ClassID:

207006

H01L21/02079 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Cleaning Cleaning for reclaiming

Recent Application in this class:
#1
20250259877
2025-08-14

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

#2
20240269716
2024-08-15

Ultrasonic cleaning method

#3
20230282494
2023-09-07

FULLY AUTOMATED WAFER DEBONDING SYSTEM AND METHOD THEREOF

#4
20230260841
2023-08-17

Method for producing a composite structure comprising a thin layer of monocrystalline sic on a carrier substrate of polycrystalline SiC

#5
20230230851
2023-07-20

TRANSFER OF WIDE AND ULTRAWIDE BANDGAP LAYERS TO ENGINEERED SUBSTRATE

#6
20230197436
2023-06-22

Epitaxial alkali halide layers for III-V substrate recycling

#7
20230197435
2023-06-22

Method for manufacturing a composite structure comprising a thin layer made of monocrystalline sic on a carrier substrate made of SiC

#8
20230187255
2023-06-15

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

#9
20230162997
2023-05-25

SEMICONDUCTOR CHIP DELAMINATION DEVICE AND CONTROL METHOD THEREFOR

#10
20230151308
2023-05-18

SEMICONDUCTOR SUBSTRATE CLEANING METHOD, PROCESSED SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD, AND COMPOSITION FOR PEELING

#11
20230125907
2023-04-27

METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE, METHOD FOR PRODUCING PROCESSED SEMICONDUCTOR SUBSTRATE, AND STRIPPING COMPOSITION

#12
20230039366
2023-02-09

COMPOSITION, AND METHOD FOR CLEANING ADHESIVE POLYMER

#13
20220195352
2022-06-23

Cleaning solution for temporary adhesive for substrates, substrate cleaning method, and cleaning method for support or substrate

#14
20220139699
2022-05-05

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

#15
20220119739
2022-04-21

Decomposing/cleaning composition, method for cleaning adhesive polymer, and method for producing device wafer

#16
20210265211
2021-08-26

Processing method of device wafer

#17
20210242043
2021-08-05

Fully automated wafer debonding system and method thereof

#18
20200251365
2020-08-06

Metrology method in wafer transportation

#19
20200140792
2020-05-07

Composition for forming a coating film for removing foreign matters

#20
20200139677
2020-05-07

Device modified substrate article and methods for making

#21
20200043719
2020-02-06

Substrate processing apparatuses and substrate processing methods

#22
20190164792
2019-05-30

Metrology method in wafer transportation

#23
20190051553
2019-02-14

Methods of Transferring a Graphene Monolayer via a Stacked Structure and Devices Fabricated Thereby

#24
20180226243
2018-08-09

Polysilicon chip reclamation assembly and method of reclaiming polysilicon chips from a polysilicon cleaning apparatus

#25
20180182633
2018-06-28

Systems and methods for anisotropic material breakthrough

#26
20180182617
2018-06-28

Method for manufacturing restored substrate and method for manufacturing light emitting element

#27
20180166598
2018-06-14

High performance solar cells, arrays and manufacturing processes therefor

#28
20170326866
2017-11-16

De-bonding and cleaning process and system

#29
20170263446
2017-09-14

Sapphire substrate recycling method

#30
20170182744
2017-06-29

Device modified substrate article and methods for making

#31
20170011948
2017-01-12

Semiconductor structures including carrier wafers and attached device wafers, and methods of forming such semiconductor structures

#32
20160225613
2016-08-04

SUBSTRATE TREATMENT DEVICE, PEELING METHOD FOR LAMINATED SUBSTRATE, AND METHOD FOR REMOVING ADHESIVE

#33
20160067729
2016-03-10

Recycle photochemical to reduce cost of material and environmental impact

#34
20150371863
2015-12-24

Rework and stripping of complex patterning layers using chemical mechanical polishing

#35
20140264758
2014-09-18

Methods of forming a protection layer to protect a metal hard mask layer during lithography reworking processes

#36
20130081515
2013-04-04

Method for recovering metal copper from coated copper wires

#37
20110275164
2011-11-10

Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon

#38
20110223767
2011-09-15

CONTROL WAFER RECLAMATION PROCESS

#39
20110076623
2011-03-31

METHOD FOR REWORKING SILICON-CONTAINING ARC LAYERS ON A SUBSTRATE

#40
20110017401
2011-01-27

Electron induced chemical etching and deposition for local circuit repair

#41
20100297828
2010-11-25

Method for fabricating a semiconductor on insulator type substrate

#42
20100190416
2010-07-29

Device for polishing the edge of a semiconductor substrate

#43
20100151685
2010-06-17

METHODS OF REMOVING MULTI-LAYERED STRUCTURE AND OF MANUFACTURING SEMICONDUCTOR DEVICE

#44
20100144065
2010-06-10

Method for recycling/reclaiming a monitor wafer

#45
20100112728
2010-05-06

METHODS FOR STRIPPING MATERIAL FOR WAFER RECLAMATION

#46
20090305931
2009-12-10

Composition for removing an insulation material and related methods

#47
20090270017
2009-10-29

Slurryless mechanical planarization for substrate reclamation

#48
20090233447
2009-09-17

CONTROL WAFER RECLAMATION PROCESS

#49
20090065944
2009-03-12

Reworked integrated circuit device and reworking method thereof

#50
20090050604
2009-02-26

Tri-layer plasma etch resist rework

#51
20080318426
2008-12-25

Wafer recycling method

#52
20080299682
2008-12-04

METHOD FOR REMOVING POLY SILICON

#53
20080280454
2008-11-13

Wafer recycling method using laser films stripping

#54
20080261847
2008-10-23

Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon

#55
20080233490
2008-09-25

Mask rework method

#56
20080153185
2008-06-26

Copper process methodology

#57
20080153183
2008-06-26

Floating gate process methodology

#58
20080153040
2008-06-26

Method for processing semiconductor wafer

#59
20080124930
2008-05-29

METHODS OF RECYCLING A SUBSTRATE INCLUDING USING A CHEMICAL MECHANICAL POLISHING PROCESS

#60
20080067145
2008-03-20

METHOD OF RECYCLING DUMMY WAFER

#61
20080006603
2008-01-10

Electron induced chemical etching and deposition for local circuit repair

#62
20070203041
2007-08-30

Cleaning composition for removing impurities and method of removing impurities using the same

#63
20070190799
2007-08-16

Refurbishing a wafer having a low-k dielectric layer

#64
20070190798
2007-08-16

REMOVING A LOW-K DIELECTRIC LAYER FROM A WAFER

#65
20070190791
2007-08-16

REMOVING A LOW-K DIELECTRIC LAYER FROM A WAFER BY CHEMICAL MECHANICAL POLISHING

#66
20070190790
2007-08-16

FINE GRINDING A LOW-K DIELECTRIC LAYER OFF A WAFER

#67
20070151949
2007-07-05

Semiconductor processes and apparatuses thereof

#68
20070087580
2007-04-19

Composition for removing an insulation material, method of removing an insulation layer and method of recycling a substrate using the same

#69
20070082497
2007-04-12

Composition for removing an insulation material and related methods

#70
20070007245
2007-01-11

Silicon wafer reclamation method and reclaimed wafer

#71
20060255314
2006-11-16

Polishing slurry and method of reclaiming wafers

#72
20060240675
2006-10-26

Removal of silicon oxycarbide from substrates

#73
20060194349
2006-08-31

Method of reworking a semiconductor structure

#74
20060160364
2006-07-20

Refreshing wafers having low-k dielectric materials

#75
20060016786
2006-01-26

Method and apparatus for removing SiC or low k material film

#76
20060009011
2006-01-12

Method for recycling/reclaiming a monitor wafer

#77
20050250277
2005-11-10

Method for reclaiming and reusing wafers

#78
20050248004
2005-11-10

Wafer and the manufacturing and reclaiming methods thereof

#79
20050037622
2005-02-17

Method of reworking layers over substrate