207362 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
WAFER BOATS AND METHODS FOR HEATING A SET OF SEMICONDUCTOR STRUCTURES
#2SYSTEMS FOR TRANSPORTING A PLURALITY OF SEMICONDUCTOR STRUCTURES
#3APPARATUS FOR PROCESSING SUBSTRATE
#4COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL LAYER
#5Semiconductor Device and Methods of Making and Using an Enhanced Carrier to Reduce Electrostatic Discharge
#6SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPORT, RECORDING MEDIUM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#7Substrate Support, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
#8SUBSTRATE PROCESSING APPARATUS
#9Graphite plate
#10ELECTRONIC COMPONENT, METHOD OF MANUFACTURING ELECTRONIC COMPONENT, AND ELECTRONIC COMPONENT PACKAGE
#11Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
#12Substrate processing apparatus and method
#13SUBSTRATE SUPPORT ELEMENT FOR A SUPPORT RACK
#14Two piece shutter disk assembly with self-centering feature
#15WAFER BOAT AND METHOD OF MANUFACTURING THE SAME
#16QUARTZ GLASS MEMBER WITH INCREASED EXPOSED AREA, METHOD FOR MANUFACTURING SAME, AND BLADE WITH MULTIPLE PERIPHERAL CUTTING EDGES
#17Segmented vertical wafer boat
#18Method of manufacturing actuator
#19Substrate-storing container
#20APPARATUS FOR THERMAL TREATMENT OF A SUBSTRATE, CARRIER AND SUBSTRATE SUPPORT ELEMENT
#21Industrial heater
#22Protective layer for PECVD graphite boats
#23Manufacturing method of semiconductor device and semiconductor manufacturing apparatus using a conveying robot conveying a semiconductor substrate
#24Wafer boat and manufacturing method of the same
#25Heat treatment method
#26Generation of compact alumina passivation layers on aluminum plasma equipment components
#27Conditioned semiconductor system parts
#28Quartz clip device and manufacturing method thereof and OLED high-temperature oven having same
#29MECHANISMS FOR FURNACE APPARATUS AND WAFER BOAT
#30ELECTRONIC PART POSITIONING JIG
#31CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES
#32MANUFACTURING METHOD OF A HOLDER OF A BOAT FOR LOADING A SUBSTRATE
#33HIGH STRENGTH BONDING AND COATING MIXTURE
#34Vertical boat for heat treatment and method for heat treatment of silicon wafer using the same
#35Methods of Making Wafer Supports
#36Silocon wafer supporting method, heat treatment jig and heat-treated wafer
#37Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
#38Wafer support jig, vertical heat treatment boat including wafer support jig, and method for manufacturing wafer support jig
#39Assembly of silicon parts bonded together with a silicon and silica composite
#40SUPPORT FOR A SEMICONDUCTOR WAFER IN A HIGH TEMPERATURE ENVIRONMENT
#41Semiconductor processing
#42Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
#43Method of semiconductor process and semiconductor apparatus system
#44Vertical Boat for Heat Treatment and a Method for Heat Treatment
#45Thermal Batch Reactor with Removable Susceptors
#46Heat treating apparatus
#47Chemical vapor deposited silicon carbide articles
#48Wafer Support and Method of Making Wafer Support
#49Quartz glass tool for heat treatment of silicon wafer and process for producing the same
#50SUSCEPTOR WITH SURFACE ROUGHNESS FOR HIGH TEMPERATURE SUBSTRATE PROCESSING
#51Baking method of quartz products, computer program and storage medium
#52Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
#53Heat treatment jig for semiconductor silicon substrates and method for manufacturing the same
#54THERMAL PROCESSING SYSTEM, COMPONENTS, AND METHODS
#55Semiconductor processing
#56Tube formed of bonded silicon staves
#57Silicon wafer support fixture with roughended surface
#58Silicon shelf towers
#59Holder manufacturing method for loading substrate of semiconductor manufacturing device, batch type boat having holder, loading/unloading method of semiconductor substrate using the same, and semiconductor manufacturing device having the same
#60Silicon parts joined by a silicon layer preferably plasma sprayed
#61Adhesive of a silicon and silica composite for bonding together silicon parts
#62Reinforced structural member for high temperature operations and fabrication method
#63Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems
#64Heat treatment jig for semiconductor wafer
#65Susceptor with surface roughness for high temperature substrate processing
#66Heat treatment jig for silicon semiconductor substrate
#67High purity silicon carbide wafer boats
#68Wafer boat with interference fit wafer supports
#69Method of producing silicon carbide sintered body jig