Patents-Review.com
ClassID:

207407 ⎘

H01L21/67751 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece

Recent Application in this class:
#1
20260060031
2026-02-26

SEMICONDUCTOR SUBSTRATE PLACEMENT ROBOT

 #2
20260033284
2026-01-29

SUBSTRATE PROCESSING APPARATUS

 #3
20250385105
2025-12-18

COVER FOR A CLEANING MODULE FOR CLEANING A SEMICONDUCTOR WAFER, AND METHOD FOR CLEANING A SEMICONDUCTOR WAFER IN A CLEANING LINE

 #4
20250372414
2025-12-04

HEAT TREATMENT SYSTEM AND STATE MONITORING METHOD

 #5
20250323072
2025-10-16

WAFER SHIFT DETECTION

 #6
20250125177
2025-04-17

Methods and Systems for Improving Transfer Efficiency of an Automated Material Handling System

 #7
20240402427
2024-12-05

METHOD FOR III-V/SILICON HYBRID INTEGRATION

 #8
20240379386
2024-11-14

SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME AND METHOD OF PROCESSING SUBSTATE USING THE SAME

 #9
20240371672
2024-11-07

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AND SEMICONDUCTOR PROCESS METHOD

 #10
20240339340
2024-10-10

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

 #11
20240258125
2024-08-01

ELECTRONIC COMPONENT CLEANING APPARATUS

 #12
20240105480
2024-03-28

WAFER SHIFT DETECTION

 #13
20230420279
2023-12-28

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

 #14
20230369088
2023-11-16

Methods and systems for improving transfer efficiency of an automated material handling system

 #15
20230317488
2023-10-05

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

 #16
20230187243
2023-06-15

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

 #17
20230178417
2023-06-08

SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND RING REPLACEMENT METHOD

 #18
20230163010
2023-05-25

Substrate lifting apparatus and substrate transferring method

 #19
20230075313
2023-03-09

LOAD-BEARING DEVICE, WAFER TRANSFER DEVICE, CHAMBER DEVICE AND WAFER PROCESSING APPARATUS

 #20
20230065660
2023-03-02

Methods and systems for improving transfer efficiency of an automated material handling system

 #21
20230005761
2023-01-05

WAFER CLEANING AND DRYING DEVICE

 #22
20220357509
2022-11-10

Method for III-v/silicon hybrid integration

 #23
20220351999
2022-11-03

Substrate transfer mechanism to reduce back-side substrate contact

 #24
20220319822
2022-10-06

Internally divisible process chamber using a shutter disk assembly

 #25
20220310440
2022-09-29

Nasal Delivery Device and Methods of Use

 #26
20220181180
2022-06-09

Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus

 #27
20220122867
2022-04-21

BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS

 #28
20220051926
2022-02-17

Substrate transport apparatus, substrate processing apparatus, and substrate transport method

 #29
20220037177
2022-02-03

Electrostatic capacitance sensor

 #30
20220020615
2022-01-20

Multiple process semiconductor processing system

 #31
20220013394
2022-01-13

Substrate handling systems

 #32
20210280441
2021-09-09

Substrate transfer system and load lock module

 #33
20210252695
2021-08-19

Teaching method

 #34
20210252694
2021-08-19

Teaching method of transfer device and processing system

 #35
20210057253
2021-02-25

Transfer unit and substrate treating apparatus including ihe same

 #36
20210043480
2021-02-11

Substrate processing system

 #37
20210005505
2021-01-07

Substrate processing apparatus and substrate delivery method

 #38
20200411350
2020-12-31

Method and apparatus for substrate transfer and radical confinement

 #39
20200387074
2020-12-10

Apparatus for post exposure bake

 #40
20200365437
2020-11-19

Substrate processing apparatus

 #41
20200303228
2020-09-24

Substrate transfer mechanism to reduce back-side substrate contact

 #42
20200203152
2020-06-25

Cleaning device and method for driving cleaning device

 #43
20200168485
2020-05-28

Substrate processing apparatus for processing substrates

 #44
20200066563
2020-02-27

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

 #45
20200027759
2020-01-23

SUBSTRATE PROCESSING APPARATUS

 #46
20200027758
2020-01-23

Substrate processing apparatus

 #47
20190311938
2019-10-10

Substrate supporting apparatus

 #48
20190305259
2019-10-03

MANUFACTURING DEVICE FOR LIGHT EMITTING ELEMENT

 #49
20190279884
2019-09-12

SUBSTRATE DRYING APPARATUS

 #50
20190252229
2019-08-15

Substrate transfer mechanism to reduce back-side substrate contact

 #51
20190252213
2019-08-15

Substrate holding member, substrate processing device, method for controlling substrate processing device, and storage medium storing programs

 #52
20190237350
2019-08-01

Substrate treatment apparatus, controller of substrate treatment apparatus, method for controlling substrate treatment apparatus, and memory medium storing program

 #53
20190214278
2019-07-11

SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, SUBSTRATE HOLDER CONVEYING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYING METHOD

 #54
20190164795
2019-05-30

Transport system with crane

 #55
20190093223
2019-03-28

Vacuum treatment apparatus

 #56
20190080951
2019-03-14

Substrate support for reduced damage substrate backside

 #57
20190057883
2019-02-21

Wafer cleaning apparatus and cleaning method using the same

 #58
20190054613
2019-02-21

Substrate conveyance robot and substrate conveyance apparatus

 #59
20190051867
2019-02-14

Manufacturing method of a light emitting device

 #60
20190013220
2019-01-10

Substrate processing device

 #61
20180294174
2018-10-11

Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus

 #62
20180282893
2018-10-04

Substrate transporting apparatus, control apparatus for substrate transporting apparatus, displacement compensation method for substrate transporting apparatus, program for implementing method and recording medium that records program

 #63
20180247850
2018-08-30

Method and apparatus for substrate transfer and radical confinement

 #64
20180218924
2018-08-02

Substrate liquid treatment apparatus

 #65
20180217504
2018-08-02

APPARATUS FOR POST EXPOSURE BAKE

 #66
20180138067
2018-05-17

Substrate lift bar and method for smearing anti-static liquid

 #67
20180130683
2018-05-10

Apparatus and method for contactless transfer and soldering of chips using a flash lamp

 #68
20180107119
2018-04-19

Apparatus for post exposure bake

 #69
20180096875
2018-04-05

Adjustable circumference electrostatic clamp

 #70
20180040856
2018-02-08

Manufacturing device and manufacturing method of light-emitting element

 #71
20180004094
2018-01-04

Apparatus for post exposure bake

 #72
20170358472
2017-12-14

Substrate processing apparatus and substrate transfer method

 #73
20170283170
2017-10-05

Container storage facility

 #74
20170263491
2017-09-14

Substrate processing apparatus

 #75
20170175285
2017-06-22

Plating apparatus

 #76
20170047233
2017-02-16

Substrate processing apparatus and substrate processing system

 #77
20170025291
2017-01-26

MULTI-CHAMBER FURNACE FOR BATCH PROCESSING

 #78
20160362788
2016-12-15

Atomic layer deposition processing chamber permitting low-pressure tool replacement

 #79
20160336201
2016-11-17

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #80
20160319422
2016-11-03

THIN FILM ENCAPSULATION PROCESSING SYSTEM AND PROCESS KIT PERMITTING LOW-PRESSURE TOOL REPLACEMENT

 #81
20160315048
2016-10-27

SEMICONDUCTOR ELECTROPLATING SYSTEM

 #82
20160284571
2016-09-29

Substrate processing apparatus

 #83
20160265109
2016-09-15

Vacuum treatment apparatus

 #84
20160225656
2016-08-04

Wafer processing system with chuck assembly maintenance module

 #85
20160181086
2016-06-23

Systems and methods for rinsing and drying substrates

 #86
20160172224
2016-06-16

Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method

 #87
20160163570
2016-06-09

System and method for forming a sealed chamber

 #88
20160160387
2016-06-09

Linear Cluster Deposition System

 #89
20160079108
2016-03-17

ELECTROSTATIC CHUCK MECHANISM, SUBSTRATE PROCESSING METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

 #90
20160069613
2016-03-10

High capacity magnetic annealing system and method of operating

 #91
20150371894
2015-12-24

Substrate processing method, substrate processing apparatus, substrate processing system and recording medium

 #92
20150364348
2015-12-17

GAS PHASE ETCHING APPARATUS

 #93
20150357213
2015-12-10

SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, SUBSTRATE HOLDER CONVEYING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYING METHOD

 #94
20150303084
2015-10-22

Die supply apparatus

 #95
20150303041
2015-10-22

Method and system for maintaining an edge exclusion shield

 #96
20150270151
2015-09-24

Substrate processing apparatus and method of transferring a substrate

 #97
20150240360
2015-08-27

Compact substrate processing tool with multi-station processing and pre-processing and/or post-processing stations

 #98
20150228477
2015-08-13

Manufacturing method for semiconductor device

 #99
20150187621
2015-07-02

Substrate processing apparatus

 #100
20150179489
2015-06-25

Substrate Processing Module, Substrate Processing Apparatus Including the same, and Substrate Transferring Method

 #101
20150170948
2015-06-18

Coupling transfer system

 #102
20150132085
2015-05-14

Substrate processing system

 #103
20150122291
2015-05-07

Wafer cleaning module

 #104
20150090694
2015-04-02

Substrate processing device and substrate processing method

 #105
20150050112
2015-02-19

Apparatus for transferring substrates

 #106
20150050105
2015-02-19

VAPOR DRYER MODULE WITH REDUCED PARTICLE GENERATION

 #107
20150037127
2015-02-05

Apparatus for transferring substrates

 #108
20150030418
2015-01-29

Processing station for planar substrates and method for processing planar substrates

 #109
20140377040
2014-12-25

Elevator linear motor drive

 #110
20140345518
2014-11-27

Method for manufacturing workpieces and apparatus

 #111
20140308028
2014-10-16

Substrate heat treatment apparatus

 #112
20140306124
2014-10-16

Yellow room system

 #113
20140245954
2014-09-04

Plating apparatus

 #114
20140105716
2014-04-17

Apparatus for transferring substrates

 #115
20140087561
2014-03-27

Method and apparatus for substrate transfer and radical confinement

 #116
20140086711
2014-03-27

Vacuum treatment apparatus

 #117
20140042111
2014-02-13

Storage device for multilayer substrate

 #118
20140034610
2014-02-06

Apparatus and methods for handling workpieces of different sizes

 #119
20130287527
2013-10-31

Vacuum treatment apparatus and a method for manufacturing

 #120
20130196572
2013-08-01

CONDITIONING A PAD IN A CLEANING MODULE

 #121
20130153462
2013-06-20

Coupling system

 #122
20130089395
2013-04-11

Method and apparatus for removing a vertically-oriented substrate from a cassette

 #123
20120285493
2012-11-15

Ex-situ cleaning assembly

 #124
20120231703
2012-09-13

Method of operating substrate processing apparatus and substrate processing apparatus

 #125
20120231158
2012-09-13

In-line type film forming apparatus and method for manufacturing magnetic recording medium

 #126
20120199065
2012-08-09

Multi-Module System for Processing Thin Film Photovoltaic Devices

 #127
20120193506
2012-08-02

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBSTRATE CLAMP APPARATUS, AND CHEMICAL LIQUID TREATMENT APPARATUS

 #128
20120149208
2012-06-14

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #129
20120093616
2012-04-19

Processing thin wafers

 #130
20120090543
2012-04-19

Thin film depositing apparatus

 #131
20120067698
2012-03-22

Conveying system having endless drive medium and conveying method

 #132
20120058630
2012-03-08

Linear Cluster Deposition System

 #133
20120027543
2012-02-02

Method and device for introducing and removing substrates

 #134
20120018280
2012-01-26

Transferred object rotating device

 #135
20120003064
2012-01-05

Vacuum treatment apparatus

 #136
20110200417
2011-08-18

Apparatus for transferring substrates

 #137
20110186762
2011-08-04

Flap transfer valve with pivotable valve closure beam

 #138
20110030614
2011-02-10

Wet coating system having annealing chamber

 #139
20110024399
2011-02-03

Plasma processing apparatus and method for plasma processing

 #140
20110008534
2011-01-13

Coating device and nozzle managing method

 #141
20110000512
2011-01-06

Substrate processing apparatus and substrate processing method

 #142
20110000428
2011-01-06

Substrate processing system

 #143
20100326354
2010-12-30

Substrate processing system, carrying device, and coating device

 #144
20100297353
2010-11-25

Coating device and coating method

 #145
20100297352
2010-11-25

Coating device and coating method

 #146
20100279014
2010-11-04

VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD, AND COMPUTER READABLE STORAGE MEDIUM

 #147
20100272550
2010-10-28

SUBSTRATE HOLDING MECHANISM, SUBSTRATE DELIVERING/RECEIVING MECHANISM, AND SUBSTRATE PROCESSING APPARATUS

 #148
20100243163
2010-09-30

SUBSTRATE PROCESSING APPARATUS

 #149
20100226630
2010-09-09

APPARATUS FOR HEAT-TREATING SUBSTRATE AND SUBSTRATE MANUFACTURING METHOD

 #150
20100139889
2010-06-10

Multiple slot load lock chamber and method of operation

 #151
20100136773
2010-06-03

Semiconductor Device Manufacturing Method and Substrate Processing Apparatus

 #152
20100126415
2010-05-27

Conveyor and deposition apparatus, and maintenance method thereof

 #153
20100119350
2010-05-13

Semiconductor device fabrication process

 #154
20100111650
2010-05-06

AUTOMATIC SUBSTRATE LOADING STATION

 #155
20100108564
2010-05-06

CLEAN DEVICE WITH CLEAN BOX-OPENING/CLOSING DEVICE

 #156
20100075509
2010-03-25

MANUFACTURING METHOD AND MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE

 #157
20100050940
2010-03-04

Substrate processing system, carrying device and coating device

 #158
20100024186
2010-02-04

Servicing a plasma processing system with a robot

 #159
20100006124
2010-01-14

SINGLE WAFER DRYER AND DRYING METHODS

 #160
20090252892
2009-10-08

PROCESSING CHAMBER

 #161
20090252582
2009-10-08

Processing thin wafers

 #162
20090241996
2009-10-01

SINGLE WAFER DRYER AND DRYING METHODS

 #163
20090233449
2009-09-17

Etching chamber with subchamber

 #164
20090186557
2009-07-23

Method of operating substrate processing apparatus and substrate processing apparatus

 #165
20090180847
2009-07-16

Multi-chamber vacuum processing and transfer system

 #166
20090123256
2009-05-14

Elevator linear motor drive

 #167
20090106968
2009-04-30

Method for manufacturing workpieces and apparatus

 #168
20090067959
2009-03-12

Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatus

 #169
20090041563
2009-02-12

Wafer transferring apparatus, polishing apparatus, and wafer receiving method

 #170
20090029560
2009-01-29

Apparatus and method for single substrate processing

 #171
20090025749
2009-01-29

METHOD FOR VERTICAL TRANSFER OF SEMICONDUCTOR SUBSTRATES IN A CLEANING MODULE

 #172
20090020408
2009-01-22

Substrate Processing Method and Substrate Processing Apparatus

 #173
20090016857
2009-01-15

SUBSTRATE-REPLACING APPARATUS, SUBSTRATE-PROCESSING APPARATUS, AND SUBSTRATE-INSPECTING APPARATUS

 #174
20080298947
2008-12-04

Apparatus for transferring substrates

 #175
20080298936
2008-12-04

Vacuum substrate storage

 #176
20080271749
2008-11-06

Substrate cleaning technique employing multi-phase solution

 #177
20080237172
2008-10-02

Transfer apparatus

 #178
20080185018
2008-08-07

Apparatus for rapid filling of a processing volume

 #179
20080181758
2008-07-31

Microfeature workpiece transfer devices with rotational orientation sensors, and associated systems and methods

 #180
20080163900
2008-07-10

IPA DELIVERY SYSTEM FOR DRYING

 #181
20080163096
2008-07-03

METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

 #182
20080041422
2008-02-21

SEMICONDUCTOR SUBSTRATE CLEANING SYSTEM

 #183
20080005881
2008-01-10

Buffer system for adjusting first-in first-out

 #184
20080000495
2008-01-03

APPARATUS AND METHOD FOR SINGLE SUBSTRATE PROCESSING

 #185
20070296715
2007-12-27

Substrate treatment apparatus

 #186
20070295371
2007-12-27

Single wafer dryer and drying methods

 #187
20070286709
2007-12-13

Heat treatment apparatus, heat treatment method, and recording medium recording program for practicing the method

 #188
20070283983
2007-12-13

Method and apparatus for cleaning substrates

 #189
20070280816
2007-12-06

Multiple slot load lock chamber and method of operation

 #190
20070272657
2007-11-29

APPARATUS AND METHOD FOR SINGLE SUBSTRATE PROCESSING

 #191
20070264914
2007-11-15

Substrate delivery mechanism

 #192
20070231108
2007-10-04

Method and apparatus for transferring wafers

 #193
20070215481
2007-09-20

IN-SITU CLEANING PROCESSES FOR SEMICONDUCTOR ELECTROPLATING ELECTRODES

 #194
20070178748
2007-08-02

Load-lock technique

 #195
20070175588
2007-08-02

HIGH THROUGHPUT PLASMA TREATMENT SYSTEM

 #196
20070151669
2007-07-05

Vacuum processing apparatus

 #197
20070144559
2007-06-28

UNIT FOR PREVENTING A SUBSTRATE FROM DRYING, SUBSTRATE CLEANING APPARATUS HAVING THE UNIT AND METHOD OF CLEANING THE SUBSTRATE USING THE UNIT

 #198
20070137679
2007-06-21

Single side workpiece processing

 #199
20070119544
2007-05-31

APPARATUS AND METHOD FOR SINGLE SUBSTRATE PROCESSING USING MEGASONIC-ASSISTED DRYING

 #200
20070111519
2007-05-17

INTEGRATED ELECTROLESS DEPOSITION SYSTEM

 #201
20070107845
2007-05-17

SEMICONDUCTOR PROCESSING SYSTEM

 #202
20070093186
2007-04-26

Substrate delivery mechanism

 #203
20070080096
2007-04-12

Clean device with clean box-opening/closing device

 #204
20070059127
2007-03-15

Vacuum processing and transfer system

 #205
20070037292
2007-02-15

Method and apparatus for processing samples

 #206
20070028838
2007-02-08

Gas manifold valve cluster

 #207
20070026602
2007-02-01

METHOD OF MINIMAL WAFER SUPPORT ON BEVEL EDGE OF WAFER

 #208
20070022959
2007-02-01

Deposition apparatus for semiconductor processing

 #209
20070022831
2007-02-01

Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system

 #210
20070000527
2007-01-04

Workpiece support for use in a process vessel and system for treating microelectronic workpieces

 #211
20060254715
2006-11-16

METHOD AND APPARATUS FOR VERTICAL TRANSFER OF SEMICONDUCTOR SUBSTRATES IN A CLEANING MODULE

 #212
20060243205
2006-11-02

Substrate processing apparatus and substrate processing method

 #213
20060243204
2006-11-02

Substrate processing apparatus and substrate processing method

 #214
20060237431
2006-10-26

Integrated thermal unit having a shuttle with two-axis movement

 #215
20060237430
2006-10-26

Bake plate having engageable thermal mass

 #216
20060236929
2006-10-26

Substrate processing apparatus and substrate processing method

 #217
20060218680
2006-09-28

Apparatus for servicing a plasma processing system with a robot

 #218
20060213439
2006-09-28

Plasma enhanced atomic layer deposition system having reduced contamination

 #219
20060199478
2006-09-07

Substrate delivery mechanism

 #220
20060180177
2006-08-17

Semiconductor substrate cleaning system

 #221
20060174921
2006-08-10

Single wafer dryer and drying methods

 #222
20060148267
2006-07-06

Apparatus and method for single-or double-substrate processing

 #223
20060147298
2006-07-06

Apparatus for transferring a tray

 #224
20060102285
2006-05-18

Processing thin wafers

 #225
20060078407
2006-04-13

System and method for reticle protection and transport

 #226
20050284369
2005-12-29

Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position

 #227
20050282371
2005-12-22

Sequential station tool for wet processing of semiconductor wafers

 #228
20050281658
2005-12-22

Method for conveying and apparatus using the same

 #229
20050269291
2005-12-08

Method of operating a processing system for treating a substrate

 #230
20050269030
2005-12-08

Processing system and method for treating a substrate

 #231
20050252779
2005-11-17

System and method for processing semiconductor wafers using different wafer processes

 #232
20050241684
2005-11-03

Single wafer dryer and drying methods

 #233
20050229725
2005-10-20

Buffer system for a wafer handling system

 #234
20050187653
2005-08-25

Substrate transfer device

 #235
20050186716
2005-08-25

Load-lock technique

 #236
20050173396
2005-08-11

Heat-treating apparatus and heat-treating method

 #237
20050155864
2005-07-21

Adaptable electrochemical processing chamber

 #238
20050130445
2005-06-16

Substrate processing method and substrate processing apparatus

 #239
20050129489
2005-06-16

Load lock and load lock chamber using the same

 #240
20050120956
2005-06-09

Plasma processing apparatus

 #241
20050103364
2005-05-19

Liquid processing apparatus

 #242
20050072358
2005-04-07

Substrate processing apparatus and substrate processing method

 #243
20050061659
2005-03-24

Plating apparatus and plating method

 #244
20050042807
2005-02-24

Apparatus for positioning an elevator tube

 #245
20050039853
2005-02-24

High throughput plasma treatment system

 #246
20050000651
2005-01-06

High pressure processing chamber for semiconductor substrate