207374 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
WAFER BOATS AND METHODS FOR HEATING A SET OF SEMICONDUCTOR STRUCTURES
#2METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#3MODULARIZED LARGE-SIZED CARRIER
#4WAFER CONTAINER AND WAFER SUPPORT
#5WAFER TREATMENT DEVICE AND WAFER TREATMENT METHOD
#6WAFER CARRIER WITH RETICLE TEMPLATE FOR MARKING RETICLE FIELDS ON A SEMICONDUCTOR WAFER
#7RING CARRIER AND CONTAINER COMPRISING THE SAME
#8HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM
#9APPARATUS AND METHOD FOR SEPARATING WAFER SLICES
#10SAMPLE MEASURING APPARATUS
#11SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
#12Wafer cleaning apparatus and wafer transfer device
#13SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
#14WAFER HOUSING CONTAINER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#15CARRIER FOR SECURING FABRICATED WAFERS
#16SHEET, HANDLING SHEET FOR THINNED WAFER, METHOD FOR HANDLING THIN WAFER, AND METHOD FOR HANDLING THIN DEVICE
#17PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
#18Wafer holder and operating method of the same
#19SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
#20Encircling a semiconductor device with stacked frames on a substrate
#21WAFER FILM FRAME CARRIER
#22STAGE APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND OPTICAL INSPECTION APPARATUS
#23High density semiconductor storage system
#24DYNAMIC INTERFACE FOR PROVIDING A SYMMETRIC RADIO FREQUENCY RETURN PATH
#25Wafer carrier with reticle template for marking reticle fields on a semiconductor wafer
#26Thin Material Handling Carrier
#27SUBSTRATE TRANSFER DOOR ASSEMBLIES WITH RADIATING ELEMENTS FOR SUBSTRATE PROCESSING CHAMBERS
#28Atomic-layer-deposition equipment and atomiclayer-deposition method by using the same
#29Wafer supporting mechanism and method for wafer dicing
#30Substrate lifting apparatus and substrate transferring method
#31PRE-JIG WAFER CARRIER DISC INSTALLATION/UNINSTALLATION DEVICE AND METHOD THEREOF
#32Separators for handling, transporting, or storing semiconductor wafers
#33Method for Producing an Optoelectronic Semiconductor Component and Optoelectronic Semiconductor Component
#34SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#35Substrate transfer mechanism to reduce back-side substrate contact
#36Frames stacked on substrate encircling devices and manufacturing method thereof
#37Automated transfer of edge ring requiring rotational alignment
#38Rotating Disk Reactor with Split Substrate Carrier
#39SUBSTRATE PROCESSING APPARATUS
#40VAPOR DEPOSITION DEVICE AND CARRIER USED IN SAME
#41SUBSTRATE STICKING AND BREAKAGE MITIGATION
#42Substrate storing and aligning apparatus in substrate bonding equipment for bonding substrates to each other
#43Method of forming dice and structure of die
#44INSULATION PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
#45Dynamic interface for providing a symmetric radio frequency return path
#46Processing apparatus
#47Wafer supporting mechanism and method for wafer dicing
#48Substrate container with enhanced flow field therein
#49Supporting shelf module and wafer container using same
#50Substrate holding and rotation mechanism and substrate processing apparatus
#51PACKAGING UNIT FOR SUBSTRATES
#52METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#53Magazine supporting equipment and semiconductor manufacturing apparatus including the same
#54Method of forming dice and structure of die
#55Wafer separating method
#56Batch substrate support with warped substrate capability
#57Tensioning device, base, clamp and method for clamping mask plate
#58Chip carrier device
#59Automated guided vehicle with multistage loading structure
#60Wafer Fixture For Testing And Transport
#61Methods of manufacturing semiconductor devices and apparatuses for manufacturing the same
#62Stacking apparatus and stacking method
#63Transport apparatus and control method
#64Carrier FOUP and a method of placing a carrier
#65Systems and methods for horizontal wafer packaging
#66Stacking structure applicable to manufacturing circuit board
#67Substrate transfer mechanism to reduce back-side substrate contact
#68Substrate storage container
#69Substrate storing container
#70Substrate processing apparatus for producing mixed processing liquid
#71Flexure stage with modularized flexure units
#72MICROENVIRONMENT FOR FLEXIBLE SUBSTRATES
#73RETICLE SUPPORT FOR A CONTAINER
#74Wafer producing apparatus
#75Tray module, tray assembly including the same, and method for manufacturing display device using the same
#76Opener apparatus
#77Batch substrate support with warped substrate capability
#78Buffer chamber unit for wafer processing equipment
#79Substrate rack and a substrate processing system and method
#80Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber
#81Segmented vertical wafer boat
#82Automated guided vehicle with multistage loading structure
#83Thin material handling carrier
#84Substrate transfer mechanism to reduce back-side substrate contact
#85Positioning device for an integrated circuit board, and inspection apparatus for an integrated circuit board comprising such a positioning device
#86Carrying apparatus and carrying method
#87Reticle processing system
#88Wafer producing apparatus and carrying tray
#89Substrate holder having integrated temperature measurement electrical devices
#90Transparent halo for reduced particle generation
#91Stacking apparatus and stacking method
#92Substrate processing apparatus
#93Method for manufacturing circuit board and stacking structure applied thereto
#94Substrate carrier and substrate carrier stack
#95Substrate carrier and substrate carrier stack
#96Separators for handling, transporting, or storing semiconductor wafers
#97SEPARATORS FOR HANDLING, TRANSPORTING, OR STORING SEMICONDUCTOR WAFERS
#98GLASS SUBSTRATE SHIPPER
#99FLEXIBLE SUBSTRATE SHIPPER
#100Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method
#101Substrate carrier apparatus and liquid crystal display manufacturing device
#102Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer
#103SUBSTRATE TREATMENT APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#104DEVICE AND METHOD FOR ALIGNING SUBSTRATES
#105Substrate processing apparatus and method for assembling tube assembly
#106Semiconductor devices
#107Substrate holder, plating apparatus, and method for manufacturing substrate holder
#108Substrate stocker and systems management software
#109High density stocker with interlocking nubs
#110SUBSTRATE CARRIER TRANSPORT, SORTING AND LOADING/UNLOADING
#111High density Tec-Cell carrier
#112Support apparatus and support method
#113Substrate processing apparatus
#114Substrate holder and method for bonding two substrates
#115Wafer box, method for arranging wafers in a wafer box, wafer protection plate and method for protecting a wafer
#116Wafer box, wafer stacking aid, wafer carrier, wafer transport system, method for loading a wafer box with wafers and method for removing wafers from a wafer box
#117Substrate processing apparatus
#118Conveying device, conveying method and evaporation apparatus
#119Substrate storage and processing
#120Methods for the continuous processing of substrates
#121Ring spacer
#122Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate
#123Reticle processing system
#124Interfaces and die packages, and appartuses including the same
#125Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrate
#126Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates
#127Universal service cart for semiconductor system maintenance
#128Carrier substrate
#129Wafer cassette
#130Method for compensating probe misplacement and probe apparatus
#131Tray for semiconductor devices
#132Interlocking nest wafer protector
#133Ambidextrous cassette and methods of using same
#134Substrates handling in a deposition system
#135ADHESIVE WITH TUNABLE ADHESION FOR HANDLING ULTRA-THIN WAFER
#136Manufacturing method of semiconductor device and semiconductor manufacturing apparatus using a conveying robot conveying a semiconductor substrate
#137Substrate carrier for active/passive bonding and de-bonding of a substrate
#138Substrate holder having integrated temperature measurement electrical devices
#139Laser processing apparatus
#140Wafer plate and mask arrangement for substrate fabrication
#141Support plate and method for forming support plate
#142Wafer shipper with stacked support rings
#143Substrate carrier unit for a film deposition apparatus
#144Substrate processing apparatus
#145Substrate carrying device and substrate regularity detecting method
#146Apparatus for processing two or more substrates in a batch process
#147Fixture for conveying a mask plate for the production of thin film transistor liquid crystal display
#148Wafer processing system
#149SINGLE AND DUAL STAGE WAFER CUSHION AND WAFER SEPARATOR
#150Method of manufacturing semiconductor device
#151Storage container
#152Method and apparatus to assist the processing of deformed substrates
#153Substrate holder and plating apparatus
#154Cassette fixture for holding film frames with affixed thin substrates during liquid chemical batch removal of carriers
#155Substrate container, a load port apparatus, and a substrate treating apparatus
#156Tray for a wafer with tape frame
#157Wafer transport system and method for operating the same
#158Transport device
#159CARRIER SUBSTRATE AND METHOD FOR FIXING A SUBSTRATE STRUCTURE
#160Wafer Stage Having Function of Anti-Collision
#161Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber
#162Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium
#163Chip supplying apparatus
#164Method for detaching a product substrate off a carrier substrate
#165WAFER HOLDER CLEANING APPARATUS AND FILM DEPOSITION SYSTEM INCLUDING THE SAME
#166Semiconductor device manufacturing apparatus
#167LOAD PORT APPARATUS
#168Support unit and apparatus for treating substrate
#169Semiconductor wafer conveying tool
#170Device and method for aligning substrates
#171Substrate of semiconductor package and method of fabricating semiconductor package using the same
#172Carrier for Ultra-Thin Substrates and Method of Use
#173Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
#174Elevator linear motor drive
#175Process box, arrangements and methods for processing coated substrates
#176Semiconductor package and stacked semiconductor package having the same
#177Edge ring for a thermal processing chamber
#178Structure of reaction chamber of semiconductor sputtering equipment
#179Edge ring for a thermal processing chamber
#180System and method for improved epitaxial lift off
#181Support disk fixing apparatus, manufacturing method for a semiconductor device using this apparatus, and semiconductor manufacturing apparatus
#182WAFER CARRIER WITH POCKET
#183Spacer, spacer transferring method, processing method and processing apparatus
#184Storage device for multilayer substrate
#185Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates
#186Dual-mask arrangement for solar cell fabrication
#187Method and apparatus to support a cleanspace fabricator
#188Continuous substrate processing system
#189CARRIER AND SUBSTRATE UNLOADING METHOD USING THE SAME
#190JIG FOR USE IN ETCHING AND CHEMICAL LIFT-OFF APPARATUS INCLUDING THE SAME
#191Interfaces and die packages, and appartuses including the same
#192Device for forming a reduced chamber space, and method for positioning multilayer bodies
#193Edge ring for a thermal processing chamber
#194Arrangement, system, and method for processing multilayer bodies
#195Semiconductor package and stacked semiconductor package having the same
#196Device for detaching a product substrate off a carrier substrate
#197CLEANING METHOD AND CLEANING APPARATUS
#198DEVICE FOR HOUSING A SUBSTRATE, AND RELATIVE METHOD
#199System and method for improved epitaxial lift off
#200Substrate processing apparatus
#201Substrate Assembly Carrier Using Electrostatic Force
#202Edge ring for a thermal processing chamber
#203Single and dual stage wafer cushion and wafer separator
#204PARALLEL MULTI WAFER AXIAL SPIN CLEAN PROCESSING USING SPIN CASSETTE INSIDE MOVABLE PROCESS CHAMBER
#205Method for manufacturing a hybrid composite wafer carrier for wet clean equipment
#206Tray holder
#207Module for stacking thin panels and method of stacking thin panels
#208Thin wafer support assembly
#209Replaceable substrate masking on carrier and method for processing a substrate
#210Apparatus for storage of objects from the field of manufacture of electronic components
#211Vacuum wafer carriers for strengthening thin wafers
#212Substrate support apparatus and vacuum processing apparatus
#213FILM DEPOSITION DEVICE AND SUBSTRATE PROCESSING DEVICE
#214Substrate holder mounting device and substrate holder container chamber
#215Carrier for glass substrates
#216Frame for holding laminate during processing
#217Wafer tray and test apparatus
#218Injection molding die and injection molding method
#219Thin plate container with a stack of removable loading trays
#220Semiconductor wafer carrier
#221Substrate carrying apparatus having circumferential sidewall and substrate processing system
#222Device for storing substrates
#223Substrate carrier with enhanced temperature uniformity
#224SUBSTRATE HOLDER MOUNTING DEVICE AND SUBSTRATE HOLDER CONTAINER CHAMBER
#225Substrate supporting/transferring tray
#226Semiconductor package and stacked semiconductor package having the same
#227System and method for processing substrates with detachable mask
#228INTEGRATED MINIATURE MICROELECTRONIC DEVICE FACTORY
#229Method of forming a device wafer with recyclable support
#230Thin plate container and processing apparatus for thin plate container
#231Wafer container with cushion sheet
#232Substrate accommodating tray pallet
#233Flexible substrate tensioner
#234Separating device
#235Elevator linear motor drive
#236RETICLE STORAGE APPARATUS AND SEMICONDUCTOR ELEMENT STORAGE APPARATUS
#237Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer
#238Transfer apparatus
#239Wafer container with cushion sheets
#240Apparatus for holding stacked trays
#241Loading tray and thin plate container
#242Method of forming a device wafer with recyclable support
#243Hybrid composite wafer carrier for wet clean equipment
#244SYSTEM AND METHOD FOR REDUCING COLLATERAL TRANSPORT-INDUCED DAMAGE DURING MICROSTRUCTURE PROCESSING
#245Substrate supporting/transferring tray
#246Evaporation device and transport system thereof
#247Wafer storage container
#248Apparatus to support a cleanspace fabricator
#249Heat sink assembly and related methods for semiconductor vacuum processing systems
#250Semiconductor manufacturing equipment with an open-topped cassette apparatus
#251METHOD OF MINIMAL WAFER SUPPORT ON BEVEL EDGE OF WAFER
#252Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer
#253Fixing carrier, fixing carrier manufacturing method, method of using fixing carriers and substrate storage container
#254Adjustable height wafer box
#255Universal storage tray for electronic components
#256Semiconductor component handling device having a performance film
#257Substrate carrier for parallel wafer processing reactor
#258Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system
#259Non-adhesive semiconductor wafer holder and assembly
#260Method and system for shipping semiconductor wafers
#261Substrate accommodating tray pallet and substrate transfer system
#262Low profile carrier for non-wafer form device testing
#263Wafer shipper with orientation control
#264Die sorter with reduced mean time to convert
#265Substrate carriers with isolation membrane
#266Wafer edge warp supression for thin wafer supported by tape frame