of active components

#71
20170326866
2017-11-16

De-bonding and cleaning process and system

#72
20170309594
2017-10-26

Bonding method of semiconductor chip and bonding apparatus of semiconductor chip

#73
20170200602
2017-07-13

Method for removing adhering matter and dry etching method

#74
20170184924
2017-06-29

Method of unit level liquid crystal display device assembly process for liquid crystal on silicon

#75
20170162521
2017-06-08

Wafer processing method

#76
20170154768
2017-06-01

CLEANING METHOD

#77
20170130649
2017-05-11

Ultrasonic cleaning system and method

#78
20170098578
2017-04-06

METHOD OF FABRICATING A SEMICONDUCTOR PACKAGE

#79
20170036433
2017-02-09

De-bonding and cleaning process and system

#80
20170032981
2017-02-02

Semiconductor device and method of encapsulating semiconductor die

#81
20170025269
2017-01-26

Wafer processing method

#82
20170018441
2017-01-19

Methods and apparatus for substrate edge cleaning

#83
20170018423
2017-01-19

Apparatus and Method for Processing the Surface of a Workpiece Comprised of Sensitive Materials with an Ozone and Carbon Dioxide Treating Fluid

#84
20170005018
2017-01-05

METHOD AND DEVICE FOR INSPECTION OF A SEMICONDUCTOR DEVICE

#85
20170004965
2017-01-05

Semiconductor die singulation method

#86
20160372323
2016-12-22

Method of reducing residual contamination in singulated semiconductor die

#87
20160365283
2016-12-15

Etch-resistant water soluble mask for hybrid wafer dicing using laser scribing and plasma etch

#88
20160218037
2016-07-28

Device manufacturing method of processing cut portions of semiconductor substrate using carbon dioxide particles

#89
20160141209
2016-05-19

Device manufacturing method and device

#90
20160133521
2016-05-12

Method of manufacturing a semiconductor device

#91
20160126218
2016-05-05

Bonding method of semiconductor chip and bonding apparatus of semiconductor chip

#92
20160101613
2016-04-14

De-bonding and cleaning process and system

#93
20160056086
2016-02-25

Temporary bonding scheme

#94
20150357242
2015-12-10

WAFER PROCESSING METHOD

#95
20150357241
2015-12-10

Method of reducing residual contamination in singulated semiconductor die

#96
20150357224
2015-12-10

Wafer processing method

#97
20150357198
2015-12-10

Method of etching and cleaning wafers

#98
20150332928
2015-11-19

Wafer processing method

#99
20150311096
2015-10-29

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND CLEANING PROCESSING SYSTEM

#100
20150228494
2015-08-13

Semiconductor die singulation method

#101
20150162300
2015-06-11

Laser ashing of polyimide for semiconductor manufacturing

#102
20150162222
2015-06-11

Wafer processing apparatus

#103
20150155260
2015-06-04

Temporary bonding scheme

#104
20150151337
2015-06-04

Cleaning apparatus

#105
20150104928
2015-04-16

Wafer processing method for removing organic debris

#106
20150044788
2015-02-12

Test apparatus and test method

#107
20150034131
2015-02-05

Devices and methodologies to clean wafers with solvent

#108
20150004754
2015-01-01

Semiconductor chips having improved solidity, semiconductor packages including the same and methods of fabricating the same

#109
20140373869
2014-12-25

METHOD FOR REMOVING SOLDER BALLS FROM CHIP

#110
20140318584
2014-10-30

FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM-CONTAINING SOLUTIONS

#111
20140251535
2014-09-11

Collet cleaning method and die bonder using the same

#112
20140251375
2014-09-11

Methods and apparatus for substrate edge cleaning

#113
20140248774
2014-09-04

Liquid treatment apparatus and liquid treatment method

#114
20140224785
2014-08-14

Apparatus to improve internal wafer temperature profile

#115
20140216500
2014-08-07

Single wafer cleaning tool with HSOrecycling

#116
20140206589
2014-07-24

AZEOTROPE-LIKE COMPOSITIONS COMPRISING 1-CHLORO-3,3,3-TRIFLUOROPROPENE

#117
20140196850
2014-07-17

Method and system for wafer level singulation

#118
20140190513
2014-07-10

Apparatus and method for treating substrate

#119
20140179083
2014-06-26

High die strength semiconductor wafer processing method and system

#120
20140170835
2014-06-19

Method for wafer dicing and composition useful thereof

#121
20140135246
2014-05-15

Cleaning composition, cleaning process, and process for producing semiconductor device

#122
20140134828
2014-05-15

Semiconductor die singulation method

#123
20140120699
2014-05-01

Fabrication method for dicing of semiconductor wafers using laser cutting techniques

#124
20140051232
2014-02-20

Semiconductor die singulation method

#125
20140015114
2014-01-16

Electronic device manufacturing method and chip assembly

#126
20140014142
2014-01-16

Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device

#127
20140007902
2014-01-09

Method of stripping photoresist on a single substrate system

#128
20130284213
2013-10-31

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#129
20130206176
2013-08-15

Cleaning system and cleaning method

#130
20130152965
2013-06-20

Semiconductor cleaning device and semiconductor cleaning method

#131
20130146229
2013-06-13

Separation system, separation method, program and computer storage medium

#132
20130045570
2013-02-21

Method and system for wafer level singulation

#133
20120115308
2012-05-10

FABRICATION METHOD FOR DICING OF SEMICONDUCTOR WAFERS USING LASER CUTTING TECHNIQUES

#134
20120111496
2012-05-10

Laser ashing of polyimide for semiconductor manufacturing

#135
20120094493
2012-04-19

Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device

#136
20120080052
2012-04-05

Devices and methodologies for handling wafers

#137
20120009762
2012-01-12

Method for wafer dicing and composition useful thereof

#138
20110297190
2011-12-08

Method for processing process-target object

#139
20110272694
2011-11-10

Insulating substrate for semiconductor apparatus, semiconductor apparatus, and method for manufacturing semiconductor apparatus

#140
20110237480
2011-09-29

Cleaning composition, cleaning process, and process for producing semiconductor device

#141
20110020984
2011-01-27

Method of manufacturing a semiconductor device

#142
20100009517
2010-01-14

Process for inhibiting corrosion and removing contaminant from a surface during wafer dicing and composition useful therefor

#143
20090291529
2009-11-26

Method of manufacturing a semiconductor device

#144
20090155985
2009-06-18

Inhibition of metal diffusion arising from laser dicing

#145
20090155983
2009-06-18

Method of inhibition of metal diffusion arising from laser dicing

#146
20090098713
2009-04-16

Object cutting method

#147
20090057845
2009-03-05

APPARATUS TO SAW WAFER AND HAVING NOZZLE TO REMOVE BURRS IN SCRIBE LANES, METHOD OF SAWING WAFER, AND SEMICONDUCTOR PACKAGE FABRICATED BY THE SAME

#148
20080286902
2008-11-20

Method of manufacturing a semiconductor device

#149
20080115891
2008-05-22

Laser beam machining system

#150
20070204956
2007-09-06

Method of manufacturing a semiconductor device and wet processing apparatus

#151
20070199580
2007-08-30

System and method for removing foreign particles from semiconductor device

#152
20070123061
2007-05-31

Method of treating a substrate, method of processing a substrate using a laser beam, and arrangement

#153
20060261445
2006-11-23

INTEGRATED CIRCUIT DEVICE WITH TREATED PERIMETER EDGE

#154
20060141677
2006-06-29

Method of manufacturing a semiconductor device

#155
20060046434
2006-03-02

Method for reducing lead precipitation during wafer processing

#156
14589918
2016-05-31

Hybrid wafer dicing approach using a line shaped laser beam profile laser scribing process and plasma etch process

#157
14589823
2016-05-03

Hybrid wafer dicing approach using a galvo scanner and linear stage hybrid motion laser scribing process and plasma etch process