Patents-Review.com
ClassID:

207396 ⎘

H01L21/67718 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations Changing orientation of the substrate, e.g. from a horizontal position to a vertical position

Recent Application in this class:
#1
20260060028
2026-02-26

SUBSTRATE PROCESSING APPARATUS

 #2
20260052940
2026-02-19

SHUTTLE AND CHIP TRANSFER APPARATUS INCLUDING THE SAME

 #3
20260018433
2026-01-15

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

 #4
20260005052
2026-01-01

SUBSTRATE PROCESSING APPARATUS

 #5
20250364291
2025-11-27

CARRIER STORAGE DEVICE, CARRIER STORAGE SYSTEM AND METHOD FOR TRANSPORTING CARRIER

 #6
20250364283
2025-11-27

APPARATUS FOR TREATING A SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

 #7
20250349585
2025-11-13

APPARATUS FOR TREATING SUBSTRATE

 #8
20250336705
2025-10-30

WAFER PROCESSING APPARATUS, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMICONDUCTOR CHIP

 #9
20250259874
2025-08-14

SUBSTRATE PROCESSING APPARATUS

 #10
20250256406
2025-08-14

SUBSTRATE PROCESSING APPARATUS

 #11
20250256307
2025-08-14

SUBSTRATE PROCESSING METHOD

 #12
20250239466
2025-07-24

WAFER CLEANING SYSTEM

 #13
20250198946
2025-06-19

WAFER ALIGNMENT, CLEANLINESS, AND SURFACE QUALITY VERIFICATION USING LASER LIGHT SCATTERING

 #14
20250157841
2025-05-15

SUBSTRATE CLEANING APPARATUS AND TURN-OVER DEVICE THEREOF

 #15
20250079217
2025-03-06

SUBSTRATE HOLDER, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSFER METHOD

 #16
20250038028
2025-01-30

SUBSTRATE PROCESSING SYSTEM

 #17
20250038026
2025-01-30

BLACK WHEELS FOR TRANSPORTING ULTRA-THIN SILICON WAFER

 #18
20240429078
2024-12-26

INSPECTION SYSTEM

 #19
20240372031
2024-11-07

APPARATUS AND METHOD FOR CONNECTING SOLAR CELLS

 #20
20240347361
2024-10-17

FLIPPING APPARATUS

 #21
20240258144
2024-08-01

CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING APPARATUS

 #22
20240206307
2024-06-20

MANUFACTURING DEVICE OF DISPLAY DEVICE

 #23
20240194492
2024-06-13

SEPARATION METHOD OF BONDED SUBSTRATES

 #24
20240186165
2024-06-06

WAFER PICKING AND PLACING APPARATUS

 #25
20240145271
2024-05-02

Workpiece handling architecture for high workpiece throughput

 #26
20240145270
2024-05-02

Workpiece handling architecture for high workpiece throughput

 #27
20240105486
2024-03-28

SUBSTRATE TREATING APPARATUS

 #28
20240105484
2024-03-28

SUBSTRATE TREATING APPARATUS

 #29
20240105483
2024-03-28

SUBSTRATE TREATING APPARATUS

 #30
20240105482
2024-03-28

SUBSTRATE TREATING APPARATUS

 #31
20240030047
2024-01-25

SUBSTRATE TREATING APPARATUS

 #32
20230282493
2023-09-07

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

 #33
20230147919
2023-05-11

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

 #34
20230096569
2023-03-30

APPARATUS AND METHOD FOR TREATING SUBSTRATE

 #35
20230075394
2023-03-09

Inspection system

 #36
20220406640
2022-12-22

METHODOLOGY FOR SUBSTRATE TO CATHODE PLANARITY AND CENTERING ALIGNMENT

 #37
20220293892
2022-09-15

System and method to evaporate an OLED layer stack in a vertical orientation

 #38
20220254669
2022-08-11

System and method to evaporate an OLED layer stack in a vertical orientation

 #39
20220181194
2022-06-09

Semiconductor flipper

 #40
20220139747
2022-05-05

Device for self-assembling semiconductor light-emitting diodes

 #41
20210398834
2021-12-23

CMP wafer cleaning equipment, wafer transfer robot and wafer flipping method

 #42
20210366752
2021-11-25

Apparatus and method for transferring wafers

 #43
20210327738
2021-10-21

Substrate processing system and substrate processing method

 #44
20210249293
2021-08-12

Substrate positioning apparatus, substrate positioning method, and bonding apparatus

 #45
20210202295
2021-07-01

SYSTEMS AND METHODS FOR FIXED FOCUS RING PROCESSING

 #46
20210193491
2021-06-24

Substrate transfer apparatus

 #47
20210090925
2021-03-25

Device for self-assembling semiconductor light-emitting diodes

 #48
20210090924
2021-03-25

Device for self-assembling semiconductor light-emitting diodes

 #49
20210028049
2021-01-28

Article transporter in semiconductor fabrication

 #50
20200335373
2020-10-22

Method and gripper for rotating a cleanroom container

 #51
20200335372
2020-10-22

Substrate holding hand and substrate conveying apparatus

 #52
20200286762
2020-09-10

Substrate transporter and substrate transport method

 #53
20200251366
2020-08-06

Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle

 #54
20200110391
2020-04-09

Cleaning device for display panel

 #55
20200096562
2020-03-26

Electronic element inspection equipment and chip inspection method thereof

 #56
20200027767
2020-01-23

CARRIER, VACUUM SYSTEM AND METHOD OF OPERATING A VACUUM SYSTEM

 #57
20190393070
2019-12-26

Apparatus, system and method for providing a bernoulli-based semiconductor wafer pre-aligner

 #58
20190279956
2019-09-12

Bonding equipment

 #59
20190218132
2019-07-18

Method for producing glass film

 #60
20190214278
2019-07-11

SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, SUBSTRATE HOLDER CONVEYING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYING METHOD

 #61
20190198360
2019-06-27

DEVICE AND METHOD FOR TURNING CELL OVER

 #62
20190172739
2019-06-06

Semiconductor wafer placement position determination method and semiconductor epitaxial wafer production method

 #63
20190164804
2019-05-30

Systems and methods for fixed focus ring processing

 #64
20190157129
2019-05-23

Article transferring method in semiconductor fabrication

 #65
20190067077
2019-02-28

Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method

 #66
20190027388
2019-01-24

Electronic component mounting apparatus

 #67
20180286718
2018-10-04

Weighing apparatus, substrate liquid processing apparatus, weighing method, substrate liquid processing method and recording medium

 #68
20180282893
2018-10-04

Substrate transporting apparatus, control apparatus for substrate transporting apparatus, displacement compensation method for substrate transporting apparatus, program for implementing method and recording medium that records program

 #69
20180254210
2018-09-06

Wafer transfer method and wafer transfer device

 #70
20180170689
2018-06-21

SUBSTRATE DELIVERY DEVICE AND DELIVERY METHOD THEREOF

 #71
20180166310
2018-06-14

Substrate processing apparatus

 #72
20180158708
2018-06-07

Method for automatic sending cassette pod

 #73
20180158701
2018-06-07

Substrate liquid processing apparatus and substrate liquid processing method

 #74
20180144966
2018-05-24

Exchange and flip chamber design for heterojunction solar cell formation

 #75
20180143540
2018-05-24

Exposure apparatus, exposure method and storage medium

 #76
20180090358
2018-03-29

Posture changing device

 #77
20180090356
2018-03-29

Substrate transporter and substrate transport method

 #78
20180061693
2018-03-01

Transport container and transfer method for stored object

 #79
20170358472
2017-12-14

Substrate processing apparatus and substrate transfer method

 #80
20170304991
2017-10-26

Turn table transport carriage

 #81
20170263483
2017-09-14

Substrate processing apparatus and substrate processing method

 #82
20170081132
2017-03-23

Conveyance apparatus

 #83
20170011943
2017-01-12

Attitude changing apparatus, aligning apparatus, attitude changing method and aligning method

 #84
20160336207
2016-11-17

Method and system for transferring semiconductor devices from a wafer to a carrier structure

 #85
20160284581
2016-09-29

Method of Manufacturing Semiconductor Device

 #86
20160240416
2016-08-18

DEVICE AND METHOD FOR CONVEYING AND FLIPPING A COMPONENT

 #87
20160233120
2016-08-11

System and method for high throughput work-in-process buffer

 #88
20160221045
2016-08-04

Substrate processing method for transferring a substrate

 #89
20160211162
2016-07-21

Substrate carrier with integrated electrostatic chuck

 #90
20160196997
2016-07-07

Substrate carrier with integrated electrostatic chuck

 #91
20150270151
2015-09-24

Substrate processing apparatus and method of transferring a substrate

 #92
20150235888
2015-08-20

Substrate processing apparatus, method for correcting positional displacement, and storage medium

 #93
20150221536
2015-08-06

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER DEVICE

 #94
20150179488
2015-06-25

Robot with integrated aligner

 #95
20140369791
2014-12-18

Substrate processing device

 #96
20140328652
2014-11-06

Transfer apparatus for transferring electronic devices and changing their orientations

 #97
20140271086
2014-09-18

Workpiece flipping mechanism for space-constrained environment

 #98
20140081443
2014-03-20

Plate member reversing system and reversing/transfer method thereof

 #99
20130202394
2013-08-08

Plate-shaped member transfer facility

 #100
20130202393
2013-08-08

Plate-shaped member transfer facility

 #101
20120308356
2012-12-06

Substrate processing apparatus, substrate transfer method and substrate transfer device

 #102
20120223048
2012-09-06

System for Fabricating a Pattern on Magnetic Recording Media

 #103
20120090543
2012-04-19

Thin film depositing apparatus

 #104
20120076633
2012-03-29

APPARATUS AND METHOD FOR THE SEPARATING AND TRANSPORTING OF SUBSTRATES

 #105
20120037475
2012-02-16

SUBSTRATE INVERTING SYSTEM

 #106
20110286826
2011-11-24

Substrate support apparatus and vacuum processing apparatus

 #107
20110283923
2011-11-24

Pallet assembly for transport of solar module array pre-assembly

 #108
20100324717
2010-12-23

THIN-FILM SOLAR-CELL MANUFACTURING SYSTEM AND COMMON SUBSTRATE STORAGE RACK

 #109
20100272550
2010-10-28

SUBSTRATE HOLDING MECHANISM, SUBSTRATE DELIVERING/RECEIVING MECHANISM, AND SUBSTRATE PROCESSING APPARATUS

 #110
20100243163
2010-09-30

SUBSTRATE PROCESSING APPARATUS

 #111
20100239397
2010-09-23

Substrate transport apparatus and control method for substrate transport apparatus

 #112
20090311439
2009-12-17

Short Thermal Profile Oven Useful For Screen Printing

 #113
20090308860
2009-12-17

SHORT THERMAL PROFILE OVEN USEFUL FOR SCREEN PRINTING

 #114
20090297302
2009-12-03

WAFER CONVEYANCE METHOD AND WAFER CONVEYANCE DEVICE

 #115
20090190109
2009-07-30

Substrate transfer apparatus

 #116
20090029033
2009-01-29

Method of manufacturing thin-film based PV modules

 #117
20090010748
2009-01-08

Batch forming apparatus, substrate processing system, batch forming method, and storage medium

 #118
20080273950
2008-11-06

Device and method for turning over electronic components

 #119
20080017320
2008-01-24

SUBSTRATE PROCESSING APPARATUS

 #120
20070292632
2007-12-20

Substrate holding device, substrate processing system and liquid crystal display device

 #121
20070289843
2007-12-20

Conveyor System Including Offset Section