207103 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Forming layers; Forming inorganic semiconducting materials on a substrate Special treatments
Sub-classes:STRAIN RELIEF TRENCHES FOR EPITAXIAL GROWTH
#2METHOD FOR ADJUSTING THERMAL FIELD OF SILICON CARBIDE SINGLE CRYSTAL GROWTH
#3Purge ring for pedestal assembly
#4Method of manipulating deposition rates of poly-silicon and method of manufacturing a SiGe HBT device
#5Thin substrate handling via edge clamping
#6Strain relief trenches for epitaxial growth
#7Method for filling recessed features in semiconductor devices with a low-resistivity metal
#8Method of filling recess
#9Method of forming aluminum nitride film and method of manufacturing semiconductor light-emitting element
#10SiGe p-channel tri-gate transistor based on bulk silicon and fabrication method thereof
#11Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
#12Method of manufacturing integrated circuit device
#13Method of preparing diamond substrates for CVD nanometric delta doping
#14Method of doped germanium formation
#15CVD reactor and method for nanometric delta doping of diamond
#16SiGe P-CHANNEL TRI-GATE TRANSISTOR BASED ON BULK SILICON AND FABRICATION METHOD THEREOF
#17Method and apparatus for reducing threshold voltage mismatch in an integrated circuit
#18Manufacturing a submicron structure using a liquid precursor
#19Processing gas generating apparatus, processing gas generating method, substrate processing method, and storage medium
#20Silicon carbide semiconductor substrate and method for manufacturing same
#21Semiconductor device, semiconductor substrate, method for manufacturing semiconductor device, and method for manufacturing semiconductor substrate
#22Method of manufacturing semiconductor device
#23Device and method for adjusting post-spacer height in production of liquid crystal displays
#24Light induced nanowire assembly
#25Method of fabricating an optoelectronic device with a hollow component in epitaxial layer
#26Cyclic epitaxial deposition and etch processes
#27Methods for producing complex films, and films produced thereby
#28Apparatus and method for fabricating wafer
#29Inorganic nanostructure reactive direct-write and growth
#30Methods of preparing graphene and device including graphene
#31Graphene-layered structure, method of preparing the same, and transparent electrode and transistor including graphene-layered structure
#32Horizontally and vertically aligned graphite nanofibers thermal interface material for use in chip stacks
#33Semiconductive micro- and nano-wire array manufacturing
#34Apparatus and method for manufacturing a light-emitting device using a neutral particle beam
#35Radiation hardened transistors based on graphene and carbon nanotubes
#36Formation of a graphene layer on a large substrate
#37Method of manufacturing graphene substrate, and graphene substrate
#38Method for manufacturing a thin film transistor array panel
#39Semiconductor substrate and semiconductor substrate manufacturing method
#40Method of manufacturing substrate
#41Semiconductor device, semiconductor substrate, method for manufacturing device, and method for manufacturing semiconductor substrate
#42FABRICATION OF LIGHT EMITTING DIODES (LEDS) USING A DEGAS PROCESS
#43METHOD OF FABRICATING LIGHT RECEIVING ELEMENT AND APPARATUS FOR FABRICATING LIGHT RECEIVING ELEMENT
#44Graphene-layered structure, method of preparing the same, and transparent electrode and transistor including graphene-layered structure
#45Method of manufacturing semiconductor device
#46Production of graphene and nanoparticle catalysts supported on graphene using laser radiation
#47NITRIDE BASED LIGHT EMITTING DEVICE USING PATTERNED LATTICE BUFFER LAYER AND METHOD OF MANUFACTURING THE SAME
#48Graphene-containing semiconductor structures and devices on a silicon carbide substrate having a defined miscut angle
#49TEMPLATE, METHOD FOR MANUFACTURING THE TEMPLATE AND METHOD FOR MANUFACTURING VERTICAL TYPE NITRIDE-BASED SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE TEMPLATE
#50Radiation hardened transistors based on graphene and carbon nanotubes
#51Formation of a graphene layer on a large substrate
#52Light-emitting semiconductor device having sub-structures for reducing defects of dislocation therein
#53PATTERNING METHOD
#54METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
#55METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
#56METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
#57PHOTOELECTRIC CONVERSION DEVICE AND SOLAR CELL
#58Semiconductor substrate, semiconductor device, and manufacturing methods thereof
#59Surface passivation techniques for chamber-split processing
#60Semiconductor substrate and method for manufacturing the same
#61Method of manufacturing semiconductor light emitting device
#62GaN Epitaxial Wafer and Semiconductor Devices, and Method of Manufacturing GaN Epitaxial Wafer and Semiconductor Devices
#63Nitride semiconductor light-emitting device and fabrication method thereof
#64Semiconductor nanowire and its manufacturing method
#65Growth of low dislocation density Group-III nitrides and related thin-film structures
#66Methods, devices and compositions for depositing and orienting nanostructures
#67Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
#68Dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers
#69Method for fabricating light emitting semiconductor device for reducing defects of dislocation in the device
#70Method of fabricating gallium nitride substrate
#71Semiconductor device and method of processing the same
#72Thermal Expansion Transition Buffer Layer for Gallium Nitride on Silicon
#73Method of producing a semiconductor element in a substrate
#74FABRICATION OF DIVERSE STRUCTURES ON A COMMON SUBSTRATE THROUGH THE USE OF NON-SELECTIVE AREA GROWTH TECHNIQUES
#75Gallium nitride on silicon with a thermal expansion transition buffer layer
#76Methods, devices and compositions for depositing and orienting nanostructures
#77Method and Structure of Strain Control of Sige Based Photodetectors and Modulators
#78Nitride semiconductor light-emitting device and fabrication method thereof
#79Patterning and aligning semiconducting nanoparticles
#80III nitride crystal and method for producing same
#81Semiconductor substrate and method for fabricating the same
#82Methods, devices and compositions for depositing and orienting nanostructures