ClassID:

207112

H01L21/0272 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Making masks on semiconductor bodies for further photolithographic processing not provided for in group or comprising organic layers for lift-off processes

Recent Application in this class:
#1
20260047401
2026-02-12

SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME

#2
20260011573
2026-01-08

SEMICONDUCTOR DEVICE AND FORMATION METHOD THEREOF

#3
20250372378
2025-12-04

Patterning Process

#4
20250130496
2025-04-24

POSITIVE TYPE LIFT-OFF RESIST COMPOSITION AND METHOD FOR MANUFACTURING RESIST PATTERN USING THE SAME

#5
20250069885
2025-02-27

SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION

#6
20250014900
2025-01-09

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH FEATURES AT DIFFERENT LEVELS

#7
20240412973
2024-12-12

PATTERNING USING MONOMER BASED SACRIFICIAL MATERIAL LIFTOFF

#8
20240379356
2024-11-14

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

#9
20240379355
2024-11-14

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

#10
20240376342
2024-11-14

HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS

#11
20240363346
2024-10-31

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES OF DIFFERENT DEPTHS

#12
20240304444
2024-09-12

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES OF DIFFERENT DEPTHS

#13
20240288771
2024-08-29

SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERNS USING THE COMPOSITION

#14
20240234091
2024-07-11

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

#15
20240162087
2024-05-16

MANDREL-PULL-FIRST INTERCONNECT PATTERNING

#16
20240136153
2024-04-25

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

#17
20240072127
2024-02-29

MANUFACTURING METHOD OF PATTERNIG SUBSTRATE, PATTERNED SUBSTRATE, AND INTERMEDIATE PATTERNED SUBSTRATE

#18
20240012327
2024-01-11

METHOD FOR FORMING A LIFT-OFF MASK STRUCTURE

#19
20230393479
2023-12-07

RESIST UNDERLAYER FILM-FORMING COMPOSITION HAVING BENZYLIDENECYANOACETATE GROUP

#20
20230377884
2023-11-23

Integrated photoresist removal and laser annealing

#21
20230317452
2023-10-05

HARD MASK STRUCTURE

#22
20230298889
2023-09-21

Method of manufacturing semiconductor device

#23
20230246100
2023-08-03

ENHANCEMENT-MODE HEMT AND MANUFACTURING PROCESS OF THE SAME

#24
20230223261
2023-07-13

Method for preparing semiconductor device structure with features at different levels

#25
20230223260
2023-07-13

Method for preparing semiconductor device structure having features of different depths

#26
20230223259
2023-07-13

Method for preparing semiconductor device structure having features of different depths

#27
20230161251
2023-05-25

COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND AND POLYMER FOR FORMING ORGANIC FILM

#28
20230131253
2023-04-27

RESIST UNDERLAYER FILM-FORMING COMPOSITION WITH SUPPRESSED DEGENERATION OF CROSSLINKING AGENT

#29
20230112348
2023-04-13

TUNNELING DEVICE HAVING INTERMEDIATE LAYER USING NATURAL OXIDE FILM AND METHOD OF MANUFACTURING TUNNELING DEVICE

#30
20230008150
2023-01-12

METHOD OF SELECTIVELY ETCHING A METAL COMPONENT

#31
20220392769
2022-12-08

METHOD FOR FORMING ELECTRODE

#32
20220367275
2022-11-17

Method and structure for thin-film fabrication

#33
20220317573
2022-10-06

Photoresist removal method and photoresist removal system

#34
20220236829
2022-07-28

Touch panel and method of manufacturing the same

#35
20220216037
2022-07-07

Depositing a carbon hardmask by high power pulsed low frequency RF

#36
20220093408
2022-03-24

Manufacturing method of semiconductor structure including complementary first and second mask patterns

#37
20220037148
2022-02-03

Photoresist structure, patterned deposition layer, semiconductor chip and manufacturing method thereof

#38
20210398803
2021-12-23

Method for manufacturing semiconductor device

#39
20210364923
2021-11-25

Coating method and coating system

#40
20210358739
2021-11-18

Selective passivation and selective deposition

#41
20210327827
2021-10-21

Field effect transistor and semiconductor device

#42
20210313220
2021-10-07

Method for forming vias and method for forming contacts in vias

#43
20210151572
2021-05-20

Process of forming a high electron mobility transistor including a gate electrode layer spaced apart from a silicon nitride film

#44
20210151316
2021-05-20

Method of fabricating transistor with short gate length by two-step photolithography

#45
20210111268
2021-04-15

Nitride semiconductor device

#46
20210098262
2021-04-01

Molecular layer etching

#47
20210013157
2021-01-14

Semiconductor device and method for manufacturing semiconductor device

#48
20200411317
2020-12-31

INTEGRATED CIRCUIT PACKAGE ASSEMBLIES WITH HIGH-ASPECT RATIO METALLIZATION FEATURES

#49
20200395239
2020-12-17

Line structure for fan-out circuit and manufacturing method thereof, and photomask pattern for fan-out circuit

#50
20200357644
2020-11-12

Semiconductor device manufacturing method

#51
20200279818
2020-09-03

Field effect transistor and semiconductor device

#52
20200273943
2020-08-27

Backplane for display device and method of manufacturing the same

#53
20200219720
2020-07-09

APPARATUS AND METHODS FOR ASYMMETRIC DEPOSITION OF METAL ON HIGH ASPECT RATIO NANOSTRUCTURES

#54
20200135465
2020-04-30

Selective deposition by laser heating for forming a semiconductor structure

#55
20200126849
2020-04-23

Method for forming vias and method for forming contacts in vias

#56
20200096873
2020-03-26

Prism-mask for angled patterning applications

#57
20200087534
2020-03-19

Composition of spin-on materials containing metal oxide nanoparticles and an organic polymer

#58
20200075317
2020-03-05

Method of reducing lift-off related redeposit defects on semiconductor wafers

#59
20200027723
2020-01-23

Method for manufacturing device

#60
20200006053
2020-01-02

Tools and methods for producing nanoantenna electronic devices

#61
20190385861
2019-12-19

Hybrid mask for deep etching

#62
20190371651
2019-12-05

Tunable hardmask for overlayer metrology contrast

#63
20190355613
2019-11-21

Method of forming film

#64
20190326193
2019-10-24

Semiconductor device and method for manufacturing the same

#65
20190287791
2019-09-19

Methods for asymmetric deposition of metal on high aspect ratio nanostructures

#66
20190260178
2019-08-22

Semiconductor element and method of manufacturing the same

#67
20190259843
2019-08-22

High electron mobility transistor including a gate electrode layer spaced apart from a silicon nitride film

#68
20190245068
2019-08-08

Method for making thin film transistor with nanowires as masks

#69
20190206722
2019-07-04

Tunable hardmask for overlayer metrology contrast

#70
20190181248
2019-06-13

Thin film transistor, manufacturing method therefor, array substrate and display panel

#71
20190181110
2019-06-13

Method for manufacturing semiconductor device

#72
20190165120
2019-05-30

Electronic device, manufacturing method for electronic device, and electronic apparatus

#73
20190157613
2019-05-23

Method of manufacturing display apparatus and display apparatus manufactured using the same

#74
20190131168
2019-05-02

Inorganic lift-off profile process for semiconductor wafer processing

#75
20190131129
2019-05-02

Directed growth of electrically self-contacted monolayer transition metal dichalcogenides with lithographically defined metallic patterns

#76
20190115449
2019-04-18

Process of forming nitride semiconductor device

#77
20190088533
2019-03-21

Method for fabricating planarization layer

#78
20190081178
2019-03-14

Thin film transistor, array substrate, and method for fabricating the same

#79
20190079392
2019-03-14

Template, method for fabricating template, and method for manufacturing semiconductor device

#80
20190024268
2019-01-24

Method for manufacturing pattern for electronic devices, and fiber-type electronic device comprising the pattern for electronic devices

#81
20180374934
2018-12-27

Method for making thin film transistor

#82
20180374701
2018-12-27

Method for making nanoscale channels

#83
20180366497
2018-12-20

Method for manufacturing TFT substrate

#84
20180366318
2018-12-20

Selective deposition process utilizing polymer structure deactivation process

#85
20180337201
2018-11-22

Method of fabricating electrodes, method of fabricating thin film transistor, method of fabricating array substrate, thin film transistor, array substrate, and display apparatus

#86
20180331206
2018-11-15

Polycrystalline silicon thin film transistor and method of fabricating the same, and display apparatus

#87
20180331131
2018-11-15

Method for manufacturing thin film transistor, method for manufacturing array substrate, array substrate and display device

#88
20180301546
2018-10-18

Method for making thin film transistor

#89
20180301543
2018-10-18

Method for making thin film transistor with nanowires as masks

#90
20180301340
2018-10-18

Method for making nano-scaled channels with nanowires as masks

#91
20180267400
2018-09-20

Template and template manufacturing method

#92
20180239453
2018-08-23

Touch panel and method of manufacturing the same

#93
20180233350
2018-08-16

Selective passivation and selective deposition

#94
20180210340
2018-07-26

Film for application to three-dimensional sample, method for manufacturing same, and method for transferring fine pattern using same

#95
20180197730
2018-07-12

Selective SiARC removal

#96
20180174828
2018-06-21

Patterning process with silicon mask layer

#97
20180151444
2018-05-31

Array substrate and manufacturing method for the same

#98
20180144950
2018-05-24

Backplane for display device and method of manufacturing the same

#99
20180102413
2018-04-12

Method for manufacturing electrode of semiconductor device

#100
20180082893
2018-03-22

Semiconductor device manufacture method

#101
20180080119
2018-03-22

Swellable film forming compositions and methods of nanoimprint lithography employing same

#102
20180025903
2018-01-25

Tools and methods for producing nanoantenna electronic devices

#103
20170338311
2017-11-23

Graphene NMOS transistor using nitrogen dioxide chemical adsorption

#104
20170322495
2017-11-09

COMPOSITION FOR REMOVING PHOTORESIST AND METHOD FOR REMOVING PHOTORESIST USING THE SAME

#105
20170294531
2017-10-12

Semiconductor device with a recessed ohmic contact and methods of fabrication

#106
20170287694
2017-10-05

Photolithographic patterning of electronic devices

#107
20170256400
2017-09-07

Semiconductor device and method of manufacturing semiconductor device

#108
20170243751
2017-08-24

Self-anchored catalyst metal-assisted chemical etching

#109
20170243743
2017-08-24

Reactive ion etching assisted lift-off processes for fabricating thick metallization patterns with tight pitch

#110
20170243737
2017-08-24

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

#111
20170236706
2017-08-17

Orthogonal patterning method

#112
20170222148
2017-08-03

Photolithographic patterning of devices

#113
20170194195
2017-07-06

Reactive ion etching assisted lift-off processes for fabricating thick metallization patterns with tight pitch

#114
20170186651
2017-06-29

Array substrate and manufacturing method for the same

#115
20170125406
2017-05-04

Methods of manufacturing transistors including forming a depression in a surface of a covering of resist material

#116
20170110346
2017-04-20

METAL LIFTOFF TOOLS AND METHODS

#117
20170025453
2017-01-26

Method and systems for coupling semiconductor substrates

#118
20170018428
2017-01-19

Lithography process for the encapsulation of patterned thin film coatings

#119
20160307750
2016-10-20

Dual coating and lift-off method for protecting patterned dielectric-metal coatings

#120
20160300926
2016-10-13

Semiconductor device and method of manufacturing semiconductor device

#121
20160230130
2016-08-11

Photoresist stripping using intelligent liquids

#122
20160171992
2016-06-16

PMR writer with non-conformal side gaps

#123
20160159056
2016-06-09

Process for the transfer of at least a portion of a composite film onto a flexible polymer membrane

#124
20160154490
2016-06-02

Touch panel and method of manufacturing the same

#125
20160148955
2016-05-26

THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME

#126
20160064499
2016-03-03

Transistor including active layer having through holes and manufacturing method thereof

#127
20160064240
2016-03-03

Method for integrated circuit patterning

#128
20160049500
2016-02-18

Method for manufacturing thin film transistor and pixel unit thereof

#129
20160020090
2016-01-21

Enhancement of modulus and hardness for UV-cured ultra low-k dielectric films

#130
20150357234
2015-12-10

Method for providing a self-aligned pad protection in a semiconductor device

#131
20150336800
2015-11-26

Wafer scale epitaxial graphene transfer

#132
20150279701
2015-10-01

Metal liftoff tools and methods

#133
20150270290
2015-09-24

Metal oxide TFT device and method for manufacturing the same

#134
20150243829
2015-08-27

Tools and methods for producing nanoantenna electronic devices

#135
20150243514
2015-08-27

Method for directed self-assembly (DSA) of a block copolymer (BCP) using a blend of a BCP with functional homopolymers

#136
20150228728
2015-08-13

Formation of large scale single crystalline graphene

#137
20150214095
2015-07-30

Method for producing a copper layer on a semiconductor body using a printing process

#138
20150214038
2015-07-30

Method for directed self-assembly (DSA) of block copolymers

#139
20150200130
2015-07-16

Method for forming different patterns in a semiconductor structure using a single mask

#140
20150194450
2015-07-09

Thin film transistor and manufacturing method thereof, array substrate and manufacturing method thereof, display device

#141
20150187825
2015-07-02

Method of Manufacturing Array Substrate of LCD

#142
20150187704
2015-07-02

Method of joining semiconductor substrate

#143
20150187592
2015-07-02

Methods for single exposure—self-aligned double, triple, and quadruple patterning

#144
20150179669
2015-06-25

Method of manufacturing array substrate, array substrate and display device

#145
20150137204
2015-05-21

Memory circuit structure and semiconductor process for manufacturing the same

#146
20150137135
2015-05-21

Semiconductor devices with integrated Schottky diodes and methods of fabrication

#147
20150132965
2015-05-14

Method for using post-processing methods for accelerating EUV lithography

#148
20150126029
2015-05-07

DRY FILM PHOTORESIST, MANUFACTURING METHOD OF DRY FILM PHOTORESIST, METAL PATTERN FORMING METHOD AND ELECTRONIC COMPONENT

#149
20150108612
2015-04-23

Method for thinning, metalizing, and dicing a semiconductor wafer, and semiconductor device made using the method

#150
20150093844
2015-04-02

Dicing-free LED fabrication

#151
20150034960
2015-02-05

Method of manufacturing semiconductor device

#152
20140346567
2014-11-27

Elemental semiconductor material contact for high electron mobility transistor

#153
20140342127
2014-11-20

Formation of large scale single crystalline graphene

#154
20140291282
2014-10-02

Wafer scale epitaxial graphene transfer

#155
20140273514
2014-09-18

Topography minimization of neutral layer overcoats in directed self-assembly applications

#156
20140273500
2014-09-18

Metal liftoff tools and methods

#157
20140264826
2014-09-18

Semiconductor device including insulating films with different moisture resistances and fabrication method thereof

#158
20140191331
2014-07-10

Methods of manufacturing transistors including forming a depression in a surface of a covering of resist material

#159
20140141618
2014-05-22

Processing for overcoming extreme topography

#160
20140073137
2014-03-13

Methods for single exposure—self-aligned double, triple, and quadruple patterning

#161
20140034605
2014-02-06

Patterning process for oxide film

#162
20140021623
2014-01-23

Method of forming electric contact interface regions of an electronic device

#163
20130330923
2013-12-12

Middle of line structures and methods for fabrication

#164
20130313223
2013-11-28

Method for producing substrate having surface nanostructure

#165
20130252369
2013-09-26

ENHANCED LIFT-OFF TECHNIQUES FOR USE WHEN FABRICATING LIGHT SENSORS INCLUDING DIELECTRIC OPTICAL COATING FILTERS

#166
20130249032
2013-09-26

Enhanced lift-off techniques for use with dielectric optical coatings and light sensors produced therefrom

#167
20130230981
2013-09-05

Pattern forming method

#168
20130129991
2013-05-23

Multiple exposure with image reversal in a single photoresist layer

#169
20130095574
2013-04-18

Method for producing microparticles

#170
20130065383
2013-03-14

Fabrication methods for T-gate and inverted L-gate structure for high frequency devices and circuits

#171
20130023121
2013-01-24

Double patterning method using tilt-angle deposition

#172
20120315708
2012-12-13

Method for manufacturing semiconductor device

#173
20120267041
2012-10-25

Method of forming multi-layer graphene

#174
20120261829
2012-10-18

Middle of line structures

#175
20120238090
2012-09-20

Production method for thick film metal electrode and production method for thick film resist

#176
20120234792
2012-09-20

Lithography method using tilted evaporation

#177
20120220105
2012-08-30

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF CLEANING SEMICONDUCTOR SUBSTRATE

#178
20120184101
2012-07-19

Chemically amplified positive resist composition and patterning process

#179
20120164765
2012-06-28

Localized annealing of metal-silicon carbide ohmic contacts and devices so formed

#180
20120088322
2012-04-12

Dicing-free LED fabrication

#181
20110130005
2011-06-02

Processing for overcoming extreme topography

#182
20100301456
2010-12-02

Method for applying a structure to a semiconductor element

#183
20100276698
2010-11-04

Gate electrodes for millimeter-wave operation and methods of fabrication

#184
20100266965
2010-10-21

Etch-enhanced technique for lift-off patterning

#185
20100148159
2010-06-17

Method for forming a pattern on a substrate and electronic device formed thereby

#186
20100142259
2010-06-10

Nanogaps: methods and devices containing same

#187
20100117188
2010-05-13

METHOD FOR PRODUCING TRENCH ISOLATION IN SILICON CARBIDE AND GALLIUM NITRIDE AND ARTICLES MADE THEREBY

#188
20100112493
2010-05-06

Method for Producing a Plurality of Regularly Arranged Nanoconnections on a Substrate

#189
20100093122
2010-04-15

Thin film patterning method and method for manufacturing a liquid crystal display device

#190
20100046079
2010-02-25

Polymer pattern and metal film pattern, metal pattern, plastic mold using thereof, and method of the forming the same

#191
20100012945
2010-01-21

Method of forming photoresist burr edge and method of manufacturing array substrate

#192
20100009541
2010-01-14

Process for adjusting the size and shape of nanostructures

#193
20090325380
2009-12-31

METHOD FOR FORMING ELECTRODE ON SEMICONDUCTOR WAFER

#194
20090298292
2009-12-03

Processing for overcoming extreme topography

#195
20090269920
2009-10-29

METHOD OF FORMING INTERCONNECTION LINE AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE

#196
20090267115
2009-10-29

Club extension to a T-gate high electron mobility transistor

#197
20090225592
2009-09-10

Suspended structures

#198
20090146302
2009-06-11

Method for manufacturing semiconductor device

#199
20090130599
2009-05-21

Method for forming an electrical structure comprising multiple photosensitive materials

#200
20090127588
2009-05-21

Patterning techniques

#201
20090111061
2009-04-30

Methods of minimizing etch undercut and providing clean metal liftoff

#202
20090092928
2009-04-09

Component fabrication using thermal resist materials

#203
20090057927
2009-03-05

Method for forming interlayer insulating film in semiconductor device

#204
20090047782
2009-02-19

Method for manufacturing a device having a high aspect ratio via

#205
20080268369
2008-10-30

Organic Film Composition and Method for Forming Resist Pattern

#206
20080254632
2008-10-16

Method for forming a semiconductor structure having nanometer line-width

#207
20080251877
2008-10-16

Methods for fabricating complex micro and nanoscale structures and electronic devices and components made by the same

#208
20080248405
2008-10-09

Liquid toner-based pattern mask method and system

#209
20080241757
2008-10-02

Reproducible, high yield method for fabricating ultra-short T-gates on HFETs

#210
20080176398
2008-07-24

High throughput, low cost dual-mode patterning method for large area substrates

#211
20080171180
2008-07-17

Process for the formation of miniaturized getter deposits and getter deposits so obtained

#212
20080090181
2008-04-17

Method for producing submicron structures

#213
20080070010
2008-03-20

Method of making nanopatterns and nanostructures and nanopatterned functional oxide materials

#214
20080050564
2008-02-28

Method of forming a nano-structure and the nano-structure

#215
20070184643
2007-08-09

Methods of forming metal layers using multi-layer lift-off patterns

#216
20070152337
2007-07-05

Formation of interconnects through lift-off processing

#217
20070087468
2007-04-19

Electronic components and methods for producing same

#218
20070066051
2007-03-22

Method for forming gate pattern for electronic device

#219
20070026580
2007-02-01

Method for manufacturing semiconductor device

#220
20070020883
2007-01-25

Patterned structures fabricated by printing mask over lift-off pattern

#221
20070017899
2007-01-25

Method of controlling the critical dimension of structures formed on a substrate

#222
20060279747
2006-12-14

Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus

#223
20060240338
2006-10-26

Pattern formation method, electronic circuit manufactured by the same, and electronic device using the same

#224
20060228877
2006-10-12

Patterned material layer, method of forming the same, microdevice, and method of manufacturing the same

#225
20060223294
2006-10-05

Semiconductor device fabrication method

#226
20060194444
2006-08-31

Patterning method for fabricating high resolution structures

#227
20060183325
2006-08-17

Lift-off method

#228
20060183309
2006-08-17

Method for manufacturing a patterned structure

#229
20060105550
2006-05-18

Method of depositing material on a substrate for a device

#230
20060046446
2006-03-02

Semiconductor device and manufacturing method thereof, and gate electrode and manufacturing method thereof

#231
20060009038
2006-01-12

Processing for overcoming extreme topography

#232
20050205999
2005-09-22

Method for pattern metalization of substrates

#233
20050202346
2005-09-15

Plating method

#234
20050186785
2005-08-25

Device manufacturing method and substrate comprising multiple resist layers

#235
20050170628
2005-08-04

Forming a contact in a thin-film device

#236
20050164133
2005-07-28

Inverse resist coating process

#237
20050158900
2005-07-21

Fabrication method for liquid crystal display

#238
20050136358
2005-06-23

Patterning using wax printing and lift off

#239
20050104072
2005-05-19

Localized annealing of metal-silicon carbide ohmic contacts and devices so formed

#240
20050068672
2005-03-31

Liftoff process for thin photoresist

#241
20050054146
2005-03-10

Photo-mask process and method for manufacturing a thin film transistor using the process

#242
18139922
2023-09-12

Method for producing gallium oxide Schottky barrier diode with negative beveled angle terminal

#243
15724759
2018-07-24

Formation of high-resolution patterns inside deep cavities and applications to RF Si-embedded inductors

#244
14960016
2017-11-21

Formation of high-resolution patterns inside deep cavities and applications to RF SI-embedded inductors

#245
14738980
2016-04-05

Method for forming a microfabricated structure

#246
14704082
2016-08-30

Method for making guiding lines with oxidized sidewalls for use in directed self-assembly (DSA) of block copolymers

#247
14545516
2016-09-13

Process for forming gate of thin film transistor devices

#248
14046790
2016-03-01

Process for making PMR writer with non-conformal side gaps