ClassID:

207195

H01L21/2258 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer Diffusion into or out of AB compounds

Recent Application in this class:
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HIGH ELECTRON MOBILITY TRANSISTOR AND FABRICATION METHOD THEREOF

#2
20250372383
2025-12-04

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

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20250357141
2025-11-20

MANUFACTURING METHOD FOR NITRIDE SEMICONDUCTOR DEVICE

#4
20250351399
2025-11-13

METHOD OF FORMING SEMICONDUCTOR DEVICE

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20250254954
2025-08-07

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

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20250254953
2025-08-07

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

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20250220983
2025-07-03

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

#8
20250220941
2025-07-03

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE

#9
20250191919
2025-06-12

High-Temperature Material Processing In The Absence Of Hydrogen

#10
20250149338
2025-05-08

METHODS OF FORMING SEMICONDUCTOR DEVICES INCLUDING SELF-ALIGNED P-TYPE AND N-TYPE DOPED REGIONS

#11
20250031425
2025-01-23

FIELD ASSISTED INTERFACIAL DIFFUSION DOPING THROUGH HETEROSTRUCTURE DESIGN

#12
20240379362
2024-11-14

METHOD OF PRODUCING P-TYPE NITRIDE SEMICONDUCTOR

#13
20240355887
2024-10-24

Manufacturing method of semiconductor device

#14
20240313089
2024-09-19

NITRIDE SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF

#15
20240243185
2024-07-18

SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME

#16
20240178313
2024-05-30

ENHANCED GAN HEMT RADIO-FREQUENCY DEVICE AND MANUFACTURING METHOD THEREOF

#17
20240162283
2024-05-16

Semiconductor Structure and Method for Manufacturing the Same

#18
20240120201
2024-04-11

Selective Area Diffusion Doping of III-N Materials

#19
20240063257
2024-02-22

SEMICONDUCTOR STRUCTURE AND PREPARATION METHOD THEREOF

#20
20240047527
2024-02-08

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

#21
20240047516
2024-02-08

SUPERJUNCTION DEVICES FORMED BY FIELD ASSISTED DIFFUSION OF DOPANTS

#22
20230369489
2023-11-16

Semiconductor device, method of manufacturing the same and electronic device including the device

#23
20230144657
2023-05-11

Semiconductor device and manufacturing method thereof

#24
20230011185
2023-01-12

LAMINATE, METHOD FOR MANUFACTURING LAMINATE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE

#25
20220359196
2022-11-10

METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT, AND SEMICONDUCTOR DEVICE

#26
20220102530
2022-03-31

PREPARATION METHOD FOR SEMICONDUCTOR STRUCTURE

#27
20210351037
2021-11-11

Method for producing a semiconductor component comprising performing a plasma treatment, and semiconductor component

#28
20210257463
2021-08-19

Field assisted interfacial diffusion doping through heterostructure design

#29
20210249269
2021-08-12

Method and system for diffusing magnesium in gallium nitride materials using sputtered magnesium sources

#30
20210225670
2021-07-22

Method for thermally processing a substrate and associated system

#31
20210091205
2021-03-25

Manufacturing method of an HEMT transistor of the normally off type with reduced resistance in the on state and HEMT transistor

#32
20210057221
2021-02-25

Method for preparing ohmic contact electrode of gallium nitride-based device

#33
20200381544
2020-12-03

Methods for forming fluorine doped high electron mobility transistor (HEMT) devices

#34
20200350411
2020-11-05

Doped aluminum nitride crystals and methods of making them

#35
20200280700
2020-09-03

Semiconductor device, method of manufacturing the same and electronic device including the device

#36
20200212212
2020-07-02

Semiconductor devices with fluorinated region and methods for forming the same

#37
20200152454
2020-05-14

Multi-state device based on ion trapping

#38
20200098565
2020-03-26

Semiconductor device

#39
20200027950
2020-01-23

Semiconductor device, method of manufacturing the same and electronic device including the same

#40
20200027879
2020-01-23

Semiconductor device, method of manufacturing the same, and electronic device including the device

#41
20190393038
2019-12-26

Gallidation assisted impurity doping

#42
20190341261
2019-11-07

Implanted dopant activation for wide bandgap semiconductor electronics

#43
20190287865
2019-09-19

IC unit and method of manufacturing the same, and electronic device including the same

#44
20190279980
2019-09-12

Semiconductor device including stressed source/drain, method of manufacturing the same and electronic device including the same

#45
20190252191
2019-08-15

Method of making N-type doped gallium oxide through the deposition of a tin layer on the gallium oxide

#46
20190229203
2019-07-25

Manufacturing method of an HEMT transistor of the normally off type with reduced resistance in the on state and HEMT transistor

#47
20190189746
2019-06-20

Compound semiconductor device and method with high concentration dopant layer in regrown compound semiconductor

#48
20190164750
2019-05-30

Multi-state device based on ion trapping

#49
20190131427
2019-05-02

High electron mobility transistor structure

#50
20190115215
2019-04-18

Semiconductor device and method of manufacturing semiconductor device

#51
20190035898
2019-01-31

Doped aluminum nitride crystals and methods of making them

#52
20190019886
2019-01-17

Semiconductor device and manufacturing method thereof

#53
20190013210
2019-01-10

Method of reducing a sheet resistance in an electronic device, and an electronic device

#54
20190006184
2019-01-03

Gallium nitride based semiconductor device and manufacturing method of gallium nitride based semiconductor device

#55
20180308950
2018-10-25

Semiconductor device, power supply circuit, and computer

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20180286945
2018-10-04

Method for manufacturing semiconductor device and edge termination structure of semiconductor device

#57
20180248003
2018-08-30

Semiconductor device and method for manufacturing semiconductor device

#58
20180226405
2018-08-09

Low damage self-aligned amphoteric FINFET tip doping

#59
20180226253
2018-08-09

Method for manufacturing substrate for semiconductor device

#60
20180190769
2018-07-05

Vertical gate-all-around transistor with top and bottom source/drain epitaxy on a replacement nanowire, and method of manufacturing the same

#61
20180166561
2018-06-14

Contact structure and extension formation for III-V nFET

#62
20180130661
2018-05-10

Semiconductor device and method of manufacturing the same

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20180108577
2018-04-19

IC unit and methond of manufacturing the same, and electronic device including the same

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20180097106
2018-04-05

Semiconductor device, method of manufacturing the same and electronic device including the same

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20180097065
2018-04-05

Semiconductor device, method of manufacturing the same and electronic device including the device

#66
20180061968
2018-03-01

Contact structure and extension formation for III-V nFET

#67
20180019129
2018-01-18

Method of forming a P-type ohmic contact in group-III nitride semiconductors

#68
20170278952
2017-09-28

Method of manufacturing semiconductor device, and semiconductor device

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20170263700
2017-09-14

III-nitride based semiconductor device with low vulnerability to dispersion and backgating effects

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20170256546
2017-09-07

Single source/drain epitaxy for co-integrating nFET semiconductor fins and pFET semiconductor fins

#71
20170194150
2017-07-06

Doping of a substrate via a dopant containing polymer film

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20170194148
2017-07-06

Method of making a semiconductor device formed by thermal annealing

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20170178910
2017-06-22

Method for differential heating of elongate nano-scaled structures

#74
20170170295
2017-06-15

High electron mobility transistor structure

#75
20170162390
2017-06-08

Forming a contact layer on a semiconductor body

#76
20170125591
2017-05-04

Semiconductor device having metallic source and drain regions

#77
20170125545
2017-05-04

Compound semiconductor device and manufacturing method thereof

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20170084702
2017-03-23

Doped aluminum nitride crystals and methods of making them

#79
20170062592
2017-03-02

Contact structure and extension formation for III-V nFET

#80
20170062221
2017-03-02

Liquid immersion doping

#81
20170062215
2017-03-02

Contact structure and extension formation for III-V nFET

#82
20170025307
2017-01-26

Methods for preparing layered semiconductor structures

#83
20160343705
2016-11-24

Contact structure and extension formation for III-V nFET

#84
20160329211
2016-11-10

Selective dopant junction for a group III-V semiconductor device

#85
20160284827
2016-09-29

High electron mobility transistor with indium nitride layer

#86
20160254150
2016-09-01

Selective dopant junction for a group III-V semiconductor device

#87
20160233108
2016-08-11

Defects annealing and impurities activation in semiconductors at thermodynamically non-stable conditions

#88
20160218017
2016-07-28

Substrate for semiconductor device and method of manufacturing the same

#89
20160211265
2016-07-21

Single source/drain epitaxy for co-integrating nFET semiconductor fins and pFET semiconductor fins

#90
20160126099
2016-05-05

Silicon-based substrate having first and second portions

#91
20160093618
2016-03-31

Single source/drain epitaxy for co-integrating nFET semiconductor fins and pFET semiconductor fins

#92
20160093510
2016-03-31

Method for performing activation of dopants in a GaN-base semiconductor layer

#93
20160049477
2016-02-18

III-V compound semiconductor device having dopant layer and method of making the same

#94
20160035572
2016-02-04

Doping of a substrate via a dopant containing polymer film

#95
20150380242
2015-12-31

Silicon substrates with compressive stress and methods for production of the same

#96
20150364325
2015-12-17

Techniques for increased dopant activation in compound semiconductors

#97
20150279679
2015-10-01

Multiple-threshold voltage devices and method of forming same

#98
20150118834
2015-04-30

SULFUR AND SELENIUM PASSIVATION OF SEMICONDUCTORS

#99
20150056766
2015-02-26

Method of making high electron mobility transistor structure

#100
20150053997
2015-02-26

Compound semiconductor device and method of fabricating the same

#101
20150017792
2015-01-15

Method and system for diffusion and implantation in gallium nitride based devices

#102
20150011080
2015-01-08

Method for electrical activation of dopant species in a GaN film

#103
20140159120
2014-06-12

Conformal Doping

#104
20140124817
2014-05-08

Contact Layers

#105
20140061860
2014-03-06

Compound semiconductor device and method of fabricating the same

#106
20130299895
2013-11-14

III-V COMPOUND SEMICONDUCTOR DEVICE HAVING DOPANT LAYER AND METHOD OF MAKING THE SAME

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20130200443
2013-08-08

Interface engineering to optimize metal-III-V contacts

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20130134435
2013-05-30

High electron mobility transistor structure with improved breakdown voltage performance

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20130075748
2013-03-28

Method and system for diffusion and implantation in gallium nitride based devices

#110
20130001659
2013-01-03

Self-aligned III-V MOSFET diffusion regions and silicide-like alloy contact

#111
20130001657
2013-01-03

SELF-ALIGNED III-V MOSFET DIFFUSION REGIONS AND SILICIDE-LIKE ALLOY CONTACT

#112
20120264309
2012-10-18

Ammonium sulfide passivation of semiconductors

#113
20120196398
2012-08-02

Photodiode array, method for manufacturing photodiode array, epitaxial wafer, and method for manufacturing epitaxial wafer

#114
20120126200
2012-05-24

Nanowhiskers with PN junctions, doped nanowhiskers, and methods for preparing them

#115
20110193055
2011-08-11

Nanowhiskers with PN junctions, doped nanowhiskers, and methods for preparing them

#116
20110101306
2011-05-05

Photodiode array, method for manufacturing photodiode array, epitaxial wafer, and method for manufacturing epitaxial wafer

#117
20100187545
2010-07-29

Selectively doped semi-conductors and methods of making the same

#118
20100187541
2010-07-29

Doped aluminum nitride crystals and methods of making them

#119
20100144123
2010-06-10

Methods of forming a compound semiconductor device including a diffusion region

#120
20090200643
2009-08-13

Semiconductor and method for producing the same

#121
20090020782
2009-01-22

Avalanche photodiode with edge breakdown suppression

#122
20090014711
2009-01-15

Nanowhiskers with PN junctions, doped nanowhiskers, and methods for preparing them

#123
20080248639
2008-10-09

Method for forming electrode for group III nitride based compound semiconductor and method for manufacturing p-type group III nitride based compound semiconductor

#124
20080248631
2008-10-09

Wafer and method of producing a substrate by transfer of a layer that includes foreign species

#125
20080132047
2008-06-05

Method for doping impurities

#126
20080090395
2008-04-17

Method for producing p-type group III nitride semiconductor and method for producing electrode for p-type group III nitride semiconductor

#127
20070131160
2007-06-14

Doped aluminum nitride crystals and methods of making them

#128
20060105554
2006-05-18

Method for solid phase diffusion of zinc into an InP-based photodiode and an InP photodiode made with the method

#129
20060060922
2006-03-23

Wafer and method of producing a substrate by transfer of a layer that includes foreign species

#130
20050211999
2005-09-29

Doping of gallium nitride by solid source diffusion and resulting gallium nitride structures

#131
20050124086
2005-06-09

Method for manufacturing a semiconductor device, and method for manufacturing a wafer

#132
20050006673
2005-01-13

Nanowhiskers with pn junctions, doped nanowhiskers, and methods for preparing them

#133
15282152
2017-06-13

Contact resistance reduction by III-V Ga deficient surface

#134
14841033
2017-01-24

Asymmetric III-V MOSFET on silicon substrate

#135
13455023
2014-05-20

P type III-nitride materials and formation thereof