Patents-Review.com
ClassID:

207335 āŽ˜

H01L21/67155 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere; Apparatus not specifically provided for elsewhere; Apparatus for manufacture or treatment Apparatus for manufacturing or treating in a plurality of work-stations

Sub-classes:
Recent Application in this class:
#1
20260049644
2026-02-19

VIBRATION ABSORBING APPARATUS FOR A SEMICONDUCTOR MANUFACTURING APPARATUS

 #2
20250372456
2025-12-04

SUBSTRATE PROCESSING APPARATUS, CALIBRATION SUBSTRATE, AND CALIBRATION METHOD

 #3
20250239471
2025-07-24

APPARATUS INCLUDING A SUBSTRATE CHUCK, A DISPENSER, AND A PLANARIZATION HEAD AND METHODS OF USING THE SAME

 #4
20250205834
2025-06-26

DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT

 #5
20250201613
2025-06-19

SUBSTRATE TRANSFER ARM AND APPARATUS USING THE SAME

 #6
20250199521
2025-06-19

MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS

 #7
20250189950
2025-06-12

SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD

 #8
20250172955
2025-05-29

WATER REPLENISHMENT CONTROL METHOD FOR SEMICONDUCTOR PROCESS DEVICE AND SEMICONDUCTOR PROCESS DEVICE

 #9
20250068144
2025-02-27

SEMICONDUCTOR PROCESS APPARATUS SCHEDULING CONTROL METHOD AND SEMICONDUCTOR PROCESS APPARATUS

 #10
20250022737
2025-01-16

SUBSTRATE PROCESSING APPARATUS

 #11
20240404848
2024-12-05

Mobile Cart for Commissioning Semiconductor Processing Tool

 #12
20240393768
2024-11-28

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PROGRAM

 #13
20240385602
2024-11-21

RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM STORING RECIPE CREATION PROGRAM

 #14
20240355615
2024-10-24

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE

 #15
20240194501
2024-06-13

WAFER PROCESSING APPARATUS

 #16
20240094705
2024-03-21

Semiconductor manufacturing system, behavior recognition device and semiconductor manufacturing method

 #17
20240082964
2024-03-14

Device maintenance in semiconductor manufacturing environment

 #18
20240071790
2024-02-29

MULTI-FUNCTION DEVICE

 #19
20240003181
2024-01-04

Seal mechanism for load port doors

 #20
20230402983
2023-12-14

MICROWAVE PROVIDING APPARATUS, SYSTEM INCLUDING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #21
20230307269
2023-09-28

SEMICONDUCTOR PROCESSING SYSTEM AND METHOD OF ASSEMBLY

 #22
20230307264
2023-09-28

SUBSTRATE PROCESSING APPARATUS

 #23
20230282492
2023-09-07

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND METHOD

 #24
20230222264
2023-07-13

PROCESSING CHAMBER CALIBRATION

 #25
20230221015
2023-07-13

Semiconductor turbine reset

 #26
20230197463
2023-06-22

Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same

 #27
20230136819
2023-05-04

CONTROL OF WAFER BOW DURING INTEGRATED CIRCUIT PROCESSING

 #28
20220399209
2022-12-15

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS

 #29
20220355425
2022-11-10

Device maintenance in semiconductor manufacturing environment

 #30
20220277974
2022-09-01

INPUT/OUTPUT (IO) HANDLING DURING UPDATE PROCESS FOR MANUFACTURING SYSTEM CONTROLLER

 #31
20220189764
2022-06-16

Radiation of Substrates During Processing and Systems Thereof

 #32
20220057775
2022-02-24

Semiconductor manufacturing system, behavior recognition device and semiconductor manufacturing method

 #33
20220004172
2022-01-06

Recipe creation method or apparatus utilizing a series of steps according to a target recipe file for semiconductor manufacturing or substrating processing

 #34
20210407839
2021-12-30

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #35
20210407790
2021-12-30

Radiation of substrates during processing and systems thereof

 #36
20210363641
2021-11-25

Clustered reaction system

 #37
20210327731
2021-10-21

MASS TRANSFER METHOD, MASS TRANSFER DEVICE AND BUFFER CARRIER

 #38
20210320022
2021-10-14

Apparatus and methods for manipulating power at an edge ring in a plasma processing device

 #39
20210320017
2021-10-14

BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM

 #40
20210263505
2021-08-26

Method and system for scheduling semiconductor fabrication

 #41
20210116898
2021-04-22

Matching process controllers for improved matching of process

 #42
20210104412
2021-04-08

Substrate processing method, substrate processing apparatus and substrate processing system

 #43
20210087674
2021-03-25

System with dual-motion substrate carriers

 #44
20210076503
2021-03-11

Conformal manufacturing device and method for complex curved-surface electronic system

 #45
20210071607
2021-03-11

Systems and methods to monitor particulate accumulation for bake chamber cleaning

 #46
20200381280
2020-12-03

Selective etch rate monitor

 #47
20200373195
2020-11-26

PROCESSING CHAMBER FOR THERMAL PROCESSES

 #48
20200361041
2020-11-19

Device maintenance in semiconductor manufacturing environment

 #49
20200333774
2020-10-22

Adaptive chamber matching in advanced semiconductor process control

 #50
20200321227
2020-10-08

Substrate processing system and substrate transfer apparatus and method

 #51
20200308700
2020-10-01

Film-forming device

 #52
20200168459
2020-05-28

Vacuumizing device and vacuumizing method for bonding substrate

 #53
20200152485
2020-05-14

To pumping line arrangements

 #54
20200149187
2020-05-14

Vapor phase growth apparatus comprising n reactors, a primary gas supply path, a main secondary gas supply path, (nāˆ’1) auxiliary secondary gas supply paths, a first control circuit, and a second control circuit

 #55
20200130106
2020-04-30

Wafer producing apparatus

 #56
20200110390
2020-04-09

Adaptive chamber matching in advanced semiconductor process control

 #57
20200091412
2020-03-19

Magnetic memory device, method for manufacturing the same, and substrate treating apparatus

 #58
20200063993
2020-02-27

Semiconductor turbine reset

 #59
20200003550
2020-01-02

Shutter monitoring system

 #60
20190385850
2019-12-19

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

 #61
20190348311
2019-11-14

Chamber for degassing substrates

 #62
20190333795
2019-10-31

System for and method of manufacture using multimodal analysis

 #63
20190326105
2019-10-24

Processing system and processing method

 #64
20190279902
2019-09-12

Hybrid wafer dicing approach using a multiple pass laser scribing process and plasma etch process

 #65
20190155159
2019-05-23

Method of forming a directed self-assembled layer on a substrate

 #66
20190136379
2019-05-09

Substrate treating apparatus and method

 #67
20180358508
2018-12-13

Chip mounting system and method for mounting chips

 #68
20180337068
2018-11-22

Substrate processing apparatus

 #69
20180323095
2018-11-08

Image based substrate mapper

 #70
20180269061
2018-09-20

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

 #71
20180240692
2018-08-23

Selective etch rate monitor

 #72
20180231952
2018-08-16

Substrate transport device, substrate processing apparatus including the substrate transport device, and substrate transport method

 #73
20180199423
2018-07-12

Scalable multi-role surface-wave plasma generator

 #74
20180174872
2018-06-21

Chamber for degassing substrates

 #75
20180138061
2018-05-17

Selective etch rate monitor

 #76
20180108587
2018-04-19

Method for passivating a surface of a semiconductor and related systems

 #77
20180019225
2018-01-18

Bonding systems

 #78
20180003178
2018-01-04

Vacuum exhaust system and channel-switching valve used in this vacuum exhaust system

 #79
20170358469
2017-12-14

Manufacturing apparatus of light-emitting element

 #80
20170350395
2017-12-07

IMPROVEMENTS IN OR RELATING TO VACUUM PUMPING ARRANGEMENT

 #81
20170330775
2017-11-16

Manufacturing cell and manufacturing cell management system

 #82
20170323822
2017-11-09

SYSTEMS, APPARATUS, AND METHODS FOR AN IMPROVED SUBSTRATE HANDLING ASSEMBLY

 #83
20170309623
2017-10-26

METHOD, APPARATUS, AND SYSTEM FOR INCREASING DRIVE CURRENT OF FINFET DEVICE

 #84
20170236727
2017-08-17

Substrate holding module, substrate processing apparatus, and substrate processing method

 #85
20170178936
2017-06-22

Wafer processing system and wafer processing method using same

 #86
20170168477
2017-06-15

Matching process controllers for improved matching of process

 #87
20170067156
2017-03-09

Plasma excitation for spatial atomic layer deposition (ALD) reactors

 #88
20170030807
2017-02-02

Fault detection and classification matching

 #89
20160379826
2016-12-29

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TRANSISTORS

 #90
20160336204
2016-11-17

Chamber for degassing substrates

 #91
20160189991
2016-06-30

Substrate processing device, substrate processing method, and substrate processing system

 #92
20160158939
2016-06-09

Carrying method and bonding apparatus

 #93
20160086864
2016-03-24

MOVABLE GAS NOZZLE IN DRYING MODULE

 #94
20160079103
2016-03-17

Transfer system

 #95
20160074772
2016-03-17

Device and method for applying a material to a substrate

 #96
20160064261
2016-03-03

Dispatching method and system

 #97
20160042958
2016-02-11

Graphene forming method

 #98
20160038965
2016-02-11

Substrate processing apparatus for coating liquid composed of first coating liquid and second coating liquid on substrate with slit-shaped ejection port

 #99
20150380289
2015-12-31

Small production device and production system using the same

 #100
20150346709
2015-12-03

Semiconductor process management system, semiconductor manufacturing system including the same, and method of manufacturing semiconductor

 #101
20150314338
2015-11-05

Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box

 #102
20150303081
2015-10-22

Die bonding device

 #103
20150262854
2015-09-17

WAFER ETCHING SYSTEM AND WAFER ETCHING PROCESS USING THE SAME

 #104
20150249013
2015-09-03

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

 #105
20150170958
2015-06-18

Methods and systems for forming semiconductor laminate structures

 #106
20150170929
2015-06-18

Systems and methods for monitoring and controlling particle sizes in slurries

 #107
20150122419
2015-05-07

LASER AND PLASMA ETCH WAFER DICING WITH A DOUBLE SIDED UV-CURABLE ADHESIVE FILM

 #108
20150116674
2015-04-30

Apparatus for treating substrate

 #109
20150111391
2015-04-23

Substrate treating apparatus and method

 #110
20150105895
2015-04-16

Matching process controllers for improved matching of process

 #111
20150099314
2015-04-09

Predictive method of matching two plasma reactors

 #112
20150040757
2015-02-12

Airflow management for low particulate count in a process tool

 #113
20140320837
2014-10-30

Monitoring apparatus and method particularly useful in photolithographically processing substrates

 #114
20140315347
2014-10-23

Scalable multi-role surface-wave plasma generator

 #115
20140302634
2014-10-09

APPARATUS AND METHOD FOR PRODUCING SOLAR CELLS

 #116
20140285790
2014-09-25

Substrate treating apparatus

 #117
20140248739
2014-09-04

Heating a furnace for the growth of semiconductor material

 #118
20140165908
2014-06-19

Transfer chamber and method of using a transfer chamber

 #119
20140154883
2014-06-05

Tungsten deposition process using germanium-containing reducing agent

 #120
20140141562
2014-05-22

Reaction apparatus and method for manufacturing a CIGS absorber of a thin film solar cell

 #121
20140093984
2014-04-03

Substrate processing apparatus, substrate transfer method and storage medium

 #122
20140078478
2014-03-20

Method of optimizing lithography tools utilization

 #123
20140060735
2014-03-06

Substrate processing apparatus

 #124
20130288424
2013-10-31

Contact and interconnect metallization for solar cells

 #125
20130210190
2013-08-15

Apparatus and method for producing solar cells

 #126
20130078061
2013-03-28

Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium

 #127
20120051872
2012-03-01

Integrated apparatus to assure wafer quality and manufacturability

 #128
20110307089
2011-12-15

Method and system for performing a chemical oxide removal process

 #129
20110290178
2011-12-01

Coating device including substrate carrying, application and removal units

 #130
20110232771
2011-09-29

Airflow management for low particulate count in a process tool

 #131
20110207248
2011-08-25

Light emitting device and manufacturing method thereof

 #132
20110073256
2011-03-31

SEMICONDUCTOR MANUFACTURING APPARATUS

 #133
20110070721
2011-03-24

EPITAXIAL GROWTH OF COMPOUND NITRIDE SEMICONDUCTOR STRUCTURES

 #134
20110037957
2011-02-17

Monitoring apparatus and method particularly useful in photolithographically processing substrates

 #135
20100291490
2010-11-18

Resist pattern slimming treatment method

 #136
20100279439
2010-11-04

Automated substrate handling and film quality inspection in solar cell processing

 #137
20100200995
2010-08-12

COUPLING LAYER COMPOSITION FOR A SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, METHOD OF FORMING THE COUPLING LAYER, AND APPARATUS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE

 #138
20100183420
2010-07-22

TRANSFER DEVICE FOR AN OVERHEAD CONVEYING SYSTEM

 #139
20100144077
2010-06-10

Method of manufacturing a semiconductor device

 #140
20100075453
2010-03-25

SYSTEM ARCHITECTURE AND METHOD FOR SOLAR PANEL FORMATION

 #141
20100045684
2010-02-25

HOST CONTROL DEVICE, SLAVE CONTROL DEVICE, SCREEN OPERATION RIGHT GIVING METHOD, AND STORAGE MEDIUM CONTAINING SCREEN OPERATION RIGHT GIVING PROGRAM

 #142
20100015756
2010-01-21

Hybrid heterojunction solar cell fabrication using a doping layer mask

 #143
20100015751
2010-01-21

Hybrid heterojunction solar cell fabrication using a metal layer mask

 #144
20090231558
2009-09-17

Monitoring apparatus and method particularly useful in photolithographically processing substrates

 #145
20090226610
2009-09-10

Coating apparatus with rotation module

 #146
20090111212
2009-04-30

Method and apparatus for chalcogenide device formation

 #147
20090029509
2009-01-29

Substrate processing apparatus and a manufacturing method of a thin film semiconductor device

 #148
20080254636
2008-10-16

Etching of silicon oxide film

 #149
20080233283
2008-09-25

Apparatus for depositing protective layer and depositing method using the apparatus

 #150
20080202410
2008-08-28

Multi-substrate size vacuum processing tool

 #151
20080149272
2008-06-26

Surface Microstructuring Device

 #152
20080047583
2008-02-28

Substrate Processing Method and Apparatus

 #153
20080045029
2008-02-21

Semiconductor substrate processing apparatus

 #154
20080043229
2008-02-21

Monitoring apparatus and method particularly useful in photolithographically

 #155
20070292256
2007-12-20

Conveying system

 #156
20070289844
2007-12-20

Conveying system

 #157
20070281090
2007-12-06

SYSTEM ARCHITECTURE AND METHOD FOR SOLAR PANEL FORMATION

 #158
20070240631
2007-10-18

Epitaxial growth of compound nitride semiconductor structures

 #159
20070238054
2007-10-11

In-line process for making thin film electronic devices

 #160
20070173046
2007-07-26

Manufacturing method of a thin film semiconductor device

 #161
20060287200
2006-12-21

Substrate processing system and substrate processing method

 #162
20060234515
2006-10-19

Film forming method

 #163
20060219547
2006-10-05

Vertical production of photovoltaic devices

 #164
20060213439
2006-09-28

Plasma enhanced atomic layer deposition system having reduced contamination

 #165
20060193630
2006-08-31

Monitoring apparatus and method particularly useful in photolithographically

 #166
20060141645
2006-06-29

Light emitting device and manufacturing method thereof

 #167
20060046326
2006-03-02

In-line process for making thin film electronic devices

 #168
20060035475
2006-02-16

Semiconductor substrate processing apparatus

 #169
20050263066
2005-12-01

Apparatus for electroless deposition of metals onto semiconductor substrates

 #170
20050260335
2005-11-24

Method of manufacturing color filter substrate, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus

 #171
20050239294
2005-10-27

Apparatus for depositing a multilayer coating on discrete sheets

 #172
20050208714
2005-09-22

Method of manufacturing a semiconductor device and manufacturing system thereof

 #173
20050199874
2005-09-15

Light emitting device and manufacturing method thereof

 #174
20050194681
2005-09-08

Conductive pad with high abrasion

 #175
20050170080
2005-08-04

System and method for electroless surface conditioning

 #176
20050167404
2005-08-04

Semiconductor manufacturing device

 #177
20050160705
2005-07-28

Station for controlling and purging a mini-environment

 #178
20050158884
2005-07-21

Method of in-situ treatment of low-k films with a silylating agent after exposure to oxidizing environments

 #179
20050147509
2005-07-07

Apparatus and method for control, pumping and abatement for vacuum process chambers

 #180
20050145335
2005-07-07

Installation for the vacuum treatment in particular of substrates

 #181
20050142010
2005-06-30

Fore-line preconditioning for vacuum pumps

 #182
20050132962
2005-06-23

Pipe structure, alignment apparatus, electron beam lithography apparatus, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor device manufacturing factory

 #183
20050009237
2005-01-13

Method of manufacturing semiconductor device and semiconductor device manufacturing apparatus used in it

 #184
16189487
2020-01-07

Method and apparatus for substrate fabrication

 #185
14887876
2016-11-22

Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs